Lateral and longitudinal patterning of semiconductor structures by crystal growth on nonplanar and dielectric-masked GaAs substrates: application to thickness-modulated waveguide structures

Journal of Crystal Growth - Tập 107 - Trang 226-230 - 1991
E. Colas1, A. Shahar1, B.D. Soole1, W.J. Tomlinson1, J.R. Hayes1, C. Caneau1, R. Bhat1
1Bellcore, Red Bank, New Jersey 07701-7040, USA

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