[{"data":1,"prerenderedAt":-1},["ShallowReactive",2],{"_public_publisher_all{\"sortAscending\":false,\"sortField\":\"updateTime\",\"page\":0,\"size\":10,\"facet\":true,\"searchKey\":\"\"}":3,"_public_publisher_byId_2d0cdaa0-5071-4c26-8dbd-6ae22bfc3e29":865,"_public_publication_all{\"sortAscending\":false,\"sortField\":\"totalCitation\",\"page\":0,\"size\":10,\"facet\":true,\"searchKey\":\"publisherId:2d0cdaa0-5071-4c26-8dbd-6ae22bfc3e29,\"}":952},{"meta":4,"data":6},{"total":5},"117",[7,56,246,295,379,474,535,646,710,744],{"id":8,"createTime":9,"updateTime":10,"relativeEntities":11,"slug":12,"properties":13,"entityType":25,"verifyStatus":26,"verifyTime":27,"verifyNote":28,"languages":29,"translateLanguages":28,"viewCount":32,"subjectFields":33,"manageAffiliations":34,"indexDatabases":35,"url":36,"thumbnailPath":28,"statistic":28,"gsStatistic":37,"type":55,"analyzePriority":28},"f8d0bf97-8d89-482e-b58c-2fc481a0b79b","2025-10-27T06:27:08.591+00:00","2026-08-27T01:57:29.562+00:00",[],"T%E1%BA%A1p-ch%C3%AD-Khoa-h%E1%BB%8Dc-v%C3%A0-C%C3%B4ng-ngh%E1%BB%87-nhi%E1%BB%87t-%C4%91%E1%BB%9Bi",{"country":14,"issn":16,"title":18,"introduce":21,"gsId":23},{"VOID":15},"VN",{"VOID":17},"08667535",{"EN":19,"VI":20},"Journal of Tropical Science and Engineering","Tạp chí Khoa học và Công nghệ nhiệt đới",{"EN":22},"\u003Cp style=\"text-align:justify;\">     Journal of Tropical Science and Engineering (JTSE) is a multidisciplinary scientific journal, licensed to operate as a print journal in 2012 and an electronic journal in 2024 (License No.1479\u002FGP-BTTTT dated August 20, 2012 and No.91\u002FGP-BTTTT dated April 9, 2024 issued by the Ministry of Information and Communications of Vietnam). The JTSE is headquartered in Hanoi.\u003C\u002Fp>\u003Cp style=\"text-align:justify;\">        The JTSE is published every 3 months (4 issues\u002Fyear), publishing research results and overview articles in 3 groups of fields: Tropical Ecology and Environment; Chemistry and Material Sciences; Biomedicine and Pharmacy. In 2022, the JTSE registered the international identifier Digital Object Identifier (DOI): 10.58334\u002Fvrtc.jtst and assigned DOI codes to all articles of the journal. The members of the Editorial Board of the JTSE are prestigious scientists and leading scientists from Vietnam and many countries in the world. The JTSE has been recognized by the Vietnam State Council for Professorship to score scientific articles in Chemistry, Medicine and Biology with scores ranging from 0-0.75 points.\u003C\u002Fp>\u003Cp style=\"text-align:justify;\">      Currently, the JTSE is building and perfecting a set of criteria and making efforts to join the List of prestigious  international journals with a roadmap to enter Scopus and SCIE in the coming time.\u003C\u002Fp>",{"VOID":24},"MS2_GJQAAAAJ","PUBLISHER","VERIFIED","2025-10-27T06:27:25.058+00:00",null,[30,31],"VI","EN",0,[],[],[],"https:\u002F\u002Ftapchikhcnnd.com.vn",{"impactFactor":28,"impactFactorByYear":28,"i10Index":32,"i10IndexLast5Year":32,"totalPublication":38,"totalPublicationByYear":39,"totalCitation":43,"totalCitationByYear":44,"totalCitationPerPublication":52,"totalCitationPerPublicationByYear":53,"hindexLast5Year":42,"hindex":42},483,{"0":40,"2020":40,"2021":40,"2022":40,"2024":40,"2025":41,"2026":42},1,475,3,117,{"2017":40,"2018":40,"2019":45,"2020":46,"2021":46,"2022":47,"2023":48,"2024":49,"2025":50,"2026":51},4,5,11,6,7,53,15,0.24,{"2020":46,"2021":46,"2022":47,"2024":49,"2025":54,"2026":46},0.11,"JOURNAL",{"id":57,"createTime":58,"updateTime":10,"relativeEntities":59,"slug":60,"properties":61,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":69,"subjectFields":70,"manageAffiliations":71,"indexDatabases":84,"url":101,"thumbnailPath":28,"statistic":102,"gsStatistic":195,"type":55,"analyzePriority":28},"cc3aedc1-bd17-441e-b403-4be82349b362","2023-05-29T12:05:16.902+00:00",[],"Vietnam-Journal-of-Mechanics",{"country":62,"issn":63,"title":65,"gsId":67},{"VOID":15},{"VOID":64},"08667136",{"EN":66},"Vietnam Journal of Mechanics",{"VOID":68},"B98qpzgAAAAJ",29,[],[72],{"id":73,"createTime":28,"updateTime":28,"relativeEntities":74,"slug":28,"properties":75,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":82,"parentIds":83,"statistic":28},"5bf72910-eb8d-41eb-b358-ea294f24f765",[],{"title":76,"country":79,"abbreviation":80},{"EN":77,"VI":78},"Vietnam Academy of Science and Technology","Viện Hàn lâm Khoa học và Công nghệ Việt Nam",{"VOID":15},{"VOID":81},"VAST","https:\u002F\u002Fvast.gov.vn\u002F",[],[85],{"id":86,"indexDatabase":87,"url":97,"indexYears":98,"academicFieldIds":99,"indexDatabaseRanking":28},"61d05d3d-1119-4247-9062-3944e6a8afd5",{"id":88,"createTime":28,"updateTime":28,"relativeEntities":89,"label":90,"description":92,"key":94,"publicationTags":95,"standard":28},"7c6668cf-5dbb-472f-ac65-0e3d0d95e1c2",[],{"EN":91,"VI":91},"ACI - Asean Citation Index",{"EN":93,"VI":93},"Cơ sở dữ liệu ACI","aci",[96],"ACI","https:\u002F\u002Fasean-cites.org\u002Fjournal_info?jid=10758","2018-2022",[100],"007635a4-2624-49b8-a8f3-fec188e6a80e","http:\u002F\u002Fvjs.ac.vn\u002Findex.php\u002Fvjmech\u002Findex",{"impactFactor":32,"impactFactorByYear":103,"i10Index":122,"i10IndexLast5Year":123,"totalPublication":124,"totalPublicationByYear":125,"totalCitation":143,"totalCitationByYear":144,"totalCitationPerPublication":163,"totalCitationPerPublicationByYear":164,"hindexLast5Year":146,"hindex":146},{"1994":104,"1995":105,"1997":54,"1998":106,"1999":105,"2000":107,"2001":108,"2002":107,"2003":107,"2004":109,"2005":110,"2006":111,"2007":105,"2008":110,"2010":112,"2011":113,"2012":114,"2013":115,"2014":105,"2015":116,"2016":111,"2017":116,"2018":117,"2019":109,"2020":118,"2021":119,"2022":115,"2023":120,"2024":121},0.12,0.08,0.05,0.02,0.1,0.15,0.14,0.09,0.07,0.21,0.73,0.52,0.13,0.26,0.36,0.61,0.64,0.27,23,2,1046,{"1979":126,"1980":127,"1981":128,"1982":129,"1983":51,"1984":129,"1985":130,"1986":128,"1987":51,"1988":51,"1989":122,"1990":128,"1991":129,"1992":128,"1993":131,"1994":132,"1995":133,"1996":133,"1997":132,"1998":131,"1999":128,"2000":122,"2001":134,"2002":130,"2003":135,"2004":122,"2005":136,"2006":133,"2007":137,"2008":138,"2009":131,"2010":134,"2011":47,"2012":139,"2013":131,"2014":134,"2015":131,"2016":135,"2017":140,"2018":132,"2019":131,"2020":141,"2021":122,"2022":142,"2023":130,"2024":123},12,17,18,19,20,25,28,27,22,21,24,38,35,37,26,39,36,1403,{"1980":40,"1982":40,"1983":40,"1991":132,"1992":45,"1993":48,"1994":49,"1995":145,"1996":146,"1997":134,"1998":140,"1999":47,"2000":136,"2001":127,"2002":128,"2003":147,"2004":148,"2005":131,"2006":149,"2007":150,"2008":151,"2009":152,"2010":153,"2011":154,"2012":155,"2013":156,"2014":152,"2015":157,"2016":158,"2017":138,"2018":159,"2019":160,"2020":159,"2021":161,"2022":162,"2023":45},9,13,31,30,46,40,65,43,119,105,89,72,63,66,70,59,68,58,1.34,{"1980":165,"1982":106,"1983":112,"1991":166,"1992":167,"1993":52,"1994":168,"1995":169,"1996":170,"1997":171,"1998":172,"1999":119,"2000":172,"2001":173,"2002":174,"2003":175,"2004":176,"2005":172,"2006":177,"2007":178,"2008":179,"2009":180,"2010":181,"2011":182,"2012":183,"2013":184,"2014":185,"2015":186,"2016":187,"2017":188,"2018":189,"2019":190,"2020":191,"2021":192,"2022":193,"2023":194},0.06,1.47,0.22,0.25,0.33,0.48,0.79,1.04,0.77,0.9,1.48,1.3,1.7,1.05,1.86,1.72,5.41,9.55,2.41,2.88,1.95,2.52,3.14,1.35,2.5,2.36,1.79,2.96,1.61,0.2,{"impactFactor":28,"impactFactorByYear":28,"i10Index":196,"i10IndexLast5Year":128,"totalPublication":197,"totalPublicationByYear":198,"totalCitation":203,"totalCitationByYear":204,"totalCitationPerPublication":219,"totalCitationPerPublicationByYear":220,"hindexLast5Year":126,"hindex":199},42,1244,{"0":147,"1979":146,"1980":127,"1981":127,"1982":199,"1983":199,"1984":129,"1985":129,"1986":128,"1987":129,"1988":51,"1989":140,"1990":127,"1991":129,"1992":129,"1993":133,"1994":147,"1995":132,"1996":69,"1997":132,"1998":131,"1999":134,"2000":140,"2001":131,"2002":134,"2003":131,"2004":133,"2005":132,"2006":131,"2007":200,"2008":138,"2009":140,"2010":132,"2011":122,"2012":201,"2013":132,"2014":140,"2015":148,"2016":122,"2017":202,"2018":69,"2019":140,"2020":69,"2021":132,"2022":139,"2023":130,"2024":133,"2025":131,"2026":138},16,47,41,32,2194,{"1997":126,"1998":205,"1999":126,"2000":145,"2001":145,"2002":126,"2003":205,"2004":127,"2005":129,"2006":146,"2007":132,"2008":136,"2009":47,"2010":131,"2011":138,"2012":206,"2013":207,"2014":208,"2015":162,"2016":209,"2017":209,"2018":210,"2019":211,"2020":212,"2021":213,"2022":214,"2023":215,"2024":216,"2025":217,"2026":218},10,54,64,62,93,123,118,122,168,159,177,205,255,154,1.76,{"1997":221,"1998":222,"1999":223,"2000":224,"2001":118,"2002":223,"2003":222,"2004":225,"2005":226,"2006":115,"2007":227,"2008":228,"2009":229,"2010":230,"2011":231,"2012":232,"2013":233,"2014":234,"2015":235,"2016":236,"2017":237,"2018":238,"2019":239,"2020":240,"2021":48,"2022":241,"2023":242,"2024":243,"2025":244,"2026":245},0.43,0.4,0.55,0.35,0.63,0.68,0.6,0.69,0.42,0.89,1.52,1.32,2.29,2.38,1.93,4.04,2.91,4.24,4.54,4.21,4.3,8.85,7.59,10.2,4.4,{"id":247,"createTime":248,"updateTime":10,"relativeEntities":249,"slug":250,"properties":251,"entityType":25,"verifyStatus":26,"verifyTime":261,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":147,"subjectFields":262,"manageAffiliations":263,"indexDatabases":264,"url":273,"thumbnailPath":28,"statistic":274,"gsStatistic":290,"type":55,"analyzePriority":28},"b5209d2b-2258-40ef-8732-874e80fe24a5","2023-08-01T04:13:30.887+00:00",[],"VNU-Journal-of-Science-Medical-and-Pharmaceutical-Sciences",{"country":252,"eissn":253,"issn":255,"title":257,"gsId":259},{"VOID":15},{"VOID":254},"25881132",{"VOID":256},"26159309",{"EN":258},"VNU Journal of Science: Medical and Pharmaceutical Sciences",{"VOID":260},"nxupvWQAAAAJ","2023-08-01T04:16:22.633+00:00",[],[],[265],{"id":266,"indexDatabase":267,"url":272,"indexYears":28,"academicFieldIds":28,"indexDatabaseRanking":28},"1c684ac3-c7bf-4466-8841-3c6146083c3c",{"id":88,"createTime":28,"updateTime":28,"relativeEntities":268,"label":269,"description":270,"key":94,"publicationTags":271,"standard":28},[],{"EN":91,"VI":91},{"EN":93,"VI":93},[96],"https:\u002F\u002Fasean-cites.org\u002Fjournal_info?jid=11969","https:\u002F\u002Fjs.vnu.edu.vn\u002FMPS",{"impactFactor":32,"impactFactorByYear":275,"i10Index":32,"i10IndexLast5Year":32,"totalPublication":276,"totalPublicationByYear":277,"totalCitation":282,"totalCitationByYear":283,"totalCitationPerPublication":284,"totalCitationPerPublicationByYear":285,"hindexLast5Year":45,"hindex":45},{"2019":106,"2020":110,"2021":104,"2022":104,"2023":109,"2024":108},360,{"2016":140,"2017":278,"2018":69,"2019":148,"2020":279,"2021":200,"2022":280,"2023":281,"2024":200},34,48,49,50,163,{"2016":145,"2017":145,"2018":135,"2019":140,"2020":50,"2021":135,"2022":128,"2023":48},0.45,{"2016":224,"2017":117,"2018":286,"2019":287,"2020":288,"2021":284,"2022":289,"2023":104},0.72,0.87,1.1,0.37,{"impactFactor":28,"impactFactorByYear":28,"i10Index":32,"i10IndexLast5Year":32,"totalPublication":136,"totalPublicationByYear":291,"totalCitation":127,"totalCitationByYear":292,"totalCitationPerPublication":293,"totalCitationPerPublicationByYear":294,"hindexLast5Year":123,"hindex":42},{"0":123,"2014":40,"2015":40,"2016":130},{"2016":40,"2019":123,"2021":123,"2023":45,"2024":42,"2025":40,"2026":40},0.71,{"2016":106},{"id":296,"createTime":297,"updateTime":10,"relativeEntities":298,"slug":299,"properties":300,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":51,"subjectFields":310,"manageAffiliations":311,"indexDatabases":312,"url":313,"thumbnailPath":28,"statistic":314,"gsStatistic":349,"type":55,"analyzePriority":28},"e7ce3904-ad2d-4341-b39e-98ebe8da5908","2023-06-13T10:30:04.853+00:00",[],"Communications-in-Physics",{"country":301,"eissn":302,"issn":304,"title":306,"gsId":308},{"VOID":15},{"VOID":303},"28155947",{"VOID":305},"08863166",{"EN":307},"Communications in Physics",{"VOID":309},"FStER9AAAAAJ",[],[],[],"https:\u002F\u002Fvjs.ac.vn\u002Findex.php\u002Fcip",{"impactFactor":32,"impactFactorByYear":315,"i10Index":199,"i10IndexLast5Year":45,"totalPublication":321,"totalPublicationByYear":322,"totalCitation":326,"totalCitationByYear":327,"totalCitationPerPublication":335,"totalCitationPerPublicationByYear":336,"hindexLast5Year":126,"hindex":126},{"2008":110,"2009":316,"2010":165,"2011":317,"2012":317,"2013":112,"2014":318,"2015":105,"2016":108,"2017":116,"2018":318,"2019":52,"2020":319,"2021":284,"2022":320,"2023":116,"2024":222},0.3,0.03,0.16,0.34,0.28,738,{"2007":323,"2008":145,"2009":145,"2010":136,"2011":139,"2012":324,"2013":138,"2014":151,"2015":69,"2016":151,"2017":325,"2018":142,"2019":50,"2020":201,"2021":141,"2022":152,"2023":150,"2024":278,"2025":123},14,107,56,947,{"2007":148,"2008":49,"2009":49,"2010":127,"2011":328,"2012":155,"2013":278,"2014":329,"2015":206,"2016":330,"2017":331,"2018":332,"2019":333,"2020":334,"2021":127,"2022":132,"2023":148},52,94,86,129,76,91,106,1.28,{"2007":337,"2008":338,"2009":338,"2010":293,"2011":339,"2012":340,"2013":341,"2014":342,"2015":179,"2016":232,"2017":343,"2018":344,"2019":180,"2020":345,"2021":346,"2022":347,"2023":348},2.14,0.78,1.41,0.83,0.97,1.45,2.3,2.11,2.59,0.44,0.65,0.75,{"impactFactor":28,"impactFactorByYear":28,"i10Index":133,"i10IndexLast5Year":145,"totalPublication":350,"totalPublicationByYear":351,"totalCitation":355,"totalCitationByYear":356,"totalCitationPerPublication":363,"totalCitationPerPublicationByYear":364,"hindexLast5Year":145,"hindex":323},1117,{"0":48,"1972":40,"1991":127,"1992":51,"1993":49,"1994":47,"1995":323,"1996":42,"1997":40,"1998":146,"1999":146,"2000":205,"2001":47,"2002":128,"2003":136,"2004":132,"2005":136,"2006":148,"2007":141,"2008":149,"2009":352,"2010":353,"2011":196,"2012":208,"2013":280,"2014":354,"2015":150,"2016":328,"2017":137,"2018":142,"2019":325,"2020":152,"2021":139,"2022":139,"2023":142,"2024":148,"2025":147,"2026":132},33,44,92,1611,{"2004":46,"2005":357,"2006":47,"2007":47,"2008":126,"2009":140,"2010":69,"2011":147,"2012":147,"2013":147,"2014":208,"2015":353,"2016":201,"2017":280,"2018":161,"2019":358,"2020":212,"2021":331,"2022":212,"2023":359,"2024":360,"2025":361,"2026":362},8,85,153,178,188,132,1.44,{"2004":365,"2005":169,"2006":289,"2007":320,"2008":117,"2009":171,"2010":366,"2011":367,"2012":368,"2013":225,"2014":369,"2015":288,"2016":171,"2017":370,"2018":371,"2019":231,"2020":372,"2021":373,"2022":374,"2023":375,"2024":376,"2025":377,"2026":378},0.18,0.66,0.74,0.5,0.67,1.29,1.89,2.84,3.49,3.3,4.25,5.93,6.06,4.71,{"id":380,"createTime":381,"updateTime":382,"relativeEntities":383,"slug":384,"properties":385,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":28,"languages":394,"translateLanguages":28,"viewCount":127,"subjectFields":395,"manageAffiliations":396,"indexDatabases":404,"url":418,"thumbnailPath":28,"statistic":419,"gsStatistic":446,"type":55,"analyzePriority":28},"2300fd63-13a8-4ee9-92b0-d24d9e616c6b","2023-05-29T12:05:31.684+00:00","2026-08-27T01:57:29.561+00:00",[],"Journal-of-Computer-Science-and-Cybernetics",{"country":386,"issn":387,"title":389,"gsId":392},{"VOID":15},{"VOID":388},"18139663",{"EN":390,"VI":391},"Journal