Thin-film boron-doped polycrystalline silicon70%-germanium30% for thermopiles

Sensors and Actuators A: Physical - Tập 53 - Trang 325-329 - 1996
P Van Gerwen1, T Slater2, J.B Chévrier1, K Baert1, R Mertens1
1IMEC, MAP MS-division, Kapeldreef 75, 3001 Leuven, Belgium
2Wildcat Micromachining, 1032 Irving Box 227, San Francisco, CA 94122, USA

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