Thickness dependence of electrical properties of ITO film deposited on a plastic substrate by RF magnetron sputtering

Applied Surface Science - Tập 253 - Trang 409-411 - 2006
Dong-Ho Kim1, Mi-Rang Park1, Hak-Jun Lee1, Gun-Hwan Lee1
1Surface Technology Research Center, Korea Institute of Machinery and Materials (KIMM), Changwon, Kyungnam 641-010, Republic of Korea

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