Effects of an additional magnetic field in ITO thin film deposition by magnetron sputtering

Ceramics International - Tập 41 - Trang 617-621 - 2015
Kyong Chan Heo1, Youngku Sohn2, Jin Seog Gwag1
1Department of Physics Yeungnam University, 214-1 Dae-dong, Gyeongsan 712-749, Korea
2Department of Chemistry Yeungnam University, 214-1 Dae-dong, Gyeongsan 712-749, Korea

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