of Computer Science and Cybernetics","Tạp chí tin học và điều khiển học",{"VOID":393},"hVh9fuMAAAAJ",[30,31],[],[397],{"id":73,"createTime":28,"updateTime":28,"relativeEntities":398,"slug":28,"properties":399,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":82,"parentIds":403,"statistic":28},[],{"title":400,"country":401,"abbreviation":402},{"EN":77,"VI":78},{"VOID":15},{"VOID":81},[],[405],{"id":406,"indexDatabase":407,"url":412,"indexYears":413,"academicFieldIds":414,"indexDatabaseRanking":28},"0c897c2c-8ca4-4a7a-91b9-14955abc3043",{"id":88,"createTime":28,"updateTime":28,"relativeEntities":408,"label":409,"description":410,"key":94,"publicationTags":411,"standard":28},[],{"EN":91,"VI":91},{"EN":93,"VI":93},[96],"https:\u002F\u002Fasean-cites.org\u002Fjournal_info?jid=11305","2019-2021",[100,415,416,417],"a24a4497-b6ac-43f3-ae94-c044be819e49","b2d37900-0c9f-4074-a519-9ee0b570caa7","37da756c-1c5e-4925-87f2-a9bd3ce5859c","http:\u002F\u002Fvjs.ac.vn\u002Findex.php\u002Fjcc",{"impactFactor":32,"impactFactorByYear":420,"i10Index":129,"i10IndexLast5Year":42,"totalPublication":425,"totalPublicationByYear":426,"totalCitation":431,"totalCitationByYear":432,"totalCitationPerPublication":438,"totalCitationPerPublicationByYear":439,"hindexLast5Year":323,"hindex":323},{"2013":107,"2014":107,"2015":111,"2016":365,"2017":107,"2018":421,"2019":117,"2020":422,"2021":227,"2022":423,"2023":368,"2024":424},0.04,0.32,0.39,0.57,1184,{"2012":427,"2013":358,"2014":278,"2015":428,"2016":429,"2017":51,"2018":430,"2019":148,"2020":130,"2021":136,"2022":199,"2023":132,"2024":42},473,71,251,134,995,{"2012":433,"2013":434,"2014":434,"2015":333,"2016":435,"2017":436,"2018":437,"2019":211,"2020":281,"2021":434,"2022":126,"2023":152},149,45,114,51,232,0.84,{"2012":422,"2013":440,"2014":232,"2015":335,"2016":284,"2017":441,"2018":442,"2019":443,"2020":189,"2021":444,"2022":348,"2023":445},0.53,3.4,1.73,3.93,1.88,1.54,{"impactFactor":28,"impactFactorByYear":28,"i10Index":150,"i10IndexLast5Year":132,"totalPublication":447,"totalPublicationByYear":448,"totalCitation":449,"totalCitationByYear":450,"totalCitationPerPublication":192,"totalCitationPerPublicationByYear":460,"hindexLast5Year":51,"hindex":199},1105,{"0":47,"1981":40,"1985":199,"1986":135,"1987":136,"1988":323,"1989":126,"1990":199,"1991":127,"1992":126,"1993":47,"1994":129,"1995":130,"1996":132,"1997":142,"1998":148,"1999":201,"2000":196,"2001":353,"2002":353,"2003":352,"2004":132,"2005":131,"2006":148,"2007":147,"2008":133,"2009":131,"2010":139,"2011":201,"2012":281,"2013":142,"2014":202,"2015":69,"2016":140,"2017":136,"2018":140,"2019":134,"2020":134,"2021":133,"2022":134,"2023":134,"2024":136,"2025":49},3272,{"2007":145,"2008":323,"2009":46,"2010":48,"2011":129,"2012":148,"2013":140,"2014":69,"2015":152,"2016":160,"2017":162,"2018":451,"2019":452,"2020":453,"2021":454,"2022":455,"2023":456,"2024":457,"2025":458,"2026":459},109,173,236,318,398,469,442,440,297,{"2007":461,"2008":115,"2009":194,"2010":318,"2011":462,"2012":227,"2013":286,"2014":463,"2015":175,"2016":464,"2017":465,"2018":466,"2019":467,"2020":468,"2021":469,"2022":470,"2023":471,"2024":472,"2025":473},0.29,0.46,0.91,2.27,2.42,4.19,7.86,10.73,11.78,18.09,21.32,18.42,62.86,{"id":475,"createTime":476,"updateTime":382,"relativeEntities":477,"slug":478,"properties":479,"entityType":25,"verifyStatus":26,"verifyTime":491,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":202,"subjectFields":492,"manageAffiliations":493,"indexDatabases":509,"url":510,"thumbnailPath":28,"statistic":511,"gsStatistic":525,"type":55,"analyzePriority":28},"25b6bd10-676c-40c0-8dc3-356d1679a284","2023-05-19T02:22:33.430+00:00",[],"T%E1%BA%A1p-ch%C3%AD-Y-D%C6%B0%E1%BB%A3c-h%E1%BB%8Dc-C%E1%BA%A7n-Th%C6%A1",{"country":480,"issn":481,"title":483,"introduce":486,"gsId":489},{"VOID":15},{"VOID":482},"23541210",{"EN":484,"VI":485},"Cantho Journal of Medicine and Pharmacy","Tạp chí Y Dược học Cần Thơ",{"EN":487,"VI":488},"\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">04\u002F10\u002F2015 Ministry of Information and Communications allowed Can Tho journal of medicine and pharmacy to operate (102 \u002FGP-BTTTT)\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">07\u002F16\u002F2015 Can Tho journal of medicine and pharmacy is internationally recognized: ISSN 2354-1210\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">In 2016, The journal has been included in the list of medical science journals by The State Council for professorship which is awarded a work score of 0-0.5 points for a published article.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Can Tho Journal of Medicine and Pharmacy welcome original works that haven’t been submitted or published in other medical journals. Posts must contain content related to one of the journal’s categories.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">The content published\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">The journal is divided into 3 categories:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Scientific research article: are valuable scientific works, which have been researched and accepted.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Overview of medicine, biology and pharmacy: serving the objective of continuing training in the fields of medicine, biology and pharmacy; to systematize classical and modern knowledge.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Update information on new knowledge about medicine, biology, pharmacy in the country and in the world.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Scope\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Publication and introduction of scientific research in the fields:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">+ Medicine (internal medicine, surgery, pediatrics, obstetrics and gynecology, odonto-stomatology, laboratory, oncology, traditional medicine, nursing).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">+ Biology (genetics, biotechnology).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">+ Pharmacology (pharmaceutics, drug quality analysis-control, synthetic pharmaceutical chemistry, biochemistry, pharmacognosy, botany, clinical pharmacy).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- To enhance the quality of undergraduate, postgraduate education, scientifically researching and meet the necessary treatment in hospital.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Introducing the updated domestic and oversea information about science technology to promote scientific research and exchanging technology in local, other universities.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">- Exchanging pharmaceutical and medical information for social health developing in the Mekong Delta and Vietnam.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">The object\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Postgraduate students, student of Can Tho University of Medicine and Pharmacy, scientists from schools, research institutes, hospitals, health centers, pharmaceutical companies of the Mekong Delta; other provinces and regions in Vietnam and other country.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Address\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Headquarters of Can Tho Journal of Medicine and Pharmacy, located Scientific Research and International Cooperation Office: 179 Nguyen Van Cu Street, An Khanh Ward, Ninh Kieu District, Can Tho City, Vietnam.\u003C\u002Fspan>\u003C\u002Fp>","\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Ngày 16\u002F7\u002F2015, Tạp chí Y Dược học Cần Thơ được cấp chỉ số quốc tế: ISSN 2354-1210.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Từ tháng 4\u002F2016, Tạp chí đã được Hội đồng Giáo sư ngành Y đưa vào danh sách các tạp chí khoa học Y học được tính điểm công trình 0-0,5 điểm cho một bài báo đăng.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Năm 2020 Tạp chí Y Dược học Cần Thơ đã được phê duyệt vào danh mục của các Hội đồng Giáo sư ngành Dược học được tính điểm công trình 0-0,5 điểm cho một bài báo đăng.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tạp chí Y Dược học Cần Thơ ra 12 số\u002Fnăm, 180-200 trang\u002Fsố.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Từ tháng 12\u002F2022 Tạp chí Y Dược học Cần Thơ là thành viên của hệ thống Crossref và từ tháng 01\u002F2023 tạp chí thực hiện bình duyệt online kín 2 chiều nhằm tăng tính minh bạch, tin cậy của các công trình nghiên cứu khoa học và đảm bảo tốt nhất chất lượng khoa học của bài viết.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tôn chỉ, mục đích và phạm vi của tạp chí\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tôn chỉ và mục đích hoạt động của tạp chí: xuất bản nhằm mục đích phổ biến kết quả từ các đề tài nghiên cứu khoa học; giao lưu trao đổi khoa học, chia sẻ kinh nghiệm, học tập, đồng thời cập nhật thông tin khoa học mới trong các lĩnh vực y, sinh, dược học trong và ngoài nước.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Phạm vi của tạp chí: Tạp chí xuất bản được chia thành 3 chuyên mục: (i) Bài báo nghiên cứu khoa học là kết quả công trình nghiên cứu khoa học có giá trị đã được triển khai nghiên cứu, (ii) Bài tổng quan y, sinh, dược học: phục vụ mục tiêu đào tạo liên tục trong lĩnh vực y, sinh, dược học; nhằm hệ thống hóa những kiến thức kinh điển và hiện đại; (iii) Thông tin cập nhật kiến thức mới về y, sinh, dược học trong nước và trên thế giới.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Chính sách truy cập mở\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tạp chí Y Dược học Cần Thơ áp dụng chính sách truy cập mở đối với các bài báo đã xuất bản đến với độc giả, nhằm mở rộng cơ hội tiếp cận các kết quả nghiên cứu chất lượng cao và tăng cường trao đổi kiến thức. Tạp chí đăng tải trực tuyến (miễn phí) toàn văn các bài báo được công bố trên website của Tạp chí (https:\u002F\u002Ftapchi.ctump.edu.vn).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Đạo đức xuất bản\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tạp chí Y Dược học Cần Thơ cam kết tuân thủ đạo đức xuất bản phù hợp với các hướng dẫn và tiêu chuẩn của the Committee on Publication Ethics (COPE), tuân thủ các nguyên tắc của COPE’s Core Practices, Best Practices Guidelines for Journal Editors và Guidelines on Good Publication Practices.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Bản thảo bài báo chỉ được chấp nhận khi được tác giả chịu trách nhiệm chính cam kết các nội dung sau: Các nội dung của bản thảo chưa được đăng tải toàn bộ hoặc một phần ở các tạp chí khác; Tất cả các tác giả đều có đóng góp một cách đáng kể vào quá trình nghiên cứu hoặc chuẩn bị bản thảo và cùng chịu trách nhiệm về các nội dung của bản thảo; Tuân thủ các biện pháp đảm bảo đạo đức nghiên cứu (ví dụ thỏa thuận đồng ý tham gia nghiên cứu).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Cam kết bảo mật\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tạp chí cam kết thực hiện và tuân thủ các quy định của luật và các văn bản hướng dẫn liên quan đến bảo mật thông tin cá nhân trên không gian mạng. Các thông tin mà người dùng (tác giả, độc giả, biên tập viên, người phản biện) nhập vào các biểu mẫu trên Hệ thống Quản lý xuất bản trực tuyến của tạp chí chỉ được sử dụng vào các mục đích đã được tuyên bố rõ ràng và sẽ không được cung cấp cho bất kỳ bên thứ ba nào khác, hay dùng vào bất kỳ mục đích nào khác.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Phí gửi bài\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Lệ phí gửi đăng bài: 1.000.000đ\u002Fbài báo\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Lệ phí gửi đăng nhanh: 1.500.000đ\u002Fbài báo\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Đối với tác giả là cán bộ viên chức thuộc Trường Đại học Y Dược Cần Thơ thì được hỗ trợ 50% lệ phí gửi đăng bài.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Đối với sinh viên thực hiện đề tài nghiên cứu khoa học cấp trường được hỗ trợ 100% lệ phí đăng bài ( Tác giả gửi đính kèm “ Quyết định về việc giao tổ chức thực hiện đề tài nghiên cứu khoa học cấp Trường của sinh viên”).\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Hình thức nộp lệ phí:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">1. Tiền mặt:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Nộp trực tiếp tại Phòng Tài chính - Kế toán, Trường Đại học Y Dược Cần Thơ, số 179 Nguyễn Văn Cừ, P. An Khánh, Q. Ninh Kiều, thành phố Cần Thơ.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">2. Chuyển khoản:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tên Tài khoản: Trường ĐHYD Cần Thơ, Số TK: 0111000115668, tại ngân hàng Vietcombank chi nhánh Cần Thơ.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Thời gian: Áp dụng từ ngày 01\u002F02\u002F2023.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">* Phí gửi bài không được hoàn trả khi bài viết bị từ chối hoặc tác giả xin rút bài viết.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Quy trình phản biện bài báo\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tạp chí Y Dược học Cần Thơ thực hiện quy trình phản biện kín hai chiều nghiêm ngặt. Danh tính của những người phản biện không được tiết lộ cho các tác giả và ngược lại. Quy trình thẩm định bài báo đăng gồm các bước sau:\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tiếp nhận bản thảo\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Tác giả liên hệ gửi bản thảo đến Tạp chí qua hệ thống trực tuyến tại website: https:\u002F\u002Ftapchi.ctump.edu.vn. Hướng dẫn về cách đăng ký, gửi bài và chuẩn bị bản thảo được cung cấp trên website của Tạp chí.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Sàng lọc sơ bộ\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Sau khi Tòa soạn nhận được bài báo của tác giả, Ban Thư ký sẽ tiến hành kiểm tra sơ bộ bài báo (các yêu cầu về nội dung và hình thức). Những bài báo không đúng quy cách hoặc có nội dung không phù hợp hoặc vi phạm bản quyền sẽ bị từ chối (Ban Thư ký thông báo phản hồi đến tác giả trong vòng 1 tuần). Những bài báo đủ điều kiện, được Ban Thư ký tòa soạn chuyển đến Ban Biên tập có cùng chuyên môn với nội dung bài báo để đề xuất người phản biện. Thời gian kể từ khi Ban Biên tập nhận bài báo đến khi đề xuất người phản biện bài báo chậm nhất là 5 ngày.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Vòng phản biện\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">1. Ban Thư ký gửi bài và yêu cầu phản biện đến 02 phản biện độc lập.