Large area nanopatterning by combined anodic aluminum oxide and soft UV–NIL technologies for applications in biology

Microelectronic Engineering - Tập 88 - Trang 2444-2446 - 2011
Frédéric Hamouda1, Houda Sahaf2, Sylvain Held1, Grégory Barbillon3, Philippe Gogol1, Eric Moyen2, Abdelhanin Aassime1, Julien Moreau3, Michael Canva3, Jean-Michel Lourtioz1, Margrit Hanbücken2, Bernard Bartenlian1
1IEF CNRS UMR8622, Univ. Paris-Sud, Orsay cedex 91405, France
2CINAM CNRS UPR3118, Campus de Luminy, Case 913, Marseille cedex 9 13288, France
3LCFIO-IOGS, CNRS UMR8501, Campus Polytechnique, RD 128, Palaiseau cedex 91127, France

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