Review of ultrasonic vibration-assisted machining in advanced materials

Zhichao Yang1, Lida Zhu1, Guixiang Zhang2, Chenbing Ni1, Bin Lin3
1School of Mechanical Engineering and Automation, Northeastern University, Shenyang 110819, China
2School of Mechanical Engineering, Shandong University of Technology, Zibo, 255000, China
3Key Laboratory of Advanced Ceramics and Processing Technology, Tianjin University, Tianjin, 300072, China

Tài liệu tham khảo

Shamoto, 1994, Study on elliptical vibration cutting, CIRP Ann. - Manuf. Technol., 43, 35, 10.1016/S0007-8506(07)62158-1 Gan, 2003, Ultraprecision diamond turning of glass with ultrasonic vibration, Int. J. Adv. Manuf. Technol., 21, 952, 10.1007/s00170-002-1416-x Azarhoushang, 2011, Development of a novel ultrasonic unit for grinding of ceramic matrix composites, Int. J. Adv. Manuf. Technol., 57, 945, 10.1007/s00170-011-3347-x Nath, 2008, Effect of machining parameters in ultrasonic vibration cutting, Int. J. Mach. Tool Manufact., 48, 965, 10.1016/j.ijmachtools.2008.01.013 Shen, 2015, Study on wear of diamond wheel in ultrasonic vibration-assisted grinding ceramic, Wear, 332–333, 788, 10.1016/j.wear.2015.02.047 Li, 2016, Material removal modes of quartz crystals by micro USM, Procedia CIRP, 42, 842, 10.1016/j.procir.2016.03.005 Moriwaki, 1992, Ultraprecision ductile cutting of glass by applying ultrasonic vibration, CIRP Ann. - Manuf. Technol., 41, 141, 10.1016/S0007-8506(07)61171-8 Sun, 2018, Force prediction model considering material removal mechanism for axial ultrasonic vibration-assisted peripheral grinding of Zerodur, Int. J. Adv. Manuf. Technol., 98, 2775, 10.1007/s00170-018-2457-0 Wang, 2019, Study on key factors influencing the surface generation in rotary ultrasonic grinding for hard and brittle materials, J. Manuf. Process., 38, 549, 10.1016/j.jmapro.2019.01.046 Prasad, 2016, Aerospace Mater. Mater. Technol., 1 Kumabe, 1986, Ultrasonic super-position vibration cutting of ceramics, J. Jpn. Soc. Precis. Eng., 52, 1851, 10.2493/jjspe.52.1851 Sun, 2006, A novel ultrasonic micro-dissection technique for biomedicine, Ultrasonics, 44, 255, 10.1016/j.ultras.2006.06.010 Babitsky, 2003, Ultrasonically assisted turning of aviation materials, J. Mater. Process. Technol., 132, 157, 10.1016/S0924-0136(02)00844-0 Babitsky, 2004, Ultrasonically assisted turning of aviation materials: simulations and experimental study, Ultrasonics, 42, 81, 10.1016/j.ultras.2004.02.001 Amini, 2017, Effect of longitudinal−torsional vibration in ultrasonic-assisted drilling, Mater. Manuf. Process., 32, 616, 10.1080/10426914.2016.1198027 Yang, 2019, Investigation of surface topography formation mechanism based on abrasive-workpiece contact rate model in tangential ultrasonic vibration-assisted CBN grinding of ZrO 2 ceramics, Int. J. Mech. Sci., 155, 66, 10.1016/j.ijmecsci.2019.02.031 Wang, 2019, A mechanistic model on feeding-directional cutting force in surface grinding of CFRP composites using rotary ultrasonic machining with horizontal ultrasonic vibration, Int. J. Mech. Sci., 155, 450, 10.1016/j.ijmecsci.2019.03.009 Liu, 2019, Analysis of surface texturing in radial ultrasonic vibration-assisted turning, J. Mater. Process. Technol., 267, 186, 10.1016/j.jmatprotec.2018.12.021 Yang, 2019, Drilling force model for forced low frequency vibration assisted drilling of Ti-6Al-4V titanium alloy, Int. J. Mach. Tool Manufact., 146, 103438, 10.1016/j.ijmachtools.2019.103438 Xu, 2018, Machinablity improvement with ultrasonic vibration–assisted micro-milling, Adv. Mech. Eng., 10, 1, 10.1177/1687814018812531 Kurniawan, 2019, Experimental study of microgroove surface using three-dimensional elliptical vibration texturing, J. Micro Nano-Manufacturing, 7, 1, 10.1115/1.4043957 Zhang, 2019, Design and kinematic analysis of a novel decoupled 3D ultrasonic elliptical vibration assisted cutting mechanism, Ultrasonics, 95, 79, 10.1016/j.ultras.2019.03.012 Zhang, 2019, A novel design method for 3D elliptical vibration-assisted cutting mechanism, Mech. Mach. Theor., 134, 308, 10.1016/j.mechmachtheory.2019.01.007 Weber, 1984, Turning of machinable glass ceramics with an ultrasonically vibrated tool, CIRP Ann. - Manuf. Technol., 33, 85, 10.1016/S0007-8506(07)61385-7 Liu, 2017, Rotary ultrasonic face grinding of carbon fiber reinforced plastic (CFRP): a study on cutting force model, Int. J. Adv. Manuf. Technol., 89, 847, 10.1007/s00170-016-9151-x Ko, 2011, Cusp error reduction under high speed micro/meso- scale milling with ultrasonic vibration assistance, Int. J. Precis. Eng. Manuf., 12, 15, 10.1007/s12541-011-0002-2 Ni, 2018, Analytical modeling of tool-workpiece contact rate and experimental study in ultrasonic vibration-assisted milling of Ti–6Al–4V, Int. J. Mech. Sci., 142–143, 97, 10.1016/j.ijmecsci.2018.04.037 Nath, 2014 Yang, 2019, Global tool path optimization of high-resolution image reproduction in ultrasonic modulation cutting for structural coloration, Int. J. Mach. Tool Manufact., 138, 14, 10.1016/j.ijmachtools.2018.11.002 Yang, 2017, Structural coloration of metallic surfaces with micro/nano-structures induced by elliptical vibration texturing, Appl. Surf. Sci., 402, 400, 10.1016/j.apsusc.2017.01.026 Khanna, 1995, Experimental investigation of rotary ultrasonic grinding of ceramic disks Zeng, 2016, 1 Legge, 1964, Ultrasonic drilling of ceramics: industrial diamond review, Ultrasonics, 24, 20 Skelton, 1968, Turning with an oscillating tool, Int. J. Mach. Tool Des. Res., 8, 239, 10.1016/0020-7357(68)90014-0 Moriwaki, 1991, Ultra-precision diamond turning of stainless steel by applying ultrasonic