Development behaviour of irradiated microstructures

Microelectronic Engineering - Tập 35 - Trang 409-412 - 1997
J. Zanghellini1, A. El-Kholi1, J. Mohr1
1Forschungszentrum Karlsruhe GmbH, Institut für Mikrostrukturtechnik Postfach 3640, 76021 Karlsruhe, Germany

Tài liệu tham khảo

Bacher, 1995, The LIGA Technique and Its Potential for Microsystems - A Survey, IEEE Transactions On Industrial Electronics, Vol.42, 10.1109/41.464604 El-Kholi, 1994, Ultrasonic supported development of irradiated micro-structures, Microelectronic Engineering, 23, 219, 10.1016/0167-9317(94)90141-4 Tu, 1977, A multi-phase Stefan problem describing the swelling and the dissolution of glassy polymer