Ion beam induced surface and interface engineering

Vladimirov, 2008, C. R. Phys., 9, 303, 10.1016/j.crhy.2008.02.004 Dubon, 2006, Physica B: Condensed Matter, 376–377, 630, 10.1016/j.physb.2005.12.159 Chu, 2001, Surf. Coat. Technol., 136, 151, 10.1016/S0257-8972(00)01046-X de Souza, 2010, Surf. Coat. Technol., 204, 2944, 10.1016/j.surfcoat.2010.02.010 Tuboltsev, 2009, Small, 5, 2687, 10.1002/smll.200901424 Chu, 2009, Surf. Coat. Technol., 203, 2793, 10.1016/j.surfcoat.2009.02.131 Mehta, 2002, Pramana, 59, 703, 10.1007/s12043-002-0082-8 Mehta, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 8, 10.1016/S0168-583X(03)01835-4 Jain, 1995, Vacuum, 46, 369, 10.1016/0042-207X(94)00081-6 Su, 1993, Nucl. Instrum. Methods Phys. Res. B, 80–81, 1296, 10.1016/0168-583X(93)90785-5 Gupta, 1998, Nucl. Instrum. Methods Phys. Res. B, 146, 265, 10.1016/S0168-583X(98)00433-9 Gupta, 1998, J. Phys Condens. Matter, 10, 9669, 10.1088/0953-8984/10/43/009 Leguay, 1997, Nucl. Instrum. Methods Phys. Res. B, 122, 481, 10.1016/S0168-583X(96)00756-2 Paul, 1999, Nucl. Instrum. Methods Phys. Res. B, 156, 158, 10.1016/S0168-583X(99)00275-X Gangopadhyay, 2000, J. Appl. Phys., 88, 4975, 10.1063/1.1290739 Singh, 2000, J. Appl. Phys., 87, 2742, 10.1063/1.372249 Narsale, 1997, J. Appl. Phys., 82, 4228, 10.1063/1.366227 Bhave, 1997, Nucl. Instrum. Methods Phys. Res. B, 127–128, 383, 10.1016/S0168-583X(96)00962-7 Mehta, 1997, Vacuum, 48, 957, 10.1016/S0042-207X(97)00102-4 Lofland, 1995, Phys. Rev. B, 51, 8489, 10.1103/PhysRevB.51.8489 Kumar, 1998, Solid State Commun., 106, 805, 10.1016/S0038-1098(98)00122-7 Marhas, 1992, Nucl. Instrum. Methods Phys. Res. B, 156, 21, 10.1016/S0168-583X(99)00270-0 Agnihotri, 1992, Supercond. Sci. Technol., 15, 582, 10.1088/0953-2048/5/10/004 Sen, 1992, Solid State Commun., 82, 555, 10.1016/0038-1098(92)90231-W Kwan, 1997, J. Appl. Phys., 81, 4950, 10.1063/1.365008 Mathur, 1997, Nature, 387, 266, 10.1038/387266a0 Chen, 1996, Appl. Phys. Lett., 69, 3089, 10.1063/1.117314 Ogale, 1998, J. Appl. Phys., 84, 6255, 10.1063/1.368945 Date, 1998, J. Appl. Phys., 83, 7174, 10.1063/1.367157 Mittal, 1997, Radiat. Eff. Def. Solids, 147, 199, 10.1080/10420159908229009 Avasthi, 1998, Nucl. Instrum. Methods B, 146, 504, 10.1016/S0168-583X(98)00464-9 Singh, 1999, Nucl. Instrum. Methods B, 156, 191, 10.1016/S0168-583X(99)00166-4 Jagielski Piatkowska, 2006, Surf. Coat. Technol., 200, 6355, 10.1016/j.surfcoat.2005.11.005 Sioshansi, 1996, Surf. Coat. Technol., 83, 175, 10.1016/0257-8972(95)02838-2 Mandal, 2003, Nucl. Instrum. Methods Phys. Res. B, 206, 517, 10.1016/S0168-583X(03)00813-9 D. Kanjilal, G. Rodrigues, U.K. Rao, C.P. Safvan, P. Kumar, A. Roy, G.K. Mehta, Proceedings of the Second Asian Particle Accelerator Conference, Beijing China, 2001, p. 878. Kumar, 2002, Pramana—J. Phys., 59, 805, 10.1007/s12043-002-0094-4 Nastasi, 1996 Lindhard, 1963, K.g.l. Danske Vid Selsk Matt.-Fys. Medd., 33, 14 Allen, 1970 Ishikawa, 1994, Rev. Sci. Instrum., 65, 1290, 10.1063/1.1144984 Tsuji, 2000, Rev. Sci. Instrum., 71, 804, 10.1063/1.1150299 Tsuji, 2005, Surf. Coat. Technol., 196, 39, 10.1016/j.surfcoat.2004.08.088 Tsuji, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 94, 10.1016/j.nimb.2006.12.156 Tsuji, 2006, Nucl. Instrum. Methods Phys. Res. B, 242, 129, 10.1016/j.nimb.2005.08.102 Tsuji, 2007, Surf. Coat. Technol., 201, 8516, 10.1016/j.surfcoat.2006.02.063 Tsuji, 2007, Surf. Coat. Technol., 201, 8123, 10.1016/j.surfcoat.2006.01.074 Sommani, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 118, 10.1016/j.nimb.2006.12.159 Tsuji, 2004, Trans. Mater. Res. Soc. Jpn., 29, 575 Ishikawa, 2009, Surf. Coat. Technol., 203, 2351, 10.1016/j.surfcoat.2009.02.023 Zhou, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 58, 10.1016/j.nimb.2008.10.084 Dai, 1999, Nucl. Instrum. Methods Phys. Res. B, 149, 108, 10.1016/S0168-583X(98)80730-1 Sobolev, 2010, Semiconductors, 44, 1, 10.1134/S106378261001001X Priolo, 1998, Mater. Chem. Phys., 54, 273, 10.1016/S0254-0584(98)00103-5 Tsuji, 2000, Nucl. Instrum. Methods Phys. Res. B, 166–167, 815, 10.1016/S0168-583X(99)01055-1 Toth, 1999, Nucl. Instrum. Methods Phys. Res. B, 148, 1131, 10.1016/S0168-583X(98)00833-7 Fink, 2005, Rad. Eff. Def. Solids, 160, 67, 10.1080/10420150500132687 Biersack, 1980, Nucl. Instrum. Methods Phys. Res. B, 174, 257, 10.1016/0029-554X(80)90440-1 2004 2005, Ion solid interaction: status and perspectives, Braz. J. Phys., 35, 735 Arista, 2002, Nucl. Instrum. Methods Phys. Res. B, 195, 91, 10.1016/S0168-583X(02)00687-0 Bolse, 1994, Mater. Sci. Eng. R, 12, 53, 10.1016/0927-796X(94)90001-9 Bethe, 1930, Ann. Phys., 5, 325, 10.1002/andp.19303970303 Block, 1933, Ann. Phys., 16, 287 Kasi, 1989, Surf. Sci. Rep., 10, 1, 10.1016/0167-5729(89)90005-8 Boldyryeva, 2004, Nucl. Instrum. Methods Phys. Res. B, 219–220, 953, 10.1016/j.nimb.2004.01.195 Braceras, 2007, Surf. Coat. Technol., 201, 8511, 10.1016/j.surfcoat.2006.02.082 Yang, 2010, Nucl. Instrum. Methods Phys. Res. B B, 268, 2034, 10.1016/j.nimb.2010.02.125 Martín-González, 2010, J. Magnet. Magnet. Mater., 322, 2762, 10.1016/j.jmmm.2010.04.023 Parada, 2006, Nucl. Instrum. Methods Phys. Res. B, 242, 550, 10.1016/j.nimb.2005.08.147 Palacio, 2005, Surf. Sci., 578, 71, 10.1016/j.susc.2005.01.014 Dehm, 1994, Nucl. Instrum. Methods Phys. Res. B, 84, 148, 10.1016/0168-583X(94)95744-4 Datta, 2007, Nucl. Instrum. Methods Phys. Res. B, 256, 248, 10.1016/j.nimb.2006.12.031 Milosavljevć, 2001, J. Appl. Phys., 90, 4474, 10.1063/1.1405818 Dhar, 2003, Appl. Phys. A: Mater. Sci. Process., 76, 773, 10.1007/s00339-002-2045-9 Dhar, 2001, Phys. Rev. B, 65, 024109, 10.1103/PhysRevB.65.024109 Bibic, 2000, Nucl. Instrum. Methods Phys. Res. B, 161–163, 1011, 10.1016/S0168-583X(99)00838-1 Arranz, 2009, Thin Solid Films, 517, 2656, 10.1016/j.tsf.2008.10.052 El-Badry, 2009, Vacuum, 83, 1138, 10.1016/j.vacuum.2009.02.010 Lipiński, 2009, Vacuum, 83, S200, 10.1016/j.vacuum.2009.01.063 Pradhan, 1996, Phys. Rev. B, 53, 2269, 10.1103/PhysRevB.53.2269 Ziegler, 1985 Popok, 2001, Nucl. Instrum. Methods Phys. Res. B, 178, 305, 10.1016/S0168-583X(00)00491-2 Lewis, 1991, Nucl. Instrum. Methods Phys. Res. B, 61, 457, 10.1016/0168-583X(91)95323-6 Bathe, 1998, J. Appl. Phys., 83, 7174, 10.1063/1.367792 Sisodia, 2004, Bull. Mater. Sci., 27, 393, 10.1007/BF02704778 Singh, 2001, Mater. Sci. Semicond. Process., 4, 425, 