The preparation of hydrogenated amorphous silicon by plasma-enhanced reactive evaporation

Journal of Non-Crystalline Solids - Tập 108 - Trang 115-127 - 1989
R.V. Kruzelecky1, D. Racansky1, S. Zukotynski1
1Department of Electrical Engineering, University of Toronto, Toronto, Ontario, Canada M5S 1A4

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