High spatial resolution 3D analysis of materials using gallium focused ion beam secondary ion mass spectrometry (FIB SIMS)

Elsevier BV - Tập 136 - Trang 1028-1033 - 1998
Bunbunoshin Tomiyasu1, Isamu Fukuju1, Hirotaka Komatsubara1, Masanori Owari2, Yoshimasa Nihei1
1Institute of Industrial Science, the University of Tokyo, 7-22-1, Roppongi, Minato-ku, Tokyo 106, Japan
2Environmental Science Center, the University of Tokyo, 7-3-1 Hongo, Bunkyo-ku, Tokyo 113, Japan

Tài liệu tham khảo

Satoh, 1988, J. Vac. Sci. Technol., B6, 915, 10.1116/1.584322 Nihei, 1987, J. Vac. Sci. Technol., A5, 1254, 10.1116/1.574784 Tomiyasu, 1994, 848 Owari, 1992, 545 Tomiyasu, 1994, 565 von Wimmersperg, 1982, Nucl. Instr. and Meth., 197, 597, 10.1016/0167-5087(82)90360-X Kajiyama, 1996, 816 Benninghoven, 1987, 7
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Elsevier BV

Tập 136

1028-1033

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