Hard and soft micromachining for BioMEMS: review of techniques and examples of applications in microfluidics and drug delivery

Advanced Drug Delivery Reviews - Tập 56 - Trang 145-172 - 2004
Babak Ziaie1,2, Antonio Baldi1, Ming Lei1, Yuandong Gu3, Ronald A Siegel2,3,4
1Department of Electrical and Computer Engineering, University of Minnesota, Minneapolis, MN 55455 USA
2Biomedical Engineering Institute, University of Minnesota, Minneapolis, MN 55455, USA
3Department of Pharmaceutics, University of Minnesota, Minneapolis, MN 55455, USA
4Department of Biomedical Engineering, University of Minnesota, Minneapolis, MN 55455, USA