Ion implantation and annealing of crystalline oxides

Materials Science Reports - Tập 4 - Trang 41-146 - 1989
C.W. White, C.J. McHargue1, P.S. Sklad1, L.A. Boatner1
1Oak Ridge National Laboratory, Oak Ridge, TN 37831, USA

Tài liệu tham khảo

1970 1973 1976 1980, 47 1981, 182/183 1983, 209/210 1985, 7/8 1987, 19/20 1989, 39 1980, Vol. 18 1982 1984 1982, 64/65 1984, 1 1986, 97 1988, 32 1987 1984 Perez, 1987, 156 Perez, 1976, Nucl. Instr. Methods, 132, 219, 10.1016/0029-554X(76)90738-2 Evans, 1976, 265 Luera, 1976, 285 Arnold, 1974, Appl. Phys. Letters, 25, 540, 10.1063/1.1655301 Naguib, 1975, Radiation Effects, 25, 1, 10.1080/00337577508242047 Kelly, 1981, Nucl. Instr. Methods, 182/183, 351, 10.1016/0029-554X(81)90709-6 Krefft, 1978, J. Appl. Phys., 49, 2725, 10.1063/1.325194 Naramoto, 1984, J. Appl. Phys., 54, 683, 10.1063/1.332076 White, 1988, Nucl. Instr. Methods B, 32, 11, 10.1016/0168-583X(88)90172-3 Ohkubo, 1986, J. Appl. Phys., 60, 1325, 10.1063/1.337305 McHargue, 1987, Nucl. Instr. Methods B, 19/20, 797, 10.1016/S0168-583X(87)80160-X Burnett, 1984, J. Mater. Sci., 19, 3524, 10.1007/BF02396926 Goetz, 1987, 412 Buchal, 1987, J. Mater. Res., 2, 222, 10.1557/JMR.1987.0222 Matzke, 1988, Nucl. Instr. Methods B, 32, 455, 10.1016/0168-583X(88)90256-X Venkatessan, 1987, 301 1982 1978 1986 1984 1979 1986 1986 Sklad, 1985, 276 Fisher, 1985, 182 Matzke, 1982, Radiation Effects, 64, 3, 10.1080/00337578208222984 McHargue, 1986, Nucl. Instr. Methods B, 16, 212, 10.1016/0168-583X(86)90016-9 McHargue, 1986, Intern. Met. Rev., 31, 49, 10.1179/095066086790324311 Pells, 1983, Radiation Effects, 74, 181, 10.1080/00337578308218411 Sibley, 1984, Nucl. Instr. Methods B, 1, 419, 10.1016/0168-583X(84)90102-2 Sibley, 1988, Nucl. Instr. Methods B, 32, 194, 10.1016/0168-583X(88)90208-X Vodakov, 1973, 508 Matzke, 1966, Can. J. Phys., 44, 995, 10.1139/p66-083 Spitznagel, 1986, Nucl. Instr. Methods B, 16, 237, 10.1016/0168-583X(86)90019-4 Coulter, 1980, J. Nucl. Mater., 88, 249, 10.1016/0022-3115(80)90280-9 Parkin, 1981, J. Nucl. Mater., 101, 261, 10.1016/0022-3115(81)90169-0 Auner, 1983, Thin Solid Films, 107, 191, 10.1016/0040-6090(83)90021-4 Krefft, 1975, 2247 Jech, 1969, J. Phys. Chem. Solids, 30, 465, 10.1016/0022-3697(69)90001-8 Naguib, 1973, J. Mater. Sci., 8, 1633, 10.1007/BF00754899 Drigo, 1977, Radiation Effects, 33, 161, 10.1080/00337577708233100 Canera, 1980, Radiation Effects, 49, 29, 10.1080/00337578008243062 Turos, 1981, Phys. Stat. Sol., 64a, 565 Rechtin, 1979, Radiation Effects, 42, 129, 10.1080/00337577908209130 McHargue, 1985, Mater. Sci. Eng., 69, 123, 10.1016/0025-5416(85)90382-9 White, 1985, Nucl. Instr. Methods