10.1016/S1369-8001(01)00009-9 Srivastava, 2001, Hyperfine Interact., 133, 53, 10.1023/A:1012297031444 Miranda, 1997, Nucl. Instrum. Methods Phys. Res. B, 127–128, 132, 10.1016/S0168-583X(97)00064-5 Srivastava, 1995, Nucl. Instrum. Methods Phys. Res. B, 101, 400, 10.1016/0168-583X(95)00497-1 B.B. Sharma, S.R. Gupta, R.K. Sharma, V. Kumar, U. Tiwari, P. Sen, G.K. Mehta, MRS Spring Meeting, San Francisco, April 1995. Barshilia, 1995, Thin Solid Films, 258, 123, 10.1016/0040-6090(95)80049-2 Donnelly, 2006, Bull. Russ. Acad. Sci. Phys., 70, 893 Wang, 1995, Nucl. Instrum. Methods Phys. Res. B, 100, 493, 10.1016/0168-583X(95)00369-X Titov, 2000, Nucl. Instrum. Methods Phys. Res. B, 168, 375, 10.1016/S0168-583X(99)01095-2 Sahu, 2007, Nanotechnology, 18, 495702, 10.1088/0957-4484/18/49/495702 Angelov, 2003, Nucl. Instrum. Methods Phys. Res. B, 206, 907, 10.1016/S0168-583X(03)00859-0 Virdi, 2002, Nucl. Instrum. Methods Phys. Res. B, 187, 189, 10.1016/S0168-583X(01)00925-9 R. Singh, S.K. Arora, R. Kumar, G.S. Virdi, V. Ganesan, D.K. Avasthi, D. Kanjilal, Proceedings of SPIE — The International Society for Optical Engineering, 2000, p. 3975. Belyakov, 1996, Rad. Effects Defects Solids, 138, 231, 10.1080/10420159608211525 Akimov, 1998, Surface Investigation X-ray, Synchrotron Neutron Tech., 14, 611 Akimov, 1998, Surface investigation X-ray, Synchrotron Neutron Tech., 13, 277 Szenes, 2005, J. Nucl. Mater., 336, 81, 10.1016/j.jnucmat.2004.09.004 Rahmani, 1988, Nucl. Instrum. Methods Phys. Res. B, 32, 56, 10.1016/0168-583X(88)90180-2 Williams, 1998, Nucl. Instrum. Methods Phys. Res. B, 141, 268, 10.1016/S0168-583X(98)00150-5 Kling, 1998, Nucl. Instrum. Methods Phys. Res. B, 141, 436, 10.1016/S0168-583X(98)00175-X Comins, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 2690, 10.1016/j.nimb.2009.05.074 Chen, 2009, J. Appl. Phys., 106, 081101, 10.1063/1.3216517 Larguem, 2006, Nucl. Instrum. Methods Phys. Res. B, 249, 140, 10.1016/j.nimb.2006.03.100 Lee, 1973, Phys. Status Solidi, 15a, 645, 10.1002/pssa.2210150235 van der Weg, 1974 Cheng, 1990, Mater. Sci. Rep., 5, 45, 10.1016/S0920-2307(05)80007-6 Nastasi, 1994, Mater. Sci. Eng. R, 12, 1, 10.1016/0927-796X(94)90005-1 Hiller, 1989, Mater. Sci. Eng. A, 115, 151, 10.1016/0921-5093(89)90671-0 Matteson, 1979, Rad. Eff., 42, 265, 10.1080/00337577908209140 Schattat, 2003, Appl. Phys. A: Mater. Sci. Process., 76, 165, 10.1007/s003390201319 Desimoni, 1995, Phys. Rev. B, 48, 13266, 10.1103/PhysRevB.48.13266 Mayers, 1980, Nucl. Instrum. Methods Phys. Res. B, 168, 403 Wagner, 1983, Phys. Rev. B, 28, 6780, 10.1103/PhysRevB.28.6780 Johnson, 1985, Nucl. Instrum. Methods Phys. Res. B, 7–8, 657, 10.1016/0168-583X(85)90450-1 Bolse, 1993, Nucl. Instrum. Methods Phys. Res. B, 80–81, 137, 10.1016/0168-583X(93)96093-R Sigmund, 1974, Appl. Phys. Lett., 25, 169, 10.1063/1.1655425 Averback, 1986, Nucl. Instrum. Methods Phys. Res. B, 915, 675, 10.1016/0168-583X(86)90391-5 Wang, 1993, Nucl. Instrum. Methods Phys. Res. B, 83, 503, 10.1016/0168-583X(93)95878-9 Wang, 1995, J. Adhesion Sci. Technol., 9, 1523, 10.1163/156856195X00176 Leguay, 1995, Nucl. Instrum. Methods Phys. Res. B, 106, 28, 10.1016/0168-583X(95)00672-9 Bauer, 1997, J. Appl. Phys., 81, 116, 10.1063/1.363996 Avasthi, 1999, Nucl. Instrum. Methods Phys. Res. B, 156, 143, 10.1016/S0168-583X(99)00259-1 Singh, 2010, J. Phys. Chem. C, 114, 622, 10.1021/jp906725b Lee, 2010, J. Electrochem. Soc., 157, J107, 10.1149/1.3295696 Deshpande, 2008, J. Phys. D: Appl. Phys., 41, 035308, 10.1088/0022-3727/41/3/035308 Jensen, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1893, 10.1016/j.nimb.2010.02.051 Dash, 2009, Appl. Surf. Sci., 256, 558, 10.1016/j.apsusc.2009.08.046 Chavhan, 2008, Rad. Phys. Chem., 77, 794, 10.1016/j.radphyschem.2007.12.015 Chandramohan, 2007, Nucl. Instrum. Methods Phys. Res. B, 254, 236, 10.1016/j.nimb.2006.11.041 Ghosh, 2006, Nucl. Instrum. Methods Phys. Res. B, 248, 71, 10.1016/j.nimb.2006.04.057 Muntele, 2006, Nucl. Instrum. Methods Phys. Res. B, 242, 512, 10.1016/j.nimb.2005.08.136 Hirvonen, 1991, Mater. Sci. Rep., 6, 215, 10.1016/0920-2307(91)90008-B Pulker, 1984 Cho, 1996, Appl. Opt., 35, 5545, 10.1364/AO.35.005545 Thielsch, 2002, Thin Solid Films, 410, 86, 10.1016/S0040-6090(02)00208-0 Niederwald, 2000, Thin Solid Films, 377–378, 21, 10.1016/S0040-6090(00)01394-8 Kim, 2002, Surf. Coat. Technol., 158–159, 457, 10.1016/S0257-8972(02)00286-4 Gilo, 1999, Thin Solid Films, 350, 203, 10.1016/S0040-6090(99)00226-6 Jacob, 2000, Thin Solid Films, 360, 133, 10.1016/S0040-6090(99)00738-5 Toki, 1996, Thin Solid Films, 281–282, 401, 10.1016/0040-6090(96)08691-9 Fu, 1997, J. Non-Cryst. Solids, 218, 403, 10.1016/S0022-3093(97)00207-X Meng, 2010, AIP Conf. Proc., 1233, 71, 10.1063/1.3452265 Zhao, 2004, J. Adhesion Sci. Technol., 18, 1003, 10.1163/1568561041257522 Hayashi, 2000, Thin Solid Films, 376, 152, 10.1016/S0040-6090(00)01201-3 Pan, 2004, J. Appl. Phys. Optics, 5, 53 Park, 2009, Surf. Coat. Technol., 203, 2646, 10.1016/j.surfcoat.2009.02.085 Leng, 2010, Appl. Surf. Sci., 256, 5832, 10.1016/j.apsusc.2010.03.054 Meng, 2008, Thin Solid Films, 516, 1365, 10.1016/j.tsf.2007.04.159 Ko, 1997, J. Vac. Sci. Technol., A, 15, 2750, 10.1116/1.580818 Lee, 2007, Surf. Coat. Technol., 201, 5132, 10.1016/j.surfcoat.2006.07.112 Colligon, 1991, Mater. Sci. Eng. A, 139, 199, 10.1016/0921-5093(91)90617-V Rauschenbach, 2003, Vacuum, 69, 3, 10.1016/S0042-207X(02)00302-0 Smidt, 1990, Int. Mater. Rev., 35, 61, 10.1179/095066090790323975 Rauschenbach, 2000, Cryst. Res. Technol., 35, 675, 10.1002/1521-4079(200007)35:6/7<675::AID-CRAT675>3.0.CO;2-7 Rauschenbach, 2000, Adv. Solid State Phys., 40, 439, 10.1007/BFb0108371 Yamashita, 1989, J. Vac. Sci. Technol. A, 7, 151, 10.1116/1.575744 Chiu, 1999, Thin Solid Films, 343–344, 39, 10.1016/S0040-6090(98)01565-X Chiu, 2000, Thin Solid Films, 358, 264, 10.1016/S0040-6090(99)00725-7 Kelly, 2000, Vacuum, 56, 159, 10.1016/S0042-207X(99)00189-X Musil, 1990, Vacuum, 40, 435, 10.1016/0042-207X(90)90241-P Wang, 2006, Electrochimica Acta., 51, 4865, 10.1016/j.electacta.2006.01.026 Gallasch, 2011, J. Power Sources, 196, 428, 10.1016/j.jpowsour.2010.06.099 Buatier De Mongeot, 2009, Journal of Physics: Condensed Matter, 21, 224022, 10.1088/0953-8984/21/22/224022 Kumar, 2008, Semiconductor Science and Technology, 23, 105020, 10.1088/0268-1242/23/10/105020 Ghosh, 2000, Vacuum, 