Growth behavior of electroless copper on silicon substrate

Shin-Shyan Wu1, Wei-Long Liu2, Ting-Kan Tsai2, Shu-Huei Hsieh2, Wen-Jauh Chen3
1Institute of Electro-Optical and Materials Science, Formosa University, Yunlin, China Taipei
2Department of Materials Science and Engineering, Formosa University, Yunlin, China Taipei
3Graduate Institute of Materials Engineering, Pingtung University of Science and Technology, Pingtung, China Taipei