Classical and novel techniques for the preparation of SnO2 thin-film gas sensors
Tóm tắt
Từ khóa
Tài liệu tham khảo
Chopra, 1983, Transparent conductors: a status review, Thin Solid Films, 102, 1, 10.1016/0040-6090(83)90256-0
Banerjee, 1987, Properties of tin oxide films prepared by reactive electron beam evaporation, Thin Solid Films, 149, 291, 10.1016/0040-6090(87)90392-0
Tatsuyama, 1976, Electrical and optical properties of GaSeSnO2, Jpn. J. Appl. Phys., 15, 843, 10.1143/JJAP.15.843
Madou, 1989, 424
Pink, 1980, Preparation of fast detecting SnO2 gas sensors, Jpn. J. Appl. Phys., 19, 513, 10.1143/JJAP.19.513
U. Dibbern, G. Kuersten and P. Willich, Gas sensitivity, sputter conditions and stoichiometry of pure tin oxide layer, Proc. 2nd Int. Meet. Chemical Sensors, Bordeaux, France, July 7–10, 1986, pp. 127–130
G. Sberveglieri, G. Faglia, S. Groppelli, P. Nelli and A. Taroni, A novel PVD technique for the preparation of SnO2 thin films as C2H5OH sensors, Sensors and Actuators B, submitted for publication
Sotomura, 1983, SnO2 sputtered film gas sensor, Nat. Tech. Rep., 29, 137
Chang, 1979, Thin film semiconductor NOx sensor, IEEE Trans. Electron Devices, ED-26, 1875, 10.1109/T-ED.1979.19790
Hubner, 1991, Tin oxide gas sensors: an analytical comparison of gas-sensitive and non gas-sensitive thin films, Sensors and Actuators B, 4, 463, 10.1016/0925-4005(91)80152-A
Klober, 1991, Effects of thickness and additives on thin-film SnO2 gas sensors, Sensors and Actuators B, 3, 69, 10.1016/0925-4005(91)85009-8
Sanjines, 1990, Some aspects of the interaction of oxygen with polycrystalline SnOx thin films, Sensors and Actuators, B1, 176, 10.1016/0925-4005(90)80196-7
Gardner, 1991, Integrated tin oxide sensors, Sensors and Actuators B, 4, 117, 10.1016/0925-4005(91)80186-N
Windischmann, 1979, A model for the operation of a thin film SnOx conductance modulation carbon monoxide sensor, J. Electrochem. Soc., 126, 627, 10.1149/1.2129098
Capehart, 1981, The interaction of tin oxide films with O2, H2, NO and H2S, J. Vac. Sci. Technol., 18, 393, 10.1116/1.570794
Huck, 1990, Spillover effects in the detection of H2 and CH4 by sputtered SnO2 films with Pd and PdO deposits, Sensors and Actuators, B1, 176
Zacheja, 1991, Fast detection of phenylarsine, a comparison of sputtered and sintered SnO2 films, Sensors and Actuators B, 4, 355, 10.1016/0925-4005(91)80135-7
Inoue, 1990, Polarization effects of poled ferroelectric substrates upon surface conductivity changes in phthalocyanine and SnO2 films following gas adsorption, J. Chem. Soc., 86, 2611
Lalauze, 1984, A new approach to selective detection of gas by an SnO2 solid-state sensor, Sensors and Actuators, 5, 55, 10.1016/0250-6874(84)87006-7
Kohl, 1985, Problems and possibilities of oxidic and organic semiconductor gas sensors, Sensors and Actuators, 8, 227, 10.1016/0250-6874(85)85005-8
R. Lalauze, P. Breuil, C. Pijolat and G. Tournier, Kinetic interpretation of SnO2 electrical conductivity changes under ethanol, Proc. 3rd Int. Meet. Chemical Sensors, Cleveland, OH, USA, Sept. 24–26, 1990, pp. P61–62
Fang, 1989, A tin oxide thin film sensor with high ethanol sensitivity, Thin Solid Films, 169, 51, 10.1016/S0040-6090(89)80004-5