vibration, J. Jpn. Soc. Precis. Eng., 57, 1983, 10.2493/jjspe.57.1983 Shamoto, 2005, A new method to machine sculptured surfaces by applying ultrasonic elliptical vibration cutting, 84 Kim, 2008, Characteristics of elliptical vibration cutting in micro-V grooving with variations in the elliptical cutting locus and excitation frequency, J. Micromech. Microeng., 18, 10.1088/0960-1317/18/2/025002 Kim, 2007, An ultrasonic elliptical vibration cutting device for micro V-groove machining: kinematical analysis and micro V-groove machining characteristics, J. Mater. Process. Technol., 190, 181, 10.1016/j.jmatprotec.2007.02.047 Guo, 2011 Zhang, 2014, A study of the diamond tool wear suppression mechanism in vibration-assisted machining of steel, J. Mater. Process. Technol., 214, 496, 10.1016/j.jmatprotec.2013.10.002 Ding, 2011, Surface topography of fine-grained ZrO 2 ceramic by two-dimensional ultrasonic vibration grinding, J. Wuhan Univ. Technol.-Materials Sci. Ed., 26, 1162, 10.1007/s11595-011-0382-3 Harada, 2009, Effect of dynamic response and displacement/stress amplitude on ultrasonic vibration cutting, J. Mater. Process. Technol., 209, 4490, 10.1016/j.jmatprotec.2008.10.026 Zhang, 2013, Investigation on machining performance of amplitude control sculpturing method in elliptical vibration cutting, Procedia CIRP, 8, 328, 10.1016/j.procir.2013.06.111 Verma, 2019, Machining forces in ultrasonic-vibration assisted end milling, Ultrasonics, 94, 350, 10.1016/j.ultras.2018.07.004 Niu, 2019, 12 Tang, 2017, Development of a novel ultrasonic drill using longitudinal-bending hybrid mode, IEEE Access, 5, 7362, 10.1109/ACCESS.2017.2696566 Wang, 2018, Reducing cutting force in rotary ultrasonic drilling of ceramic matrix composites with longitudinal-torsional coupled vibration, Manuf. Lett., 18, 1, 10.1016/j.mfglet.2018.08.002 Suzuki, 2007, Elliptical vibration cutting of tungsten alloy molds for optical glass parts, CIRP Ann. - Manuf. Technol., 56, 127, 10.1016/j.cirp.2007.05.032 Liang, 2010, A new two-dimensional ultrasonic assisted grinding (2D-UAG) method and its fundamental performance in monocrystal silicon machining, Int. J. Mach. Tool Manufact., 50, 728, 10.1016/j.ijmachtools.2010.04.005 Han, 2019, Design and computational optimization of elliptical vibration-assisted cutting system with a novel flexure structure, IEEE Trans. Ind. Electron., 66, 1151, 10.1109/TIE.2018.2835425 Shamoto, 2008, Analysis of 3D elliptical vibration cutting with thin shear plane model, CIRP Ann. - Manuf. Technol., 57, 57, 10.1016/j.cirp.2008.03.073 Rana Che, 2014, Machining of carbon fiber reinforced plastics/polymers: a literature review, J. Manuf. Sci. Eng. Trans. ASME, 136, 10.1115/1.4026526 Chen, 2018, A nonuniform moving heat source model for temperature simulation in ultrasonic-assisted cutting of titanium alloys, Int. J. Adv. Manuf. Technol., 97, 3009, 10.1007/s00170-018-2174-8 Ning, 2017, Surface grinding of CFRP composites with rotary ultrasonic machining: a mechanistic model on cutting force in the feed direction, Int. J. Adv. Manuf. Technol., 92, 1217, 10.1007/s00170-017-0149-9 Cakir, 2015, Finite element modeling of ultrasonic assisted turning of Ti6Al4V alloy, Procedia - Soc. Behav. Sci., 195, 2839, 10.1016/j.sbspro.2015.06.404 Jain, 2018, Effect of tool design parameters study in micro rotary ultrasonic machining process, Int. J. Adv. Manuf. Technol., 98, 1267, 10.1007/s00170-018-2239-8 Zheng, 2018, A theoretical and experimental investigation on ultrasonic assisted grinding from the single-grain aspect, Int. J. Mech. Sci., 148, 667, 10.1016/j.ijmecsci.2018.09.026 Cao, 2018, Ductile-brittle transition behavior in the ultrasonic vibration-assisted internal grinding of silicon carbide ceramics, Int. J. Adv. Manuf. Technol., 96, 3251, 10.1007/s00170-018-1715-5 Huang, 2018, Ductile-regime machining model for ultrasonic elliptical vibration cutting of brittle materials, J. Manuf. Process., 36, 68, 10.1016/j.jmapro.2018.09.029 Wang, 2018, Reducing edge chipping defect in rotary ultrasonic machining of optical glass by compound step-taper tool, J. Manuf. Process., 32, 213, 10.1016/j.jmapro.2018.02.001 Jia, 2019, Experimental evaluation of surface topographies of NMQL grinding ZrO2 ceramics combining multiangle ultrasonic vibration, Int. J. Adv. Manuf. Technol., 100, 457, 10.1007/s00170-018-2718-y Tesfay, 2016, Ultrasonic vibration assisted grinding of bio-ceramic materials: an experimental study on edge chippings with Hertzian indentation tests, Int. J. Adv. Manuf. Technol., 86, 3483, 10.1007/s00170-015-8326-1 Dambatta, 2017, Ultrasonic assisted grinding of advanced materials for biomedical and aerospace applications—a review, Int. J. Adv. Manuf. Technol., 92, 3825, 10.1007/s00170-017-0316-z Shih, 2018, Fixed abrasive machining of non-metallic materials, CIRP Ann., 67, 767, 10.1016/j.cirp.2018.05.010 Wen, 2019, Study on contact performance of ultrasonic-assisted grinding surface, Ultrasonics, 91, 193, 10.1016/j.ultras.2018.08.009 Muhammad, 2014, Analysis of a free machining α+β titanium alloy using conventional and ultrasonically assisted turning, J. Mater. Process. Technol., 214, 906, 10.1016/j.jmatprotec.2013.12.002 Jian-Hua, 2015, Kinematics and experimental study on ultrasonic vibration-assisted micro end grinding of silica glass, Int. J. Adv. Manuf. Technol., 78, 1893, 10.1007/s00170-014-6761-z Xu, 2015, Ultrasonic vibration-assisted machining: principle, design and application, Adv. Manuf., 3, 173, 10.1007/s40436-015-0115-4 Ding, 2017, Experimental studies on matching performance of grinding and vibration parameters in ultrasonic assisted grinding