Growth of diamond particles from methane-hydrogen gas

Journal of Materials Science - Tập 17 - Trang 3106-3112 - 1982
Seiichiro Matsumoto1, Yoichiro Sato1, Masayuki Tsutsumi1, Nobuo Setaka1
1National Institute for Research in Inorganic Materials, Ibaraki-ken, Japan

Tóm tắt

Microcrystals of diamond were grown on non-diamond substrates including silicon, molybdenum and silica, as well as on diamond by chemical vapour deposition. Deposition was carried out by passing a mixture of hydrocarbon and hydrogen gases through a heated reaction chamber in which a hot tungsten filament was held near the substrates. The deposit was identified by reflection electron diffraction and Raman spectroscopy. The effects of experimental conditions on the growth features were studied.

Tài liệu tham khảo

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