2D hall sensor array for measuring the position of a magnet matrix
International Journal of Precision Engineering and Manufacturing-Green Technology - Tập 1 - Trang 125-129 - 2014
Tóm tắt
Hall sensor array is used to measure the position of a magnet array and needs compensation of errors caused by manufacturing tolerances as well as harmonic components of the magnetic flux of the magnet array. This paper presents a 2D hall sensor array to measure the position of a magnet matrix by filtering harmonic components. First, 1D sensor array to filter out arbitrary number of harmonic signals is proposed and extended to 2D sensor array for the position measurement of a magnet matrix. A 2D hall sensor array for filtering both fundamental and 2nd harmonic components of the magnetic flux and its conditioning circuit board are built to measure the position of the magnet matrix for a planar motor. Finally, performances of filtering harmonics and measuring position of the magnet matrix are experimentally verified with a XY linear motion stage. The proposed 2D hall sensor array is compatible to a sine encoder and is directly applicable to commercial motion controllers.
Tài liệu tham khảo
Ouyang, P. R., Tjiptoprodjo, R. C., Zhang, W. J., and Yang, G. S., “Micro-Motion Devices Technology: The State of Arts Review,” Int. J. Adv. Manuf. Technol., Vol. 38, No. 5–6, pp. 463–478, 2008.
Kim, W. J. and Trumper, D., “High-Precision Magnetic Levitation Stage for Photolithography,” Precision Engineering, Vol. 22, No. 2, pp. 66–77, 1998.
Cho, H. S., Im, C. H., and Jung, H. K., “Magnetic Field Analysis of 2-D Permanent Magnet Array for Planar Motor,” IEEE Trans. Magn., Vol. 37, No. 5, pp. 3762–3766, 2001.
Compter, J., “Electro-Dynamic Planar Motor,” Precision Engineering, Vol. 28, No. 2, pp. 171–180, 2003
Kim, W. J., Bhat, N., and Hu, T., “Integrated Multidimensional Positioner for Precision Manufacturing,” J. Eng. Manuf., Vol. 218, No. 4, pp. 431–442, 2004.
Etxaniz, I., Izpizua, A., Martin, M. S., and Arana, J., “Magnetic Levitated 2D Fast Drive,” IEEJ Transactions on Industry Applications, Vol. 126, No. 12, pp. 1678–1681, 2007.
Shinno, H., Yoshioka, H., and Taniguchi, K., “A Newly Developed Linear Motor-Driven Aerostatic X-Y Planar Motion Table System for Nano-Machining,” CIRP Annals — Manuf. Tech., Vol. 56, No. 1, pp. 369–372, 2007.
Jansen, J. W., Van Lierop, C. M. M., Lomonova, E. A., and Vandenput, A. J. A., “Magnetically Levitated Planar Actuator with Moving Magnets,” IEEE Transactions on Industry Applications, Vol. 44, No. 4, pp. 1108–1115, 2008.
Lu, X. and Usman, I. U. R., “6d Direct-Drive Technology for Planar Motion Stages,” CIRP Annals — Manuf. Tech., Vol. 61, No. 1, pp. 359–362, 2012.
Sawyer, B. A., “Magnetic Positioning Device,” US Patent, No. 3457482 A, 1969.
Li, X., Gao, W., Muto, H., Shimizu, Y., Ito, S., and Dian, S., “A Six-Degree-of-Freedom Surface Encoder for Precision Positioning of a Planar Motion Stage,” Precision Engineering, Vol. 37, No. 3, pp. 771–781, 2013.
Li, X., Shimizu, Y., Ito, S., and Gao, W., “Fabrication of Scale Gratings for Surface Encoders by using Laser Interference Lithography with 405 nm Laser Diodes,” Int. J. Precis. Eng. Manuf., Vol. 14, No. 11, pp. 1979–1988, 2013.
Frissen, P. C. M., Compter, J. C., Peijnenburg, A. T. A., and Loopstra, E. R., “Displacement Device,” US Patent, No. 6879063, 2005.
Kawato, Y. and Kim, W. J., “Multi-Degree-of-Freedom Precision Position Sensing and Motion Control using Two-Axis Hall-Effect Sensors,” Journal of Dynamic Systems, Measurement, and Control, Vol. 128, No. 4, pp. 980–988, 2006.
Lu, X., Rao, N., and Usman, I. U. R., “Six-Axis Position Measurement System for Levitated Motion Stages,” CIRP Annals - Manuf. Technol., Vol. 62, No. 1, pp. 507–510, 2013.
Halbach, K., “Design of Permanent Multipole Magnets with Oriented Rare Earth Cobalt Material,” Nuclear Instruments and Methods, Vol. 169, No. 1, pp. 1–10, 1980.
Whitehouse, D. J., “Some Theoretical Aspects of Error Separation Techniques in Surface Metrology,” Journal of Physics E: Scientific Instruments, Vol. 9, No. 7, pp. 531, 1976.
Ahn, H. J., Kim, I. H., and Han, D. C., “Nonlinear Analysis of Cylindrical Capacitive Sensor,” Measurement Science and Technology, Vol. 16, No. 3, Paper No. 699, 2005.
Ahn, H. J. and Han, D. C., “Optimal Multi-Segment Cylindrical Capacitive Sensor,” Measurement Science and Technology, Vol. 14, No. 5, Paper No. 531, 2003.
Binnard, M., “Planar Motor with Linear Coil Arrays,” US Patent, No. 6445093 B1, 2002.
Honeywell, “HMR4007: Linear Position Sensor Module, 900289 01-03 Rev. A,” http://media.digikey.com/pdf/Data%20Sheets/Honeywell%20PDFs/HMR4007.pdf (Accessed 11 Mar. 2014)
Schott, C., Racz, R., Betschart, F., and Popovic, R. S., “Novel Magnetic Displacement Sensors,” Paper No. SENSORS-00355-2002, 2002.