A tunable gas sensor using an acoustic waveguide
Tóm tắt
A tunable gas sensor using surface acoustic waves (SAW) is described. It is designed on the basis of a waveguide delay line fabricated on a piezoelectric substrate made of 128° Y-cut LiNbO3. A voltage applied between the waveguide and two electrodes causes a local change in the properties of the substrate near the waveguide and differently affects the sensor’s response to the vapors of various analytes. Some results of the experimental study of the sensor, which show the change in the selectivity under the effect of voltage, are presented. The analytes used for testing include a number of alcohols and deionized water. The possibilities for employing such a sensor in the sensor arrays of gas analyzers of the electronic nose type are discussed.
Tài liệu tham khảo
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