Vibration sensitivity analysis of MEMS vibratory ring gyroscopes

M.W. Putty, A Micromachined Vibrating Ring Gyroscope, Ph.D. Thesis, Electrical Engineering, University of Michigan, 1995. Ayazi, 2001, A HARPSS polysilicon vibrating ring gyroscope, Journal of Microelectromechanical Systems, 10, 169, 10.1109/84.925732 Chang, 2008, In-plane free vibration of a single-crystal silicon ring, International Journal of Solids and Structures, 45, 6114, 10.1016/j.ijsolstr.2008.07.033 Eley, 1999, Anisotropy effects on the vibration of circular rings made from crystalline silicon, Journal of Sound and Vibration, 228, 11, 10.1006/jsvi.1999.2404 He, 2002, A single-crystal silicon vibrating ring gyroscope, 718 Rourke, 2001, Multi-modes trimming of imperfect rings, Journal of Sound and Vibration, 695, 10.1006/jsvi.2001.3811 Gallacher, 2006, Initial Test Results from a 3-axis Vibrating Ring Gyroscope, 662 Zaman, 2005, The resonating star gyroscope, 355 Chang, 2005, Fabrication options and operation principle for single-crystal silicon vibratory ring gyroscope, 142 Sviridova, 2009, Electrostatic ring gyroscope investigation, 515 Tao, 2011, Design, analysis and experiment of a novel ring vibratory gyroscope, Sensors and Actuators A: Physical, 168, 286, 10.1016/j.sna.2011.04.039 Yazdi, 1998, Micromachined inertial sensors, Proceedings of the IEEE, 86, 1640, 10.1109/5.704269 Xie, 2003, Integrated microelectromechanical gyroscopes, Journal of Aerospace Engineering, 16, 65, 10.1061/(ASCE)0893-1321(2003)16:2(65) Blevins, 1995 Timoshenko, 1974 Lynch, 1987, Vibration-induced drift in the hemispherical resonator gyro, 34 Asokanthan, 2007, Dynamic response-based characterization of ring-based vibratory angular rate sensors, Journal of Mechanical Science and Technology, 21, 965, 10.1007/BF03027078 Martynenko, 2010, Dynamics of a ring micromechanical gyroscope in the forced-oscillation mode, Gyroscopy and Navigation, 1, 43, 10.1134/S2075108710010074 Weng, 2005, Structural design and analysis of micromachined ring-type vibrating sensor of both yaw rate and linear acceleration, Sensors and Actuators A: Physical, 117, 230, 10.1016/j.sna.2004.06.016 Esmaeili, 2006, Ring microgyroscope modeling and performance evaluation, Journal of Vibration and Control, 12, 537, 10.1177/1077546306064445 Sheng, 2009, A new calculation of potential energy of supporting spring in MEMS VRG, IEEE Sensors Journal, 9, 231, 10.1109/JSEN.2008.2011951 Yoon, 2007, Vibration Sensitivity of MEMS Tuning Fork Gyroscopes, 115 S.W. Yoon, Vibration isolation and shock protection for MEMS, Ph.D. Thesis, Electrical Engineering, University of Michigan, 2009. Becker, 1954 Thomas, 1972 Young, 2002 Namazu, 2006, Characterization of single crystal silicon and electroplated nickel films by uniaxial tensile test with in situ X-ray diffraction measurement, Fatigue and Fracture of Engineering Materials and Structures, 30, 13, 10.1111/j.1460-2695.2006.01043.x Rao, 1990 Kawiecki, 2001, Modal damping measurement for damage detection, Smart Materials and Structures, 10, 466, 10.1088/0964-1726/10/3/307 Lee, 2003, Nonlinear dynamic perspectives on dynamic force microscopy, Ultramicroscopy, 97, 185, 10.1016/S0304-3991(03)00043-3 Wong, 2006, Thermoelastic damping of the in-plane vibration of thin silicon rings, Journal of Sound and Vibration, 293, 266, 10.1016/j.jsv.2005.09.037 Weinberg, 2009, Energy loss in MEMS resonators and the impact on inertial and RF devices, 688 Phani, 2006, Modal coupling in micromechanical vibratory rate gyroscopes, IEEE Sensors Journal, 6, 1144, 10.1109/JSEN.2006.881432 Phani, 2008, Rayleigh quotient and dissipative systems, ASME Journal of Applied Mechanics, 75 S. Adhikari, Damping Models for Structural Vibration, Ph.D. Thesis, Engineering, Cambridge University, 2000. Schofield, 2008, Effects of operational frequency scaling in multi-degree of freedom MEMS gyroscopes, IEEE Sensors Journal, 8, 1672, 10.1109/JSEN.2008.2004299 Tsai, 2010, Experimental analysis and characterization of electrostatic-drive tri-axis micro-gyroscope, Sensors and Actuators A: Physical, 158, 231, 10.1016/j.sna.2010.01.005 Alper, 2006, A low-cost rate-grade nickel microgyroscope, Sensors and Actuators A: Physical, 132, 171, 10.1016/j.sna.2006.03.031 Ayazi, 2000, High aspect-ratio dry-release poly-silicon MEMS technology for inertial-grade microgyroscopes, 304 Jeong, 2004, A study on resonant frequency and Q factor tunings for MEMS vibratory gyroscopes, Journal of Micromechanics and Microengineering, 14, 1530, 10.1088/0960-1317/14/11/014 O’Brien, 2002, Angular rate gyroscope with dual anchor support, 285 Zaman, 2006, High performance matched-mode tuning fork gyroscope, 66 Chiou, 2006, Process window of micromachined gyroscopes subjected to vibrational frequencies, Sensors and Actuators A: Physical, 125, 519, 10.1016/j.sna.2005.08.021