57, 377, 10.1016/S0042-207X(00)00151-2 Lee, 1996, Thin Solid Films, 290/291, 83 Tsai, 2007, Journal of Materials Processing Technology, 192–193, 55, 10.1016/j.jmatprotec.2007.04.029 Dhunna, 2008, Mater. Sci. Semicond. Process., 11, 126, 10.1016/j.mssp.2009.05.003 Dubey, 2005, J. Appl. Phys., 98, 083903, 10.1063/1.2076443 Brahma, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1493, 10.1016/j.nimb.2008.02.017 Awais, 2010, Surf. Coat. Technol., 204, 2729, 10.1016/j.surfcoat.2010.02.027 Sutthana, 2010, Current Applied Physics, 10, 813, 10.1016/j.cap.2009.09.020 Meng, 2010, Appl. Surf. Sci., 256, 3676, 10.1016/j.apsusc.2009.12.169 Zhao, 2005, Appl. Surf. Sci., 252, 385, 10.1016/j.apsusc.2005.01.033 Tarey, 1987, The Rikagu Journal, 4, 11 2000 Sarkar, 2000, Nucl. Instrum. Methods Phys. Res. B, 161–163, 992, 10.1016/S0168-583X(99)00774-0 Dhar, 1995, Appl. Phys. Lett., 67, 1700, 10.1063/1.115021 Ghosh, 2006, Appl. Phys. Lett., 89, 104104, 10.1063/1.2345611 Katharria, 2006, J. Phys. D: Appl. Phys., 39, 3969, 10.1088/0022-3727/39/18/007 Katharria, 2007, Nucl. Instrum. Methods Phys. Res. B, 254, 78, 10.1016/j.nimb.2006.09.016 Cullity, 1978 Dev, 2001, Current Science, 80, 1550 Doolittle, 1985, Nucl. Instrum. Methods Phys. Res. B, 9, 344, 10.1016/0168-583X(85)90762-1 Khalfaoui, 2006, Vacuum, 81, 45, 10.1016/j.vacuum.2006.02.008 Kaschny, 2004, Nucl. Instrum. Methods Phys. Res. B, 218, 308, 10.1016/j.nimb.2003.12.016 Datta, 2008, Appl. Surf. Sci., 255, 2075, 10.1016/j.apsusc.2008.06.202 Khalfaoui, 2005, Vacuum, 78, 341, 10.1016/j.vacuum.2005.01.048 Kim-Ngan, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1875, 10.1016/j.nimb.2010.02.015 L’Ecuyer, 1978, Nucl. Instrum. Methods Phys. Res. B, 149, 271, 10.1016/0029-554X(78)90872-8 Doyle, 1979, Appl. Phys. Lett., 34, 812, 10.1063/1.90654 Avasthi, 2001, Current Science, 80, 1532 Jain, 2000, Int. J. Hydrogen Energy, 25, 517, 10.1016/S0360-3199(99)00061-0 Avasthi, 2004, Nucl. Instrum. Methods Phys. Res. B, 219–220, 206, 10.1016/j.nimb.2004.01.055 Sigmund, 1981, J. Appl. Phys., 52, 990, 10.1063/1.328790 Ghosh, 2002, Nucl. Instrum. Methods Phys. Res. B, 190, 169, 10.1016/S0168-583X(02)00474-3 Chaudhary, 2004, Nucl. Instrum. Methods Phys. Res. B, 225, 291, 10.1016/j.nimb.2004.04.165 Khan, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1912, 10.1016/j.nimb.2007.10.042 Kumar, 2006, Nucl. Instrum. Methods B, 244, 194, 10.1016/j.nimb.2005.11.054 1997 Briggs (Ed.), Surface and Interface Analysis, 24: (9) 1996. Beamson, 1992 1992 Watts, 1994, X-ray photoelectron spectroscopy, Vacuum, 45l, 653, 10.1016/0042-207X(94)90107-4 Khalfaoui, 2005, Vacuum, 78, 223, 10.1016/j.vacuum.2005.01.030 Ohno, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 3013, 10.1016/j.nimb.2008.03.155 Park, 2009, Current Applied Physics, 9, 847, 10.1016/j.cap.2008.07.021 Lal, 2009, Vacuum, 83, 931, 10.1016/j.vacuum.2008.10.004 Serry, 2005, Microscopy and Microanalysis, 11, 380, 10.1017/S1431927605509917 Bolse, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 115, 10.1016/j.nimb.2005.11.053 Katharria, 2007, Appl. Surf. Sci., 253, 6824, 10.1016/j.apsusc.2007.01.130 Srivastava, 2008, Appl. Surf. Sci., 254, 5116, 10.1016/j.apsusc.2008.02.068 Chen, 2007, Appl. Surf. Sci., 254, 464, 10.1016/j.apsusc.2007.06.044 Zhang, 2003, Appl. Surf. Sci., 205, 343, 10.1016/S0169-4332(02)01129-7 Rohani, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 554, 10.1016/j.nimb.2008.12.005 Komarov, 2005, Vacuum, 78, 361, 10.1016/j.vacuum.2005.01.050 Nagar, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 3617, 10.1016/j.nimb.2009.08.025 Goodhew, 1988 Milosavljevic, 2002, Nucl. Instrum. Methods Phys. Res. B, 188, 166, 10.1016/S0168-583X(01)01068-0 Popovic, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 2507, 10.1016/j.nimb.2008.03.032 Shirai, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 1787, 10.1016/j.nimb.2009.03.079 Ogata, 1997, 3 Criegern, 2000, 63 Winograd, 2006, Appl. Surf. Sci., 252, 6836, 10.1016/j.apsusc.2006.02.142 Jones, 2006, Appl. Surf. Sci., 252, 6844, 10.1016/j.apsusc.2006.02.145 Wilson, 1989 Dilawar, 2000, J. Phys. Chem. Solids, 61, 1927, 10.1016/S0022-3697(00)00082-2 Chakraborty, 2004, Appl. Surf. Sci., 221, 143, 10.1016/S0169-4332(03)00875-4 Diva, 2004, Nucl. Instrum. Methods Phys. Res. B, 222, 169, 10.1016/j.nimb.2004.01.221 Portier, 2008, Appl. Surf. Sci., 255, 1323, 10.1016/j.apsusc.2008.05.263 Colthup, 1990 Derek long, 2002 Lyon, 1998, Anal. Chem., 70, 341, 10.1021/a1980021p Awasthi, 2010, Radiat. Meas., 45, 850, 10.1016/j.radmeas.2010.03.002 Singhal, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 1349, 10.1016/j.nimb.2009.01.044 Sinha, 2009, Surf. Coat. Technol., 203, 2490, 10.1016/j.surfcoat.2009.02.044 Kumar, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1799, 10.1016/j.nimb.2008.01.070 Gerwert, 2001 Braun, 1989, Polym. Bull., 21, 63, 10.1007/BF00700270 Kellner, 1986, Mikrochim. Acta I, 271, 10.1007/BF01206720 Umeda, 2003, Nucl. Instrum. Methods Phys. Res. B, 206, 657, 10.1016/S0168-583X(03)00815-2 Chennamsetty, 2006, Desalination, 188, 203, 10.1016/j.desal.2005.04.118 Kulshrestha, 2010, Micron, 41, 390, 10.1016/j.micron.2009.12.003 Qing, 2010, Plasma Sci. Technol., 12, 378, 10.1088/1009-0630/12/3/26 Albrecht, 1985, Appl. Phys. A, 37, 37, 10.1007/BF00617867 Toulemonde, 1987, Phys. Rev. B, 35, 6560, 10.1103/PhysRevB.35.6560 Studer, 1987, NIMB, 19/20, 856, 10.1016/S0168-583X(87)80171-4 Studer, 1988, NIMB, 32, 389, 10.1016/0168-583X(88)90242-X Dunlop, 1989, NIMB, 42, 182, 10.1016/0168-583X(89)90705-2 Toulemonde, 1989, Phys. Status Solidi A, 114, 467, 10.1002/pssa.2211140205 Audouard, 1987, Europhys. Lett., 3, 327, 10.1209/0295-5075/3/3/013 Klamünzer, 1983, Phys. Rev. Lett., 51, 850 Karamyan, 1989, Nucl. Instrum. Methods B, 43, 153, 10.1016/0168-583X(89)90029-3 Izui, 1986 Seitz, 1956, vol. 2, 305 Markle, 1962, Phys. Rev. Lett., 9, 150, 10.1103/PhysRevLett.9.150 Bonfiglioli, 1961, J. Appl. Phys., 32, 2499, 10.1063/1.1728339 Noggle, 1962, J. Appl. Phys., 33, 1726, 10.1063/1.1728816 Seitz, 1949, Phys. Rev., 76, 1376, 10.1103/PhysRev.76.1376 Izui, 1965, J. Phys. Soc. Japan, 20, 945, 10.1143/JPSJ.20.915 Ritchie, 1982, Nucl. Instrum. Methods, 198, 133, 10.1016/0167-5087(82)90064-3 Lewandowski, 1988, Europhys. Lett., 6, 425, 10.1209/0295-5075/6/5/009 Fujimoto, 1984, Phys. Rev. Lett., 53, 1837, 10.1103/PhysRevLett.53.1837 