Energy advantage of cold energy recovery system using water- and air-side free cooling technologies in semiconductor fabrication plant in summer

Kircher, 2010, Cleanroom energy efficiency strategies: modeling and simulation, Energy Build., 42, 282, 10.1016/j.enbuild.2009.09.004 Zhuang, 2020, Uncertainty-based robust optimal design of cleanroom air-conditioning systems considering life-cycle performance, Indoor Built Environ., 29, 1214, 10.1177/1420326X19899442 Zhao, 2022, A comparative analysis on alternative air-conditioning systems for high-tech cleanrooms and their performance in different climate zones, Energy, 261, 10.1016/j.energy.2022.125284 Chen, 2013, 52 Hu, 2003, Power consumption of semiconductor fabs in Taiwan, Energy, 28, 895, 10.1016/S0360-5442(03)00008-2 Electronics 2022 Chang, 2016, Various energy-saving approaches to a TFT-LCD panel fab, Sustainability, 8, 1, 10.3390/su8090907 Tsao, 2008, Saving energy in the make-up air unit (MAU) for semiconductor clean rooms in subtropical areas, Energy Build., 40, 1387, 10.1016/j.enbuild.2007.12.005 Kim, 2011, Comparative study on energy consumption in ateam-humidification- and water-spray-humidification-type outdoor air-conditioning systems for semiconductor manufacturing clean rooms, Transact. Korean Soci. Mechanic. Eng., B, 35, 1249, 10.3795/KSME-B.2011.35.12.1249 Yin, 2021, Performance analysis and energy saving potential of air conditioning system in semiconductor cleanrooms, J. Build. Eng., 37 Lin, 2015, Developing an innovative fan dry coil unit (FDCU) return system to improve energy efficiency of environmental control for mission critical cleanrooms, Energy Build., 90, 94, 10.1016/j.enbuild.2014.12.003 Chasey, 2002, Planning for water reclamation in a semiconductor fabrication facility, J. Am. Water Works Assoc., 94, 106, 10.1002/j.1551-8833.2002.tb09511.x Song, 2008, A study on the energy performance of a cooling plant system: air-conditioning in a semiconductor factory, Energy Build., 40, 1521, 10.1016/j.enbuild.2008.02.003 Yin, 2020, Performance and improvement of cleanroom environment control system related to cold-heat offset in clean semiconductor fabs, Energy Build., 224, 10.1016/j.enbuild.2020.110294 Sermsuk, 2022, Feasibility study of a combined system of electricity generation and cooling from liquefied natural gas to reduce the electricity cost of data centres, Energy, 254, 10.1016/j.energy.2022.124397 Song, 2009, An experimental study on energy reduction of an exhaust air heat recovery type outdoor air conditioning system for semiconductor manufacturing clean rooms, Korean J. Air-Conditioning Refrig. Eng., 21, 273 Zadpoor, 2006, Performance improvement of a gas turbine cycle by using a desiccant-based evaporative cooling system, Energy, 31, 2652, 10.1016/j.energy.2005.11.004 Hu, 2007, A comparative study on energy consumption for HVAC systems of high-tech FABs, Appl. Therm. Eng., 27, 2758, 10.1016/j.applthermaleng.2007.03.016 Li, 2021, Practical reviews of exhaust systems operation in semiconductor industry, IOP Conf. Ser. Earth Environ. Sci., 859, 10.1088/1755-1315/859/1/012074 Papaefthimiou, 2006, Thermodynamic study of wet cooling tower performance, Int. J. Energy Res., 30, 411, 10.1002/er.1158 Goshayshi, 2000, Investigation of cooling tower packing in various arrangements, Appl. Thermal Energy, 20, 69, 10.1016/S1359-4311(99)00011-3 Kiturami-Bumyang Mitchell, 2012, 148 Albdoor, 2022, Experimental and numerical investigation of the operating performance of air-to-air membrane enthalpy exchangers, Sustain. Energy Technol. Assessments, 49 Kim, 2019, Performance investigation of an independent dedicated outdoor air system for energy-plus houses, Appl. Therm. Eng., 146, 306, 10.1016/j.applthermaleng.2018.09.131 Niu, 2012, Investigation on capacity matching in liquid desiccant and heat pump hybrid air-conditioning systems, Int. J. Refrig., 35, 160, 10.1016/j.ijrefrig.2011.08.004 Khan, 2004, A comprehensive design and performance evaluation study of counter flow wet cooling towers, Int. J. Refrig., 27, 914, 10.1016/j.ijrefrig.2004.04.012 Simpson, 1946, Performance of small mechanical draft cooling tower, Refrig. Eng., 52, 574 2022 2013 2013