The application of control chart for defects and defect clustering in IC manufacturing based on fuzzy theory

Albin, 1991, Clustered defect in IC fabrication: Impact on process control charts, IEEE Transactions on Semiconductor Manufacturing, 4, 36, 10.1109/66.75850 Hsieh, 2001, Process improvement in the presence of qualitative response by combining fuzzy sets and neural networks, Integrated Manufacturing Systems, 12, 449, 10.1108/09576060110407022 Jun, 1999, A simulation-based semiconductor chip yield model incorporating a new defect cluster index, Microelectronics Reliability, 39, 451, 10.1016/S0026-2714(99)00026-8 Stapper, 1973, Defect density distribution for LSI yield calculations, IEEE Transactions on Electron Devices, ED-20, 655, 10.1109/T-ED.1973.17719 Stapper, 1985, The effects of wafer to wafer density variations on integrated circuit defect and fault density, IBM Journal of Research Development, 29, 87, 10.1147/rd.291.0087 Stapper, 1983, Integrated circuit yield statistics, Proceedings of IEEE, 71, 453, 10.1109/PROC.1983.12619 Wu, C. H. (2000). Hotelling T2 control chart combining defect count and defect clustering in IC manufacturing. Master Dissertation, Department of Information Management, National Chaio Tung University. Zadeh, 1965, Fuzzy sets, Information and Control, 8, 338, 10.1016/S0019-9958(65)90241-X Zadeh, 1973, Outline of a new approach to the analysis of complex systems and decision process, IEEE Transaction on System, Man and Cybernetics, SMC-3, 28, 10.1109/TSMC.1973.5408575 Zang, I. H. (1995). IC process control chart with consideration of defect clustering. Master Dissertation, Department of Information Management, National Chaio Tung University.