Growth of diamond particles from methane-hydrogen gas

Journal of Materials Science - Tập 17 - Trang 3106-3112 - 1982
Seiichiro Matsumoto1, Yoichiro Sato1, Masayuki Tsutsumi1, Nobuo Setaka1
1National Institute for Research in Inorganic Materials, Ibaraki-ken, Japan

Tóm tắt

Microcrystals of diamond were grown on non-diamond substrates including silicon, molybdenum and silica, as well as on diamond by chemical vapour deposition. Deposition was carried out by passing a mixture of hydrocarbon and hydrogen gases through a heated reaction chamber in which a hot tungsten filament was held near the substrates. The deposit was identified by reflection electron diffraction and Raman spectroscopy. The effects of experimental conditions on the growth features were studied.

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