Picosecond pulsed laser deposition of metal-oxide sensing layers with controllable porosity for gas sensor applications
Tóm tắt
Recent results of properties and performance of
$$\hbox {WO}_3$$
gas sensing layers produced by industrial picosecond pulsed laser deposition process developed by Picodeon Ltd Oy are presented in this paper.
$$\hbox {WO}_3$$
layers with controllable porosity and nanostructure were successfully deposited on commercial sensor platforms, and basic measurements to characterize their performance as gas sensors gave promising results.
Tài liệu tham khảo
J. Huotari, J. Lappalainen, J. Puustinen, T. Baur, C. Alépée, T. Haapalainen, S. Komulainen, J. Pylvänäinen, A.L. Spetz, Proc. Eng. 120, 1158–1161 (2015)
T. Ohkagi, R. Matsuoka, K. Watanabe, K. Matsumoto, Y. Adachi, I. Sakaguchi, S. Hishita, N. Ohashi, H. Haneda, Sens. Actuators B 150, 99–104 (2010)
A. Bailini, F. Di Fonzo, M. Fusi, C.S. Casari, Bassi A. Li, V. Russo, A. Baserga, C.E. Bottani, Appl. Surf. Sci. 253, 8130–8135 (2007)
F. Mitsugi, E. Hiraiwa, T. Ikegami, K. Ebihara, Surf. Coat. Technol. 169–170, 553–556 (2003)
Y.-K. Chung, M.-H. Kim, W.-S. Um, H.-S. Lee, J.-K. Song, S.-C. Choi, K.-M. Yi, M.-J. Lee, K.-W. Chung, Sens. Actuators B 60, 49–56 (1999)
A.S. Garde, J. Alloys Compd. 617, 367–373 (2014)
M. Ahsan, M.Z. Ahmad, T. Tesfamichael, J.M. Bell, W. Wlodarski, N. Motta, Sens. Actuators B 173, 789–796 (2012)
T. Akamatsu, T. Itoh, N. Izu, W. Shin, Sensors 13, 12467–12481 (2013)
N.M. Vuong, D. Kim, H. Kim, Sci. Rep. 5, 11040 (2015)
M. Filipescu, S. Orlando, V. Russo, A. Lamperti, A. Purice, A. Moldovan, M. Dinescu, Appl. Surf. Sci. 253, 8258–8262 (2007)
H. Kawasaki, J. Namba, K. Iwatsuji, Y. Suda, K. Wada, K. Ebihara, T. Ohshima, Appl. Surf. Sci. 197–198, 547–551 (2002)
H. Kawasaki, T. Ueda, Y. Suda, T. Ohshima, Sens. Actuators B 100, 266–269 (2004)
J. Lappalainen, R. Viter, J. Puustinen, D. Gornostayev, V. Smyntyna, Proc. Eng. 5, 343–346 (2010)
C. Ristoscu, L. Cultera, A. Dima, A. Perrone, R. Cutting, H.L. Du, A. Busiakiewicz, Z. Klusek, P.K. Datta, S.R. Rose, Appl. Surf. Sci. 247, 95–100 (2005)
R. Dolbec, M.A. El Khakani, A.M. Serventi, M. Trudeau, R.G. Saint-Jacques, Thin Solid Films 419, 230–236 (2002)
M.A. El Khakani, R. Dolbec, A.M. Serventi, M.C. Horrillo, M. Trudeau, R.G. Saint-Jacques, D.G. Rickerby, I. Sayago, Sens. Actuators B 77, 383–388 (2001)
M. Filipescu, P.M. Ossi, M. Dinescu, Appl. Surf. Sci. 254, 1347–1351 (2007)
S.-H. Lee, H.M. Cheong, P. Liu, D. Smith, C.E. Tracy, A. Mascarenhas, J.R. Pitts, S.K. Deb, Electrochim. Acta 46, 1995–1999 (2001)
N.E. Stankova, P.A. Atanasov, T.J. Stanimirova, A. Og Dikovska, R.W. Eason, Appl. Surf. Sci. 247, 401–405 (2005)
M. Akiyama, J. Tamaki, N. Miura, N. Yamazoe, Chem. Lett. 20, 1611–1614 (1991)