B, 7/8, 473, 10.1016/0168-583X(85)90415-X McHargue, 1983, 451 Burnett, 1986, Radiation Effects, 97, 283, 10.1080/00337578608226019 McHargue, 1987, Nucl. Instr. Methods B, 19/20, 813, 10.1016/S0168-583X(87)80163-5 Burnett, 1984, 669 Mouritz, 1987, Nucl. Instr. Methods B, 19/20, 805, 10.1016/S0168-583X(87)80161-1 Lee, 1985, Phil. Mag., 51, 639, 10.1080/01418618508245279 Sklad, 1987, 1073 White, 1986, 60, 337 Clausen, 1985, 41, 381 Schaper, 1984, Thermochim. Acta, 77, 383, 10.1016/0040-6031(84)87077-X Wilson, 1980, J. Solid State Chem., 34, 315, 10.1016/0022-4596(80)90429-6 Yoldas, 1975, Ceram. Bull., 54, 286 Steines, 1971, J. Am. Ceram. Soc., 54, 412, 10.1111/j.1151-2916.1971.tb12335.x Tucker, 1984, 31, 337 Csepregi, 1978, J. Appl. Phys., 49, 3906, 10.1063/1.325397 Olson, 1988, Mater. Sci. Rept., 3, 1, 10.1016/S0920-2307(88)80005-7 Campisano, 1980, Appl. Phys. Letters, 37, 170, 10.1063/1.91812 Campisano, 1980, Appl. Phys. Letters, 37, 719, 10.1063/1.92057 Williams, 1981, Nucl. Instr. Methods, 182/183, 289 Naramoto, 1983, Nucl. Instr. Methods, 209/210, 1159, 10.1016/0167-5087(83)90934-1 Farlow, 1984, 27, 395 G.C. Farlow, C.W. White, P.S. Sklad and C.J. McHargue, in preparation. Farlow, 1985, Nucl. Instr. Methods B, 7/8, 541, 10.1016/0168-583X(85)90429-X Burnett, 1984, J. Mater. Sci., 19, 845, 10.1007/BF00540455 Primak, 1963, J. Appl. Phys., 34, 3630, 10.1063/1.1729275 Primak, 1966, J. Appl. Phys., 37, 2287, 10.1063/1.1708805 Primak, 1976, J. Nucl. Mater., 63, 313, 10.1016/0022-3115(76)90344-5 Gruen, 1976, J. Chem. Phys., 65, 363, 10.1063/1.432776 Mouritz, 1987 Hioki, 1985, Nucl. Instr. Methods B, 7/8, 521, 10.1016/0168-583X(85)90425-2 Appleton, 1984, Nucl. Instr. Methods B, 1, 167, 10.1016/0168-583X(84)90064-8 White, 1984, 24, 163 Farlow, 1986, 60, 387 McHargue, 1985, Nucl. Instr. Methods B, 10/11, 569, 10.1016/0168-583X(85)90310-6 Ohkubo, 1987, J. Appl. Phys., 62, 3069, 10.1063/1.339351 Hioki, 1986, J. Mater. Sci., 21, 1321, 10.1007/BF00553270 Farlow, 1986, Radiation Effects, 97, 257, 10.1080/00337578608226016 Kelly, 1965, Acta Metall., 13, 169, 10.1016/0001-6160(65)90193-8 Kelly, 1965, J. Nucl. Mater., 17, 179, 10.1016/0022-3115(65)90037-1 Burnett, 1985, J. Mater. Sci., 20, 4624, 10.1007/BF00559353 McHargue, 1987, Nucl. Instr. Methods B, 19/20, 809, 10.1016/S0168-583X(87)80162-3 1964 Sklad, 1987, 146 Perez, 1983, Phys. Rev. B, 28, 1227, 10.1103/PhysRevB.28.1227 Kowalski, 1983, Nucl. Instr. Methods, 209/210, 1145, 10.1016/0167-5087(83)90932-8 Guermazi, 1983, Mater. Res. Bull., 18, 529, 10.1016/0025-5408(83)90209-X McHargue, 1988, 100, 119 Bourdillon, 1986, J. Mater. Sci., 21, 1545, 10.1007/BF01114707 Bull, 