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">2. Các phản biện gởi nhận xét cho Ban Thư ký. Thời gian từ khi gửi bài cho phản biện đến khi nhận ý kiến của phản biện tối đa là 20 ngày.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Xử ký kết quả phản biện\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">1. Nếu ý kiến đồng ý cho đăng và không cần chỉnh sửa, Ban Thư ký tiếp tục đăng bài theo qui trình.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">2. Nếu ý kiến đồng ý đăng và cần chỉnh sửa, Ban Thư ký sẽ thông tin đến tác giả chỉnh sửa theo yêu cầu của người phản biện. Thời gian chỉnh sửa và gửi lại kéo dài không quá 2 tuần, từ khi tác giả bài báo nhận được thông tin (Quá trình này có thể lặp lại tối đa 2 lần\u002F1 bài báo). Khi có sự thống nhất, đồng ý của người phản biện; bài báo được tiếp tục đăng theo qui trình.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">3. Những bài báo có chất lượng không đạt yêu cầu, cả 2 phản biện không đồng ý cho đăng sẽ bị Tòa soạn từ chối đăng.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">Xuất bản\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">1. Ban Thư ký tổng hợp các bản thảo đã được tác giả hoàn thiện sau thẩm định trình Ban Biên tập xem xét, Tổng Biên tập phê duyệt, quyết định bài đăng theo các tiêu chí: sự phù hợp nội dung với tôn chỉ và mục đích, thể loại bài viết (ưu tiên các bài có bài có nghiên cứu chuyên sâu, hàm lượng khoa học cao), đóng góp mới bài báo, bài báo được ưu tiên đăng trong số gần nhất của Tạp chí theo thứ tự: tính thời sự, chất lượng bài báo và thời gian gửi bài.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">2. Ban Biên tập và Ban Thư ký biên tập bản thảo, chế bản, đọc rà soát lỗi. Thời gian hoàn thành từ 10-15 ngày.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">3. Ban Thư ký có trách nhiệm thông báo cho tác giả bài báo (bằng e-mail) về tình hình phê duyệt bài báo, thời gian, số kỳ, tập xuất bản bài báo theo qui định.\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>\u003Cp>\u003Cspan style=\"color: rgb(0, 0, 0);\">4. Danh sách bài báo theo số Tạp chí được in ấn và phát hành trong năm định kỳ được công bố chính thức trên website: https:\u002F\u002Ftapchi.ctump.edu.vn\u003C\u002Fspan>\u003C\u002Fp>\u003Cp>\u003Cbr>\u003C\u002Fp>",{"VOID":490},"wcQ1uqwAAAAJ","2023-05-30T08:17:21.868+00:00",[],[494],{"id":495,"createTime":28,"updateTime":28,"relativeEntities":496,"slug":28,"properties":497,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":507,"parentIds":508,"statistic":28},"6413896b-eca9-442b-a73f-182a58a0ce40",[],{"title":498,"address":501,"country":504,"abbreviation":505},{"EN":499,"VI":500},"Can Tho University of Medicine and Pharmacy","Trường Đại học Y Dược Cần Thơ",{"EN":502,"VI":503},"No 179, Nguyen Van Cu street, An Khanh ward, Ninh Kieu district, Can Tho city, Vietnam","Số 179, đường Nguyễn Văn Cừ, phường An Khánh, quận Ninh Kiều, thành phố Cần Thơ, Việt Nam",{"VOID":15},{"VOID":506},"ctump","http:\u002F\u002Fwww.ctump.edu.vn\u002F",[],[],"https:\u002F\u002Ftapchi.ctump.edu.vn\u002Findex.php\u002Fctump",{"impactFactor":32,"impactFactorByYear":512,"i10Index":32,"i10IndexLast5Year":32,"totalPublication":514,"totalPublicationByYear":515,"totalCitation":520,"totalCitationByYear":521,"totalCitationPerPublication":108,"totalCitationPerPublicationByYear":523,"hindexLast5Year":45,"hindex":45},{"2022":513,"2023":111,"2024":106},0.01,1556,{"2020":47,"2021":516,"2022":517,"2023":518,"2024":519,"2025":122},57,306,801,358,161,{"2021":146,"2022":280,"2023":522},99,{"2021":524,"2022":318,"2023":104},0.23,{"impactFactor":28,"impactFactorByYear":28,"i10Index":123,"i10IndexLast5Year":123,"totalPublication":526,"totalPublicationByYear":527,"totalCitation":526,"totalCitationByYear":528,"totalCitationPerPublication":40,"totalCitationPerPublicationByYear":531,"hindexLast5Year":49,"hindex":49},476,{"0":205,"2019":123,"2021":139,"2022":459,"2023":451,"2024":357,"2025":49,"2026":48},{"2021":42,"2022":123,"2023":161,"2024":529,"2025":360,"2026":530},136,83,{"2021":105,"2022":513,"2023":532,"2024":127,"2025":533,"2026":534},0.62,25.43,13.83,{"id":536,"createTime":537,"updateTime":382,"relativeEntities":538,"slug":539,"properties":540,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":28,"languages":552,"translateLanguages":28,"viewCount":133,"subjectFields":553,"manageAffiliations":554,"indexDatabases":555,"url":556,"thumbnailPath":557,"statistic":558,"gsStatistic":594,"type":55,"analyzePriority":28},"6984a56a-db70-403b-9cc4-4013e1ceaffa","2023-05-09T06:47:40.346+00:00",[],"T%E1%BA%A1p%20ch%C3%AD%20Nghi%C3%AAn%20c%E1%BB%A9u%20n%C6%B0%E1%BB%9Bc%20ngo%C3%A0i",{"country":541,"issn":542,"title":544,"introduce":547,"gsId":550},{"VOID":15},{"VOID":543},"25252445",{"EN":545,"VI":546},"VNU Journal of Foreign Studies","Tạp chí Nghiên cứu nước ngoài",{"EN":548,"VI":549},"{\"ops\":[{\"insert\":\"\\n\\nThe \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science\"},{\"insert\":\"\\n was established in 1985 for the publication of national and international research papers in all fields of natural sciences and technology, social sciences and humanities. Since then, the journal has grown in quality, size and scope and now comprises a dozen of serials spanning academic research. In 2002, with the rapid expansion of the field of Foreign Languages and International Studies, the \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science\"},{\"insert\":\"\\n was delighted to announce the launch of the \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science: Foreign Studies\"},{\"insert\":\"\\n.\\n\\n\\nSince 2017, as a natural development from its predecessor \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science: Foreign Studies\"},{\"insert\":\"\\n, the\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\" \"},{\"attributes\":{\"italic\":true,\"bold\":true},\"insert\":\"VNU Journal of Foreign Studies \"},{\"insert\":\"\\ncontinues to be an official, independent publication of the University of Languages and International Studies (ULIS) under Vietnam National University (VNU).\\nThe\\n\"},{\"attributes\":{\"italic\":true,\"bold\":true},\"insert\":\" VNU Journal of Foreign Studies\"},{\"attributes\":{\"italic\":true},\"insert\":\" \"},{\"insert\":\"\\npublishes \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"blind\"},{\"insert\":\"\\n \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"peer-reviewed\"},{\"insert\":\"\\n research papers, discussions and reviews concerning:\\nLinguisticsForeign language educationInternational studiesRelated social sciences and humanities\\nBimonthly in 4 English editions and 2 Vietnamese editions in the current year in both print and electronic forms, the journal provides maximum exposure for published articles, making research available to all to read and share.\\n\\n\\n\"}]}","{\"ops\":[{\"attributes\":{\"italic\":true},\"insert\":\"Tạp chí Khoa học, Đại học Quốc gia Hà Nội\"},{\"insert\":\"\\n được thành lập năm 1985 với mục đích xuất bản các bài báo nghiên cứu trong nước và quốc tế về tất cả các lĩnh vực khoa học tự nhiên và công nghệ, khoa học xã hội và nhân văn. Kể từ đó, tạp chí đã phát triển về chất lượng, quy mô và phạm vi với hàng chục số báo liên quan đến nghiên cứu học thuật. Năm 2002, với sự phát triển nhanh chóng của lĩnh vực Ngoại ngữ và Quốc tế học, \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"Tạp chí Khoa học Đại học Quốc gia Hà Nội\"},{\"insert\":\"\\n đã vui mừng thông báo ra mắt Chuyên san \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"Nghiên cứu Nước ngoài.\"},{\"insert\":\"\\n\\n\\nKể từ năm 2017, như một sự kế thừa và phát triển từ tiền thân Chuyên san \\n\"},{\"attributes\":{\"italic\":true},\"insert\":\"Nghiên cứu Nước ngoài\"},{\"insert\":\"\\n của Tạp chí Khoa học, Đại học Quốc gia Hà Nội, \\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Tạp chí\"},{\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\" \"},{\"insert\":\"\\n\"},{\"attributes\":{\"italic\":true,\"bold\":true},\"insert\":\"Nghiên cứu nước ngoài \"},{\"insert\":\"\\ntiếp tục là ấn phẩm khoa học chính thức và độc lập của Trường Đại học Ngoại ngữ, Đại học Quốc gia Hà Nội.\\nTạp chí \\n\"},{\"attributes\":{\"italic\":true,\"bold\":true},\"insert\":\"Nghiên cứu nước ngoài\"},{\"insert\":\"\\n xuất bản các bài báo nghiên cứu, trao đổi và đánh giá đã được phản biện kín về:\\nNgôn ngữ họcGiảng dạy ngoại ngữ\u002Fngôn ngữQuốc tế họcCác ngành khoa học xã hội và nhân văn có liên quan\\nTạp chí xuất bản định kì 06 số\u002Fnăm (gồm 04 số tiếng Anh\u002Fnăm và 2 số tiếng Việt\u002Fnăm) dưới dạng bản in và bản điện tử. Tạp chí cung cấp khả năng tiếp cận tối đa tới các bài báo đã xuất bản nhằm giúp độc giả dễ dàng đọc và chia sẻ.\\n\"}]}",{"VOID":551},"jyihv3YAAAAJ",[30,31],[],[],[],"https:\u002F\u002Fjfs.ulis.vnu.edu.vn\u002Findex.php\u002Ffs","\u002Fapi\u002Fpublic\u002Ffile\u002Fpublisher\u002F6984a56a-db70-403b-9cc4-4013e1ceaffa\u002F92693604f5caf63c64520c5c2cd756b5.jpg",{"impactFactor":32,"impactFactorByYear":559,"i10Index":560,"i10IndexLast5Year":205,"totalPublication":561,"totalPublicationByYear":562,"totalCitation":568,"totalCitationByYear":569,"totalCitationPerPublication":579,"totalCitationPerPublicationByYear":580,"hindexLast5Year":140,"hindex":140},{"2007":317,"2010":112,"2011":109,"2012":421,"2013":165,"2014":421,"2015":421,"2016":111,"2017":116,"2018":104,"2019":109,"2020":320,"2021":284,"2022":168,"2023":116,"2024":108},67,1200,{"2002":51,"2003":51,"2004":47,"2005":352,"2006":142,"2007":131,"2008":147,"2009":139,"2010":278,"2011":138,"2012":69,"2013":206,"2014":137,"2015":69,"2016":196,"2017":563,"2018":209,"2019":564,"2020":565,"2021":566,"2022":530,"2023":567,"2024":428,"2025":281},130,78,90,80,61,3204,{"2002":42,"2003":123,"2004":123,"2005":570,"2006":47,"2007":127,"2008":571,"2009":572,"2010":196,"2011":573,"2012":130,"2013":560,"2014":574,"2015":149,"2016":325,"2017":575,"2018":576,"2019":577,"2020":578,"2021":453,"2022":206,"2023":205,"2025":51},189,223,765,246,98,171,377,355,199,2.67,{"2002":194,"2003":116,"2004":365,"2005":581,"2006":582,"2007":226,"2008":583,"2009":584,"2010":585,"2011":586,"2012":228,"2013":585,"2014":587,"2015":588,"2016":589,"2017":232,"2018":590,"2019":591,"2020":592,"2021":593,"2022":347,"2023":318,"2025":316},5.73,0.31,7.19,20.68,1.24,7.03,2.58,1.59,1.33,4.05,4.55,2.21,2.95,{"impactFactor":28,"impactFactorByYear":28,"i10Index":595,"i10IndexLast5Year":596,"totalPublication":597,"totalPublicationByYear":598,"totalCitation":609,"totalCitationByYear":610,"totalCitationPerPublication":625,"totalCitationPerPublicationByYear":626,"hindexLast5Year":142,"hindex":152},379,311,2120,{"0":361,"1960":40,"1971":40,"1975":40,"1987":40,"1988":40,"1989":40,"1990":45,"1992":40,"1993":40,"1994":46,"1995":46,"1996":45,"1997":42,"1998":49,"1999":42,"2000":123,"2001":42,"2002":48,"2003":46,"2004":145,"2005":131,"2006":51,"2007":131,"2008":135,"2009":146,"2010":127,"2011":122,"2012":148,"2013":352,"2014":201,"2015":149,"2016":599,"2017":600,"2018":601,"2019":209,"2020":602,"2021":603,"2022":604,"2023":605,"2024":606,"2025":607,"2026":608},77,75,97,143,167,156,182,231,230,128,13225,{"2003":149,"2004":150,"2005":201,"2006":196,"2007":157,"2008":436,"2009":328,"2010":611,"2011":612,"2012":333,"2013":522,"2014":613,"2015":520,"2016":614,"2017":615,"2018":616,"2019":617,"2020":618,"2021":619,"2022":620,"2023":621,"2024":622,"2025":623,"2026":624},74,88,146,228,310,347,413,636,944,1261,1400,1846,2511,1882,6.24,{"2003":627,"2004":628,"2005":629,"2006":630,"2007":186,"2008":631,"2009":45,"2010":632,"2011":633,"2012":634,"2013":42,"2014":635,"2015":636,"2016":192,"2017":637,"2018":638,"2019":628,"2020":639,"2021":640,"2022":641,"2023":642,"2024":643,"2025":644,"2026":645},9.2,4.44,1.64,2.8,2.43,4.35,3.83,3.03,3.56,3.5,4.13,3.58,4.45,5.65,8.08,7.69,7.99,10.92,14.7,{"id":647,"createTime":648,"updateTime":382,"relativeEntities":649,"slug":650,"properties":651,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":664,"languages":665,"translateLanguages":28,"viewCount":142,"subjectFields":666,"manageAffiliations":667,"indexDatabases":668,"url":677,"thumbnailPath":678,"statistic":679,"gsStatistic":699,"type":55,"analyzePriority":28},"21d239d8-ac9d-48c7-a176-9d8aadc5eba5","2023-08-21T02:43:48.721+00:00",[],"Khoa-h%E1%BB%8Dc-%C4%90HQGHN-Khoa-h%E1%BB%8Dc-T%E1%BB%B1-nhi%C3%AAn-v%C3%A0-C%C3%B4ng-ngh%E1%BB%87",{"country":652,"eissn":653,"issn":655,"title":657,"introduce":660,"gsId":662},{"VOID":15},{"VOID":654},"25881140",{"VOID":656},"26159317",{"EN":658,"VI":659},"VNU Journal of Science: Natural Science and Technology","Khoa học ĐHQGHN: Khoa học Tự nhiên và Công nghệ",{"EN":661},"{\"ops\":[{\"insert\":\"The \"},{\"attributes\":{\"italic\":true},\"insert\":\"Journal\"},{\"insert\":\" \"},{\"attributes\":{\"italic\":true},\"insert\":\"of\"},{\"insert\":\" \"},{\"attributes\":{\"italic\":true},\"insert\":\"Science\"},{\"insert\":\" was established in 1985 for the publication of national and international research papers in all fields of natural sciences and technology, social sciences and humanities. Since then, the journal has grown in quality, size and scope and now comprises a dozen of serials spanning academic research.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"With the rapid expansion of the field of Economics, the VNU \"},{\"attributes\":{\"italic\":true},\"insert\":\"Journal\"},{\"insert\":\" \"},{\"attributes\":{\"italic\":true},\"insert\":\"of\"},{\"insert\":\" \"},{\"attributes\":{\"italic\":true},\"insert\":\"Science\"},{\"insert\":\" is delighted to announce the launch of the \"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science: Natural Sciences and Technology (JS: NST) \"},{\"insert\":\"since 1985. This serial publication provides researchers with the opportunity to publish research covering aspects in these areas in the popular \"},{\"attributes\":{\"italic\":true},\"insert\":\"VNU Journal of Science\"},{\"insert\":\" series.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"As a fully open access publication, the journal will provide maximum exposure for published articles, making the research available to all to read and share. The journal will be published quarterly in March, June, September and December.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Scope\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"JS: NST is an open access journal publishing double-blinded peer-reviewed research papers, communications and reviews dealing with Biology, Bio-technology, Chemistry, Chemical engineering, Energy, Environmental technology and Materials engineering.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Publication Ethics\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"VNUJS is committed to maintaining the highest standards of publication ethics and takes all possible measures against any publication malpractices. The journal follows the guidelines and recommendations of the Committee on Publication Ethics (C.O.P.E) to ensure ethical publishing practices.