Borson, 1987, Phys. Rev. Lett., 59, 1962, 10.1103/PhysRevLett.59.1962 Lin, 1987, Appl. Phys. Lett., 50, 124, 10.1063/1.97691 Tom, 1988, Phys. Rev. Lett., 60, 1438, 10.1103/PhysRevLett.60.1438 Borson, 1990, Phys. Rev. Lett., 64, 2172, 10.1103/PhysRevLett.64.2172 Toulemonde, 2000, Nucl. Instrum. Methods Phys. Res. B, 166/167, 903, 10.1016/S0168-583X(99)00799-5 Toulemonde, 1992, Phys. Rev. B, 46, 14362, 10.1103/PhysRevB.46.14362 Wang, 1994, J. Phys: Condens. Matter, 6, 6733, 10.1088/0953-8984/6/34/006 Barbu, 1991, Europhys. Lett., 15, 3713, 10.1209/0295-5075/15/1/007 Kamarou, 2006, Phys. Rev. B, 73, 184107, 10.1103/PhysRevB.73.184107 Wesch, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 283, 10.1016/j.nimb.2007.01.012 Chettah, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 2719, 10.1016/j.nimb.2009.05.063 Dufour, 1999, Europhys. Lett., 45, 585, 10.1209/epl/i1999-00207-5 Mary, 1992, Nucl. Instrum. Methods B, 62, 391, 10.1016/0168-583X(92)95263-Q Levalois, 1992, Nucl. Instrum. Methods B, 63, 14, 10.1016/0168-583X(92)95160-S Lieb, 2006, Nucl. Instrum. Methods B, 245, 121, 10.1016/j.nimb.2005.11.130 Park, 1999, J. Mater. Res., 149, 281, 10.1557/JMR.1999.0040 Wang, 2003, Nucl. Instrum. Methods Phys. Res. B, 209, 194, 10.1016/S0168-583X(02)02028-1 Srivastava, 2006, Nucl. Instrum. Methods Phys. Res. B, 243, 304, 10.1016/j.nimb.2005.09.016 Dhuri, 1999, Nucl. Instrum. Methods Phys. Res. B, 156, 148, 10.1016/S0168-583X(99)00164-0 Kumar, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1759, 10.1016/j.nimb.2008.01.068 Borodin, 2003, Nucl. Instrum. Methods Phys. Res. B, 209, 122, 10.1016/S0168-583X(02)01987-0 Kucheyev, 2004, J. Appl. Phys., 95, 5360, 10.1063/1.1703826 Bringa, 2002, Phys. Rev. Lett., 88, 165501, 10.1103/PhysRevLett.88.165501 Donlop, 2003, Phys. Rev. Lett., 90, 15503, 10.1103/PhysRevLett.90.015503 Dunlop, 1990, Nucl. Instrum. Methods Phys. Res. B, 48, 419, 10.1016/0168-583X(90)90152-K Fleischer, 1975 Fleischer, 1965, J. Appl. Phys., 36, 3645, 10.1063/1.1703059 Schiwietz, 2001, Nucl. Instrum. Methods Phys. Res. B, 175–177, 1, 10.1016/S0168-583X(00)00544-9 Bringa, 2003, Nucl. Instrum. Methods Phys. Res. B, 209, 1, 10.1016/S0168-583X(02)02006-2 Bringa, 1999, Phys. Rev. B, 60, 15107, 10.1103/PhysRevB.60.15107 Jakas, 2002, Phys. Rev. B, 65, 165425, 10.1103/PhysRevB.65.165425 Schiwietz, 1996, Nucl. Instrum. Methods B, 107, 113, 10.1016/0168-583X(95)00794-6 Schiwietz, 2003, Nucl. Instrum. Methods B, 209, 26, 10.1016/S0168-583X(02)01995-X Schiwietz, 2004, Nucl. Instrum. Methods Phys. Res. B, 225, 4, 10.1016/j.nimb.2004.05.041 Khatua, 1999, Nucl. Instrum. Methods Phys. Res. B, 156, 44, 10.1016/S0168-583X(99)00161-5 Terasawa, 2006, Vacuum, 81, 142, 10.1016/j.vacuum.2006.03.020 Tona, 2007, Surf. Sci., 601, 723, 10.1016/j.susc.2006.11.002 Toulemonde, 1994, NIMB, 91, 108, 10.1016/0168-583X(94)96200-6 Meftah, 1993, Phys. Rev. B, 48, 920, 10.1103/PhysRevB.48.920 Szenes, 1992, Mater. Sci. Forum, 97–99, 647, 10.4028/www.scientific.net/MSF.97-99.647 Szenes, 1995, Phys. Rev. B, 51, 8026, 10.1103/PhysRevB.51.8026 Szenes, 1996, Nucl. Inst. Meth. Phys. Res. B, 116, 141, 10.1016/0168-583X(96)00025-0 Szenes, 1996, Phys. Rev. B, 54, 12458, 10.1103/PhysRevB.54.12458 Szenes, 1996, Nucl. Instrum. Methods Phys. Res. B, 107, 146, 10.1016/0168-583X(95)01020-3 Szenes, 1999, Nucl. Instrum. Methods Phys. Res. B, 155, 301, 10.1016/S0168-583X(99)00476-0 Szenes, 2000, Nucl. Instrum. Methods Phys. Res. B, 166–167, 933, 10.1016/S0168-583X(99)00733-8 Sun, 2004, Nucl. Instrum. Methods Phys. Res. B, 218, 318, 10.1016/j.nimb.2003.12.051 Sun, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 211, 10.1016/S0168-583X(03)01735-X Szenes, 2002, Appl. Phys. Lett., 81, 4622, 10.1063/1.1528303 Szenes, 2002, Nucl. Instrum. Methods Phys. Res. B, 191, 54, 10.1016/S0168-583X(02)00513-X Szenes, 2002, Phys. Rev. B, 65, 045206, 10.1103/PhysRevB.65.045206 Szenes, 2006, Rad. Eff. Def. Solids, 161, 401, 10.1080/10420150600780583 Rubin, 2003 Moffatt, 1995, Nucl. Instrum. Meth. Phys. Res. B, 96, 1, 10.1016/0168-583X(94)00443-9 Mayer, 1970 Williams, 1986, Rep. Progr. Phys., 9, 491, 10.1088/0034-4885/49/5/001 Rupprecht, 1978, J. Vac. Sci. Tech., 15, 1669, 10.1116/1.569826 Shannon, 1981, Nucl. Instrum. Methods, 182/183, 545, 10.1016/0029-554X(81)90776-X Polman, 1997, J. Appl. Phys., 82, 1, 10.1063/1.366265 Mantl, 1992, Mater. Sci. Rep., 8, 1, 10.1016/0920-2307(92)90006-M Corbett, 1981, Nucl. Instrum. Methods, 181/182, 457, 10.1016/0029-554X(81)90717-5 Elliman, 1985, Appl. Phys. Lett., 46, 478, 10.1063/1.95563 Kelly, 1981, Nucl. Instrum. Methods, 182/183, 351, 10.1016/0029-554X(81)90709-6 1984 Svensson, 1993, Phys. Rev. Lett., 71, 1860, 10.1103/PhysRevLett.71.1860 Kyllesbech Larsen, 1996, Phys. Rev. Lett., 76, 1493, 10.1103/PhysRevLett.76.1493 Williams, 1998, Mater. Sci. Eng., A253, 8, 10.1016/S0921-5093(98)00705-9 Williams, 1994, Trans. Mater. Res. Soc. Japan, 17, 417 Csepregi, 1976, Appl. Phys. Lett., 29, 645, 10.1063/1.88886 Olson, 1988, Mater. Sci. Rev., 3, 1, 10.1016/S0920-2307(88)80005-7 Eaglesham, 1994, Appl. Phys. Lett., 65, 2305, 10.1063/1.112725 Scarpulla, 2003, Physica B, 340–342, 908, 10.1016/j.physb.2003.09.113 Sun, 2009, Appl. Surf. Sci., 256, 1361, 10.1016/j.apsusc.2009.08.088 Sun, 2009, Mater. Lett., 63, 2574, 10.1016/j.matlet.2009.09.007 Zhang, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 123, 10.1016/j.nimb.2009.10.168 Husnain, 2010, Physica B, 405, 2340, 10.1016/j.physb.2010.02.044 Singh, 2010, Phys. Status Solidi C, 7, 44, 10.1002/pssc.200982630 Xue, 2009, J. Opt. Biomed. Mater., 1, 34 Dupeyrat, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 2863, 10.1016/j.nimb.2010.03.018 Yoon, 2010, J. Supercond. Nov. Magn., 23, 115, 10.1007/s10948-009-0554-x Feng, 2004, Int. J. Solids Struct., 41, 4299, 10.1016/j.ijsolstr.2004.02.054 Chroneos, 2006, Mater. Sci. Semicond. Process., 9, 640, 10.1016/j.mssp.2006.10.001 Chui, 2003, Appl. Phys. Lett., 83, 3275, 10.1063/1.1618382 Satta, 2006, J. Vac. Sci. Technol. B, 24, 494, 10.1116/1.2162565 Canneaux, 2008, Mater. Sci. Eng. B, 154–155, 68, 10.1016/j.mseb.2008.08.004 Koffel, 2008, Mater. Sci. Eng. B, 154–155, 60, 10.1016/j.mseb.2008.08.007 Kaiser, 2010, Thin Solid Films, 518, 2323, 10.1016/j.tsf.2009.09.138 Xiao, 2006, Mater. Sci. Eng. B, 134, 159, 10.1016/j.mseb.2006.07.012 Hoshi, 2010, Thin Solid Films, 518, S162, 10.1016/j.tsf.2009.10.079 