of SiC ceramics, Int. J. Adv. Manuf. Technol., 88, 2527, 10.1007/s00170-016-8977-6 Yao, 2013, A new design of ultrasonic power based on ARM, Adv. Mater. Res., 629, 671, 10.4028/www.scientific.net/AMR.629.671 Komatsu, 1985, Constant vibration amplitude method of piezoelectric transducer using a pll (Phase locked loop), Jpn. J. Appl. Phys., 24, 159, 10.7567/JJAPS.24S1.159 Shamoto, 2002, Development of ultrasonic elliptical vibration controller for elliptical vibration cutting, CIRP Ann. - Manuf. Technol., 51, 327, 10.1016/S0007-8506(07)61528-5 Gao, 2019, Sensorless control of a three-degree-of-freedom ultrasonic vibration tool holder, Precis. Eng., 58, 47, 10.1016/j.precisioneng.2019.05.005 Zhou, 2019, An output amplitude model of a giant magnetostrictive rotary ultrasonic machining system considering load effect, Precis. Eng., 60, 340, 10.1016/j.precisioneng.2019.07.005 Zhao, 2019, The effects of thermo-mechanical load on the vibrational characteristics of ultrasonic vibration system, Ultrasonics, 98, 7, 10.1016/j.ultras.2019.05.005 Kuang, 2014, Resonance tracking and vibration stablilization for high power ultrasonic transducers, Ultrasonics, 54, 187, 10.1016/j.ultras.2013.07.001 Baytndtr, 2003, DSP-based PLL-controlled 50-1 00 kHz 20 kW highfrequency induction heating system for surface hardening and welding applications, IEE Proc. Elec. Power Appl., 150, 365, 10.1049/ip-epa:20030096 Ben-Yaakov, 2002, Frequency tracking to maximum power of piezoelectric transformer HV converters under load variations, Pesc. Rec. - IEEE Annu. Power Electron. Spec. Conf., 2, 657 Song, 2018, Ultrasonic assisted high rotational speed diamond machining of dental glass ceramics, Int. J. Adv. Manuf. Technol., 96, 387 Han, 1998, Ultrasonically assisted and piezoelectric actuators integrated cutting tool, Jpn. J. Appl. Phys., Part 1: Regular Papers and Short Notes and Review Papers, 37, 4616, 10.1143/JJAP.37.4616 Jin, 2015, Experimental study on surface generation in vibration-assisted micro-milling of glass, Int. J. Adv. Manuf. Technol., 81, 507, 10.1007/s00170-015-7211-2 Moriwaki, 2010, Development of 2DOF ultrasonic vibration cutting device for ultraprecision elliptical vibration cutting, Key Eng. Mater., 447 448, 164, 10.4028/www.scientific.net/KEM.447-448.164 Chen, 2019, Mechanism for material removal in ultrasonic vibration helical milling of Ti–6Al–4V alloy, Int. J. Mach. Tool Manufact., 138, 1, 10.1016/j.ijmachtools.2018.11.001 Li, 2016, An experimental investigation on ultrasonic vibration-assisted grinding of SiO2f/SiO2 composites, Mater. Manuf. Process., 31, 887, 10.1080/10426914.2015.1090586 Wdowik, 2018, Measurements of surface texture parameters after ultrasonic assisted and conventional grinding of carbide and ceramic samples in selected machining conditions, Procedia CIRP, 78, 329, 10.1016/j.procir.2018.09.046 Kim, 2011, Direct machining of micro patterns on nickel alloy and mold steel by vibration assisted cutting, Int. J. Precis. Eng. Manuf., 12, 583, 10.1007/s12541-011-0075-y Joshi, 2011 Wang, 2019, Development of a new type of 2-DOF piezo-actuated pseudo-decoupled compliant mechanism for elliptical vibration machining, Micromachines, 10 Jieqiong, 2014, Tool path generation for fabricating optical freeform surfaces by non-resonant three-dimensional elliptical vibration cutting, Proc. IME C J. Mech. Eng. Sci., 228, 1208, 10.1177/0954406213502448 Silge, 2018, Design of contactlessly powered and piezoelectrically actuated tools for non-resonant vibration assisted milling, Actuators, 7, 10.3390/act7020019 Heike, 2017, Material removal mechanism in ultrasonic-assisted grinding of Al2O3by single-grain scratch test, Int. J. Adv. Manuf. Technol., 1 Tawakoli, 2011, New developments in ultrasonic-assisted grinding and dressing, IMETI 2011 - 4th international multi-conference on engineering and technological innovation, Proceedings, 1, 210 Mae, 2019, Characteristics of ultrasound device: a new technology for bone curettage and excavation, J. Exp. Orthop., 6, 10.1186/s40634-019-0203-7 Thoe, 1998, Review on ultrasonic machining, Int. J. Mach. Tool Manufact., 38, 239, 10.1016/S0890-6955(97)00036-9 Jin, 2001, Development of a practical ultrasonic vibration cutting tool system, J. Mater. Process. Technol., 113, 342, 10.1016/S0924-0136(01)00649-5 Börner, 2018, Generation of functional surfaces by using a simulation tool for surface prediction and micro structuring of cold-working steel with ultrasonic vibration assisted face milling, J. Mater. Process. Technol., 255, 749, 10.1016/j.jmatprotec.2018.01.027 Shamoto, 2009, Development of elliptical vibration cutting technology and its application to ultraprecision/Micro machining of hard/Brittle materials, Adv. Mater. Res., 69–70, 133, 10.4028/www.scientific.net/AMR.69-70.133 Shamoto, 2014 Wang, 2018, Experimental study on vibration stability in rotary ultrasonic machining of ceramic matrix composites: cutting force variation at hole entrance, Ceram. Int., 44, 14386, 10.1016/j.ceramint.2018.05.048 Xu, 2014, Elliptic vibration-assisted cutting of fibre-reinforced polymer composites: understanding the material removal mechanisms, Compos. Sci. Technol., 92, 103, 10.1016/j.compscitech.2013.12.011 Wan, 2019, Effect of vibration assistance on chatter stability in milling, Int. J. Mach. Tool Manufact., 145, 103432, 10.1016/j.ijmachtools.2019.103432 Nosouhi, 2014, Experimental and analytical study of the elliptical vibration-assisted turning process with the dynamic friction model, Proc. IME B J. Eng. Manufact., 228, 837, 10.1177/0954405413508943 Kumar, 2014, Vibration assisted conventional and