Madhusudhana Reddy, 1989, The effect of heat treatment on the structural properties of electron beam evaporated SnO2 films, Thin Solid Films, 169, 117, 10.1016/S0040-6090(89)80010-0
C. Aschieri, G. Rossetto, G.P. Silvestri, L. Armelao, P. Zanella and V. Di Noto, Preparation of TiO2 and SnO2 thin films for sensor devices via MOCVD, Paper presented at the Int. Workshop on Solid State Chemical Sensors for Environmental Applications, Ferrara, Italy, June 6–7, 1991
Oyabu, 1982, Sensing characteristics of SnO2 thin film gas sensor, J. Appl. Phys., 53, 2785, 10.1063/1.331079
M. Shiratori, T. Sakai and M. Katsura, Nb-doped SnO2 thin film gas sensor with WCuAl2O3 catalyst, Proc. 2nd Int. Meet. Chemical Sensors, Bordeaux, France, July 7–10, 1986, pp. 155–158
Geatches, 1991, Single crystal metal oxide gas sensors, Sensors and Actuators B, 4, 467, 10.1016/0925-4005(91)80153-B
K. Nomura, Y. Ujihira, S.S. Sharma, A. Fueda and T. Murakami, Gas sensitivity of metal oxide mixed tin oxide films prepared by spray pyrolysis, Surf. Sci., accepted for publication
Kanefusa, 1984, Unique phenomena in SnO2 based gas sensing devices exposed to ammonia gas, Solid-State Electron., 27, 533, 10.1016/0038-1101(84)90183-7
Puyane, 1983, Tin oxide films on glass substrates by a sol-gel technique, Proc. SPIE, 401, 190, 10.1117/12.935518
Buttà, 1990, Influence of surface parameters and doping on the sensitivity and on response times on tin oxide resistive sensors, Sensors and Actuators B, 2, 151, 10.1016/0925-4005(90)80024-T
Thornton, 1974, Influence of apparatus geometry and deposition conditions on the structure and topography of thick sputtered coatings, J. Vac. Sci. Technol., 11, 666, 10.1116/1.1312732
G. Sberveglieri, G. Faglia, S. Groppelli and P. Nelli, RGTO: a new technique for preparing SnO2 sputtered thin films as gas sensors, Proc. 6th Int. Conf. Solid-State Sensors and Actuators (Transducers '91), San Francisco, CA, USA, June 23–27, 1991, pp. 165–168
Deal, 1965, General relationship for the thermal oxidation of silicon, J. Appl. Phys., 16, 3770, 10.1063/1.1713945
Erickson, 1987, Surface conductivity changes in SnO2 (110), Surf. Sci., 187, L658, 10.1016/S0039-6028(87)80054-7
Cox, 1988, Oxygen vacancies and defect electronic states on the SnO2 (110)1 × 1 surface, Phys. Rev. B, 38, 2072, 10.1103/PhysRevB.38.2072
Sberveglieri, 1992, Methods of preparation of NO, NO2 and H2 sensors based on tin oxide thin films, grown by means of the r.f. magnetron sputtering technique, Sensors and Actuators B, 8, 79, 10.1016/0925-4005(92)85012-L
Yamazoe, 1983, Effects of additives on semiconductor gas sensors, Sensors and Actuators, 4, 283, 10.1016/0250-6874(83)85034-3
N. Yamazoe, New approaches for improving semiconductor gas sensors, Proc. 3rd Int. Meet. Chemical Sensors, Cleveland, OH, USA, Sept. 24–26, 1990, pp. 3–8
Kohl, 1988, Physical and chemical aspects of oxidic semiconductor gas sensors, I, 15
Fryberger, 1990, Conductance response of Pd/SnO (110) model gas sensors to H2 and O2, Sensors and Actuators B, 2, 305, 10.1016/0925-4005(90)80158-V
Zacheja, 1991, Detection of phenylarsine in air, J. Cryst. Growth, 107, 314, 10.1016/0022-0248(91)90476-L
Morrison, 1971, Measurement of surface state energy levels of one-equivalent adsorbates on ZnO, Surf. Sci., 27, 586, 10.1016/0039-6028(71)90190-7
Clifford, 1981, Mechanism of gas detection by metal oxide surfaces, 113