Round Robin Test for Depth Profiling of SiO2/Si Multilayer

JISK 0146:2002 (ISO14606:2000): Surface chemical analysis—Sputter depth profiling. Optimization using layered systems as reference materials; refer to the standard, which includes many references concerning depth profiling. AIST Today, Vol. 3, GaAs/AlAs Superlattice Reference Material (NIMC CRM 5201-a); regarding the distribution of the reference material, refer to this website: http://www.sasj.gr.jp/. “Bunseki Bunka Kai” is one of the sub-committee of the committee for intellectual infrastructures in the Council of Promotion for Industrial Technology Collaboration. Public testing and research organizations and AIST participate in the “Bunseki Bunka Kai” to exchange information concerning common issues associated with chemical analysis. The first activity of the “Bunseki Bunka Kai” dates back to 1957. This sub committee’s website: http://www.nrlm.go.jp/section/bb_kai/. I. Kojima, N. Fukumoto, T. Fujimoto, B. Q. Li, and H. Takaya, J. Surf. Anal., 1999, 5, 22. T. Fujimoto, B. Li, W. Xu, and I. Kojima, Characterization and Metrology for ULSI Technology, 2000, 586. J. Xu, N. Fukumoto, Y. Azuma, and I. Kojima, J. Surf. Anal., 2002, 9, 353.