Microring resonator for glucose sensing applications

Frontiers of Optoelectronics - Tập 2 - Trang 304-307 - 2009
Yao Chen1,2, Zhengyu Li1,2, Huaxiang Yi2, Zhiping Zhou2,3,4, Jun Yu1
1Department of Electronic Science and Technology, Huazhong University of Science and Technology, Wuhan, China
2Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China
3State Key Laboratory on Advanced Optical Communication Systems and Networks, Peking University, Beijing, China
4[school of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, USA]

Tóm tắt

Silicon nitride microring resonators were demonstrated as chemical sensors. The microring devices, with diameter of 100 μm, were fabricated using complementary metal oxide semiconductor (CMOS)-compatible technology, and a high Q factor of 15000 was realized with free spectrum range (FSR) of 2 nm. The structures were further packaged to perform as chemical sensors, and their functionality was proved using deionized water (DI water) and ethanol as detecting mediums. Lastly, the packaged chips were used to detect glucose solutions with various concentrations, and a detection capability of refractive index change of 10−3 refractive index unit (RIU) was obtained.

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Frontiers of Optoelectronics

Tập 2

304-307

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