advanced machining: a review, Procedia Eng., 97, 1577, 10.1016/j.proeng.2014.12.441 Kiswanto, 2019, Fundamental aspects in designing vibration assisted machining: a review, IOP Conf. Ser. Mater. Sci. Eng., 494 Lin, 2019, A new vibration device applied for two-dimensional ultrasonic polishing of biomaterials, IEEE Access, 7, 92838, 10.1109/ACCESS.2019.2927615 Brehl, 2006, Micro-structure fabrication using elliptical vibration-assisted machining (EVAM) Brehl, 2008, Review of vibration-assisted machining, Precis. Eng., 32, 153, 10.1016/j.precisioneng.2007.08.003 Ding, 2011, Dynamic surface generation modeling of two-dimensional vibration-assisted micro-end-milling, Int. J. Adv. Manuf. Technol., 53, 1075, 10.1007/s00170-010-2903-0 Shamoto, 2005, Development of 3 DOF ultrasonic vibration tool for elliptical vibration cutting of sculptured surfaces, CIRP Ann. - Manuf. Technol., 54, 321, 10.1016/S0007-8506(07)60113-9 Legrangerl, 2007 Sen Tang, 2009, Determining multiple steady-state ZCS operating points of a switch-mode contactless power transfer system, IEEE Trans. Power Electron., 24, 416, 10.1109/TPEL.2008.2007642 Kauf Bortis, 2013, Optimization of rotary transformer for high-speed applications, 2013 IEEE 14th workshop on control and modeling for power electronics, COMPEL, 2013 Wu, 2009, Development of a new rotary ultrasonic spindle for precision ultrasonically assisted grinding, Int. J. Mach. Tool Manufact., 49, 933, 10.1016/j.ijmachtools.2009.06.012 Choi, 2013, Effect of ultrasonic vibration in grinding; horn design and experiment, Int. J. Precis. Eng. Manuf., 14, 1873, 10.1007/s12541-013-0253-1 Suzuki, 2007, A micro ultrasonic grinding device with very high frequency and its application, Key Eng. Mater., 329, 45, 10.4028/www.scientific.net/KEM.329.45 Niu, 2017, Multiobjective optimization of processing parameters in longitudinal-torsion ultrasonic assisted milling of Ti-6Al-4V, Int. J. Adv. Manuf. Technol., 93, 4345, 10.1007/s00170-017-0871-3 Liu, 2017, A longitudinal-torsional composite ultrasonic vibrator with thread grooves, Ceram. Int., 43, S214, 10.1016/j.ceramint.2017.05.305 Wu, 2019, Innovative design and analysis of a longitudinal-torsional transducer with the shared node plane applied for ultrasonic assisted milling, Proc. IME C J. Mech. Eng. Sci., 233, 4128, 10.1177/0954406218797962 Zhao, 2018, Microstructure of high-performance aluminium alloy surface processed by the single-excitation same-frequency longitudinal-torsional coupled ultrasonic vibration milling, Materials, 11, 1, 10.3390/ma11101975 Zhu, 2013, Review on the development of the accessory rotary ultrasonic machining tools, Appl. Mech. Mater., 268, 1464 Gao, 2019, Development of a three-degree-of-freedom ultrasonic vibration tool holder for milling and drilling, IEEE/ASME Trans. Mechatronics., 24, 1238, 10.1109/TMECH.2019.2906904 Wang, 2019, Development of a longitudinal–torsional ultrasonic vibration-aided drilling system for drilling carbon fiber-reinforced polymer materials, Proc. IME C J. Mech. Eng. Sci., 233, 4176, 10.1177/0954406219833084 Lu, 2013, Effect of ultrasonic vibration parameters on machining performance based on tool-workpiece contact ratio, Adv. Mater. Res., 797, 332, 10.4028/www.scientific.net/AMR.797.332 Xiao, 2002, Analysis of chatter suppression in vibration cutting, Int. J. Mach. Tool Manufact., 42, 1677, 10.1016/S0890-6955(02)00077-9 Cerniway, 2001 Chen, 2018, Kinematics and tool-workpiece separation analysis of vibration assisted milling, Int. J. Mech. Sci., 136, 169, 10.1016/j.ijmecsci.2017.12.037 Sui, 2017, Feasibility study of high-speed ultrasonic vibration cutting titanium alloy, J. Mater. Process. Technol., 247, 111, 10.1016/j.jmatprotec.2017.03.017 Liu, 2008, Characteristics of ultrasonic vibration-assisted ductile mode cutting of tungsten carbide, Int. J. Adv. Manuf. Technol., 35, 833, 10.1007/s00170-006-0761-6 Jianhua, 2014, Study on effect of ultrasonic vibration on grinding force and surface quality in ultrasonic assisted micro end grinding of silica glass, Shock Vib., 2014 Zhao, 2005, Study on ultrasonic vibration grinding character of nano ZrO2 ceramics, Key Eng. Mater., 291–292, 45, 10.4028/www.scientific.net/KEM.291-292.45 Liang, 2013, Experimental study on brittle-ductile transition in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire using single diamond abrasive grain, Int. J. Mach. Tool Manufact., 71, 41, 10.1016/j.ijmachtools.2013.04.004 Wang, 2014, Study on the system matching of ultrasonic vibration assisted grinding for hard and brittle materials processing, Int. J. Mach. Tool Manufact., 77, 66, 10.1016/j.ijmachtools.2013.11.003 Zhang, 2019, Effects of tool vibration on surface integrity in rotary ultrasonic elliptical end milling of Ti - 6Al - 4V, J. Alloys Compd., 153266 Zhang, 2015, A review of machine-tool vibration and its influence upon surface generation in ultra-precision machining, Int. J. Mach. Tool Manufact., 91, 34, 10.1016/j.ijmachtools.2015.01.005 Singh, 2017, Rotary ultrasonic machining of macor ceramic: an experimental investigation and microstructure analysis, Mater. Manuf. Process., 32, 927, 10.1080/10426914.2016.1198033 Brinksmeier, 2012, Review on diamond-machining processes for the generation of functional surface structures, CIRP J. Manuf. Sci. Technol., 5, 1, 10.1016/j.cirpj.2011.10.003 Fang, 2013, Manufacturing and measurement of freeform optics, CIRP Ann. - Manuf. Technol., 62, 823, 10.1016/j.cirp.2013.05.003 Kurniawan, 2016, Micro-dimple pattern process and orthogonal cutting force analysis of elliptical vibration texturing, Int. J. Mach. Tool Manufact., 106, 127, 