2D compound structures with deep subwavelength period on silicon fabricated by double time delayed femtosecond laser beams

Kang Jin1, Nan Zhang1, Wei Wang2, Yongjian Hao2, Bing Liu2
1Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin, 300350, China
2Department of Disease Control and Prevention, Rocket Force Characteristic Medical Center, 16 Xinjiekouwai street, Xicheng District, Beijing 10088, China

Tài liệu tham khảo

Bonse, 2012, Femtosecond laser-induced periodic surface structures, J. Laser Appl., 24, 10.2351/1.4712658 Liu, 2018, Direct fabricating large-area nanotriangle structure arrays on tungsten surface by nonlinear lithography of two femtosecond laser beams, Opt. Express, 26, 11718, 10.1364/OE.26.011718 Shen, 2008, High-density regular arrays of nanometer-scale rods formed on silicon surfaces via femtosecond laser irradiation in water, Nano Lett., 8, 2087, 10.1021/nl080291q Feng, 2015, Effect of ambient air on femtosecond laser ablation of highly oriented pyrolytic graphite, Opt. Lett., 40, 17, 10.1364/OL.40.000017 Huang, 2007, A uniform 290 nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation, Nanotechnology, 18, 10.1088/0957-4484/18/50/505301 Nayak, 2011, Self-organized 2D periodic arrays of nanostructures in silicon by nanosecond laser irradiation, Appl. Opt., 50, 2349, 10.1364/AO.50.002349 Zhang, 2020, Formation of nanostructures and optical analogues of massless Dirac particles via femtosecond lasers, Opt. Express, 28, 36109, 10.1364/OE.403336 Huang, 2009, Origin of laser-induced near-subwavelength ripples: Interference between surface plasmons and incident laser, ACS Nano, 3, 4062, 10.1021/nn900654v Tsibidis, 2015, From ripples to spikes: a hydrodynamical mechanism to interpret femtosecond laser-induced self-assembled structures”, Phys. Rev. B, 92, 10.1103/PhysRevB.92.041405 Lei, 2018, Femtosecond laser eraser for controllable removing periodic microstructures on Fe-based metallic glass surfaces, Opt. Express, 26, 5102, 10.1364/OE.26.005102 Palai, 2017, Computation of impurity concentration in silicon photodiode based on their optical properties, Optik, 133, 108, 10.1016/j.ijleo.2017.01.016 Fan, 2022, Systematic investigations on doping dependent thermal transport properties of single crystal silicon by time-domain thermoreflectance measurements, Int. J. Therm. Sci., 177, 107558 Reinhardt, 2015, Directed assembly of gold nanowires on silicon via reorganization and simultaneous fusion of randomly distributed gold nanoparticles, Opt. Express, 23, 11965, 10.1364/OE.23.011965 Liu, 2014, Self-organizing microstructures orientation control in femtosecond laser patterning on silicon surface, Opt. Express, 22, 16669, 10.1364/OE.22.016669 Emery, 1982, Rayleigh-Taylor and Kelvin-Helmholtz instabilities in targets accelerated by laser ablation, Phys. Rev. Lett., 48, 677, 10.1103/PhysRevLett.48.677 Zhou, 2021, Rayleigh–Taylor and Richtmyer–Meshkov instabilities: a journey through scales, Phys. D: Nonlinear Phenom., 423, 10.1016/j.physd.2020.132838 Ahuja, 2020, Rayleigh–Bénard instability in nanofluids: a comprehensive review, Micro Nano Syst. Lett., 8, 21, 10.1186/s40486-020-00123-y Gurevich, 2020, Three-step description of single-pulse formation of laser-induced periodic surface structures on metals, Nanomaterials, 10, 1836, 10.3390/nano10091836 Xia, 2009, The fabrication of periodic metal nanodot arrays through pulsed laser melting induced fragmentation of metal nanogratings, Nanotechnology, 20, 10.1088/0957-4484/20/28/285310 Wang, 2022, Effects of supra-wavelength periodic structures on the formation of 1D/2D periodic nanostructures by femtosecond lasers, Opt. Laser Technol., 151, 10.1016/j.optlastec.2022.108058 Garcia-Lechuga, 2016, Ultrafast moving-spot microscopy: birth and growth of laser- induced periodic surface structures, ACS Photonics, 3, 1961, 10.1021/acsphotonics.6b00514