Yalçın, 2008, Spectrochim. Acta B, 63, 1130, 10.1016/j.sab.2008.09.002 Poklonski, 2010, Microelectron. Reliab., 50, 813, 10.1016/j.microrel.2010.02.007 Poklonski, 2008, Semiconductors, 42, 1388, 10.1134/S1063782608120038 Chason, 1997, J. Appl. Phys., 81, 6513, 10.1063/1.365193 Pelaz, 2004, J. Appl. Phys., 96, 5947, 10.1063/1.1808484 Shaughnessy, 2004, Appl. Phys. Lett., 84, 5219, 10.1063/1.1765737 Li, 2004, J. Appl. Phys., 95, 7832, 10.1063/1.1748862 Liu, 2010, J. Phys. Conf. Ser., 214, 012114, 10.1088/1742-6596/214/1/012114 Johnson, 2010, Thin Solid Films, 518, 2524, 10.1016/j.tsf.2009.09.152 Guo, 2010, Appl. Phys. Lett., 96, 143502, 10.1063/1.3378878 Williams, 2002, Mater. Forum, 26, 74 Yang, 2003, Japan. J. Appl. Phys., 42, 4124, 10.1143/JJAP.42.4124 Kanungo, 2010, Nanoscale Res. Lett., 1, 243, 10.1007/s11671-009-9472-x Mantl, 1985, Nucl. Instrum. Methods Phys. Res., B7-8, 622, 10.1016/0168-583X(85)90444-6 Shreter, 1984, J. Appl. Phys., 55, 3500, 10.1063/1.332938 Ogale, 1985, J. Appl. Phys., 57, 2915, 10.1063/1.335231 Averback, 1982, J. Appl. Phys., 53, 1342, 10.1063/1.330624 Lee, 1988, Nucl. Instrum. Methods Phys. Res., B33, 661, 10.1016/0168-583X(88)90654-4 Valerie, 1983, Phys. Rev. B, 28, 3357 d’heurle, 1982, J. Appl. Phys., 53, 8765, 10.1063/1.330478 Olesinski, 1990, vol. 1, 92 JCPDS cards numbers 27-0621 and 27-0622. Sarkar, 2000, Nucl. Instrum. Methods Phys. Res. B, 168, 215, 10.1016/S0168-583X(99)00876-9 Masoud, 2002, Nucl. Instrum. Methods Phys. Res. B, 198, 64, 10.1016/S0168-583X(02)01515-X Kumar, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 238, 10.1016/S0168-583X(03)01738-5 Collins, 1991, J. Phys. D: Appl. Phys., 24, 1822, 10.1088/0022-3727/24/10/017 Dhar, 1996, Phys. Rev., B54, 5769, 10.1103/PhysRevB.54.5769 Mitan, 2001, J. Vacuum Sci. Technol. B, 19, 2525, 10.1116/1.1408953 Fallon, 2000, J. Appl. Phys., 87, 6833, 10.1063/1.372857 Ghatak, 2006, Nucl. Instrum. Methods B, 244, 45, 10.1016/j.nimb.2005.11.147 Bibić, 2007, Appl. Phys. Lett., 90, 051901, 10.1063/1.2432952 Dufour, 1993, Europhys. Lett., 21, 671, 10.1209/0295-5075/21/6/007 Zhang, 2006, J. Appl. Phys., 100, 053501, 10.1063/1.2335984 Bibić, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 2498, 10.1016/j.nimb.2008.03.033 Phase, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 737, 10.1016/S0168-583X(87)80147-7 Santos, 1995, Nucl. Instrum. Methods Phys. Res. B, 103, 56, 10.1016/0168-583X(95)00607-9 Milosavljevic, 2001, NIMB, 178, 229, 10.1016/S0168-583X(00)00466-3 Bibic, 2002, Surf. Coat. Technol., 158–159, 198, 10.1016/S0257-8972(02)00205-0 Schaaf, 2002, Hyperfine Interact., 139–140, 615, 10.1023/A:1021278825257 Milosavljevic, 2001, Appl. Phys. Lett., 79, 1438, 10.1063/1.1400760 Dhar, 2003, Nucl. Instrum. Methods Phys. Res. B, 205, 741, 10.1016/S0168-583X(03)00578-0 Milinovic, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 605, 10.1016/j.nimb.2007.01.063 Kudryavtsev, 2002, Phys. Rev. B, 65, 104417, 10.1103/PhysRevB.65.104417 Park, 2002, J. Appl. Phys., 91, 7194, 10.1063/1.1456402 Hung, 1983, Thin Solid Films, 109, 85, 10.1016/0040-6090(83)90033-0 d’Heurle, 1984, J. Appl. Phys., 55, 4208, 10.1063/1.333021 Fathy, 1985, J. Appl. Phys., 58, 297, 10.1063/1.335675 Boussaa, 2005, Vacuum, 77, 125, 10.1016/j.vacuum.2004.07.081 Lee, 2004, J. Magnet. Magnet. Mater., 272–276, e921, 10.1016/j.jmmm.2003.12.234 Lee, 2005, Eur. Phys. J. B, 44, 431, 10.1140/epjb/e2005-00142-3 Tsaur, 1979, Appl. Phys. Lett., 35, 225, 10.1063/1.91103 Ishiwara, 1982, Thin Solid Films, 92, 147, 10.1016/0040-6090(82)90197-3 Lee, 1988, J. Mater. Sci., 23, 2740, 10.1007/BF00547445 Whang, 1989, J. Mater. Sci., 24, 265, 10.1007/BF00660965 Bibic, 1992, Nucl. Instrum. Methods Phys. Res., B67, 500, 10.1016/0168-583X(92)95860-T Desimoni, 1992, Nucl. Instrum. Methods Phys. Res., B72, 197, 10.1016/0168-583X(92)95234-I Cheng, 1987, J. Appl. Phys., 62, 3722, 10.1063/1.339255 Wenyu, 1989, Vacuum, 39, 259, 10.1016/0042-207X(89)90212-1 Valyi, 1989, Nucl. Instrum. Methods Phys. Res., B39, 268, 10.1016/0168-583X(89)90784-2 Kurup, 1986, Nucl. Instrum. Methods Phys. Res., B13, 473, 10.1016/0168-583X(86)90550-1 Gawlik, 2009, Vacuum, 83, S111, 10.1016/j.vacuum.2009.01.038 Shannon, 2002, J. Appl. Phys., 92, 5068, 10.1063/1.1512968 Palacio, 2008, J. Phys. D: Appl. Phys., 41, 035301, 10.1088/0022-3727/41/3/035301 Banwell, 1986, Appl. Phys. Lett., 48, 1521, 10.1063/1.96854 Tsaur, 1980, J. Appl. Phys., 51, 5326, 10.1063/1.327446 Prasad, 1986, Nucl. Instrum. Methods Phys. Res., B15, 698, 10.1016/0168-583X(86)90394-0 Yu, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 746, 10.1016/S0168-583X(87)80149-0 Cheng, 1985, Appl. Phys. Lett., 46, 562, 10.1063/1.95539 Sigmund, 1983, Appl. Phys. A, 30, 43, 10.1007/BF00617712 Saito, 1984, J. Appl. Phys., 55, 4447, 10.1063/1.333018 Bhattacharya, 1985, J. Appl. Phys., 58, 248, 10.1063/1.335719 Joshee, 1986, J. Appl. Phys., 59, 388, 10.1063/1.336641 Lau, 1983, Nucl. Instrum. Methods., 209–210, 97, 10.1016/0167-5087(83)90787-1 Liu, 1983, Nucl. Instrum. Methods, 209/210, 229, 10.1016/0167-5087(83)90804-9 Sigmund, 1975, Appl. Phys. Lett., 27, 52, 10.1063/1.88552 Børgesen, 1991, Nucl. Intr. Meth., B59/60, 563, 10.1016/0168-583X(91)95280-Q Sigmund, 1981, Nucl. Instrum. Methods, 182/183, 25, 10.1016/0029-554X(81)90668-6 Børgesen, 1990, Appl. Phys. Lett., 57, 1407, 10.1063/1.103449 Rehn, 1985, Mater. Sci. Eng., 69, 1, 10.1016/0025-5416(85)90365-9 Rivière, 1984, Appl. Phys. A, 33, 77, 10.1007/BF00617611 Jagielski, 1994, Phys. Rev. B, 50, 2815, 10.1103/PhysRevB.50.2815 Weber, 1993, J. Appl. Phys., 73, 3499, 10.1063/1.352955 Shi, 1993, Nucl. Instrum. Methods Phys. Res., B80/81, 120, 10.1016/0168-583X(93)96089-U Jabr, 1992, Nucl. Instrum. Methods Phys. Res., B71, 264 Miehle, 1993, Nucl. Instrum. Methods Phys. Res., B80/81, 424, 10.1016/0168-583X(93)96154-5 Datta, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 216, 10.1016/S0168-583X(03)01736-1 Thomé, 1995, Nucl. Instrum. Methods Phys. Res. B, 106, 65, 10.1016/0168-583X(95)00680-X Kopcewicz, 1994, J. Appl. Phys., 76, 5232, 10.1063/1.357173 Conrad, 1995, Surf. Coat. Technol., 74–75, 941, 10.1016/0257-8972(95)08348-0 Patankar, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 673, 10.1016/S0168-583X(87)80135-0 Bøttiger, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 696, 10.1016/S0168-583X(87)80139-8 Raushcenbach, 