Calibration of the photoluminescence technique for measuring B, P and Al concentrations in Si in the range 1012to 1015cm-3using Fourier transform spectroscopy

Semiconductor Science and Technology - Tập 2 Số 3 - Trang 157-166 - 1987
P McL Colley1, E C Lightowlers1
1Dept. of Phys., King's Coll., London, UK

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Tài liệu tham khảo

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