Effect of dopants on ferroelectric and piezoelectric properties of lead zirconate titanate thin films on Si substrates

Eom, 2012, Thin-film piezoelectric MEMS, MRS Bulletin, 37, 1007, 10.1557/mrs.2012.273 Funakubo, 2012, Epitaxial PZT films for MEMS printing applications, MRS Bulletin, 37, 1030, 10.1557/mrs.2012.271 Kim, 2012, Piezoelectric MEMS for energy harvesting, MRS Bulletin, 37, 1039, 10.1557/mrs.2012.275 Shen, 2006, Self-exciting, self-sensing PbZr0.53Ti0.47O3/SiO2 piezoelectric microcantilevers with femtogram/Hertz sensitivity, Applied Physics Letters, 89, 023506, 10.1063/1.2219994 Jin, 2006, High-mode resonant piezoresistive cantilever sensors for tens-femtogram resoluble mass sensing in air, Journal of Micromechanics and Microengineering, 16, 1017, 10.1088/0960-1317/16/5/019 Kwok, 2004, Effects of niobium doping on the piezoelectric properties of sol–gel-derived lead–zirconate–titanate films, Journal of Applied Physics, 95, 1372, 10.1063/1.1635968 Atkin, 1971, Substitution of Bi and Nb ions in lead zirconate–titanate, Journal of the American Ceramic Society, 54, 113, 10.1111/j.1151-2916.1971.tb12231.x Choi, 1998, Electrical properties of Sb-doped PZT films deposited by d.c. reactive sputtering using multi-targets, Materials Letters, 37, 119, 10.1016/S0167-577X(98)00082-2 Grossmann, 2002, The interface screening model as origin of imprint in PbZrxTi1−xO3 thin films—I. Dopant, illumination, and bias dependence, Journal of Applied Physics, 92, 2680, 10.1063/1.1498966 Bai, 2009, Effect of Fe-doping concentration on microstructure, electrical, and magnetic properties of Pb(Zr0.5Ti0.5)O3 thin films prepared by chemical solution deposition, Journal of Applied Physics, 106, 124908, 10.1063/1.3273384 Zhang, 2003, Improved ferroelectric and pyroelectric properties in Mn-doped lead zirconate titanate thin films, Journal of Applied Physics, 94, 5228, 10.1063/1.1613370 Zhang, 2009, Characterization of oxygen vacancies and their migration in Ba-doped Pb(Zr0.52Ti0.48)O3 ferroelectrics, Journal of Applied Physics, 105, 061639, 10.1063/1.3055338 Kozielski, 2012, Application testing of Sr doping effect of PZT ceramics on the piezoelectric transformer gain and efficiency proposed for MEMS actuators driving, Journal of Electroceramics, 29, 133, 10.1007/s10832-012-9746-z Haccart, 2003, Substitution of Nb doping on the structural, microstructural and electrical properties in PZT films, Thin Solid Films, 423, 235, 10.1016/S0040-6090(02)01045-3 Klissurska, 1997, Use of ferroelectric hysteresis parameters for evaluation of niobium effects in lead zirconate titanate thin films, Journal of the American Ceramic Society, 80, 336, 10.1111/j.1151-2916.1997.tb02835.x Warren, 1996, Defect-dipole alignment and tetragonal strain in ferroelectrics, Journal of Applied Physics, 79, 9250, 10.1063/1.362600 Lohkamper, 1990, Internal bias in acceptor-doped BaTiO3 ceramics: numerical evaluation of increase and decrease, Journal of Applied Physics, 68, 4220, 10.1063/1.346212 Majumder, 2001, Effect of acceptor and donor dopants on polarization components of lead zirconate titanate thin films, Applied Physics Letters, 79, 239, 10.1063/1.1383057 Dawber, 2000, A model for fatigue in ferroelectric perovskite thin films, Applied Physics Letters, 76, 1060, 10.1063/1.125938 Chen, 1994, Compositional control of ferroelectric fatigue in perovskite ferroelectric ceramics and thin films, Journal of Applied Physics, 76, 5394, 10.1063/1.357194 Jiang, 2002, Fatigue in artificially layered Pb(Zr,Ti)O3 ferroelectric films, Journal of Applied Physics, 