Ion implantation into GaN

Materials Science and Engineering: R: Reports - Tập 33 - Trang 51-108 - 2001
S.O Kucheyev1, J.S Williams1, S.J Pearton2
1Department of Electronic Materials Engineering, Research School of Physical Sciences and Engineering, The Australian National University, Canberra, ACT 0200, Australia
2Department of Materials Science and Engineering, University of Florida, Gainesville, FL 32611, USA

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