1989, Nucl. Instrum. Methods Phys. Res., B39, 141, 10.1016/0168-583X(89)90757-X Kuprin, 1993, Nucl. Instrum. Methods Phys. Res., B76, 218, 10.1016/0168-583X(93)95186-9 Choe, 1996, J. Appl. Phys., 79, 6306, 10.1063/1.362046 Tamisier, 1999, J. Appl. Phys., 85, 7655, 10.1063/1.370568 Enrique, 2001, Appl. Phys. Lett., 78, 4178, 10.1063/1.1379358 Enrique, 2000, Phys. Rev. Lett., 84, 2885, 10.1103/PhysRevLett.84.2885 Enrique, 2001, Phys. Rev. B, 63, 134111, 10.1103/PhysRevB.63.134111 Lin, 1999, Nucl. Instrum. Methods, 148, 946, 10.1016/S0168-583X(98)00867-2 Yang, 1999, J. Mater. Res., 14, 302, 10.1557/JMR.1999.0043 Hu, 2003, Nucl. Instrum. Methods Phys. Res., B206, 127, 10.1016/S0168-583X(03)00698-0 Cai, 2004, J. Appl. Phys., 95, 2006, 10.1063/1.1636525 Amirthapandian, 2004, J. Appl. Phys., 95, 5295, 10.1063/1.1687039 Wang, 2009, J. Alloys Compd., 476, L21, 10.1016/j.jallcom.2008.09.154 Meissner, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 669, 10.1016/S0168-583X(87)80134-9 Rauschenbach, 1987, Nucl. Instrum. Methods Phys. Res., B23, 323, 10.1016/0168-583X(87)90385-5 Brenier, 1987, Nucl. Instrum. Methods Phys. Res., B19/20, 691, 10.1016/S0168-583X(87)80138-6 Gratton, 1991, Nucl. Instrum. Methods Phys. Res., B59/60, 541, 10.1016/0168-583X(91)95275-I Pacaud, 1999, J. Appl. Phys., 86, 4847, 10.1063/1.371451 Veres, 2000, J. Appl. Phys., 87, 8504, 10.1063/1.373570 Veres, 2000, J. Appl. Phys., 87, 8513, 10.1063/1.373571 Zhang, 2006, Thin Solid Films, 515, 700, 10.1016/j.tsf.2005.12.238 Kelly, 1996, Surf. Coat. Technol., 83, 134, 10.1016/0257-8972(95)02782-3 Abonneau, 1990, Nucl. Instrum. Methods B, 46, 111, 10.1016/0168-583X(90)90679-O Perez, 1992, Nucl. Instrum. Methods B, 65, 129, 10.1016/0168-583X(92)95025-M Nagel, 1999, Nucl. Instrum. Methods Phys. Res. B, 148, 930, 10.1016/S0168-583X(98)00883-0 Neubeck, 1995, Nucl. Instrum. Methods Phys. Res. B, 106, 589, 10.1016/0168-583X(95)00815-2 Carl mchargue, 1996, Surf. Coat. Technol., 83, 151, 10.1016/0257-8972(96)02845-9 Lieb, 1990, Nucl. Instrum. Methods Phys. Res., B50, 10, 10.1016/0168-583X(90)90320-T Milosavljevic, 1992, Nucl. Instrum. Methods Phys. Res. B, 68, 426, 10.1016/0168-583X(92)96118-I Dhar, 2001, Nucl. Instrum. Methods Phys. Res. B, 178, 297, 10.1016/S0168-583X(01)00509-2 Sun, 1995, Mater. Sci. Eng., A196, 229, 10.1016/0921-5093(94)09712-7 Corts, 1993, Nucl. lnstrum. Methods B, 80–81, 167, 10.1016/0168-583X(93)96099-X Wang, 2000, Nucl. Instrum. Methods Phys. Res. B, 166–167, 420 Rissanen, 2000, Nucl. Instrum. Methods Phys. Res. B, 161–163, 986, 10.1016/S0168-583X(99)00773-9 Matsunami, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 433, 10.1016/j.nimb.2007.01.043 Matsunami, 2007, Surf. Coat. Technol., 201, 8322, 10.1016/j.surfcoat.2006.01.091 Peruško, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1749, 10.1016/j.nimb.2008.02.034 Novaković, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 2883, 10.1016/j.nimb.2010.03.027 Tegen, 1993, Nucl. Instrum. Methods Phys. Res. B, 80–81, 1055, 10.1016/0168-583X(93)90735-O Park, 2009, Thin Solid Films, 517, 4222, 10.1016/j.tsf.2009.02.041 Kim, 2004, Langmuir, 20, 157, 10.1021/la035396h Perry, 2002, J. Vac. Sci. Technol. A, 20, 1690, 10.1116/1.1497989 Liao, 2000, Appl. Phys. Lett., 77, 3191, 10.1063/1.1325389 Huang, 2001, Proc. SPIE, 4344, 583, 10.1117/12.436781 Wang, 2004, Nucl. Instrum. Methods Phys. Res. B, 219–220, 798, 10.1016/j.nimb.2004.01.166 Mackova, 2008, Phys. Status Solidi (c), 5, 964, 10.1002/pssc.200778309 Ratchev, 1995, Nuclear Inst. and Methods in Physics Research B, 106, 68, 10.1016/0168-583X(95)00681-8 Leech, 2007, Microelectron. Eng., 84, 25, 10.1016/j.mee.2006.07.005 Ahmed, 2009, Plasma Proc. Polym., 6, 860, 10.1002/ppap.200932202 Papaleo, 1996, Phys. Rev. B, 53, 10.1103/PhysRevB.53.2303 Ektessabi, 2000, Rev. Sci. Technol., 71, 1012, 10.1063/1.1150375 Clough, 2001, Instrum. Meth. Phys. Res. B, 185, 8, 10.1016/S0168-583X(01)00966-1 Webb, 2000, J. Biomed. Mater. Res., 49, 362, 10.1002/(SICI)1097-4636(20000305)49:3<362::AID-JBM9>3.0.CO;2-S Bacakova, 2000, J. Biomed. Mater. Res., 49, 369, 10.1002/(SICI)1097-4636(20000305)49:3<369::AID-JBM10>3.0.CO;2-W Choi, 1999, J. Appl. Polym. Sci., 73, 41, 10.1002/(SICI)1097-4628(19990705)73:1<41::AID-APP5>3.0.CO;2-3 Zhang, 2000, Nucl. Instrum. Methods Phys. Res. B, 168, 29, 10.1016/S0168-583X(99)00719-3 Satriano, 2003, Mater. Sci. Eng. C, 23, 779, 10.1016/j.msec.2003.09.095 Xu, 2006, Thin Solid Films, 514, 182, 10.1016/j.tsf.2006.02.095 Yogesh Karade, Sascha A. Pihan, Wilhelm H. Brünger, Andreas Dietzel, Rüdiger Berger, Karlheinz Graf, Langmuir 2009, 25, 3108. Chen, 2009, Surf. Coat. Technol., 203, 3718, 10.1016/j.surfcoat.2009.06.006 Ektessabi, 2000, Thin Solid Films, 377–378, 793, 10.1016/S0040-6090(00)01454-1 Ahmed, 2010, Surf. Coat. Technol., 205, S104, 10.1016/j.surfcoat.2010.06.005 Satriano, 2003, Nucl. Instrum. Methods Phys. Res. B, 208, 287, 10.1016/S0168-583X(03)00647-5 Kitamura, 2009, Nucl. Instrum. Methods Phys. Res. B, 267, 1638, 10.1016/j.nimb.2009.01.123 Manso, 2005, Acta Biomaterialia, 1, 431, 10.1016/j.actbio.2005.03.003 Manso Silvan, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 496, 10.1016/j.nimb.2007.01.103 Manso, 2007, Acta Biomaterialia, 3, 735, 10.1016/j.actbio.2007.02.003 Guibert, 2009, AIP Conf. Proc., 1099, 511, 10.1063/1.3120085 Toulemonde, 1999, Nucl. Instrum. Methods B, 156, 1, 10.1016/S0168-583X(99)00287-6 Dunlop, 1994, Nucl. Instrum. Methods B, 90, 330, 10.1016/0168-583X(94)95566-2 Dunlop, 1993, Radiat. Eff. Def. Solids, 126, 123, 10.1080/10420159308219692 Higai, 2002, Phys. Rev. B, 65, 165309, 10.1103/PhysRevB.65.165309 Assmann, 1998, Nucl. Instrum. Methods Phys. Res. B, 146, 271, 10.1016/S0168-583X(98)00504-7 Sinha, 2002, Surf. Coat. Technol., 158–159, 214, 10.1016/S0257-8972(02)00210-4 Avasthi, 2003, Phys. Rev B, 68, 153106, 10.1103/PhysRevB.68.153106 Roller, 2007, Phys. Rev. B, 75, 054107, 10.1103/PhysRevB.75.054107 Gupta, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 458, 10.1016/S0168-583X(03)01725-7 Srivastava, 2004, Semicond. Sci. Technol., 19, L17, 10.1088/0268-1242/19/3/L03 Milinovic, 2006, Appl. Surf. Sci., 252, 5339, 10.1016/j.apsusc.2005.12.029 Lal, 2007, Bull. Mater. Sci., 30, 153, 10.1007/s12034-007-0027-4 Tripathi, 2008, Appl. Surf. Sci., 255, 2767, 10.1016/j.apsusc.2008.08.035 Sisodia, 2003, Radiat. Meas., 36, 657, 10.1016/S1350-4487(03)00220-8 