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"Plagiarism is strictly prohibited and will not be tolerated. Any form of plagiarism, including but not limited to copying, paraphrasing, or reusing previously published work without proper attribution, will result in rejection of the manuscript and potential sanctions against the author. VNUJS utilizes DoIt as plagiarism detection software to verify the originality of submitted manuscripts.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"The publication ethics statement with full detail of the responsibilities of authors, reviewers and editors can be found \"},{\"attributes\":{\"bold\":true,\"color\":\"#464d50\",\"background\":\"transparent\",\"link\":\"https:\u002F\u002Fjs.vnu.edu.vn\u002FNST\u002Fethics\"},\"insert\":\"here\"},{\"attributes\":{\"bold\":true},\"insert\":\".\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Peer Review Process\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"Any manuscript followed the journal’s scope and author guideline will be assigned to the managing editors. All manuscripts have undergone editorial screening and anonymous double-blind peer-review by the at least one independent expert in the field. The managing editor makes an editorial decision, which is subject to endorsement by the Editor – in - Chief.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"The journal publishing process can be found in detail \"},{\"attributes\":{\"bold\":true,\"color\":\"#464d50\",\"background\":\"transparent\",\"link\":\"https:\u002F\u002Fdrive.google.com\u002Ffile\u002Fd\u002F136BOGahfq9_5BB3TzSBsLBkQKfCUe5yN\u002Fview?usp=share_link\"},\"insert\":\"here\"},{\"insert\":\".\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"\\n\"}]}",{"VOID":663},"ZfBridMAAAAJ","Admin update database",[30,31],[],[],[669],{"id":670,"indexDatabase":671,"url":676,"indexYears":28,"academicFieldIds":28,"indexDatabaseRanking":28},"6684da33-2cb9-49f9-8332-28f0bcd72e39",{"id":88,"createTime":28,"updateTime":28,"relativeEntities":672,"label":673,"description":674,"key":94,"publicationTags":675,"standard":28},[],{"EN":91,"VI":91},{"EN":93,"VI":93},[96],"https:\u002F\u002Fasean-cites.org\u002Fjournal_info?jid=11968","https:\u002F\u002Fjs.vnu.edu.vn\u002FNST","\u002Fapi\u002Fpublic\u002Ffile\u002Fpublisher\u002F21d239d8-ac9d-48c7-a176-9d8aadc5eba5\u002Fb081d4211e382646c2cdc054ead551b3.jpg",{"impactFactor":32,"impactFactorByYear":680,"i10Index":130,"i10IndexLast5Year":40,"totalPublication":682,"totalPublicationByYear":683,"totalCitation":685,"totalCitationByYear":686,"totalCitationPerPublication":691,"totalCitationPerPublicationByYear":692,"hindexLast5Year":47,"hindex":47},{"2000":317,"2005":513,"2007":107,"2010":513,"2011":317,"2012":106,"2013":107,"2014":317,"2015":107,"2016":107,"2017":421,"2018":317,"2019":421,"2020":113,"2021":582,"2022":681,"2023":194,"2024":104},0.19,1700,{"1985":131,"1986":353,"1987":130,"1988":69,"1989":69,"1990":200,"1991":196,"1992":146,"1993":279,"1994":148,"1995":200,"1996":201,"1999":278,"2000":140,"2001":128,"2002":202,"2003":353,"2004":138,"2005":202,"2006":136,"2007":278,"2008":139,"2009":137,"2010":141,"2011":278,"2012":132,"2013":202,"2014":202,"2015":278,"2016":684,"2017":359,"2018":160,"2019":162,"2020":281,"2021":157,"2022":436,"2023":358,"2024":136,"2025":135},165,870,{"1995":123,"1999":123,"2001":45,"2002":130,"2003":40,"2004":123,"2005":42,"2007":69,"2008":687,"2009":352,"2010":688,"2011":137,"2012":127,"2013":47,"2014":46,"2015":146,"2016":331,"2017":689,"2018":331,"2019":690,"2020":353,"2021":567,"2022":130,"2023":357},82,60,55,102,0.51,{"1995":421,"1999":165,"2001":167,"2002":532,"2003":107,"2004":165,"2005":111,"2007":693,"2008":694,"2009":287,"2010":445,"2011":695,"2012":119,"2013":319,"2014":318,"2015":696,"2016":338,"2017":118,"2018":697,"2019":219,"2020":698,"2021":341,"2022":423,"2023":111},0.85,2.22,1.12,0.38,2.19,0.88,{"impactFactor":28,"impactFactorByYear":28,"i10Index":126,"i10IndexLast5Year":123,"totalPublication":570,"totalPublicationByYear":700,"totalCitation":701,"totalCitationByYear":702,"totalCitationPerPublication":703,"totalCitationPerPublicationByYear":704,"hindexLast5Year":46,"hindex":205},{"0":48,"1999":146,"2000":47,"2001":45,"2002":40,"2003":199,"2004":123,"2005":42,"2006":123,"2007":145,"2008":145,"2009":46,"2010":49,"2011":47,"2012":47,"2013":49,"2014":45,"2015":45,"2016":157,"2017":40},425,{"2008":42,"2009":357,"2010":47,"2011":51,"2012":199,"2013":135,"2014":323,"2015":51,"2016":278,"2017":69,"2018":69,"2019":137,"2020":142,"2021":140,"2022":148,"2023":122,"2024":202,"2025":135,"2026":126},2.25,{"2008":169,"2009":705,"2010":706,"2011":707,"2012":342,"2013":42,"2014":636,"2015":708,"2016":709,"2017":69},1.6,1.57,1.36,3.75,0.54,{"id":711,"createTime":712,"updateTime":382,"relativeEntities":713,"slug":714,"properties":715,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":664,"languages":28,"translateLanguages":28,"viewCount":150,"subjectFields":727,"manageAffiliations":728,"indexDatabases":729,"url":730,"thumbnailPath":731,"statistic":732,"gsStatistic":738,"type":55,"analyzePriority":28},"954132b5-ca74-461c-b819-45ad6e49a404","2023-08-17T03:30:52.301+00:00",[],"HPU2-Journal-of-Science-Natural-Sciences-and-Technology",{"country":716,"issn":717,"title":719,"introduce":722,"gsId":725},{"VOID":15},{"VOID":718},"28155637",{"EN":720,"VI":721},"HPU2 Journal of Science: Natural Sciences and Technology","TẠP CHÍ KHOA HỌC TRƯỜNG ĐHSP HÀ NỘI 2: CHUYÊN SAN KHOA HỌC TỰ NHIÊN VÀ CÔNG NGHỆ",{"EN":723,"VI":724},"{\"ops\":[{\"insert\":\"HPU2 journal of Science aims to provide an interdisciplinary platform for the dissemination of advances in sciences and technology. The journal publishes original papers of scientific or technological value in all areas of natural, social or educational sciences.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"The main interest of HPU2 Journal of Science: Natural sciences and technology is in papers that describe valuable findings in physics, mathematics, chemistry, biology; solving engineering or technological problems.\"},{\"attributes\":{\"align\":\"justify\",\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"The main interest of HPU2 Journal of Science: Social Sciences and Humanity is to facilitate the publication of high-quality papers in various areas of social sciences and studies for human development.\"},{\"attributes\":{\"align\":\"justify\",\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"The main interest of HPU2 Journal of Science: Educational Sciences is to publish papers in the field of educational sciences and applications of advances to education for improving and enhancing science education at all levels.\"},{\"attributes\":{\"align\":\"justify\",\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"Papers that are published by HPU2 Journal of Science are doubled-blind, peer-reviewed by at least two experts, are evaluated by the section editor and editor in chief.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Types of Articles\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"Research articles\"},{\"attributes\":{\"align\":\"justify\",\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"Academic reports of original research that have never been published elsewhere in any languages. Manuscripts, where appropriate, should contain the following sections in the order: Title, Authors, Author affiliations, Email address of corresponding authors, Abstract, Keywords, Nomenclature (if any), Introduction, Experiment, Theory, Results and Discussion, Conclusions, Conflict of Interest, Acknowledgments (if any), References, Appendix (if any). Pre-published are to be formatted according to Templates (MS-Word version). \"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"Review articles\"},{\"attributes\":{\"align\":\"justify\",\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"In addition to invited reviews, literature reviews, systematic reviews, and critical reviews will be accepted for consideration. The manuscript should be composed and organized according to the required sequence: Titles, Author names, Affiliations, Email addresses, Abstract, Keywords, Main text, Conclusion, Conflict of Interest, Acknowledgments (if any), References. Although, the main text structure may vary based on the review subtopics, the articles should be formatted according to suitable Templates as research articles.\"},{\"attributes\":{\"align\":\"justify\"},\"insert\":\"\\n\"},{\"insert\":\"\\n\"}]}","{\"ops\":[{\"insert\":\"Tạp chí Khoa học Trường ĐHSP Hà Nội 2 nhằm mục đích cung cấp một nền tảng liên ngành của sự phổ biến những tiến bộ của khoa học và công nghệ. Tạp chí xuất bản các bài báo gốc có giá trị khoa học hoặc công nghệ trong tất cả các lĩnh vực khoa học tự nhiên, xã hội hoặc giáo dục.\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Chuyên san Khoa học tự nhiên và công nghệ:\"},{\"insert\":\" Là các bài báo mô tả những phát hiện có giá trị trong vật lý, toán học, hóa học, sinh học; giải quyết các vấn đề kỹ thuật hoặc công nghệ.\"},{\"attributes\":{\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Chuyên san Khoa học Xã hội và Nhân văn:\"},{\"insert\":\" là các bài báo xuất bản chất lượng cao trong các lĩnh vực khác nhau của khoa học xã hội và nghiên cứu phát triển con người.\"},{\"attributes\":{\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Chuyên san Khoa học giáo dục:\"},{\"insert\":\" là các bài báo xuất bản trong lĩnh vực khoa học giáo dục và các ứng dụng của tiến bộ vào giáo dục để cải thiện và nâng cao giáo dục khoa học ở tất cả các cấp.\"},{\"attributes\":{\"list\":\"bullet\"},\"insert\":\"\\n\"},{\"insert\":\"Tạp chí trường ĐHSP Hà Nội 2 xuất bản được phản biện kín, xét duyệt bởi ít nhất 02 chuyên gia, và được đánh giá, chọn lựa từ ban biên tập và Tổng biên tập.\\n\"},{\"attributes\":{\"bold\":true},\"insert\":\"Các loại bài báo\"},{\"insert\":\":\\nBài báo nghiên cứu:\"},{\"attributes\":{\"list\":\"ordered\"},\"insert\":\"\\n\"},{\"insert\":\"Báo cáo học thuật về nghiên cứu ban đầu chưa từng được xuất bản ở bất kỳ nơi nào, hay bằng bất kỳ ngôn ngữ nào khác. Bản thảo thích hợp, nên chứa các phần sau theo thứ tự: Tiêu đề, Tác giả, Liên kết tác giả, Địa chỉ email của tác giả tương ứng, Tóm tắt, Từ khóa, Danh pháp (nếu có), Giới thiệu, Thử nghiệm, Lý thuyết, Kết quả và thảo luận, Kết luận, Xung đột quan tâm, Lời cảm ơn (nếu có), Tài liệu tham khảo, Phụ lục (nếu có). Bản xuất bản trước phải được định dạng theo Mẫu (phiên bản MS-Word).\\n2. Bài báo tổng quan:\\nNgoài các bài phê bình được mời, các bài phê bình tài liệu, bài phê bình có hệ thống và bài phê bình sẽ được chấp nhận để xem xét. Bản thảo cần được soạn thảo và sắp xếp theo trình tự yêu cầu: Tên sách, Tên tác giả, Liên kết, Địa chỉ email, Tóm tắt, Từ khóa, Nội dung chính, Kết luận, Xung đột lợi ích, Lời cảm ơn (nếu có), Tài liệu tham khảo. Mặc dù, cấu trúc văn bản chính có thể thay đổi dựa trên các chủ đề phụ của bài đánh giá, các bài báo nên được định dạng theo các Mẫu phù hợp như các bài báo nghiên cứu.\\n\"}]}",{"VOID":726},"YPoBvsIAAAAJ",[],[],[],"https:\u002F\u002Fsj.hpu2.edu.vn\u002Findex.php\u002Fjournal","\u002Fapi\u002Fpublic\u002Ffile\u002Fpublisher\u002F954132b5-ca74-461c-b819-45ad6e49a404\u002F2790ef1d0a7d7a40a504c2fc1647f670.jpg",{"impactFactor":32,"impactFactorByYear":733,"i10Index":32,"i10IndexLast5Year":32,"totalPublication":329,"totalPublicationByYear":735,"totalCitation":134,"totalCitationByYear":736,"totalCitationPerPublication":524,"totalCitationPerPublicationByYear":737,"hindexLast5Year":123,"hindex":123},{"2024":734},0.17,{"2022":136,"2023":278,"2024":142},{"2022":357,"2023":126,"2024":123},{"2022":169,"2023":224,"2024":165},{"impactFactor":28,"impactFactorByYear":28,"i10Index":45,"i10IndexLast5Year":45,"totalPublication":330,"totalPublicationByYear":739,"totalCitation":154,"totalCitationByYear":740,"totalCitationPerPublication":741,"totalCitationPerPublicationByYear":742,"hindexLast5Year":46,"hindex":46},{"0":123,"2022":134,"2023":136,"2024":69,"2025":145},{"2023":46,"2024":136,"2025":201,"2026":278},1.22,{"2023":113,"2024":340,"2025":743},4.56,{"id":745,"createTime":746,"updateTime":747,"relativeEntities":748,"slug":749,"properties":750,"entityType":25,"verifyStatus":26,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":69,"subjectFields":762,"manageAffiliations":763,"indexDatabases":771,"url":817,"thumbnailPath":28,"statistic":818,"gsStatistic":850,"type":55,"analyzePriority":28},"21ccdb34-414d-420f-8a60-a592a2fa848e","2023-05-29T10:42:53.358+00:00","2026-08-27T01:57:29.560+00:00",[],"Vietnam-Journal-of-Earth-Sciences",{"country":751,"eissn":752,"issn":754,"title":756,"introduce":758,"gsId":760},{"VOID":15},{"VOID":753},"26159783",{"VOID":755},"08667187",{"EN":757},"Vietnam Journal of Earth Sciences",{"EN":759},"Science of the Earth, formerly Vietnam Journal of Earth Sciences, is a peer-reviewed journal to publish high-quality articles on the entire range of earth sciences and the environment, focused on the Asia Pacific region and their correlations and connections to the globe. The journal publishes fundamental and applied research in earth sciences and the environment, including geology, geophysics, geography, soil science, hydrology, meteorology, oceanography, petroleum, geohazards, environmental sciences, environmental engineering, sustainable development, geoinformatics, geodesy, GIS, and remote sensing.",{"VOID":761},"5htfr3YAAAAJ",[],[764],{"id":73,"createTime":28,"updateTime":28,"relativeEntities":765,"slug":28,"properties":766,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":82,"parentIds":770,"statistic":28},[],{"title":767,"country":768,"abbreviation":769},{"EN":77,"VI":78},{"VOID":15},{"VOID":81},[],[772,789,806],{"id":773,"indexDatabase":774,"url":786,"indexYears":28,"academicFieldIds":787,"indexDatabaseRanking":28},"06f278ee-37b9-41eb-a9b0-3d2d77fa502b",{"id":775,"createTime":28,"updateTime":28,"relativeEntities":776,"label":777,"description":779,"key":782,"publicationTags":783,"standard":28},"88bab0f7-443b-476c-a72a-7fa5222da393",[],{"EN":778,"VI":778},"ISI\u002FESCI  - Emerging Sources Citation Index",{"EN":780,"VI":781},"ESCI database","Cơ sở dữ liệu ESCI","esci",[784,785],"ESCI","ISI","https:\u002F\u002Fmjl.clarivate.com\u002Fsearch-results?issn=0866-7187",[788],"0db73426-2364-455f-81a4-efe0f91d712e",{"id":790,"indexDatabase":791,"url":801,"indexYears":802,"academicFieldIds":803,"indexDatabaseRanking":805},"6ace2085-a177-4a27-b309-8813b832111e",{"id":792,"createTime":28,"updateTime":28,"relativeEntities":793,"label":794,"description":796,"key":798,"publicationTags":799,"standard":28},"3c7051d4-eb7d-4c57-a56b-36fc74c5d1e9",[],{"EN":795,"VI":795},"Scopus - Elsevier",{"EN":795,"VI":797},"Cơ sở dữ liệu Scopus thuộc