Hypersound tomography of graphitized layers buried into diamond matrix

Rani, 2021, Recent advances in single crystal diamond device fabrication for photonics, sensing and nanomechanics, Micromachines, 12, 36, 10.3390/mi12010036 Orlando Auciello, 2021, Review on advances in microcrystalline, nanocrystalline and ultrananocrystalline diamond films-based micro/nano-electromechanical systems technologies, J. Mater. Sci., 56, 7171, 10.1007/s10853-020-05699-9 Scheffold, 1997, Sound-echo experiments in (100)-cut diamond at 70 and 150 GHz, Appl. Phys. Lett., 70, 3087, 10.1063/1.119099 Teissier, 2014, Strain coupling of a nitrogen vacancy center spin to a diamond mechanical oscillator, Phys. Rev. Lett., 113, 10.1103/PhysRevLett.113.020503 Johan, 2000, Radiation defects and their annealing behaviour in ion-implanted diamonds, Nucl. Instrum. Methods Phys. Res. B, 166–167, 364 Gregory, 2012, Ion implantation induced modification of optical properties in single-crystal diamond studied by coherent acoustic phonon spectroscopy, Appl. Phys. Lett., 101, 10.1063/1.4765647 Olivero, 2010, Controlled variation of the refractive index in ion-damaged diamond, Diam. Relat. Mater., 19, 428, 10.1016/j.diamond.2009.12.011 Bosia, 2011, Modification of the structure of diamond with MeV ion implantation, Diam. Relat. Mater., 20, 774, 10.1016/j.diamond.2011.03.025 Gippius, 1999, Formation and characterization of graphitized layers in ion-implanted diamond, Diam. Relat. Mater., 8, 1631, 10.1016/S0925-9635(99)00047-3 Khmelnitsky, 2013, Mechanical stresses and amorphization of ion-implanted diamond, Nucl. Instrum. Methods Phys. Res. B, 304, 5, 10.1016/j.nimb.2013.03.030 Mohr, 2016, Characterization of the recovery of mechanical properties of ion-implanted diamond after thermal annealing, Diam. Relat. Mater., 63, 75, 10.1016/j.diamond.2015.11.008 Battiato, 2016, Softening the ultra-stiff: controlled variation of Young’s modulus in single-crystal diamond by ion implantation, Acta Mater., 116, 95, 10.1016/j.actamat.2016.06.019 Tas, 1998, Picosecond ultrasonics study of the modification of interfacial bonding by ion implantation, Appl. Phys. Lett., 72, 2235, 10.1063/1.121276 Greener, 2019, High-Frequency Elastic Coupling at the Interface of van der Waals Nanolayers Imaged by Picosecond Ultrasonics, ACS Nano, 13, 11530, 10.1021/acsnano.9b05052 Greener, 2018, Coherent acoustic phonons in van der Waals nanolayers and heterostructures, Phys. Rev. B, 98, 10.1103/PhysRevB.98.075408 Yu. Klokov, 2020, Acoustic properties of strained SiGe / Si layers in the sub-terahertz frequency range, J. Appl. Phys., v. 127, 1 Tomoda, 2007, Tomographic reconstruction of picosecond acoustic strain propagation, Appl. Phys. Lett., 90, 1, 10.1063/1.2432238 Gusev, 2011, Depth-profiling of elastic and optical inhomogeneities in transparent materials by picosecond ultrasonic interferometry: theory, J. Appl. Phys., 110, 10.1063/1.3665646 Gusev, 2018, Advances in applications of time-domain Brillouin scattering for nanoscale imaging, Appl. Phys. Rev., 5, 10.1063/1.5017241 Threard, 2021, Photoacoustic 3-D imaging of polycrystalline microstructure improved with transverse acoustic waves, Photoacoustics, 23, 10.1016/j.pacs.2021.100286 Tas, 1992, Noninvasive picosecond ultrasonic detection of ultrathin interfacial layers: CFx at the Al/Si interface, Appl. Phys. Lett., 61, 1787, 10.1063/1.108427 Khomich, 2005, Spectroscopic ellipsometry study of buried graphitized layers in the ion-implanted diamond, Vacuum, 78, 583, 10.1016/j.vacuum.2005.01.090 Kalish, 1999, Nucl. Instr. Meth B, 148, 10.1016/S0168-583X(98)00857-X Tachizaki, 2006, Scanning ultrafast Sagnac interferometry for imaging two-dimensional surface wave propagation, Rev. Sci. Instrum., 77, 10.1063/1.2194518 Yu. Klokov, 2022, 3D hypersound microscopy of van der waals heterostructures, Nano Lett., 22, 2070, 10.1021/acs.nanolett.2c00003 Tas, 1994, Electron diffusion in metals studied by picosecond ultrasonics, Phys. Rev. B, 49, 15046, 10.1103/PhysRevB.49.15046 Matsuda, 2015, Fundamentals of picosecond ultrasonics, Utrasonics, 56, 3, 10.1016/j.ultras.2014.06.005 Perrin, 1996, Prog. Nat. Sci., S6, 444 Hettich, 2016, Viscoelastic properties and efficient acoustic damping in confined polymer nano-layers at GHz frequencies, Sci. Rep., 6, 33471, 10.1038/srep33471 Chuan, 2017, Acoustic waves undetectable by transient reflectivity measurements, Phys. Rev. B, 95