1988 Sklad, 1989, 138, 119 Sawicka, 1981, Vol. 25, 139 Greenwood, 1971, Mössbauer Spectroscopy, 249 Rossiter, 1965, J. Phys. Chem. Solids, 26, 775, 10.1016/0022-3697(65)90032-6 Janet, 1970, Bull. Soc. Fr. Mineral. Cristallogr., 93, 213 van Diepen, 1978, Solid State Commun., 27, 121, 10.1016/0038-1098(78)90814-1 McHargue, 1989, 245 Ringwood, 1979, Nature, 278, 219, 10.1038/278219a0 Ringwood, 1979, Geochem. J., 13, 141, 10.2343/geochemj.13.141 White, 1987, 74, 357 White, 1987, 93, 11 Rankin, 1988, Nucl. Instr. Methods B, 32, 28, 10.1016/0168-583X(88)90174-7 Rankin, 1988, 100, 453 Rankin, 1988, 207 D.F. Mullica, D.A. Grossie and L.A. Boatner, Determination of the Structure of Synthetic Perovskite CaTiO3 by X-Ray Diffraction, in preparation. Narayan, 1983, J. Vacuum Sci. Technol. B, 1, 871, 10.1116/1.582708 Appleton, 1986, J. Mater. Res., 1, 104, 10.1557/JMR.1986.0104 Poker, 1987, 93, 293 Poker, 1989, J. Mater. Res., 4, 412, 10.1557/JMR.1989.0412 Ashley, 1987, 835, 113 Ashley, 1989, J. Lighwave Technol., 7, 855, 10.1109/50.19126 J. Rankin, L.A. Boatner, J.C. McCallum and C.W. White, unpublished results. Sonder, 1988, J. Appl. Phys., 65, 1140, 10.1063/1.341875 Perez, 1984, Nucl. Instr. Methods B, 1, 621, 10.1016/0168-583X(84)90134-4 Evans, 1972, Phys. Rev. B, 6, 2453, 10.1103/PhysRevB.6.2453 Crawford, 1973, J. Appl. Phys., 44, 385, 10.1063/1.1661892 Evans, 1974, Phys. Rev. B, 9, 5222, 10.1103/PhysRevB.9.5222 Krefft, 1977, J. Vacuum Sci. Technol., 14, 533, 10.1116/1.569301 Krefft, 1980, Radiation Effects, 49, 127, 10.1080/00337578008243080 Perez, 1981, Nucl. Instr. Methods, 182/183, 747, 10.1016/0029-554X(81)90805-3 Perez, 1983, Nucl. Instr. Methods, 209/210, 281, 10.1016/0167-5087(83)90812-8 Perez, 1982, 159 Treilleux, 1978, Phys. Stat. Sol., 48a, 425, 10.1002/pssa.2210480219 Matzke, 1982, Radiation Effects, 65, 241, 10.1080/00337578208216811 Matzke, 1981, J. Phys. C, 14, 3333, 10.1088/0022-3719/14/23/011 Matzke, 1971, Phys. Stat. Sol., 8a, 90 Burnett, 1984, Vol. 75, 789 Perez, 1982, Radiation Effects, 64, 199, 10.1080/00337578208223014 Perez, 1980, Radiation Effects, 52, 127, 10.1080/00337578008210024 Marichy, 1979, Phys. Stat. Sol., 92b, 221, 10.1002/pssb.2220920125 Marsh, 1975, 471 Matzke, 1970, Phys. Stat. Sol., 1a, 469, 10.1002/pssa.19700010312 Marsh, 1970, Radiation Effects, 6, 301, 10.1080/00337577008236310 Choyke, 1971, Phys. Rev. B, 4, 1843, 10.1103/PhysRevB.4.1843 Hart, 1971, Radiation Effects, 9, 261, 10.1080/00337577108231058 Addamiano, 1972, J. Electrochem. Soc., 119, 1355, 10.1149/1.2403997 Patrick, 1972, Phys. Rev. B, 5, 3253, 10.1103/PhysRevB.5.3253 1972, J. Phys. Chem. Solids, 34, 565 Makarov, 