10.1016/j.ijmachtools.2016.03.007 Kurniawan, 2019, Surface topography analysis in three-dimensional elliptical vibration texturing (3D-EVT), Int. J. Adv. Manuf. Technol., 102, 1601, 10.1007/s00170-018-03253-1 Amini, 2016, Experimental study on effect of micro textured surfaces generated by ultrasonic vibration assisted face turning on friction and wear performance, Appl. Surf. Sci., 390, 633, 10.1016/j.apsusc.2016.07.064 Zheng, 2017, Influence of process parameters on surface topography in ultrasonic vibration- assisted end grinding of SiCp/Al composites, Int. J. Adv. Manuf. Technol., 91, 2347, 10.1007/s00170-016-9931-3 Kurniawan, 2018, Experimental and analytical study of ultrasonic elliptical vibration cutting on AISI 1045 for sustainable machining of round-shaped microgroove pattern, Int. J. Adv. Manuf. Technol., 98, 2031, 10.1007/s00170-018-2359-1 Lotfi, 2019, Wettability analysis of titanium alloy in 3D elliptical ultrasonic assisted turning, Int. J. Lightweight Mater. Manuf., 2, 235 Sajjady, 2016, Analytical and experimental study of topography of surface texture in ultrasonic vibration assisted turning, Mater. Des., 93, 311, 10.1016/j.matdes.2015.12.119 Kurniawan, 2017, Surface roughness of two-frequency elliptical vibration texturing (TFEVT) method for micro-dimple pattern process, Int. J. Mach. Tool Manufact., 116, 77, 10.1016/j.ijmachtools.2016.12.011 Li, 2018, Theoretical investigation of vertical elliptic vibration-assisted grinding (EVAG) technology, Int. J. Adv. Manuf. Technol., 94, 2315, 10.1007/s00170-017-0989-3 Yanyan, 2009, Ultraprecision surface finishing of nano-ZrO2 ceramics using two-dimensional ultrasonic assisted grinding, Int. J. Adv. Manuf. Technol., 43, 462, 10.1007/s00170-008-1732-x Peng, 2012, Characteristics of chip generation by vertical elliptic ultrasonic vibration-assisted grinding of brittle materials, Int. J. Adv. Manuf. Technol., 62, 563, 10.1007/s00170-011-3839-8 Wang, 2016, Investigation on surface formation mechanism in elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire based on fractal analysis method, Int. J. Adv. Manuf. Technol., 87, 2933, 10.1007/s00170-016-8700-7 Wang, 2015, Fractal analysis of surface topography in ground monocrystal sapphire, Appl. Surf. Sci., 327, 182, 10.1016/j.apsusc.2014.11.093 Chen, 2019, Modelling and experimental investigation on textured surface generation in vibration-assisted micro-milling, J. Mater. Process. Technol., 266, 339, 10.1016/j.jmatprotec.2018.11.011 Zheng, 2019, Modulation of surface wettability by vibration assisted milling, Precis. Eng., 55, 179, 10.1016/j.precisioneng.2018.09.006 Chen, 2018, Surface texture formation by non-resonant vibration assisted micro milling, J. Micromech. Microeng., 28, 10.1088/1361-6439/aaa06f Tao, 2016, Feasibility study on ultrasonic vibration assisted milling for Squamous surface, Procedia CIRP, 42, 847, 10.1016/j.procir.2016.03.006 Li, 2019, Edge surface grinding of CFRP composites using rotary ultrasonic machining: comparison of two machining methods, Int. J. Adv. Manuf. Technol., 100, 3237, 10.1007/s00170-018-2901-1 Geng, 2019, Experimental study on drilling load and hole quality during rotary ultrasonic helical machining of small-diameter CFRP holes, J. Mater. Process. Technol., 270, 195, 10.1016/j.jmatprotec.2019.03.001 Cong, 2014, Preliminary study on rotary ultrasonic machining of CFRP/Ti stacks, Ultrasonics, 54, 1594, 10.1016/j.ultras.2014.03.012 Ding, 2014, Experimental studies on drilling tool load and machining quality of C/SiC composites in rotary ultrasonic machining, J. Mater. Process. Technol., 214, 2900, 10.1016/j.jmatprotec.2014.06.015 Wang, 2019, Scratching-induced surface characteristics and material removal mechanisms in rotary ultrasonic surface machining of CFRP, Ultrasonics, 97, 19, 10.1016/j.ultras.2019.04.004 Shamoto, 1999, Ultraprecision diamond cutting of hardened steel by applying elliptical vibration cutting, CIRP Ann. - Manuf. Technol., 48, 441, 10.1016/S0007-8506(07)63222-3 Suzuki, 2003, Ultraprecision micromachining of hardened steel by applying ultrasonic elliptical vibration cutting, MHS 2003, 221 Du Kim, 1994, A study of the ultrasonic-vibration cutting of carbon-fiber reinforced plastics, J. Mater. Process. Technol., 43, 259, 10.1016/0924-0136(94)90025-6 Zhong, 2005, Diamond turning of a metal matrix composite with ultrasonic vibrations, Mater. Manuf. Process., 20, 727, 10.1081/AMP-200055124 Yuan, 2020, Freeform surface fabrication on hardened steel by double frequency vibration cutting, J. Mater. Process. Technol., 275 Zhang, 2019, Frictional properties of surface textures fabricated on hardened steel by elliptical vibration diamond cutting, Precis. Eng., 59, 66, 10.1016/j.precisioneng.2019.06.001 Drahansky, 2016, 13 Razavi, 2012, Analytical modeling and experimental investigation of ultrasonic-vibration assisted oblique turning, part III: experimental investigation, Int. J. Mech. Sci., 63, 26, 10.1016/j.ijmecsci.2012.06.007 Yuan, 2019, Fabrication of hierarchical freeform surfaces by 2D compliant vibration-assisted cutting, Int. J. Mech. Sci., 152, 454, 10.1016/j.ijmecsci.2018.12.051 Guo, 2013, Development of a tertiary motion generator for elliptical vibration texturing, Precis. Eng., 37, 364, 10.1016/j.precisioneng.2012.10.005 Nategh, 2012, Analytical modeling and experimental investigation of ultrasonic-vibration assisted oblique turning, part I: kinematics analysis, Int. J. Mech. Sci., 63, 1, 10.1016/j.ijmecsci.2012.04.007 Zou, 2015, Experimental investigation of ultrasonic vibration assisted turning of 304 austenitic stainless steel, Shock Vib., 2015 Sarvi