Sisodia, 2005, J. Indian Inst. Sci., 84, 151 Chaudhuri, 2004, Nucl. Instrum. Methods Phys. Res. B, 217, 589, 10.1016/j.nimb.2003.12.020 Zhang, 2006, Nucl. Instrum. Methods Phys. Res. B, 249, 167, 10.1016/j.nimb.2006.03.106 Sisodia, 2006, Appl. Surf. Sci., 252, 4016, 10.1016/j.apsusc.2005.09.035 Tripathi, 2007, Nucl. Instrum. Methods Phys. Res. B, 262, 51, 10.1016/j.nimb.2007.04.282 Kumar, 2008, J. Appl. Phys., 103, 044504, 10.1063/1.2885061 Bhattacharya, 2002, Surf. Coat. Technol., 158–159, 59, 10.1016/S0257-8972(02)00216-5 Chakraborty, 2005, J. Phys. D: Appl. Phys., 38, 2836, 10.1088/0022-3727/38/16/015 Agarwal, 2006, Appl. Surf. Sci., 253, 1165, 10.1016/j.apsusc.2006.01.059 Agarwal, 2009, Vacuum, 83, 397, 10.1016/j.vacuum.2008.05.016 Kumar, 2006, J. Appl. Phys., 100, 113723, 10.1063/1.2388855 Kumar, 2006, Solid-State Electron., 50, 1835, 10.1016/j.sse.2006.09.004 Kumar, 2006, Nucl. Instrum. Methods Phys. Res. B, 248, 109, 10.1016/j.nimb.2006.03.174 Kumar, 2007, J. Phys. D: Appl. Phys., 40, 6892, 10.1088/0022-3727/40/22/006 Kumar, 2008, J. Phys. D: Appl. Phys., 41, 105105, 10.1088/0022-3727/41/10/105105 Kumar, 2008, Appl. Surf. Sci., 254, 3277, 10.1016/j.apsusc.2007.11.014 Sisodia, 2005, Radiat. Meas., 40, 762, 10.1016/j.radmeas.2005.06.028 Sisodia, 2009, Radiat. Eff. Defects Solids, 164, 566, 10.1080/10420150902742679 Agarwal, 2010, Appl. Phys. A, 99, 879, 10.1007/s00339-010-5631-2 Bhattacharya, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 198, 10.1016/j.nimb.2005.11.022 Agarwal, 2009, Surf. Interface Anal., 41, 746, 10.1002/sia.3083 Diva, 2008, J. Phys. D: Appl. Phys., 41, 185305, 10.1088/0022-3727/41/18/185305 Chakraborty, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 209, 10.1016/j.nimb.2005.11.133 Agarwal, 2010, J. Colloid Interface Sci., 351, 570, 10.1016/j.jcis.2010.07.055 Srivastava, 2010, Appl. Surf. Sci., 256, 1664, 10.1016/j.apsusc.2009.09.090 Jaouen, 1999, Nucl. Instrum. Methods Phys. Res. B, 148, 176, 10.1016/S0168-583X(98)00725-3 Juraszek, 2000, Phys. Rev. B, 61, 12, 10.1103/PhysRevB.61.12 Srivastava, 2005, Semicond. Sci. Technol., 20, L61, 10.1088/0268-1242/20/12/L03 Kac, 2005, Vacuum, 78, 661, 10.1016/j.vacuum.2005.01.103 Mangal, 2006, Bull. Mater. Sci., 29, 653 Sreekumar, 2006, Semicond. Sci. Technol., 21, 382, 10.1088/0268-1242/21/3/030 Bagchi, 2007, J. Appl. Phys., 102, 074310, 10.1063/1.2786713 Bagchi, 2008, J. Phys.: Condens. Matter, 20, 235202, 10.1088/0953-8984/20/23/235202 Bagchi, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1601, 10.1016/j.nimb.2010.02.009 Gupta, 2008, J. Phys. D: Appl. Phys., 41, 215306, 10.1088/0022-3727/41/21/215306 Asokan, 2008, Spectrochim. Acta A, 70, 454, 10.1016/j.saa.2007.11.031 Baglin, 1989, Nucl. Instrum. Methods Phys. Res., B39, 764, 10.1016/0168-583X(89)90892-6 Baglin, 1992, Nucl. Instrum. Methods Phys. Res. B, 65, 119, 10.1016/0168-583X(92)95024-L Fuchs, 1989, Mater. Sci. Eng. A, l09, 83, 10.1016/0921-5093(89)90568-6 Ahonneau, 1991, Nucl. Instrum. Methods B, 59–60, 1183, 10.1016/0168-583X(91)95790-K Rizza, 1997, Nucl. Instrum. Methods B, 127/128, 574, 10.1016/S0168-583X(96)01129-9 Studer, 1997, Nucl. Instrum. Methods B, 122, 449, 10.1016/S0168-583X(96)00575-7 Avasthi, 2000, Nucl. Instrum. Methods B, 166–167, 345, 10.1016/S0168-583X(99)00775-2 Kraft, 2002, J. Appl. Phys., 91, 1129, 10.1063/1.1425439 Bolse, 2002, Nucl. Instrum. Methods B, 190, 173, 10.1016/S0168-583X(01)01225-3 Bolse, 2002, Surf. Coat. Technol., 158–159, 1, 10.1016/S0257-8972(02)00195-0 Schattat, 2002, Nucl. Instrum. Methods B, 191, 577, 10.1016/S0168-583X(02)00613-4 Schattat, 2002, Appl. Phys. A, 76, 165, 10.1007/s003390201319 Bolse, 2003, Appl. Phys. A, 76, 1, 10.1007/s003390201413 Bolse, 2003, Nucl. Instrum. Methods B, 209, 32, 10.1016/S0168-583X(02)02039-6 Bolse, 2003, Radiat. Meas., 36, 597, 10.1016/S1350-4487(03)00208-7 Schattat, 2003, Radiat. Meas., 36, 703, 10.1016/S1350-4487(03)00230-0 Bolse, 2004, Nucl. Instrum. Methods Phys. Res. B, 218, 479, 10.1016/j.nimb.2003.12.093 Schattat, 2004, Nucl. Instrum. Methods Phys. Res. B, 225, 105, 10.1016/j.nimb.2004.04.183 Schattat, 2005, Nucl. Instrum. Methods Phys. Res. B, 230, 240, 10.1016/j.nimb.2004.12.048 Bolse, 2004, Nucl. Instrum. Methods B, 218, 80, 10.1016/j.nimb.2003.12.091 Dais, 2006, Nucl. Instrum. Methods Phys. Res. B, 245, 239, 10.1016/j.nimb.2005.11.109 Bolse, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 8, 10.1016/j.nimb.2005.11.007 Bolse, 2006, Nucl. Instrum. Methods Phys. Res. B, 245, 264, 10.1016/j.nimb.2005.11.146 Seemann, 2001, J. Phys.: Condens. Matter, 13, 4925, 10.1088/0953-8984/13/21/319 Mallick, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 3332, 10.1016/j.nimb.2008.04.013 Mallick, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 470, 10.1016/j.nimb.2009.11.004 Agarwal, 2009, Surf. Coat. Technol., 203, 2427, 10.1016/j.surfcoat.2009.02.109 Mallick, 2009, Appl. Surf. Sci., 256, 521, 10.1016/j.apsusc.2009.07.107 Mallick, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1613, 10.1016/j.nimb.2010.02.005 Ghosh, 2001, Radiat. Eff. Defects Solids, 154, 151, 10.1080/10420150108214049 Dubey, 2007, J. Magn. Magn. Mater., 310, 2491, 10.1016/j.jmmm.2006.11.091 Dhunna, 2009, Vacuum, 83, 1448, 10.1016/j.vacuum.2009.06.003 Dhunna, 2010, Optoelectron. Adv. Mater.-Rapid Commun., 4, 187 Prakash, 2010, Vacuum, 84, 1275, 10.1016/j.vacuum.2010.02.003 Ruck, 2000, Nucl. Instrum. Methods Phys. Res. B, 166–167, 602, 10.1016/S0168-583X(99)01175-1 Singh, 2010, J. Non-Cryst. Solids, 356, 856, 10.1016/j.jnoncrysol.2010.01.006 Youmeri, 2003, Nucl. Instrum. Methods Phys. Res. B, 209, 188, 10.1016/S0168-583X(02)02027-X Hama, 1996, Radiat. Phys. Chem., 48, 549, 10.1016/0969-806X(96)00080-1 Seguchi, 1999, Nucl. Inst. and Meth. B, 151, 154, 10.1016/S0168-583X(99)00132-9 Mehta, 1996, Nucl. Instrum. Methods Phys. Res. A, 382, 335, 10.1016/S0168-9002(96)00402-0 Kulshrestha, 2006, Polym. Bull., 56, 427, 10.1007/s00289-006-0509-3 Changlong, 2000, Nucl. Instrum. Methods Phys. Res. B, 169, 78, 10.1016/S0168-583X(00)00020-3 Alda, 2001, Nucl. Instrum. Methods B, 185, 210, 10.1016/S0168-583X(01)00804-7 Trautmann, 1999, Nucl. Instrum. Methods B, 156, 162, 10.1016/S0168-583X(99)00247-5 Kulshrestha, 2007, Int. J. hydrog. Energy, 32, 3105, 10.1016/j.ijhydene.2007.01.014 Kulshrestha, 2007, Micron, 38, 326, 10.1016/j.micron.2006.06.012 Papaleo, 2002, Nucl. Instrum. Methods