Effects of an additional magnetic field in ITO thin film deposition by magnetron sputtering
Tài liệu tham khảo
Li, 2006, Efficient inverted polymer solar cells, Appl. Phys. Lett., 88, 253503(1), 10.1063/1.2212270
Bertan, 2003, RF sputtering deposition of Ag/ITO coatings at room temperature, Solid State Ionics, 165, 139, 10.1016/j.ssi.2003.08.055
Latz, 1991, High conducting large area indium tin oxide electrodes for displays prepared by DC magnetron sputtering, Jpn. J. Appl. Phys., 30, L149, 10.1143/JJAP.30.L149
Choi, 2007, Highly efficient transparent organic light-emitting diodes by ion beam assisted deposition-prepared indium tin oxide cathode, Appl. Phys. Lett., 90, 033513(1)
Hamberg, 1986, Evaporated Sn doped In2O3 films: basic optical properties and applications to energy efficient windows, J. Appl. Phys., 60, R123, 10.1063/1.337534
Shigesato, 1992, Electrical and structural properties of low resistivity tindoped indium oxide films, J. Appl. Phys., 71, 3356, 10.1063/1.350931
Rauf, 1993, Low resistivity and high mobility tin-doped indium oxide films, Mater. Lett., 18, 123, 10.1016/0167-577X(93)90110-J
Coutal, 1996, Fabrication and characterization of ITO thin films deposited by excimer laser evaporation, Thin Solid Films, 288, 248, 10.1016/S0040-6090(96)08824-4
Mattox, 1989, Particle bombardment effects on thin‐film deposition: a review, J. Vac. Sci. Technol. A, 7, 1105, 10.1116/1.576238
Rossnagel, 1989, Film modification by low energy ion bombardment during deposition, Thin Solid Films, 143, 143, 10.1016/0040-6090(89)90040-0
Ivanov, 1994, Influence of an external axial magnetic field on the plasma characteristics and deposition conditions during direct current planar magnetron sputtering, J. Vac. Sci. Technol. A, 12, 314, 10.1116/1.578874
Engstrom, 2000, Design, plasma studies, and ion assisted thin film growth in an unbalanced dual target magnetron sputtering system with a solenoid coil, Vacuum, 56, 107, 10.1016/S0042-207X(99)00177-3
Yang, 2010, Magnetic field effects on coating deposition rate and surface morphology coatings using magnetron sputtering, Smart Mater. Struct., 19, 124003(1), 10.1088/0964-1726/19/12/124003
Chopra, 1983, Transparent conductors – a status review, Thin Solid Films, 102, 1, 10.1016/0040-6090(83)90256-0
Brikholz, 2006
Fallah, 2007, The effect of annealing on structural, electrical and optical properties of nanostructured ITO films prepared by e-beam evaporation, Mater. Res. Bull., 42, 487, 10.1016/j.materresbull.2006.06.024