Hampa, 2014, The role of dry Aero-acoustical lubrication and material softening in ultrasonically assisted milling of difficult-to-cut AISI 304 steels, Trans. Indian Inst. Met., 68, 43, 10.1007/s12666-014-0429-0 Suárez, 2016, Effects of ultrasonics-assisted face milling on surface integrity and fatigue life of Ni-alloy 718, J. Mater. Eng. Perform., 25, 5076, 10.1007/s11665-016-2343-6 Ni, 2019, Comparative investigation of tool wear mechanism and corresponding machined surface characterization in feed-direction ultrasonic vibration assisted milling of Ti–6Al–4V from dynamic view, Wear, 436 Lian, 2013, Experimental research of Al6061 on ultrasonic vibration assisted micro-milling, Procedia CIRP, 6, 561, 10.1016/j.procir.2013.03.056 Li, 2014, Study of carbon/carbon composite material surface morphology on ultrasonic vibration assisted milling, Key Eng. Mater., 579–580, 181, 10.1016/j.msea.2014.04.083 Guo, 2019, A novel realization of diffractive optically variable devices using ultrasonic modulation cutting, CIRP Ann., 68, 575, 10.1016/j.cirp.2019.04.014 Zhu, 2019, Investigations of micro-textured surface generation mechanism and tribological properties in ultrasonic vibration-assisted milling of Ti–6Al–4V, Precis. Eng., 57, 229, 10.1016/j.precisioneng.2019.04.010 Yang, 2019, The grinding force modeling and experimental study of ZrO 2 ceramic materials in ultrasonic vibration assisted grinding, Ceram. Int., 45, 8873, 10.1016/j.ceramint.2019.01.216 yi Zhao, 2018, Surface roughness prediction model in ultrasonic vibration assisted grinding of BK7 optical glass, J. Cent. S. Univ., 25, 277, 10.1007/s11771-018-3736-5 Zhang, 2018, Modeling and simulation of the distribution of undeformed chip thicknesses in surface grinding, Int. J. Mach. Tool Manufact., 127, 14, 10.1016/j.ijmachtools.2018.01.002 Wang, 2018, Research on surface generating model in ultrasonic vibration-assisted grinding, Int. J. Adv. Manuf. Technol., 96, 3429, 10.1007/s00170-018-1744-0 Yan, 2006, Study on material removal mechanism of fine-crystalline ZrO 2 ceramics under two dimensional ultrasonic grinding, Mater. Sci. Forum, 532–533, 532, 10.4028/www.scientific.net/MSF.532-533.532 Liang, 2010, Elliptical ultrasonic assisted grinding (EUAG) of monocrystal sapphire - surface formation characteristics, Adv. Mater. Res., 126–128, 367, 10.4028/www.scientific.net/AMR.126-128.367 Zha, 2018, Material removal mechanism in rotary ultrasonic machining of high-volume fraction SiCp/Al composites, Int. J. Adv. Manuf. Technol., 97, 2099, 10.1007/s00170-018-2075-x Brinksmeier, 1985, X-ray stress measurement - a tool for the study and layout of machining processes, CIRP Ann. - Manuf. Technol., 34, 485, 10.1016/S0007-8506(07)61817-4 Ruud, 1982, A review of selected non-destructive methods for residual stress measurement, NDT E Int., 15, 15, 10.1016/0308-9126(82)90083-9 EL-Khabeery, 1989, 29 Muñoz-Tabares, 2011, Microstructural changes in ground 3Y-TZP and their effect on mechanical properties, Acta Mater., 59, 6670, 10.1016/j.actamat.2011.07.024 Yang, 2011, The machined surface residual stress of nano-ceramics with two-dimensional ultrasonic vibration assisted grinding, Key Eng. Mater., 455, 637 Zhao, 2014, Influence of grinding parameters on residual stress of nano-ZrO2 ceramics, Adv. Mater. Res., 1027, 119, 10.4028/www.scientific.net/AMR.1027.119 Zhang, 2003, Grinding induced damage in ceramics, J. Mater. Process. Technol., 132, 353, 10.1016/S0924-0136(02)00952-4 Teimouri, 2019, Optimization of residual stress field in ultrasonic assisted burnishing process, Int. J. Lightweight Mater. Manuf. Hu, 2011, Simulation of residual stress in ultrasonic vibration assisted micro-milling, Adv. Mater. Res., 188, 381, 10.4028/www.scientific.net/AMR.188.381 Dai, 2019, A numerical study on subsurface quality and material removal during ultrasonic vibration assisted cutting of monocrystalline silicon by molecular dynamics simulation, Mater. Res. Express, 6 Zhang, 2008, Molecular dynamics simulation of subsurface deformed layers in AFM-based nanometric cutting process, Appl. Surf. Sci., 254, 4774, 10.1016/j.apsusc.2008.01.096 Zheng, 2018, Friction and wear on titanium alloy surface machined by ultrasonic vibration-assisted milling, J. Braz. Soc. Mech. Sci. Eng., 40, 1, 10.1007/s40430-018-1336-9 Xing, 2013, Tribological properties of ultrasonic vibration assisted milling aluminium alloy surfaces, Procedia CIRP, 6, 539, 10.1016/j.procir.2013.03.008 Ni, 2020, Investigation on machining characteristics of TC4 alloy by simultaneous application of ultrasonic vibration assisted milling (UVAM) and economical-environmental MQL technology, J. Mater. Process. Technol., 278, 116518, 10.1016/j.jmatprotec.2019.116518 Yang, 2016, Friction and wear performance of titanium alloy against tungsten carbide lubricated with phosphate ester, Tribol. Int., 95, 27, 10.1016/j.triboint.2015.10.031 Chen, 2019, Effect of stress wave between adjacent asperities interaction on subsurface damage of optical glass in precision grinding, Materials, 12 Belkhir, 2009, Surface behavior during abrasive grain action in the glass lapping process, Appl. Surf. Sci., 255, 7951, 10.1016/j.apsusc.2009.04.178 Ahmed, 2012, Rotary ultrasonic machining of alumina dental ceramics: a preliminary experimental studyon surface and subsurface damages, J. Manuf. Sci. Eng., 134, 10.1115/1.4007711 Wang, 2018, Damage formation and suppression in rotary ultrasonic machining of hard and brittle materials: a critical review, Ceram. Int., 44, 1227, 10.1016/j.ceramint.2017.10.050 Lv, 2013, Relationship between subsurface damage and surface roughness