Elsevier","scopus",[800],"SCOPUS","https:\u002F\u002Fwww.scopus.com\u002Fsourceid\u002F21101039869","2018-2024",[804],"1689391c-5702-4349-aaa7-d720ee4321fc","NONE",{"id":807,"indexDatabase":808,"url":813,"indexYears":814,"academicFieldIds":815,"indexDatabaseRanking":28},"dadb15a8-ee22-41c2-a287-49e969d9a998",{"id":88,"createTime":28,"updateTime":28,"relativeEntities":809,"label":810,"description":811,"key":94,"publicationTags":812,"standard":28},[],{"EN":91,"VI":91},{"EN":93,"VI":93},[96],"https:\u002F\u002Fasean-cites.org\u002Fjournal_info?jid=10629","2016-2022",[816],"e04f14cf-280b-4aa8-b711-b77ddd79cbaf","https:\u002F\u002Fvjs.ac.vn\u002Findex.php\u002Fjse\u002F",{"impactFactor":32,"impactFactorByYear":819,"i10Index":151,"i10IndexLast5Year":132,"totalPublication":824,"totalPublicationByYear":825,"totalCitation":827,"totalCitationByYear":828,"totalCitationPerPublication":838,"totalCitationPerPublicationByYear":839,"hindexLast5Year":129,"hindex":129},{"2007":513,"2008":513,"2010":513,"2011":107,"2012":513,"2013":513,"2014":317,"2015":107,"2016":54,"2017":168,"2018":222,"2019":820,"2020":821,"2021":371,"2022":445,"2023":822,"2024":823},1.03,1.08,1.49,1.43,1180,{"2000":689,"2001":688,"2002":281,"2003":160,"2004":279,"2005":325,"2006":516,"2007":137,"2008":200,"2009":162,"2010":436,"2011":826,"2012":434,"2013":689,"2014":280,"2015":152,"2016":150,"2017":148,"2018":352,"2019":147,"2020":152,"2021":69,"2022":148,"2023":280,"2024":139,"2025":45},79,2421,{"2000":205,"2001":51,"2002":145,"2003":146,"2004":126,"2005":51,"2006":130,"2007":128,"2008":127,"2009":152,"2010":122,"2011":137,"2012":567,"2013":200,"2014":829,"2015":687,"2016":830,"2017":831,"2018":832,"2019":833,"2020":834,"2021":835,"2022":836,"2023":837,"2024":145,"2025":40},73,197,219,380,281,328,148,183,160,2.05,{"2000":365,"2001":168,"2002":365,"2003":167,"2004":168,"2005":121,"2006":224,"2007":840,"2008":118,"2009":367,"2010":284,"2011":170,"2012":707,"2013":693,"2014":822,"2015":841,"2016":842,"2017":843,"2018":844,"2019":845,"2020":846,"2021":847,"2022":848,"2023":849,"2024":52,"2025":168},0.47,1.91,4.93,7.3,11.52,9.06,7.63,5.1,6.1,3.27,{"impactFactor":28,"impactFactorByYear":28,"i10Index":435,"i10IndexLast5Year":155,"totalPublication":130,"totalPublicationByYear":851,"totalCitation":852,"totalCitationByYear":853,"totalCitationPerPublication":860,"totalCitationPerPublicationByYear":861,"hindexLast5Year":136,"hindex":133},{"1017":40,"2015":40,"2016":123,"2017":42,"2018":42,"2019":40,"2020":45,"2022":123,"2023":123,"2024":40},3528,{"2014":323,"2015":140,"2016":201,"2017":158,"2018":522,"2019":613,"2020":854,"2021":855,"2022":701,"2023":856,"2024":857,"2025":858,"2026":859},280,403,436,525,589,366,176.4,{"2015":140,"2016":862,"2017":134,"2018":352,"2019":613,"2020":159,"2022":863,"2023":864,"2024":857},20.5,212.5,218,{"code":866,"data":867,"meta":28},"SUCCESS",{"id":868,"createTime":869,"updateTime":870,"relativeEntities":871,"slug":872,"properties":873,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":885,"manageAffiliations":904,"indexDatabases":919,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},"2d0cdaa0-5071-4c26-8dbd-6ae22bfc3e29","2023-05-29T10:43:01.599+00:00","2025-11-21T10:01:33.451+00:00",[],"Journal-of-Vacuum-Science-and-Technology-A-Vacuum-Surfaces-and-Films",{"country":874,"eissn":876,"issn":878,"title":880,"introduce":882},{"VOID":875},"US",{"VOID":877},"15208559",{"VOID":879},"07342101",{"EN":881},"Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films",{"EN":883},"In 1983, the two journals, Journal of Vacuum Science and Technology A and B were launched when the original Journal of Vacuum Science and Technology was split. JVSTA is devoted to publishing reports of original research, letters, and review articles on interfaces and surfaces of materials, thin films, and plasmas. JVSTA publishes reports that advance the fundamental understanding of interfaces and surfaces at a fundamental level and that use this understanding to advance the state of the art in various technological applications. The scope includes, but is not limited to, the following topics: -Applied and fundamental surface science -Atomic layer deposition -Electronic and photonic materials and their processing -Magnetic thin films and interfaces -Materials and thin films for energy conversion and storage -Photovoltaics, including inorganic and organic thin-film solar cells -Plasma science and technology, including plasma-surface interactions, plasma diagnostics plasma deposition and etching, and applications of plasmas to micro- and nanoelectronics -Surface engineering -Thin film deposition, etching, properties, and characterization -Transmission electron microscopy, including in situ methods -Tribology","PENDING",[886,892,898],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":888,"label":889,"description":891,"parentId":28,"standard":28,"scholarHubFieldId":28},"cf3aa2e4-1bc6-404f-a558-6e04a0efe9bb",[],{"EN":890},"Surfaces, Coatings and Films",{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":894,"label":895,"description":897,"parentId":28,"standard":28,"scholarHubFieldId":28},"ed0aa0df-89f8-44de-aefa-aa06eafdfb6f",[],{"EN":896},"Surfaces and Interfaces",{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":900,"label":901,"description":903,"parentId":28,"standard":28,"scholarHubFieldId":28},"92b6979a-8d2f-4ae3-b057-43b6e548593e",[],{"EN":902},"Condensed Matter Physics",{},[905,912],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":907,"slug":28,"properties":908,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":911,"statistic":28},"85188a8d-2da2-4a9f-88e7-bc37c7dfa938",[],{"title":909},{"EN":910},"A V S AMER INST PHYSICS",[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":914,"slug":28,"properties":915,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":918,"statistic":28},"4425b469-afcb-4e91-a5f6-5565133d866a",[],{"title":916},{"EN":917},"AVS Science and Technology Society",[],[920,934],{"id":921,"indexDatabase":922,"url":927,"indexYears":928,"academicFieldIds":929,"indexDatabaseRanking":933},"68675bbd-ec43-4b3e-9459-1d57dd1f6dd7",{"id":792,"createTime":28,"updateTime":28,"relativeEntities":923,"label":924,"description":925,"key":798,"publicationTags":926,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],"https:\u002F\u002Fwww.scopus.com\u002Fsourceid\u002F28596","1970,1982-2025",[930,931,932],"71c20870-549f-47ca-ab5d-72466dbb5bc3","39de1505-f359-4a51-ae5d-209d8ced6c54","1ecff757-a023-4b19-bdfb-1a30a5bece6b","SCOPUS__Q1",{"id":935,"indexDatabase":936,"url":947,"indexYears":28,"academicFieldIds":948,"indexDatabaseRanking":28},"297a7167-d17d-4b5f-b413-781e1dff6e33",{"id":937,"createTime":28,"updateTime":28,"relativeEntities":938,"label":939,"description":941,"key":944,"publicationTags":945,"standard":28},"a4921856-b128-4d9f-8f1f-e80813d3bbd4",[],{"EN":940,"VI":940},"ISI\u002FSCIE - Science Citation Index Expanded",{"EN":942,"VI":943},"SCIE database","Cơ sở dữ liệu SCIE","scie",[946,785],"SCIE","https:\u002F\u002Fmjl.clarivate.com\u002Fsearch-results?issn=0734-2101",[949,950],"91d18554-e39b-429b-be2b-552d03b674a2","0a89cee9-2df6-4b14-8fcb-700fd0044c25","https:\u002F\u002Favs.scitation.org\u002Fjournal\u002Fjva",{"meta":953,"data":955},{"total":954},"217",[956,1634,2170,2283,2428,3655,3747,3858,3949,4078],{"id":957,"createTime":958,"updateTime":958,"relativeEntities":959,"slug":960,"properties":961,"entityType":966,"verifyStatus":26,"verifyTime":958,"verifyNote":967,"languages":968,"translateLanguages":28,"viewCount":32,"primaryUrl":969,"fullTextUrl":970,"authors":971,"publicationType":1002,"publisherRelationship":1003,"citationCount":28,"citationInfo":28,"publishDate":1057,"publishYear":1058,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":1059,"openAccess":28,"references":1060,"isForceReanalyzing":1633},"08f6c37c-073c-4a01-adda-2cda4644f6b8","2024-10-01T19:16:07.524+00:00",[],"Plasma-deposition-of-optical-films-and-coatings-A-review",{"title":962,"doi":964},{"EN":963},"Plasma deposition of optical films and coatings: A review",{"VOID":965},"10.1116\u002F1.1314395","PUBLICATION","Auto Verify",[31],"https:\u002F\u002Fdoi.org\u002F10.1116\u002F1.1314395","https:\u002F\u002Fpubs.aip.org\u002Favs\u002Fjva\u002Farticle-pdf\u002F18\u002F6\u002F2619\u002F11119434\u002F2619_1_online.pdf",[972,987],{"id":973,"sortIndex":32,"researcher":28,"roles":974,"affiliations":975,"properties":984,"displayName":986,"givenName":28,"familyName":28},"a640f104-a37c-4680-be38-a12570cfdbb5",[],[976],{"id":977,"sortIndex":32,"affiliation":978,"properties":28},"5ae313c9-7bf9-418b-b188-09ab42bc6b03",{"id":977,"createTime":28,"updateTime":28,"relativeEntities":979,"slug":28,"properties":980,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":983,"statistic":28},[],{"title":981},{"EN":982},"Groupe de Recherche en Physique et Technologie des Couches Minces (GCM) and Department of Engineering Physics and Materials Engineering, École Polytechnique, C.P. 6079, Station Centre-Ville, Montréal, Québec H3C 3A7, Canada",[],{"title":985},{"EN":986},"Martinu, Ludvik",{"id":988,"sortIndex":40,"researcher":28,"roles":989,"affiliations":990,"properties":999,"displayName":1001,"givenName":28,"familyName":28},"d2806754-82cc-4d28-a57a-d6f5a56e2191",[],[991],{"id":992,"sortIndex":32,"affiliation":993,"properties":28},"a0bfb22f-269a-4686-89a7-2efcc51f2f03",{"id":992,"createTime":28,"updateTime":28,"relativeEntities":994,"slug":28,"properties":995,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":998,"statistic":28},[],{"title":996},{"VI":997},"Institute for Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario K1A 0R6, Canada",[],{"title":1000},{"EN":1001},"Poitras, Daniel","ARTICLE",{"url":28,"publisher":1004,"properties":1050},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":1005,"slug":872,"properties":1006,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":1011,"manageAffiliations":1024,"indexDatabases":1035,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":1007,"eissn":1008,"issn":1009,"title":1010},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[1012,1016,1020],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":1013,"label":1014,"description":1015,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":1017,"label":1018,"description":1019,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":1021,"label":1022,"description":1023,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[1025,1030],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":1026,"slug":28,"properties":1027,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1029,"statistic":28},[],{"title":1028},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":1031,"slug":28,"properties":1032,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1034,"statistic":28},[],{"title":1033},{"EN":917},[],[1036,1043],{"id":921,"indexDatabase":1037,"url":927,"indexYears":928,"academicFieldIds":1042,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":1038,"label":1039,"description":1040,"key":798,"publicationTags":1041,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":1044,"url":947,"indexYears":28,"academicFieldIds":1049,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":1045,"label":1046,"description":1047,"key":944,"publicationTags":1048,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":1051,"pages":1053,"volume":1055},{"VOID":1052},"6",{"VOID":1054},"2619-2645",{"VOID":1056},"18","2000-11-01",2000,[946,933],[1061,1063,1065,1067,1069,1071,1073,1075,1077,1079,1081,1083,1085,1087,1089,1091,1093,1095,1097,1099,1101,1103,1105,1107,1109,1111,1113,1115,1117,1119,1121,1123,1125,1127,1129,1131,1133,1135,1137,1139,1141,1143,1145,1147,1149,1151,1153,1155,1157,1159,1161,1163,1165,1167,1169,1171,1173,1175,1177,1179,1181,1183,1185,1187,1189,1191,1193,1195,1197,1199,1201,1203,1205,1207,1209,1211,1213,1215,1217,1219,1221,1223,1225,1227,1229,1231,1233,1235,1237,1239,1241,1243,1245,1247,1249,1251,1253,1255,1257,1259,1261,1263,1265,1267,1269,1271,1273,1275,1277,1279,1281,1283,1285,1287,1289,1291,1293,1295,1297,1299,1301,1303,1305,1307,1309,1311,1313,1315,1317,1319,1321,1323,1325,1327,1329,1331,1333,1335,1337,1339,1341,1343,1345,1347,1349,1351,1353,1355,1357,1359,1361,1363,1365,1367,1369,1371,1373,1375,1377,1379,1381,1383,1385,1387,1389,1391,1393,1395,1397,1399,1401,1403,1405,1407,1409,1411,1413,1415,1417,1419,1421,1423,1425,1427,1429,1431,1433,1435,1437,1439,1441,1443,1445,1447,1449,1451,1453,1455,1457,1459,1461,1463,1465,1467,1469,1471,1473,1475,1477,1479,1481,1483,1485,1487,1489,1491,1493,1495,1497,1499,1501,1503,1505,1507,1509,1511,1513,1515,1517,1519,1521,1523,1525,1527,1529,1531,1533,1535,1537,1539,1541,1543,1545,1547,1549,1551,1553,1555,1557,1559,1561,1563,1565,1567,1569,1571,1573,1575,1577,1579,1581,1583,1585,1587,1589,1591,1593,1595,1597,1599,1601,1603,1605,1607,1609,1611,1613,1615,1617,1619,1621,1623,1625,1627,1629,1631],{"id":28,"text":1062,"url":28,"identifiers":28},"J. A. Dobrowolski, in Optical Society of America’s Handbook of Optics , edited by M. Bass (McGraw–Hill, New York, 1995), Chap. 42. ",{"id":28,"text":1064,"url":28,"identifiers":28},"Thin Films for Optical Systems , edited by F. R. Flory (Marcel Dekker, New York, 1995). ",{"id":28,"text":1066,"url":28,"identifiers":28},"citation_author=Willey  R. R.;  citation_journal_title=Appl. Opt.;  citation_year=1996;  citation_volume=35;  citation_pages=4982",{"id":28,"text":1068,"url":28,"identifiers":28},"Proceedings 1st International Conference on Coatings on Glass (ICCG) , edited by H. K. Pulker, K. Schmidt, and M. A. Aegerter (Elsevier, Amsterdam, 1997); ",{"id":28,"text":1070,"url":28,"identifiers":28},"J. Non-Cryst. Solids 218 , 1 (1997). ",{"id":28,"text":1072,"url":28,"identifiers":28},"citation_author=Kawachi  M.;  citation_journal_title=Opt. Quantum Electron.;  citation_year=1990;  citation_volume=22;  citation_pages=391",{"id":28,"text":1074,"url":28,"identifiers":28},"citation_author=Mir  J. M.; citation_author=Agostinelli  J. A.