A micromachined vibrating gyroscope

Sensors and Actuators A: Physical - Tập 50 - Trang 111-115 - 1995
K. Tanaka1, Y. Mochida1, M. Sugimoto1, K. Moriya1, T. Hasegawa1, K. Atsuchi1, K. Ohwada1
1Yokohama Research & Development Center, Murata Manufacturing Co. Ltd., 1-18-1 Hakusan, Midori-ku, Yokohama, 226, Japan

Tài liệu tham khảo

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