of glass BK7 in rotary ultrasonic machining and conventional grinding processes, Int. J. Adv. Manuf. Technol., 67, 613, 10.1007/s00170-012-4509-1 Wang, 2016, A model for prediction of subsurface damage in rotary ultrasonic face milling of optical K9 glass, Int. J. Adv. Manuf. Technol., 83, 347, 10.1007/s00170-015-7567-3 Baraheni, 2019, Predicting subsurface damage in silicon nitride ceramics subjected to rotary ultrasonic assisted face grinding, Ceram. Int., 45, 10086, 10.1016/j.ceramint.2019.02.055 Lv, 2013, Experimental investigations on subsurface damage in rotary ultrasonic machining of glass BK7, Mach. Sci. Technol., 17, 443, 10.1080/10910344.2013.806114 Lakhdari, 2017, Surface and subsurface damage in Zerodur® glass ceramic during ultrasonic assisted grinding, Int. J. Adv. Manuf. Technol., 90, 1993, 10.1007/s00170-016-9551-y Dai, 2016, The effect of tool geometry on subsurface damage and material removal in nanometric cutting single-crystal silicon by a molecular dynamics simulation, Appl. Phys. Mater. Sci. Process, 122, 1, 10.1007/s00339-016-0319-x Zhu, 2011, Molecular dynamics study on friction due to ploughing and adhesion in nanometric scratching process, Tribol. Lett., 41, 41, 10.1007/s11249-010-9681-6 Zhu, 2017, A study on the surface quality and brittle-ductile transition during the elliptical vibration-assisted nanocutting process on monocrystalline silicon via molecular dynamic simulations, RSC Adv., 7, 4179, 10.1039/C6RA25426H Nath, 2009, Machinability study of tungsten carbide using PCD tools under ultrasonic elliptical vibration cutting, Int. J. Mach. Tool Manufact., 49, 1089, 10.1016/j.ijmachtools.2009.07.006 Brecher, 2010, New systematic and time-saving procedure to design cup grinding wheels for the application of ultrasonic-assisted grinding, Int. J. Adv. Manuf. Technol., 47, 153, 10.1007/s00170-009-2204-7 Tawakoli, 2008, Influence of ultrasonic vibrations on dry grinding of soft steel, Int. J. Mach. Tool Manufact., 48, 1585, 10.1016/j.ijmachtools.2008.05.010 Ibrahim, 2017, An experimental investigation of cutting temperature and tool wear in 2 dimensional ultrasonic vibrations assisted micro-milling, MATEC Web of Conf., 95, 2, 10.1051/matecconf/20179507005 Yu, 2012, Prediction of tool wear in micro USM, CIRP Ann. - Manuf. Technol., 61, 227, 10.1016/j.cirp.2012.03.060 Tawakoli, 2009, Effects of vibration-assisted grinding on wear behavior of vitrified bond Al2O3 wheel, Adv. Mater. Res., 76–78, 21, 10.4028/www.scientific.net/AMR.76-78.21 Li, 2018, Ultrasonic vibration mill-grinding of single-crystal silicon carbide for pressure sensor diaphragms, Ceram. Int., 44, 3107, 10.1016/j.ceramint.2017.11.077 Janghorbanian, 2013, Effect of cutting speed on tool life in ultrasonic-assisted milling process, Proc. IME B J. Eng. Manufact., 227, 1157, 10.1177/0954405413483722 Wang, 2018, Tool wear mechanism and its relation to material removal in ultrasonic machining, Wear, 394–395, 96, 10.1016/j.wear.2017.10.010 Wang, 2018, Effects of abrasive material and particle shape on machining performance in micro ultrasonic machining, Precis. Eng., 51, 373, 10.1016/j.precisioneng.2017.09.008 Lotfi, 2018, 3D FEM simulation of tool wear in ultrasonic assisted rotary turning, Ultrasonics, 88, 106, 10.1016/j.ultras.2018.03.013 Ding, 2014, Wear of diamond grinding wheel in ultrasonic vibration-assisted grinding of silicon carbide, Int. J. Adv. Manuf. Technol., 71, 1929, 10.1007/s00170-014-5625-x Xiang, 2018, Abrasive wear of a single CBN grain in ultrasonic-assisted high-speed grinding, Int. J. Adv. Manuf. Technol., 98, 67, 10.1007/s00170-017-0409-8 Kuo, 2012, Rotary ultrasonic-assisted milling of brittle materials, Trans. Nonferrous Metals Soc. China, 22, s793, 10.1016/S1003-6326(12)61806-8 Dai, 2017, Influence of grain wear on material removal behavior during grinding nickel-based superalloy with a single diamond grain, Int. J. Mach. Tool Manufact., 113, 49, 10.1016/j.ijmachtools.2016.12.001 Ding, 2017, Study on surface/subsurface breakage in ultrasonic assisted grinding of C/SiC composites, Int. J. Adv. Manuf. Technol., 91, 3095, 10.1007/s00170-017-0012-z Ding, 2018, Investigation on chatter stability of thin-walled parts considering its flexibility based on finite element analysis, Int. J. Adv. Manuf. Technol., 94, 3173, 10.1007/s00170-016-9471-x Dong, 2018, Stability of lateral vibration in robotic rotary ultrasonic drilling, Int. J. Mech. Sci., 145, 346, 10.1016/j.ijmecsci.2018.07.004 Quintana, 2011, Chatter in machining processes: a review, Int. J. Mach. Tool Manufact., 51, 363, 10.1016/j.ijmachtools.2011.01.001 Zhu, 2019, Investigation of mechanics and machinability of titanium alloy thin-walled parts by CBN grinding head, Int. J. Adv. Manuf. Technol., 100, 2537, 10.1007/s00170-018-2795-y Sun, 2018, Modeling and predicting ground surface topography on grinding chatter, Procedia CIRP, 71, 364, 10.1016/j.procir.2018.05.042 Zhang, 2017, Effect of machining parameters on the stability of separated and unseparated ultrasonic vibration of feed direction assisted milling, J. Mech. Sci. Technol., 31, 851, 10.1007/s12206-017-0137-x Gao, 2020, Chatter stability of synchronized elliptical vibration assisted milling, CIRP J. Manuf. Sci. Technol., 28, 76, 10.1016/j.cirpj.2019.11.006 Sun, 2020, Investigation on chatter stability of robotic rotary ultrasonic milling, Robot. Comput. Integrated Manuf., 63, 101911, 10.1016/j.rcim.2019.101911 Peng, 2020, Chatter stability and precision during high-speed ultrasonic vibration cutting of a thin-walled titanium cylinder, Chin. J. Aeronaut., 10.1016/j.cja.2020.02.011 Gao, 2015, Analysis of