Radio-frequency (RF) plasma etching of graphite with oxygen: a scanning tunnelling microscope study
Tài liệu tham khảo
Kinoshita, 1988
Moore, 1981, Vol. 17, 233
Hollax, 1985, Carbon, 23, 655, 10.1016/0008-6223(85)90225-8
Hu, 1986, Anal. Chem., 55, 3235, 10.1021/ac00127a069
Gewirth, 1988, J. Phys. Chem., 92, 5563, 10.1021/j100331a006
Wieck, 1982, Analyst, 107, 951, 10.1039/an9820700951
Hershenhart, 1984, Anal. Chem., 56, 2256, 10.1021/ac00276a064
Sternitzke, 1990, Anal. Chem., 62, 1339, 10.1021/ac00212a025
Nakagiri, 1988, J. Microsc., 152, 245, 10.1111/j.1365-2818.1988.tb01385.x
Nowakowski, 1992, Surf. Sci., 271, L351, 10.1016/0039-6028(92)90889-E
Evans, 1977, Anal. Chem., 49, 1632, 10.1021/ac50019a042
Evans, 1979, Anal. Chem., 51, 358, 10.1021/ac50039a010
Miller, 1981, Anal. Chem., 53, 2319, 10.1021/ac00237a043
Schreurs, 1984, Recl. Trav. Chim. Pays-Bas, 103, 251, 10.1002/recl.19841030902
You, 1992, Surf. Sci., 279, 189, 10.1016/0039-6028(92)90755-U
Joshi, 1991, J. Mater. Res., 6, 1484, 10.1557/JMR.1991.1484
Yamashina, 1991, Appl. Surf. Sci., 48/49, 483, 10.1016/0169-4332(91)90379-X
Taglauer, 1982, J. Nucl. Mater., 111/112, 142, 10.1016/0022-3115(82)90197-0
Ashida, 1985, J. Nucl. Mater., 136, 284, 10.1016/0022-3115(85)90016-9
Al-Assadi, 1991, Vacuum, 42, 1009, 10.1016/0042-207X(91)90009-8
Brown, 1990, Surf. Sci., 237, 273, 10.1016/0039-6028(90)90539-K
Selwyn, 1986, J. Appl. Phys., 60, 2771, 10.1063/1.337109
Hartney, 1989, J. Vac. Sci. Technol. B, 7, 1, 10.1116/1.584440
Eggito, 1985, J. Vac. Sci. Technol. B, 3, 893, 10.1116/1.583078
Zarowin, 1984, J. Vac. Sci. Technol. A, 2, 1537, 10.1116/1.572466
Hoffman, 1991, J. Mater. Sci., 26, 4545, 10.1007/BF00612388
Oehrlein, 1990, 196
Holland, 1976, Vacuum, 26, 233, 10.1016/S0042-207X(76)80482-4
Holland, 1977, J. Vac. Sci. Technol., 14, 5, 10.1116/1.569159
Marsh, 1989, Introduction to Carbon Science, 107
Thomas, 1969, Carbon, 7, 359, 10.1016/0008-6223(69)90123-7
Balooch, 1988, J. Vac. Sci. Technol. B, 9, 1088, 10.1116/1.585266
Bell, 1972, Am. Inst. Chem. Eng. J., 18, 990, 10.1002/aic.690180516
Vastola, 1963, Carbon, 1, 11, 10.1016/0008-6223(63)90004-6
Shivashankar, 1986, J. Vac. Sci. Technol. A, 4, 1826, 10.1116/1.573948
Collart, 1991, J. Appl. Phys., 70, 5278, 10.1063/1.350237