α-Ga2O3 grown by low temperature atomic layer deposition on sapphire

Journal of Crystal Growth - Tập 487 - Trang 23-27 - 2018
J.W. Roberts1, J.C. Jarman2, D.N. Johnstone2, P.A. Midgley2, P.R. Chalker1, R.A. Oliver2, F.C-P. Massabuau2
1School of Engineering, The University of Liverpool, Brownlow Hill, Liverpool L69 3GH, UK
2Department of Materials Science and Metallurgy, University of Cambridge, 27 Charles Babbage Road, Cambridge CB3 0FS, UK

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