Effect of intermetallic compound thickness on shear strength of 25 μm diameter Cu-pillars

Intermetallics - Tập 51 - Trang 37-47 - 2014
Julien Bertheau1,2,3, Fiqiri Hodaj2, Nicolas Hotellier3, Jean Charbonnier1
1CEA, LETI, MINATEC Campus, 17 rue des Martyr, 38054 Grenoble Cedex 09, France
2SIMaP – UMR CNRS 5266, Grenoble INP – UJF, BP 75, F-38402 Saint Martin d'Hères, France
3STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles Cedex, France

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