cutting stability in vibration assisted machining using an analytical predictive force model, Procedia CIRP, 31, 515, 10.1016/j.procir.2015.03.014 Zhang, 2018, Study on the separation effect of high-speed ultrasonic vibration cutting, Ultrasonics, 87, 166, 10.1016/j.ultras.2018.02.016 Ma, 2011, Analysis of regenerative chatter suppression with adding the ultrasonic elliptical vibration on the cutting tool, Precis. Eng., 35, 329, 10.1016/j.precisioneng.2010.12.004 Tabatabaei, 2013, Analysis of ultrasonic assisted machining (UAM) on regenerative chatter in turning, J. Mater. Process. Technol., 213, 418, 10.1016/j.jmatprotec.2012.09.018 Chang, 2010, Burr height model for vibration assisted drilling of aluminium 6061-T6, Precis. Eng., 34, 369, 10.1016/j.precisioneng.2009.09.002 Segreto, 2018, Full-volume ultrasonic technique for 3D thickness reconstruction of CFRP Aeronautical components, Procedia CIRP, 67, 434, 10.1016/j.procir.2017.12.238 Ding, 2011, Investigation of the size effect on burr formation in two-dimensional vibration-assisted micro end milling, Proc. IME B J. Eng. Manufact., 225, 2032, 10.1177/0954405411400820 Rasidi, 2015, An investigation of cutting mechanics in 2 dimensional Ultrasonic Vibration assisted milling toward chip thickness and chip formation, IOP Conf. Ser. Mater. Sci. Eng., 100, 10.1088/1757-899X/100/1/012057 Chen, 2018, Burr reduction mechanism in vibration-assisted micro milling, Manuf. Lett., 16, 6, 10.1016/j.mfglet.2018.02.015 Uhlmann, 1998, Surface formation in creep feed grinding of advanced ceramics with and without ultrasonic assistance, CIRP Ann. - Manuf. Technol., 47, 249, 10.1016/S0007-8506(07)62828-5 Pei, 1995, Plastic flow in rotary ultrasonic machining of ceramics, J. Mater. Process. Technol., 48, 771, 10.1016/0924-0136(94)01720-L Wang, 2016, Reduction of edge chipping in rotary ultrasonic machining by using step drill: a feasibility study, Int. J. Adv. Manuf. Technol., 87, 2809, 10.1007/s00170-016-8655-8 Tesfay, 2013, An experimental study on edge chipping in ultrasonic vibration assisted grinding of bio-ceramic materials, ASME 2013 international manufacturing science and engineering conference collocated with the 41st north American manufacturing research conference, MSEC, 1, 1 Chen, 2006, Investigations on edge chipping in rotary ultrasonic machining using finite element analysis, Mater. Sci. Forum, 532–533, 969, 10.4028/www.scientific.net/MSF.532-533.969 Denkena, 2010, Advanced microstructures and its production through cutting and grinding, CIRP Ann. - Manuf. Technol., 59, 67, 10.1016/j.cirp.2010.03.066 Wang, 2010, A theoretical and experimental investigation of the tool-tip vibration and its influence upon surface generation in single-point diamond turning, Int. J. Mach. Tool Manufact., 50, 241, 10.1016/j.ijmachtools.2009.12.003 Xu, 2014, Fabrication of hybrid micro/nano-textured surfaces using rotary ultrasonic machining with one-point diamond tool, Int. J. Mach. Tool Manufact., 86, 12, 10.1016/j.ijmachtools.2014.06.005 Xu, 2017, Development of a novel 2D rotary ultrasonic texturing technique for fabricating tailored structures, Int. J. Adv. Manuf. Technol., 89, 1161, 10.1007/s00170-016-9133-z Li, 2018, Surface characterization of zirconia ceramics in ultrasonic vibration-assisted grinding, J. Braz. Soc. Mech. Sci. Eng., 40, 10.1007/s40430-018-1296-0 Xu, 2013, Surface textures fabrication on zirconia ceramics by 3D ultrasonic vibration assisted slant feed grinding, Adv. Mater. Res., 797, 326, 10.4028/www.scientific.net/AMR.797.326 Tao, 2017, Feed-direction ultrasonic vibration−assisted milling surface texture formation, Mater. Manuf. Process., 32, 193, 10.1080/10426914.2016.1198029 Zhu, 2016, A novel diamond micro-/nano-machining process for the generation of hierarchical micro-/nano-structures, J. Micromech. Microeng., 26, 10.1088/0960-1317/26/3/035009 Zhang, 2019, Advances in ultra-precision machining of micro-structured functional surfaces and their typical applications, Int. J. Mach. Tool Manufact., 142, 16, 10.1016/j.ijmachtools.2019.04.009 Guo, 2013, An analysis of the surface generation mechanics of the elliptical vibration texturing process, Int. J. Mach. Tool Manufact., 64, 85, 10.1016/j.ijmachtools.2012.08.003 Liu, 2019, Influence of tool material and geometry on micro-textured surface in radial ultrasonic vibration-assisted turning, Int. J. Mech. Sci., 152, 545, 10.1016/j.ijmecsci.2019.01.027 Zheng, 2019, Modulation of surface wettability by vibration assisted milling, Precis. Eng., 55, 179, 10.1016/j.precisioneng.2018.09.006 Zhou Errata, 2016, Surface generation of freeform surfaces in diamond turning by applying double-frequency elliptical vibration cutting, Int. J. Mach. Tool Manufact., 104, 45, 10.1016/j.ijmachtools.2015.11.012 Zhang, 2014, Microstructuring of surfaces by two-stage vibration-assisted turning, Procedia CIRP, 14, 136, 10.1016/j.procir.2014.03.026 Ning, 2016, Microstructures and mechanical properties of Fe-Cr stainless steel parts fabricated by ultrasonic vibration-assisted laser engineered net shaping process, Mater. Lett., 179, 61, 10.1016/j.matlet.2016.05.055 Wu, 2015, Dilution characteristics of ultrasonic assisted laser clad yttria-stabilized zirconia coating, Mater. Lett., 141, 207, 10.1016/j.matlet.2014.11.058 Yu, 2019, Effects of the ultrasonic vibration field on polishing process of nickel-based alloy Inconel718, J. Mater. Process. Technol., 273 Yu, 2018, Material removal mechanism of two-dimensional ultrasonic vibration assisted polishing Inconel718 nickel-based alloy, Int. J. Adv. Manuf. Technol., 96, 657, 10.1007/s00170-018-1609-6