1972, Soviet Phys. Solid State, 13, 1974 Campbell, 1975, 291 Thompson, 1976, Can. J. Phys., 54, 626, 10.1139/p76-068 Wright, 1976, J. Nucl. Mater., 63, 415, 10.1016/0022-3115(76)90358-5 Wright, 1977, Radiation Effects, 33, 133, 10.1080/00337577708233096 Gruen, 1976, J. Chem. Phys., 64, 5000, 10.1063/1.432151 Makarov, 1979, Appl. Phys. Letters, 35, 922, 10.1063/1.91006 Roberts, 1982, 136 McHargue, 1982, 303 Williams, 1983, Nucl. Instr. Methods, 209/210, 317, 10.1016/0167-5087(83)90818-9 Bohn, 1987, J. Mater. Res., 2, 107, 10.1557/JMR.1987.0107 Appleton, 1977, 80 McHargue, 1987, 223 McHargue, 1988, 359 Lawn, 1984, J. Mater. Sci., 19, 4061, 10.1007/BF00980772 EerNisse, 1971, Appl. Phys. Letters, 18, 581, 10.1063/1.1653549 H. Doi, private communication (1987). Burnett, 1984 EerNisse, 1977, J. Appl. Phys., 48, 3337, 10.1063/1.324217 Oliver, 1987, Thin Solid Films, 153, 185, 10.1016/0040-6090(87)90181-7 McHargue, 1986, 255 Burnett, 1984, 27, 401 Legg, 1985, Nucl. Instr. Methods B, 7/8, 535, 10.1016/0168-583X(85)90428-8 Burnett, 1986, Ceram. Bull., 65, 1393 McHargue, 1986, Vol. 75, 803 Roberts, 1986, J. Mater. Sci., 21, 457, 10.1007/BF01145509 C.J. McHargue, M.E. O'Hern, C.W. White and M.B. Lewis, Mater. Sci. Eng., in press. Palmquist, 1962, Arch. Eisenhüttenwes., 33, 629, 10.1002/srin.196203379 Lawn, 1980, J. Am. Ceram. Soc., 63, 574, 10.1111/j.1151-2916.1980.tb10768.x Anstis, 1981, J. Am. Ceram. Soc., 64, 533, 10.1111/j.1151-2916.1981.tb10320.x Burnett, 1984, 34, 65 Roberts, 1982, 135 Cochran, 1984, 24, 173 Yust, 1984, 533 Burnett, 1987, Wear, 114, 85, 10.1016/0043-1648(87)90018-4 Bull, 1988, J. Mater. Sci., 23, 4217, 10.1007/BF00551911 Koch, 1987, Appl. Phys. Letters, 51, 200, 10.1063/1.98922 Clark, 1987, Appl. Phys. Letters, 51, 139, 10.1063/1.98594 Clark, 1987, Appl. Phys. Letters, 51, 1462, 10.1063/1.98658 Clark, 1988, Nucl. Instr. Methods B, 32, 405, 10.1016/0168-583X(88)90246-7 White, 1988, Phys. Rev. B, 37, 3755, 10.1103/PhysRevB.37.3755 White, 1989, Nucl. Instr. Methods B, 37/38, 923, 10.1016/0168-583X(89)90328-5 Marwich, 1989, Nucl. Instr. Methods B, 37/38, 910, 10.1016/0168-583X(89)90326-1 Nastasi, 1988, Appl. Phys. Letters, 52, 1729, 10.1063/1.99714 Stoffel, 1988, 99, 507 1988, Phys. Rev. B, 37, 2297, 10.1103/PhysRevB.37.2297 McCallum, 1988, Mater. Letters, 6, 374, 10.1016/0167-577X(88)90033-X McCallum, 1989, Nucl. Instr. Methods B, 40/41, 608, 10.1016/0168-583X(89)91057-4 R. Feenstra, C.W. White, D.B. Poker, D.K. Christen, J.D. Budai and S.J. Pennycook, High-Dose Oxygen Implantation and Regrowth of Y-Ba-Cu-O Thin Films on SrTiO3, presented at the 1988 Fall Meeting of the Materials Research Society.