B, 191, 674, 10.1016/S0168-583X(02)00630-4 Tripathi, 2005, Nucl. Instrum. Methods B, 236, 186, 10.1016/j.nimb.2005.04.059 Delgado, 2009, Nucl. Instrum. Methods Phys., 267, 1546, 10.1016/j.nimb.2009.01.078 Kaur, 2009, Pramana, 72, 759, 10.1007/s12043-009-0068-x Saha, 2001, Rad. Phys. Chem., 62, 429, 10.1016/S0969-806X(01)00210-9 Papaleo, 1999, Nucl. Instrum. Methods Phys. Res. B, 151, 135, 10.1016/S0168-583X(99)00071-3 Choi, 2007, Surf. Coat. Technol., 201, 5724, 10.1016/j.surfcoat.2006.07.063 Kudo, 2009, Rad. Phys. Chem., 78, 1067, 10.1016/j.radphyschem.2009.06.020 Mathakari, 2009, Surf. Coat. Technol., 203, 2620, 10.1016/j.surfcoat.2009.02.078 Kumar, 2005, Radiat. Meas., 40, 750, 10.1016/j.radmeas.2005.06.027 Asad Ali, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1809, 10.1016/j.nimb.2010.02.080 Kumar, 2006, Nucl. Instrum. Methods Phys. Res. B, 248, 279, 10.1016/j.nimb.2006.03.185 Kumar, 2003, Nucl. Instrum. Methods Phys. Res. B, 212, 221, 10.1016/j.nimb.2003.09.006 Kumar, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 257, 10.1016/j.nimb.2005.11.135 Kumar, 2007, Nucl. Instrum. Methods Phys. Res. B, 256, 238, 10.1016/j.nimb.2006.12.067 Kumar, 2008, Radiat. Meas., 43, S578, 10.1016/j.radmeas.2008.04.059 Kumar, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1788, 10.1016/j.nimb.2008.01.010 Asad Ali, 2010, Nucl. Instrum. Methods Phys. Res. B, 268, 1813, 10.1016/j.nimb.2010.02.081 Wate, 2005, Rad. Phys. Chemistry, 73, 296, 10.1016/j.radphyschem.2004.09.018 Ensinger, 2010, Rad. Phys. Chemistry, 79, 204, 10.1016/j.radphyschem.2009.08.045 Kulsherstha, 2009, International Journal of Hydrogen Energy, 34, 9274, 10.1016/j.ijhydene.2009.09.032 Kulshrestha, 2006, Int. J. hydrog. Energy, 31, 1266, 10.1016/j.ijhydene.2005.12.004 Kulshrestha, 2006, Desalination, 195, 273, 10.1016/j.desal.2005.12.005 Kulshrestha, 2005, Bull. Mater. Sci., 28, 643, 10.1007/BF02708532 Kulshrestha, 2006, J. Appl. Polym. Sci., 102, 2386, 10.1002/app.24595 Amaldi, 2005, Rep. Progr. Phys., 68, 1861, 10.1088/0034-4885/68/8/R04 Chuanling, 2007, Nucl. Instrum. Methods B, 259, 997, 10.1016/j.nimb.2007.03.010 Denker homeyer, 2005, Nucl. Instrum. Methods Phys. Res. B, 240, 61, 10.1016/j.nimb.2005.06.164 Qin, 2005, Radiat. Eff. Defects Solids, 160, 131, 10.1080/10420150500132596 Hall, 2006, Radiat. Environ. Biophys., 45, 99, 10.1007/s00411-006-0052-5 Gong, 2007, Acta Biochim. Biophys. Sin., 39, 575, 10.1111/j.1745-7270.2007.00314.x Akino, 2009, Int. J. Radiat. Oncol. Biol. Phys., 75, 475, 10.1016/j.ijrobp.2008.12.090 Suganthi, 2009, J. Mater. Sci. Mater. Med., 20, S271, 10.1007/s10856-008-3652-6 Wera, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 2122, 10.1016/j.nimb.2008.02.066 Chen, 2010, Adv. Space Res., 45, 832, 10.1016/j.asr.2009.09.024 Avasthi, 2005, Hyperfine Interact., 160, 95, 10.1007/s10751-005-9152-x Dhara, 2007, Crit. Rev. Solid State Mater. Sci., 32, 1, 10.1080/10408430601187624 Avasthi, 2010, Current Sci., 98, 780 D’orleans, 2003, Phys. Rev. B, 67, 220101, 10.1103/PhysRevB.67.220101 D’orleans, 2004, Nucl. Instrum. Methods Phys. Res. B, 216, 372, 10.1016/j.nimb.2003.11.063 Kluth, 2006, Nucl. Instrum. Methods Phys. Res. B, 250, 215, 10.1016/j.nimb.2006.04.113 Kluth, 2006, Nucl. Instrum. Methods Phys. Res. B, 242, 458, 10.1016/j.nimb.2005.08.065 Kluth, 2007, Radiat. Eff. Defects Solids, 162, 501, 10.1080/10420150701472221 Giulian, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 3158, 10.1016/j.nimb.2008.03.176 Joseph, 2007, Nucl. Instrum. Methods Phys. Res. B, 256, 659, 10.1016/j.nimb.2006.12.183 Awazu, 2008, Phy. Rev. B, 78, 054102, 10.1103/PhysRevB.78.054102 Mishra, 2007, Appl. Phy. Lett., 91, 063103, 10.1063/1.2764556 Mishra, 2007, Radiat. Eff. Defects Solids, 162, 207, 10.1080/10420150601132883 Mishra, 2007, Appl. Phy. Lett., 90, 073110, 10.1063/1.2642824 Johannessen, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 37, 10.1016/j.nimb.2006.12.122 Varma, 2009, Surf. Coat. Technol., 203, 2468, 10.1016/j.surfcoat.2009.02.080 Jacobsohn, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 447, 10.1016/j.nimb.2007.01.026 Budak, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1574, 10.1016/j.nimb.2007.12.001 Kumar, 2008, J. Vac. Sci. Technol. B, 26, L36, 10.1116/1.2956624 Satpati, 2004, Appl. Phys. A, 79, 447, 10.1007/s00339-004-2703-1 Som, 2004, J. Appl. Phys., 97, 014305, 10.1063/1.1810200 Ghatak, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 64, 10.1016/j.nimb.2005.11.016 Ghatak, 2008, Nanotechnology, 19, 325602, 10.1088/0957-4484/19/32/325602 Ghatak, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1282, 10.1016/j.nimb.2007.11.039 Satpati, 2004, J. Appl. Phys., 96, 5213, 10.1063/1.1794899 Desnica, 2006, Nucl. Instrum. Methods Phys. Res. B, 249, 843, 10.1016/j.nimb.2006.03.151 Joshi, 2009, Surf. Coat. Technol., 203, 2476, 10.1016/j.surfcoat.2009.02.040 Srinivasa rao, 2007, Nucl. Instrum. Methods Phys. Res. B, 264, 249, 10.1016/j.nimb.2007.08.094 Batra, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 3107, 10.1016/j.nimb.2008.03.235 Schmidt, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 30, 10.1016/j.nimb.2006.12.152 G.A. Kachurin, S.G. Cherkova, T.T. Korchagina, V.A. Skuratov, 9th International Workshop and Tutorials EDM’2008, 26. Chaudhari, 2003, J. Appl. Phys., 93, 3486, 10.1063/1.1542913 Ovchinnikov, 2003, Microelectron. J., 34, 579, 10.1016/S0026-2692(03)00053-3 Giri, 2006, Nucl. Instrum. Methods Phys. Res. B, 244, 56, 10.1016/j.nimb.2005.11.017 Arnoldbik, 2007, Nucl. Instrum. Methods Phys. Res. B, 258, 199, 10.1016/j.nimb.2006.12.103 Kutsuna, 2009, Appl. Surf. Sci., 256, 1481, 10.1016/j.apsusc.2009.09.007 Thakurdesai, 2008, Nucl. Instrum. Methods Phys. Res. B, 266, 1343, 10.1016/j.nimb.2007.12.074 Thakurdesai, 2008, Appl. Surf. Sci., 254, 4695, 10.1016/j.apsusc.2008.01.101 Thakurdesai, 2009, Appl. Surf. Sci., 255, 8935, 10.1016/j.apsusc.2009.06.102 Romero-Gomez, 2009, Scr. Mater., 60, 574, 10.1016/j.scriptamat.2008.12.014 Agarwal, 2008, J. of Appl. Phys., 104, 024304, 10.1063/1.2953177 Agarwal, 2008, J. Phys. D: Appl. Phys., 41, 045305, 10.1088/0022-3727/41/4/045305 Dubey, 2007, Nucl. Instrum. Methods Phys. Res. B, 257, 287, 10.1016/j.nimb.2007.01.093 Wang, 2007, Nucl. Instrum. Methods Phys. Res. B, 261, 1162, 10.1016/j.nimb.2007.04.248 Sharma, 2009, J. Non-Cryst. Solids, 355, 1653, 10.1016/j.jnoncrysol.2009.05.055