Variation of color in Zirconium nitride thin films prepared at high Ar flow rates with reactive dc magnetron sputtering

Procedia Engineering - Tập 32 - Trang 916-921 - 2012
P. Klumdoung1,2, A. Buranawong3,2, S. Chaiyakun3, P. Limsuwan1,2
1Department of Physics, Faculty of Science, King Mongkut’s University of Technology Thonburi, Bangkok, 10140, Thailand
2Thailand Center of Excellence in Physics, CHE, Ministry of Education, Bangkok 10400, Thailand
3Vacuum Technology and Thin Films Research Laboratory, Department of Physics, Faculty of Science, Burapha University, Chonburi, 20131, Thailand

Tài liệu tham khảo

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