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1994;  citation_volume=12;  citation_pages=1439",{"id":28,"text":1076,"url":28,"identifiers":28},"C. M. Lampert, working document for the International Energy Agency, task 18, advanced glazing, 1994 (unpublished). ",{"id":28,"text":1078,"url":28,"identifiers":28},"B. Hackman-Franclin, T. J. Hauser, and J. D. Jameson, U.S. Industrial Outlook 1993—Section 7, construction materials (unpublished). ",{"id":28,"text":1080,"url":28,"identifiers":28},"citation_author=Reiss  S. M.;  citation_journal_title=Opt. Photonics News;  citation_year=1997;  citation_volume=8;  citation_pages=31",{"id":28,"text":1082,"url":28,"identifiers":28},"citation_author=Dobrowolski  J. A.; citation_author=Baird  K. M.; citation_author=Carman  P. D.; citation_author=Wardorf  A.;  citation_journal_title=Opt. Acta;  citation_year=1973;  citation_volume=20;  citation_pages=925",{"id":28,"text":1084,"url":28,"identifiers":28},"citation_author=Dobrowolski  J. A.; citation_author=Ho  F. C.; citation_author=Wardorf  A.;  citation_journal_title=Appl. Opt.;  citation_year=1989;  citation_volume=28;  citation_pages=2702",{"id":28,"text":1086,"url":28,"identifiers":28},"citation_author=Phillips  R. W.; citation_author=Bleikolm  A. F.;  citation_journal_title=Appl. Opt.;  citation_year=1996;  citation_volume=35;  citation_pages=5529",{"id":28,"text":1088,"url":28,"identifiers":28},"citation_author=Szipöcs  R.; citation_author=Ferencz  K.; citation_author=Spielmann  C.; citation_author=Krausz  F.;  citation_journal_title=Opt. Lett.;  citation_year=1994;  citation_volume=19;  citation_pages=201",{"id":28,"text":1090,"url":28,"identifiers":28},"citation_author=Kartner  F.;  citation_journal_title=Opt. Lett.;  citation_year=1997;  citation_volume=22;  citation_pages=831",{"id":28,"text":1092,"url":28,"identifiers":28},"Handbook of Deposition Technologies for Films and Coatings , edited by R. F. Bunshah (Noyes, Park Ridge, NJ, 1994). ",{"id":28,"text":1094,"url":28,"identifiers":28},"Thin Films Processes II , edited by J. L. Vossen and W. Kern (Academic, New York, 1991). ",{"id":28,"text":1096,"url":28,"identifiers":28},"citation_author=Wörhoff  K.; citation_author=Lambeck  P. V.; citation_author=Driessen  A.;  citation_journal_title=J. Lightwave Technol.;  citation_year=1999;  citation_volume=17;  citation_pages=1401",{"id":28,"text":1098,"url":28,"identifiers":28},"citation_author=Dzioba  S.; citation_author=Rousina  R.;  citation_journal_title=J. Vac. Sci. Technol. B;  citation_year=1994;  citation_volume=12;  citation_pages=433",{"id":28,"text":1100,"url":28,"identifiers":28},"Thin Films on Glass, Schott Series on Glass and Glass Ceramics , edited by H. Bach and D. Krause (Springer, Berlin, 1997). ",{"id":28,"text":1102,"url":28,"identifiers":28},"J. Segner, in Thin Films for Optical Systems , edited by F. R. Flory (Marcel Dekker, New York, 1995), Chap. 7, p. 209. ",{"id":28,"text":1104,"url":28,"identifiers":28},"Rugate (rūg⋅gět), adj. Zool. [Lat. rūgare ] Having rugæ; wrinkled [definition found in Oxford English Dictionary , Oxford University Press (London, 1970)]. ",{"id":28,"text":1106,"url":28,"identifiers":28},"citation_author=Southwell  W. H.;  citation_journal_title=J. Opt. Soc. Am. A;  citation_year=1988;  citation_volume=5;  citation_pages=1558",{"id":28,"text":1108,"url":28,"identifiers":28},"W. E. Johnson and R. L. Crane, in Inhomogeneous and Quasi-Inhomogeneous Optical Coatings , edited by P. G. Verly and J. A. Dobrowolski (SPIE, Bellingham, WA, 1993), Vol. 2046, pp. 88–108. ",{"id":28,"text":1110,"url":28,"identifiers":28},"L. Martinu, in Plasma Processing of Polymers , Applied Sciences, Vol. 346, edited by R. d’Agostino, P. Favia, and F. Fracassi (NATO ASI\u002FKluwer Academic, Dordrecht, 1997), pp. 247–272. ",{"id":28,"text":1112,"url":28,"identifiers":28},"citation_author=Liston  E. M.; citation_author=Martinu  L.; citation_author=Wertheimer  M. R.;  citation_journal_title=J. Adhes. Sci. Technol.;  citation_year=1993;  citation_volume=7;  citation_pages=1091",{"id":28,"text":1114,"url":28,"identifiers":28},"M. R. Wertheimer and L. Martinu, in Handbook of Thin Film Process Technology (IOP, Bristol, 1996), Chap. E3.0. ",{"id":28,"text":1116,"url":28,"identifiers":28},"H. Biederman and L. Martinu, in Plasma Deposition, Treatment, and Etching of Polymers , edited by R. d’Agostino (Academic, New York, 1990), Chap. 4, pp. 269–320. ",{"id":28,"text":1118,"url":28,"identifiers":28},"C. A. Harper, Handbook of Plastics, Elastomers and Composites (McGraw–Hill, New York, 1992). ",{"id":28,"text":1120,"url":28,"identifiers":28},"citation_author=Kay  E.; citation_author=Coburn  J.; citation_author=Dilks  A.;  citation_journal_title=Top. Curr. Chem.;  citation_year=1980;  citation_volume=94;  citation_pages=1",{"id":28,"text":1122,"url":28,"identifiers":28},"Microwave Excited Plasmas , edited by M. Moisan and J. Pelletier (Elsevier, Amsterdam, 1992). ",{"id":28,"text":1124,"url":28,"identifiers":28},"citation_author=Moisan  M.; citation_author=Barbeau  C.; citation_author=Claude  R.; citation_author=Ferreira  C. M.; citation_author=Margot  J.; citation_author=Paraszczak  J.; citation_author=Sá  A. B.; citation_author=Sauvé  G.; citation_author=Wertheimer  M. R.;  citation_journal_title=J. Vac. Sci. Technol. B;  citation_year=1991;  citation_volume=9;  citation_pages=8",{"id":28,"text":1126,"url":28,"identifiers":28},"C. Pomot and J. Pelletier, in Microwave Excited Plasmas , edited by M. Moisan and J. Pelletier (Elsevier, Amsterdam, 1995), Chap. 13. ",{"id":28,"text":1128,"url":28,"identifiers":28},"citation_author=Bruce  R. H.;  citation_journal_title=J. Appl. Phys.;  citation_year=1981;  citation_volume=52;  citation_pages=7064",{"id":28,"text":1130,"url":28,"identifiers":28},"R. A. Roy and D. S. Yee, in Handbook of Ion Beam Processing Technology , edited by J. J. Cuomo, S. M. Rossnagel, and H. R. Kaufman (Noyes, Park Ridge, NJ, 1989), pp. 194–218. ",{"id":28,"text":1132,"url":28,"identifiers":28},"Handbook of Plasma Processing Technology , edited by S. M. Rossnagel, J. J. Cuomo, and W. D. Westwood (Noyes, Park Ridge, NJ, 1990). ",{"id":28,"text":1134,"url":28,"identifiers":28},"citation_author=Movchan  B. A.; citation_author=Demchishin  A. V.;  citation_journal_title=Fiz. Met. Metalloved.;  citation_year=1969;  citation_volume=28;  citation_pages=653",{"id":28,"text":1136,"url":28,"identifiers":28},"citation_author=Thornton  J. A.;  citation_journal_title=J. Vac. Sci. Technol.;  citation_year=1974;  citation_volume=11;  citation_pages=666",{"id":28,"text":1138,"url":28,"identifiers":28},"citation_author=Messier  R.; citation_author=Giri  A. P.; citation_author=Roy  R. A.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1984;  citation_volume=2;  citation_pages=500",{"id":28,"text":1140,"url":28,"identifiers":28},"citation_author=Messier  R.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1986;  citation_volume=4;  citation_pages=490",{"id":28,"text":1142,"url":28,"identifiers":28},"J. M. E. Harper, J. J. Cuomo, R. J. Gambino, and H. R. Kaufman, in Ion Bombardment Modification of Surfaces , edited by O. Auciello and R. Kelly (Elsevier, Amsterdam, 1989), pp. 127–162. ",{"id":28,"text":1144,"url":28,"identifiers":28},"citation_author=Martinu  L.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Küttel  O. M.; citation_author=Raveh  A.; citation_author=Wertheimer  M. R.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1994;  citation_volume=12;  citation_pages=1360",{"id":28,"text":1146,"url":28,"identifiers":28},"citation_author=Kelly  P. J.; citation_author=Arnell  R. D.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=2858",{"id":28,"text":1148,"url":28,"identifiers":28},"J. Musil, in Proceedings of 8th International Symposium on Elementary Processes and Chemical Reactions in Low Temperature Plasma (Casta, Slovakia, 1992), p. 177. ",{"id":28,"text":1150,"url":28,"identifiers":28},"citation_author=Zeuner  M.; citation_author=Neumann  H.; citation_author=Meichsner  J.;  citation_journal_title=Vacuum;  citation_year=1997;  citation_volume=48;  citation_pages=443",{"id":28,"text":1152,"url":28,"identifiers":28},"citation_author=Zabeida  O.; citation_author=Hallil  A.; citation_author=Wertheimer  M. R.; citation_author=Martinu  L.;  citation_journal_title=J. Appl. Phys.;  citation_year=2000;  citation_volume=88;  citation_pages=635",{"id":28,"text":1154,"url":28,"identifiers":28},"Plasma Deposited Thin Films , edited by J. Mort and F. Jansen (Chemical Rubber Corp., Boca Raton, FL, 1986). ",{"id":28,"text":1156,"url":28,"identifiers":28},"citation_author=Zakrzewski  Z.; citation_author=Moisan  M.;  citation_journal_title=Plasma Sources Sci. Technol.;  citation_year=1995;  citation_volume=4;  citation_pages=379",{"id":28,"text":1158,"url":28,"identifiers":28},"citation_author=Klemberg-Sapieha  J. E.; citation_author=Kuttel  O. M.; citation_author=Martinu  L.; citation_author=Wertheimer  M. R.;  citation_journal_title=Thin Solid Films;  citation_year=1990;  citation_volume=193\u002F194;  citation_pages=965",{"id":28,"text":1160,"url":28,"identifiers":28},"citation_author=Martinu  L.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Wertheimer  M. R.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1989;  citation_volume=54;  citation_pages=2645",{"id":28,"text":1162,"url":28,"identifiers":28},"C. F. Weissfloch, M. R. Wertheimer, and R. G. Bosisio, Apparatus and Method for Plasma Generation and Material Treatment with Electromagnetic Radiation, US Patent 3814983 (1974). ",{"id":28,"text":1164,"url":28,"identifiers":28},"citation_author=Rostaing  J. C.; citation_author=Coeuret  F.; citation_author=Drevillon  B.; citation_author=Etemadi  R.; citation_author=Godet  C.; citation_author=Huc  J.; citation_author=Parey  J. Y.; citation_author=Yakovlev  V. A.;  citation_journal_title=Thin Solid Films;  citation_year=1993;  citation_volume=236;  citation_pages=58",{"id":28,"text":1166,"url":28,"identifiers":28},"citation_author=Etemadi  R.; citation_author=Godet  C.; citation_author=Kildemo  M.; citation_author=Bourée  J. E.; citation_author=Brenot  R.; citation_author=Drévillon  B.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1995;  citation_volume=187;  citation_pages=70",{"id":28,"text":1168,"url":28,"identifiers":28},"citation_author=Burke  R. R.; citation_author=Pelletier  J.; citation_author=Pomot  C.; citation_author=Vallier  L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1991;  citation_volume=8;  citation_pages=2931",{"id":28,"text":1170,"url":28,"identifiers":28},"citation_author=Bulkin  P.; citation_author=Bertrand  N.; citation_author=Drévillon  B.;  citation_journal_title=Thin Solid Films;  citation_year=1997;  citation_volume=296;  citation_pages=66",{"id":28,"text":1172,"url":28,"identifiers":28},"citation_author=Pichot  M.; citation_author=Durandet  A.; citation_author=Pelletier  J.; citation_author=Armal  Y.; citation_author=Vallier  L.;  citation_journal_title=Rev. Sci. Instrum.;  citation_year=1988;  citation_volume=59;  citation_pages=1072",{"id":28,"text":1174,"url":28,"identifiers":28},"citation_author=Firon  M.; citation_author=Hugon  M. C.; citation_author=Agius  B.; citation_author=Hu  Y. Z.; citation_author=Wang  Y.; citation_author=Irene  E. A.;  citation_journal_title=J. Vac. Sci. Technol. B;  citation_year=1996;  citation_volume=14;  citation_pages=2543",{"id":28,"text":1176,"url":28,"identifiers":28},"M. Born and E. Wolf, Principles of Optics , 6th ed. (Pergamon, New York, 1993). ",{"id":28,"text":1178,"url":28,"identifiers":28},"citation_author=Urbach  F.;  citation_journal_title=Phys. Rev.;  citation_year=1953;  citation_volume=89;  citation_pages=1189",{"id":28,"text":1180,"url":28,"identifiers":28},"citation_author=Forouhi  A. R.; citation_author=Bloomer  I.;  citation_journal_title=Phys. Rev. B;  citation_year=1986;  citation_volume=34;  citation_pages=7018",{"id":28,"text":1182,"url":28,"identifiers":28},"citation_author=McGahan  W. A.; citation_author=Makovicka  T.; citation_author=Hale  J.; citation_author=Woollam  J. A.;  citation_journal_title=Thin Solid Films;  citation_year=1994;  citation_volume=253;  citation_pages=57",{"id":28,"text":1184,"url":28,"identifiers":28},"citation_author=Jellison  G. E.; citation_author=Modine  F. A.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1996;  citation_volume=69;  citation_pages=371",{"id":28,"text":1186,"url":28,"identifiers":28},"citation_author=Jellison  G. E.; citation_author=Modine  F. A.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1996;  citation_volume=69;  citation_pages=2137",{"id":28,"text":1188,"url":28,"identifiers":28},"citation_author=Egan  W. E.; citation_author=Aspnes  D. E.;  citation_journal_title=Phys. Rev. B;  citation_year=1982;  citation_volume=26;  citation_pages=5313",{"id":28,"text":1190,"url":28,"identifiers":28},"citation_author=Bruggeman  D. A. G.;  citation_journal_title=Ann. Phys. (Leipzig);  citation_year=1935;  citation_volume=24;  citation_pages=636",{"id":28,"text":1192,"url":28,"identifiers":28},"citation_author=Stroud  D.;  citation_journal_title=Phys. Rev. B;  citation_year=1975;  citation_volume=12;  citation_pages=3368",{"id":28,"text":1194,"url":28,"identifiers":28},"citation_author=Borghesi  A.; citation_author=Bellandi  E.; citation_author=Guizzetti  G.; citation_author=Sassella  A.; citation_author=Rojas  S.; citation_author=Zanotti  L.;  citation_journal_title=Appl. Phys. A: Solids Surf.;  citation_year=1993;  citation_volume=56;  citation_pages=147",{"id":28,"text":1196,"url":28,"identifiers":28},"citation_author=Callard  S.; citation_author=Cagnaire  A.; citation_author=Joseph  J.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=2088",{"id":28,"text":1198,"url":28,"identifiers":28},"citation_author=Aspnes  D. E.; citation_author=Theeten  J. B.;  citation_journal_title=J. Appl. Phys.;  citation_year=1979;  citation_volume=50;  citation_pages=4928",{"id":28,"text":1200,"url":28,"identifiers":28},"J. C. Garland and D. B. Tanner, eds., Electrical Transport and Optical Properties of Inhomogeneous Media , AIP Conf. Proc., Vol. 40 (AIP, New York, 1978). ",{"id":28,"text":1202,"url":28,"identifiers":28},"citation_author=Diaz  R. E.; citation_author=Merrill  W. M.; citation_author=Alexopoulos  N. G.;  citation_journal_title=J. Appl. Phys.;  citation_year=1998;  citation_volume=84;  citation_pages=6815",{"id":28,"text":1204,"url":28,"identifiers":28},"D. E. Aspnes, in Handbook of Optical Constants of Solids , edited by E. D. Palik (Academic, San Diego CA, 1985), Chap. 5, pp. 89–112. ",{"id":28,"text":1206,"url":28,"identifiers":28},"citation_author=Aspnes  D. E.;  citation_journal_title=Phys. Rev. B;  citation_year=1990;  citation_volume=41;  citation_pages=10334",{"id":28,"text":1208,"url":28,"identifiers":28},"citation_author=Pliskin  W. A.;  citation_journal_title=J. Vac. Sci. Technol.;  citation_year=1977;  citation_volume=14;  citation_pages=1064",{"id":28,"text":1210,"url":28,"identifiers":28},"citation_author=Wertheimer  M. R.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Corriveau  R.;  citation_journal_title=Can. J. Phys.;  citation_year=1982;  citation_volume=60;  citation_pages=628",{"id":28,"text":1212,"url":28,"identifiers":28},"citation_author=Gaillard  F.; citation_author=Brault  P.; citation_author=Brouquet  P.