92, 6756, 10.1063/1.1516841 Majumder, 2001, Effect of neodymium (Nd) doping on the dielectric and ferroelectric characteristics of sol–gel derived lead zirconate titanate (53/47) thin films, Journal of Applied Physics, 90, 2975, 10.1063/1.1391416 Ruangchalermwong, 2008, Phase transition and electrical properties of highly [111]-oriented and niobium-modified Pb(ZrxTi1−x)O3 thin films with different Zr/Ti ratios, Journal of Physics D: Applied Physics, 41, 225302, 10.1088/0022-3727/41/22/225302 Zhu, 2008, Thickness and Nb-doping effects on ferro- and piezoelectric properties of highly a-axis-oriented Nb-doped Pb(Zr0.3Ti0.7)O3 films, Journal of Applied Physics, 104, 054107, 10.1063/1.2975164 Kwok, 2008, Effects of niobium doping on lead zirconate titanate films deposited by a sol–gel route, Journal of Sol–Gel Science and Technology, 47, 148, 10.1007/s10971-008-1782-4 Ruangchalermwong, 2009, Enhanced ferro- and piezoelectric properties in (100)-textured Nb-doped Pb(ZrxTi1−x)O3 films with compositions at morphotropic phase boundary, Thin Solid Films, 517, 6599, 10.1016/j.tsf.2009.04.045 Shen, 2006, PZT thin-film meso- and micro-devices, Ferroelectrics, 342, 15, 10.1080/00150190600946062 Chen, 2001, Ferroelectric characteristics of oriented Pb(Zr1−xTix)O3 films, Journal of Applied Physics, 90, 2970, 10.1063/1.1394159 Kueppers, 2002, PZT thin films for piezoelectric microactuator applications, Sensors and Actuators A: Physical, 97–98, 680, 10.1016/S0924-4247(01)00850-0 Nguyen, 2013, Film-thickness and composition dependence of epitaxial thin-film PZT-based mass-sensors, Sensors and Actuators A: Physical, 199, 98, 10.1016/j.sna.2013.05.004 M.D. Nguyen, Ferroelectric and Piezoelectric Properties of Epitaxial PZT Films and Devices on Silicon, Ph.D. thesis, University of Twente, the Netherlands, 2010. Nguyen, 2010, Characterization of epitaxial Pb(Zr,Ti)O3 thin films deposited by pulsed laser deposition on silicon cantilevers, Journal of Micromechanics and Microengineering, 20, 085022, 10.1088/0960-1317/20/8/085022 Stancu, 2007, Effects of porosity on ferroelectric properties of Pb(Zr0.2Ti0.8)O3 films, Thin Solid Films, 515, 6557, 10.1016/j.tsf.2006.11.165 Zhang, 2009, Characterization of hard piezoelectric lead-free ceramics, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 56, 1523, 10.1109/TUFFC.2009.1215 Uchino, 1998, Piezoelectric ultrasonic motors: overview, Smart Materials and Structures, 7, 273, 10.1088/0964-1726/7/3/002 Ramam, 2006, Microstructure, dielectric and ferroelectric characterization of Ba doped PLZT ceramics, The European Physical Journal: Appllied Physics, 35, 43, 10.1051/epjap:2006065 Warren, 1994, Electronic domain pinning in Pb(Zr,Ti)O3 thin films and its role in fatigue, Applied Physics Letters, 65, 1018, 10.1063/1.112211 Gruverman, 2002, Nanoscale observation of photoinduced domain pinning and investigation of imprint behavior in ferroelectric thin films, Journal of Applied Physics, 92, 2734, 10.1063/1.1497698 Tagantsev, 1994, Built-in electric field assisted nucleation and coercive fields in ferroelectric thin films, Integrated Ferroelectrics, 4, 1, 10.1080/10584589408018654 Tagantsev, 2002, Non-Kolmogorov–Avrami switching kinetics in ferroelectric thin films, Physical Review B, 66, 214109, 10.1103/PhysRevB.66.214109 Matthew, 2000, A model for fatigue in ferroelectric perovskite thin films, Applied Physics Letters, 76, 1060, 10.1063/1.125938 Scott, 2000, Oxygen-vacancy ordering as a fatigue mechanism in perovskite ferroelectrics, Applied Physics Letters, 76, 3801, 10.1063/1.126786