Modifications by rare gas bombardment of aluminium nitride formed by direct implantation

Materials Science and Engineering B: Solid-State Materials for Advanced Technology - Tập 2 - Trang 183-187 - 1989
S. Lucas1, F. Bodart1, G. Terwagne1
1Laboratoire d'Analyses par Réactions Nucléaires, and Institute for Studies in Interfaces Sciences, Facultés Universitaires N.D. de la Paix, B-5000 Namur Belgium

Tài liệu tham khảo

Ohira, 1987, Mater. Sci. Eng., 90, 143, 10.1016/0025-5416(87)90205-9 Maurel, 1983, Nucl. Instrum. Methods, 218, 159, 10.1016/0167-5087(83)90973-0 Amsel, 1983, Nucl. Instrum. Methods, 218, 83 Deconninck, 1983, Nucl. Instrum. Methods, 218, 165, 10.1016/0167-5087(83)90974-2 Borgesen, 1982, Appl. Phys. A, 27, 183, 10.1007/BF00619079
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Thông tin xuất bản

Materials Science and Engineering B: Solid-State Materials for Advanced Technology

Tập 2

183-187

Thông tin tác giả