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=2478",{"id":28,"text":1214,"url":28,"identifiers":28},"citation_author=Manifacier  J. C.; citation_author=Gasiot  J.; citation_author=Fillard  J. P.;  citation_journal_title=J. Phys. E;  citation_year=1976;  citation_volume=9;  citation_pages=1002",{"id":28,"text":1216,"url":28,"identifiers":28},"citation_author=Swanepoel  R.;  citation_journal_title=J. Phys. E;  citation_year=1983;  citation_volume=16;  citation_pages=1214",{"id":28,"text":1218,"url":28,"identifiers":28},"citation_author=Mouchart  J.; citation_author=Lagier  G.; citation_author=Pointu  B.;  citation_journal_title=Appl. Opt.;  citation_year=1985;  citation_volume=24;  citation_pages=1808",{"id":28,"text":1220,"url":28,"identifiers":28},"J. C. Martinez-Anton, in Optical Interference Coatings , OSA Technical Digest Series, Vol. 9 (OSA, Washington DC, 1998), p. 321. ",{"id":28,"text":1222,"url":28,"identifiers":28},"citation_author=Boccara  A. C.; citation_author=Fournier  D.; citation_author=Jackson  W. B.; citation_author=Amer  N. M.;  citation_journal_title=Opt. Lett.;  citation_year=1980;  citation_volume=5;  citation_pages=377",{"id":28,"text":1224,"url":28,"identifiers":28},"citation_author=Commandré  M.; citation_author=Roche  P.;  citation_journal_title=Appl. Opt.;  citation_year=1996;  citation_volume=35;  citation_pages=5021",{"id":28,"text":1226,"url":28,"identifiers":28},"citation_author=Sharpe  L. H.;  citation_journal_title=J. Adhes.;  citation_year=1972;  citation_volume=4;  citation_pages=51",{"id":28,"text":1228,"url":28,"identifiers":28},"R. Jacobsson, in Progress in Optics , edited by E. Wolf (North-Holland, Amsterdam, 1966), Vol. 5, pp. 247–286. ",{"id":28,"text":1230,"url":28,"identifiers":28},"citation_author=Tonova  D.; citation_author=Paneva  A.; citation_author=Pantchev  B.;  citation_journal_title=Opt. Commun.;  citation_year=1998;  citation_volume=150;  citation_pages=121",{"id":28,"text":1232,"url":28,"identifiers":28},"citation_author=Rivory  J.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=313–314;  citation_pages=333",{"id":28,"text":1234,"url":28,"identifiers":28},"citation_author=Bovard  B.; citation_author=Milligen  F. J. V.; citation_author=Messerly  M. J.; citation_author=Saxe  S. G.; citation_author=Macleod  H. A.;  citation_journal_title=Appl. Opt.;  citation_year=1985;  citation_volume=24;  citation_pages=1803",{"id":28,"text":1236,"url":28,"identifiers":28},"citation_author=Poitras  D.; citation_author=Martinu  L.;  citation_journal_title=Appl. Opt.;  citation_year=1998;  citation_volume=37;  citation_pages=4160",{"id":28,"text":1238,"url":28,"identifiers":28},"citation_author=Parjadis de Larivière  G.; citation_author=Frigerio  J. M.; citation_author=Rivory  J.; citation_author=Abelès  F.;  citation_journal_title=Appl. Opt.;  citation_year=1992;  citation_volume=31;  citation_pages=6056",{"id":28,"text":1240,"url":28,"identifiers":28},"citation_author=Kildemo  M.;  citation_journal_title=Appl. Opt.;  citation_year=1998;  citation_volume=37;  citation_pages=113",{"id":28,"text":1242,"url":28,"identifiers":28},"citation_author=Devine  R. A. B.; citation_author=Marchand  M.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1993;  citation_volume=63;  citation_pages=619",{"id":28,"text":1244,"url":28,"identifiers":28},"citation_author=Li  Y. P.; citation_author=Ching  W. Y.;  citation_journal_title=Phys. Rev. B;  citation_year=1985;  citation_volume=31;  citation_pages=2172",{"id":28,"text":1246,"url":28,"identifiers":28},"citation_author=Xu  Y.-N.; citation_author=Ching  W. Y.;  citation_journal_title=Phys. Rev. B;  citation_year=1991;  citation_volume=44;  citation_pages=11048",{"id":28,"text":1248,"url":28,"identifiers":28},"citation_author=Lucovsky  G.; citation_author=Manitini  M. J.; citation_author=Srivastava  J. K.; citation_author=Irene  E. A.;  citation_journal_title=J. Vac. Sci. Technol. B;  citation_year=1987;  citation_volume=5;  citation_pages=530",{"id":28,"text":1250,"url":28,"identifiers":28},"citation_author=Kawaguchi  Y.;  citation_journal_title=Phys. Rev. B;  citation_year=1996;  citation_volume=54;  citation_pages=9721",{"id":28,"text":1252,"url":28,"identifiers":28},"citation_author=Theil  J. A.; citation_author=Tsu  D. V.; citation_author=Watkins  M. W.; citation_author=Kim  S. S.; citation_author=Lucovsky  G.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1990;  citation_volume=8;  citation_pages=1374",{"id":28,"text":1254,"url":28,"identifiers":28},"citation_author=Ogura  S.; citation_author=Macleod  H. A.;  citation_journal_title=Thin Solid Films;  citation_year=1976;  citation_volume=34;  citation_pages=371",{"id":28,"text":1256,"url":28,"identifiers":28},"citation_author=Martin  P. J.; citation_author=Netterfield  R. P.; citation_author=Sainty  W. G.;  citation_journal_title=J. Appl. Phys.;  citation_year=1984;  citation_volume=55;  citation_pages=235",{"id":28,"text":1258,"url":28,"identifiers":28},"citation_author=Hirashita  N.; citation_author=Tokitoh  S.; citation_author=Ushida  H.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1993;  citation_volume=32;  citation_pages=1787",{"id":28,"text":1260,"url":28,"identifiers":28},"citation_author=Gupta  A.; citation_author=Toby  S.; citation_author=Gusev  E. P.; citation_author=Lu  H.; citation_author=Li  Y.; citation_author=Green  M. L.; citation_author=Gustafsson  T.; citation_author=Garfunkel  E.;  citation_journal_title=Prog. Surf. Sci.;  citation_year=1998;  citation_volume=59;  citation_pages=103",{"id":28,"text":1262,"url":28,"identifiers":28},"A. Ricard, Nitriding of Steel Sample by a   N 2   Flowing Post-Discharge (SFV, Paris, 1996). ",{"id":28,"text":1264,"url":28,"identifiers":28},"citation_author=Vahedi  V.; citation_author=Surendra  M.;  citation_journal_title=Comput. Phys. Commun.;  citation_year=1995;  citation_volume=87;  citation_pages=179",{"id":28,"text":1266,"url":28,"identifiers":28},"citation_author=Popov  K. V.; citation_author=Tikhonravov  A. V.; citation_author=Campmany  J.; citation_author=Bertran  E.; citation_author=Bosch  S.; citation_author=Canillas  A.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=313–314;  citation_pages=379",{"id":28,"text":1268,"url":28,"identifiers":28},"citation_author=Hsieh  S. W.; citation_author=Chang  C. Y.; citation_author=Hsu  S. C.;  citation_journal_title=J. Appl. Phys.;  citation_year=1993;  citation_volume=74;  citation_pages=2638",{"id":28,"text":1270,"url":28,"identifiers":28},"citation_author=Han  S. M.; citation_author=Aydil  E. S.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=2062",{"id":28,"text":1272,"url":28,"identifiers":28},"citation_author=Bertrand  N.; citation_author=Drévillon  B.; citation_author=Bulkin  P.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=63",{"id":28,"text":1274,"url":28,"identifiers":28},"citation_author=Ishii  K.; citation_author=Ohki  Y.; citation_author=Nishikawa  H.;  citation_journal_title=J. Appl. Phys.;  citation_year=1994;  citation_volume=76;  citation_pages=5418",{"id":28,"text":1276,"url":28,"identifiers":28},"citation_author=Bogart  K. H. A.; citation_author=Ramirez  S. K.; citation_author=Gonzales  L. A.; citation_author=Bogart  G. R.; citation_author=Fisher  E. R.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=3175",{"id":28,"text":1278,"url":28,"identifiers":28},"citation_author=Jellum  G. M.; citation_author=Graves  D. B.;  citation_journal_title=Appl. Phys.;  citation_year=1990;  citation_volume=67;  citation_pages=1716",{"id":28,"text":1280,"url":28,"identifiers":28},"citation_author=Shiratani  M.; citation_author=Matsuo  S.; citation_author=Watanabe  Y.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1991;  citation_volume=30;  citation_pages=1887",{"id":28,"text":1282,"url":28,"identifiers":28},"citation_author=Watanabe  Y.; citation_author=Shiratani  M.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1993;  citation_volume=32;  citation_pages=3074",{"id":28,"text":1284,"url":28,"identifiers":28},"citation_author=Love  A.; citation_author=Middleman  S.; citation_author=Hochberg  A. K.;  citation_journal_title=J. Cryst. Growth;  citation_year=1993;  citation_volume=129;  citation_pages=119",{"id":28,"text":1286,"url":28,"identifiers":28},"citation_author=Deshmukh  S. C.; citation_author=Aydil  E. S.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1995;  citation_volume=13;  citation_pages=2355",{"id":28,"text":1288,"url":28,"identifiers":28},"citation_author=Mota  R. P.; citation_author=Galvão  D.; citation_author=Durrant  S. F.; citation_author=de Moraes  M. A. B.; citation_author=de Oliveira Dantas  S.; citation_author=Cantão  M.;  citation_journal_title=Thin Solid Films;  citation_year=1995;  citation_volume=270;  citation_pages=109",{"id":28,"text":1290,"url":28,"identifiers":28},"citation_author=Goullet  A.; citation_author=Nicolazo  F.; citation_author=Turban  G.; citation_author=Granier  A.; citation_author=Vallée  C.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1997;  citation_volume=216;  citation_pages=77",{"id":28,"text":1292,"url":28,"identifiers":28},"citation_author=Zajı́čková  L.; citation_author=Ohlı́dal  I.; citation_author=Janča  J.;  citation_journal_title=Thin Solid Films;  citation_year=1996;  citation_volume=280;  citation_pages=26",{"id":28,"text":1294,"url":28,"identifiers":28},"citation_author=Lamendola  R.; citation_author=Favia  P.; citation_author=Palumbo  F.; citation_author=d’Agostino  R.;  citation_journal_title=Eur. Phys. J.: Appl. Phys.;  citation_year=1998;  citation_volume=4;  citation_pages=65",{"id":28,"text":1296,"url":28,"identifiers":28},"B. G. Bovard, in Thin Films for Optical Systems , edited by F. R. Flory (Marcel Dekker, New York, 1995), Chap. 5, pp. 117–132. ",{"id":28,"text":1298,"url":28,"identifiers":28},"citation_author=Sainty  W. G.; citation_author=McFall  W. D.; citation_author=McKenzie  D. R.; citation_author=Yin  Y.;  citation_journal_title=Appl. Opt.;  citation_year=1995;  citation_volume=34;  citation_pages=5659",{"id":28,"text":1300,"url":28,"identifiers":28},"citation_author=Vallée  C.; citation_author=Goullet  A.; citation_author=Nicolazo  F.; citation_author=Granier  A.; citation_author=Turban  G.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1997;  citation_volume=311;  citation_pages=212",{"id":28,"text":1302,"url":28,"identifiers":28},"citation_author=Garcia  S.; citation_author=Martin  J. M.; citation_author=Martil  I.; citation_author=Fernandez  M.; citation_author=Iborra  E.; citation_author=Gonzalez-Diaz  G.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1995;  citation_volume=187;  citation_pages=329",{"id":28,"text":1304,"url":28,"identifiers":28},"citation_author=Smith  D. L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1993;  citation_volume=111;  citation_pages=1843",{"id":28,"text":1306,"url":28,"identifiers":28},"citation_author=Robertson  J.;  citation_journal_title=Philos. Mag. B;  citation_year=1991;  citation_volume=63;  citation_pages=47",{"id":28,"text":1308,"url":28,"identifiers":28},"citation_author=Yin  Z.; citation_author=Smith  F. W.;  citation_journal_title=Phys. Rev. B;  citation_year=1990;  citation_volume=42;  citation_pages=3658",{"id":28,"text":1310,"url":28,"identifiers":28},"citation_author=Yin  Z.; citation_author=Smith  F. W.;  citation_journal_title=Phys. Rev. B;  citation_year=1990;  citation_volume=42;  citation_pages=3666",{"id":28,"text":1312,"url":28,"identifiers":28},"citation_author=Kotecki  D. E.; citation_author=Chapple-Sokol  J. D.;  citation_journal_title=J. Appl. Phys.;  citation_year=1995;  citation_volume=77;  citation_pages=1284",{"id":28,"text":1314,"url":28,"identifiers":28},"citation_author=Hanyaloglu  B. F.; citation_author=Aydil  E. S.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=2794",{"id":28,"text":1316,"url":28,"identifiers":28},"citation_author=Petalas  J.; citation_author=Logothetidis  S.;  citation_journal_title=Phys. Rev. B;  citation_year=1994;  citation_volume=50;  citation_pages=11801",{"id":28,"text":1318,"url":28,"identifiers":28},"citation_author=Tsu  D. V.; citation_author=Lucovsky  G.; citation_author=Mantini  M. J.;  citation_journal_title=Phys. Rev. B;  citation_year=1986;  citation_volume=33;  citation_pages=7069",{"id":28,"text":1320,"url":28,"identifiers":28},"citation_author=Hofrichter  A.; citation_author=Bulkin  P.; citation_author=Drévillon  B.;  citation_journal_title=Appl. Surf. Sci.;  citation_year=1999;  citation_volume=142;  citation_pages=447",{"id":28,"text":1322,"url":28,"identifiers":28},"citation_author=Martı́nez  F. L.; citation_author=Mártil  I.; citation_author=González-Dı́az  G.; citation_author=Selle  B.; citation_author=Sieber  I.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1998;  citation_volume=227–230;  citation_pages=523",{"id":28,"text":1324,"url":28,"identifiers":28},"citation_author=Sanchez  O.; citation_author=Aguilar  M. A.; citation_author=Falcony  C.; citation_author=Martinez-Duart  J. M.; citation_author=Albella  J. M.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=2088",{"id":28,"text":1326,"url":28,"identifiers":28},"citation_author=Poitras  D.; citation_author=Leroux  P.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Gujrathi  S. C.; citation_author=Martinu  L.;  citation_journal_title=Opt. Eng.;  citation_year=1996;  citation_volume=35;  citation_pages=2693",{"id":28,"text":1328,"url":28,"identifiers":28},"citation_author=Smirnova  T. P.; citation_author=Yakovkina  L. V.;  citation_journal_title=Thin Solid Films;  citation_year=1997;  citation_volume=293;  citation_pages=6",{"id":28,"text":1330,"url":28,"identifiers":28},"citation_author=Fracassi  F.; citation_author=d’Agostino  R.; citation_author=Bruno  G.;  citation_journal_title=Plasmas Polymers;  citation_year=1996;  citation_volume=1;  citation_pages=3",{"id":28,"text":1332,"url":28,"identifiers":28},"M. Ohring, The Materials Science of Thin Films (Academic, Boston, MA, 1992). ",{"id":28,"text":1334,"url":28,"identifiers":28},"citation_author=Martin  P. J.; citation_author=Bendavid  A.; citation_author=Takikawa  H.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1999;  citation_volume=17;  citation_pages=2351",{"id":28,"text":1336,"url":28,"identifiers":28},"citation_author=Lee  Y. H.; citation_author=Chan  K. K.; citation_author=Brady  M. J.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1995;  citation_volume=13;  citation_pages=596",{"id":28,"text":1338,"url":28,"identifiers":28},"H. Schroeder, in Oxide Layers Deposited from Organic Solutions , edited by G. Hass and R. E. Thun (Academic, New York, 1969), Vol. 5, pp. 87–141. ",{"id":28,"text":1340,"url":28,"identifiers":28},"citation_author=Williams  L. M.; citation_author=Hess  D. W.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1983;  citation_volume=1;  citation_pages=1810",{"id":28,"text":1342,"url":28,"identifiers":28},"citation_author=Williams  L. M.; citation_author=Hess  D. W.;  citation_journal_title=Thin Solid Films;  citation_year=1984;  citation_volume=115;  citation_pages=13",{"id":28,"text":1344,"url":28,"identifiers":28},"L. Martinu, M. Latrèche, V. Hajek, J. E. Klemberg-Sapieha, A. Argoitia, and P. Beauchamp, Proceedings of the 43rd Annual Technical Conference (Society of Vacuum Coaters, Denver, 2000), p. 177. ",{"id":28,"text":1346,"url":28,"identifiers":28},"citation_author=Frenck  H. J.; citation_author=Kulisch  W.; citation_author=Kuhr  M.; citation_author=Kassing  R.;  citation_journal_title=Thin Solid Films;  citation_year=1991;  citation_volume=201;  citation_pages=327",{"id":28,"text":1348,"url":28,"identifiers":28},"citation_author=Jun  B.