A capacitive sensor for non-contact nanoliter droplet detection

Sensors and Actuators A: Physical - Tập 153 - Trang 57-63 - 2009
A. Ernst1, W. Streule1, N. Schmitt1, R. Zengerle1, P. Koltay1
1Laboratory for MEMS Applications, Department of Microsystems Engineering – IMTEK, University of Freiburg, Georges-Koehler-Allee 106, 79110 Freiburg, Germany

Tài liệu tham khảo

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