-H.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=1482",{"id":28,"text":1350,"url":28,"identifiers":28},"citation_author=Ha  H.-K.; citation_author=Yoshimoto  M.; citation_author=Koinuma  H.; citation_author=Moon  B.-K.; citation_author=Ishiwara  H.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1996;  citation_volume=68;  citation_pages=2965",{"id":28,"text":1352,"url":28,"identifiers":28},"citation_author=Lee  W. G.; citation_author=Woo  S. I.; citation_author=Kim  J. C.; citation_author=Choi  S. H.; citation_author=Oh  K. H.;  citation_journal_title=Thin Solid Films;  citation_year=1994;  citation_volume=237;  citation_pages=105",{"id":28,"text":1354,"url":28,"identifiers":28},"citation_author=Kim  J.-W.; citation_author=Kim  D.-O.; citation_author=Hahn  Y.-B.;  citation_journal_title=Korean J. Chem. Eng.;  citation_year=1998;  citation_volume=15;  citation_pages=217",{"id":28,"text":1356,"url":28,"identifiers":28},"citation_author=Lee  I.-S.; citation_author=Kim  J.-W.; citation_author=Youn  C.-J.; citation_author=Park  S.-K.; citation_author=Hahn  Y.-B.;  citation_journal_title=Korean J. Chem. Eng.;  citation_year=1996;  citation_volume=13;  citation_pages=473",{"id":28,"text":1358,"url":28,"identifiers":28},"citation_author=Lee  Y. H.;  citation_journal_title=Vacuum;  citation_year=1998;  citation_volume=51;  citation_pages=503",{"id":28,"text":1360,"url":28,"identifiers":28},"citation_author=Sankur  H.; citation_author=Gunning  W.;  citation_journal_title=J. Appl. Phys.;  citation_year=1989;  citation_volume=66;  citation_pages=4747",{"id":28,"text":1362,"url":28,"identifiers":28},"citation_author=Nair  J.; citation_author=Nair  P.; citation_author=Mizukami  F.; citation_author=Oosawa  Y.; citation_author=Okubo  T.;  citation_journal_title=Mater. Res. Bull.;  citation_year=1999;  citation_volume=34;  citation_pages=1275",{"id":28,"text":1364,"url":28,"identifiers":28},"citation_author=Chen  J.-S.; citation_author=Chao  S.; citation_author=Kao  J.-S.; citation_author=Lai  G.-R.; citation_author=Wang  W.-H.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=4403",{"id":28,"text":1366,"url":28,"identifiers":28},"citation_author=Bange  K.;  citation_journal_title=Fresenius J. Anal. Chem.;  citation_year=1995;  citation_volume=353;  citation_pages=240",{"id":28,"text":1368,"url":28,"identifiers":28},"citation_author=Goto  T.; citation_author=Zhang  W.; citation_author=Hirai  T.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1999;  citation_volume=38;  citation_pages=3668",{"id":28,"text":1370,"url":28,"identifiers":28},"citation_author=Patscheiber  J.; citation_author=Veprek  S.;  citation_journal_title=Plasma Chem. Plasma Process.;  citation_year=1992;  citation_volume=12;  citation_pages=129",{"id":28,"text":1372,"url":28,"identifiers":28},"citation_author=Chryssou  C. E.; citation_author=Pitt  C. W.;  citation_journal_title=Appl. Phys. A: Mater. Sci. Process.;  citation_year=1997;  citation_volume=65;  citation_pages=469",{"id":28,"text":1374,"url":28,"identifiers":28},"citation_author=Chryssou  C. E.; citation_author=Pitt  C. W.;  citation_journal_title=IEEE J. Quantum Electron.;  citation_year=1998;  citation_volume=34;  citation_pages=282",{"id":28,"text":1376,"url":28,"identifiers":28},"citation_author=Devine  R. A. B.; citation_author=Vallier  L.; citation_author=Autran  J. L.; citation_author=Paillet  P.; citation_author=Leray  J. L.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1996;  citation_volume=68;  citation_pages=1775",{"id":28,"text":1378,"url":28,"identifiers":28},"citation_author=Weise  M. T.; citation_author=Selbrede  S. C.; citation_author=Arias  L. J.; citation_author=Carl  D.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=1399",{"id":28,"text":1380,"url":28,"identifiers":28},"citation_author=Ishii  K.; citation_author=Takami  A.; citation_author=Ohki  Y.;  citation_journal_title=J. Appl. Phys.;  citation_year=1997;  citation_volume=81;  citation_pages=1470",{"id":28,"text":1382,"url":28,"identifiers":28},"citation_author=Kudo  H.; citation_author=Shinohara  R.; citation_author=Takeishi  S.; citation_author=Awaji  N.; citation_author=Yamada  M.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1996;  citation_volume=35;  citation_pages=1583",{"id":28,"text":1384,"url":28,"identifiers":28},"citation_author=Tseng  W.-T.; citation_author=Hsieh  Y.-T.; citation_author=Lin  C.-F.; citation_author=Tsai  M.-S.; citation_author=Feng  M.-S.;  citation_journal_title=J. Electrochem. Soc.;  citation_year=1997;  citation_volume=144;  citation_pages=1100",{"id":28,"text":1386,"url":28,"identifiers":28},"citation_author=Shannon  V. L.; citation_author=Karim  M. Z.;  citation_journal_title=Thin Solid Films;  citation_year=1995;  citation_volume=270;  citation_pages=498",{"id":28,"text":1388,"url":28,"identifiers":28},"citation_author=Yoshimaru  M.; citation_author=Koizumi  S.; citation_author=Shimokawa  K.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=2908",{"id":28,"text":1390,"url":28,"identifiers":28},"citation_author=Hasegawa  S.; citation_author=Tsukaoka  T.; citation_author=Inokuma  T.; citation_author=Kurata  Y.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1998;  citation_volume=240;  citation_pages=154",{"id":28,"text":1392,"url":28,"identifiers":28},"citation_author=Lee  J. H.; citation_author=Kim  D. S.; citation_author=Lee  Y. H.;  citation_journal_title=J. Electrochem. Soc.;  citation_year=1996;  citation_volume=143;  citation_pages=1443",{"id":28,"text":1394,"url":28,"identifiers":28},"citation_author=Denison  D. R.; citation_author=Barbour  J. C.; citation_author=Burkhard  J. H.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=1124",{"id":28,"text":1396,"url":28,"identifiers":28},"citation_author=Lim  S. W.; citation_author=Shimogaki  Y.; citation_author=Nakano  Y.; citation_author=Tada  K.; citation_author=Komiyama  H.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1996;  citation_volume=35;  citation_pages=1468",{"id":28,"text":1398,"url":28,"identifiers":28},"citation_author=Kitoh  H.; citation_author=Muroyama  M.; citation_author=Sasaki  M.; citation_author=Iwasawa  M.; citation_author=Kimura  H.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1996;  citation_volume=35;  citation_pages=1464",{"id":28,"text":1400,"url":28,"identifiers":28},"citation_author=Yun  S.-M.; citation_author=Chang  H.-Y.; citation_author=Lee  K.-M.; citation_author=Kim  D.-C.; citation_author=Choi  C.-K.;  citation_journal_title=J. Electrochem. Soc.;  citation_year=1998;  citation_volume=145;  citation_pages=2576",{"id":28,"text":1402,"url":28,"identifiers":28},"citation_author=Han  S. M.; citation_author=Aydil  E. S.;  citation_journal_title=J. Appl. Phys.;  citation_year=1998;  citation_volume=83;  citation_pages=2172",{"id":28,"text":1404,"url":28,"identifiers":28},"citation_author=Lowry  J. H.; citation_author=Mendlowitz  J. S.; citation_author=Subramanian  N. S.;  citation_journal_title=Opt. Eng.;  citation_year=1992;  citation_volume=31;  citation_pages=1982",{"id":28,"text":1406,"url":28,"identifiers":28},"D. M. Manos and D. L. Flamm, Plasma Etching: An Introduction (Academic, Boston, MA, 1989). ",{"id":28,"text":1408,"url":28,"identifiers":28},"citation_author=Labelle  C. B.; citation_author=Gleason  K. K.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1999;  citation_volume=17;  citation_pages=445",{"id":28,"text":1410,"url":28,"identifiers":28},"citation_author=Takai  O.; citation_author=Hozumi  A.; citation_author=Sugimoto  N.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1997;  citation_volume=218;  citation_pages=280",{"id":28,"text":1412,"url":28,"identifiers":28},"citation_author=Weber  A.; citation_author=Pöchelmann  R.; citation_author=Klages  C.-P.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=2120",{"id":28,"text":1414,"url":28,"identifiers":28},"citation_author=Hetzler  U.; citation_author=Kay  E.;  citation_journal_title=J. Appl. Phys.;  citation_year=1978;  citation_volume=49;  citation_pages=5617",{"id":28,"text":1416,"url":28,"identifiers":28},"citation_author=Martinu  L.; citation_author=Biederman  H.; citation_author=Nedbal  J.;  citation_journal_title=Thin Solid Films;  citation_year=1986;  citation_volume=136;  citation_pages=11",{"id":28,"text":1418,"url":28,"identifiers":28},"J. E. Klemberg-Sapieha, L. Martinu, V. Fridman, and D. E. Morton, in Proceedings of the 41st Annual Technical Conferences (Society of Vacuum Coaters, Albuquerque, NM, 1998), p. 138. ",{"id":28,"text":1420,"url":28,"identifiers":28},"J. Robertson, in Diamond and Diamond-Like Films and Coatings, NATO-ASI Series B: Physics , NATO ASI, edited by R. Clausing, L. Horton, J. Angus, and P. Koidl (Plenum, New York, 1991), pp. 331–356. ",{"id":28,"text":1422,"url":28,"identifiers":28},"Properties and Characterization of Amorphous Carbon Films, Materials Science Forum , Vols. 52–53, edited by J. Pouch and S. A. Alterovitz (Trans.-Tech., Aedermannsdorf, Switzerland, 1990). ",{"id":28,"text":1424,"url":28,"identifiers":28},"citation_author=Martinu  L.; citation_author=Raveh  A.; citation_author=Boutard  D.; citation_author=Houle  S.; citation_author=Poitras  D.; citation_author=Vella  N.; citation_author=Wertheimer  M. R.;  citation_journal_title=Diamond Relat. Mater.;  citation_year=1993;  citation_volume=2;  citation_pages=673",{"id":28,"text":1426,"url":28,"identifiers":28},"D. Das Gupta, F. Demichelis, C. F. Pirri, R. Spagnolo, and A. Tagliaferro, in Diamond and Diamond-Like Films and Coatings , edited by R. E. Clausing (Plenum, New York, 1991), pp. 427–437. ",{"id":28,"text":1428,"url":28,"identifiers":28},"citation_author=Sjötröm  H.; citation_author=Stafström  S.; citation_author=Boman  M.; citation_author=Sundgren  J.-E.;  citation_journal_title=Phys. Rev. Lett.;  citation_year=1995;  citation_volume=75;  citation_pages=1336",{"id":28,"text":1430,"url":28,"identifiers":28},"citation_author=Hellgren  N.; citation_author=Johansson  M. P.; citation_author=Broitman  E.; citation_author=Hultman  L.; citation_author=Sundgren  J.-E.;  citation_journal_title=Phys. Rev. B;  citation_year=1999;  citation_volume=59;  citation_pages=5162",{"id":28,"text":1432,"url":28,"identifiers":28},"citation_author=Kleinorge  B.; citation_author=Ferrari  A. C.; citation_author=Robertson  J.; citation_author=Milne  W. I.; citation_author=Waidmann  S.; citation_author=Hearne  S.;  citation_journal_title=Diamond Relat. Mater.;  citation_year=2000;  citation_volume=9;  citation_pages=643",{"id":28,"text":1434,"url":28,"identifiers":28},"citation_author=Sah  R. E.; citation_author=Dischler  B.; citation_author=Bubenzer  A.; citation_author=Koidl  P.;  citation_journal_title=Appl. Phys. Lett.;  citation_year=1985;  citation_volume=46;  citation_pages=739",{"id":28,"text":1436,"url":28,"identifiers":28},"Diamond: Electronic Properties and Applications , edited by L. S. Pan and D. R. Kania (Kluwer Academic, Dordrecht, 1995). ",{"id":28,"text":1438,"url":28,"identifiers":28},"Applications of Diamond Films and Related Materials , NIST Special Publication, Vol. 885, edited by A. Feldman, Y. Tzeng, W. A. Yarbrough, M. Yoshikawa, and M. Murakawa (National Institute of Standards and Technology, Washington DC, 1995). ",{"id":28,"text":1440,"url":28,"identifiers":28},"citation_author=Borges  C. F. M.; citation_author=Moisan  M.; citation_author=Gicquel  A.;  citation_journal_title=Diamond Relat. Mater.;  citation_year=1995;  citation_volume=4;  citation_pages=149",{"id":28,"text":1442,"url":28,"identifiers":28},"citation_author=Greenham  A. C.; citation_author=Nichols  B. A.; citation_author=Wood  R. M.; citation_author=Nourshargh  N.; citation_author=Lewis  K. L.;  citation_journal_title=Opt. Eng.;  citation_year=1993;  citation_volume=32;  citation_pages=1018",{"id":28,"text":1444,"url":28,"identifiers":28},"citation_author=Bulkin  P. V.; citation_author=Swart  P. L.; citation_author=Lacquet  B. M.;  citation_journal_title=J. Non-Cryst. Solids;  citation_year=1995;  citation_volume=187;  citation_pages=484",{"id":28,"text":1446,"url":28,"identifiers":28},"citation_author=Kildemo  M.; citation_author=Bulkin  P.; citation_author=Drévillon  B.; citation_author=Hunderi  O.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=6352",{"id":28,"text":1448,"url":28,"identifiers":28},"citation_author=Lim  S.; citation_author=Ryu  J. H.; citation_author=Wager  J. F.; citation_author=Plant  T. K.;  citation_journal_title=Thin Solid Films;  citation_year=1994;  citation_volume=245;  citation_pages=141",{"id":28,"text":1450,"url":28,"identifiers":28},"L. Martinu, in Functional Photonic and Fiber Devices , edited by S. I. Najafi and M. N. Armenise (SPIE, Bellingham, WA, 1994), Vol. 2695, pp. 30–37. ",{"id":28,"text":1452,"url":28,"identifiers":28},"citation_author=Denisse  C. M. M.; citation_author=Troost  K. Z.; citation_author=Elferink  J. B. O.; citation_author=Habraken  F. H. P. M.; citation_author=Hendriks  M.;  citation_journal_title=J. Appl. Phys.;  citation_year=1986;  citation_volume=60;  citation_pages=2536",{"id":28,"text":1454,"url":28,"identifiers":28},"citation_author=Tompkins  H. G.; citation_author=Gregory  R. B.; citation_author=Deal  P. W.; citation_author=Smith  S. M.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1999;  citation_volume=17;  citation_pages=391",{"id":28,"text":1456,"url":28,"identifiers":28},"citation_author=Hattori  T.; citation_author=Semura  S.; citation_author=Akasaka  N.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1999;  citation_volume=38;  citation_pages=2775",{"id":28,"text":1458,"url":28,"identifiers":28},"citation_author=Zhang  G. F.; citation_author=Guo  L. J.; citation_author=Liu  Z. T.; citation_author=Xiu  X. K.; citation_author=Zhong  X.;  citation_journal_title=Appl. Opt.;  citation_year=1994;  citation_volume=76;  citation_pages=705",{"id":28,"text":1460,"url":28,"identifiers":28},"citation_author=Durrant  S. F.; citation_author=Castro  S. G.; citation_author=Cisneros  J. I.; citation_author=Cruz  N. C. d.; citation_author=de Moraes  M. A. B.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=118",{"id":28,"text":1462,"url":28,"identifiers":28},"citation_author=Kreibig  U.; citation_author=Zacharias  P.;  citation_journal_title=Z. Phys.;  citation_year=1970;  citation_volume=231;  citation_pages=128",{"id":28,"text":1464,"url":28,"identifiers":28},"citation_author=Ricard  D.; citation_author=Roussignol  P.; citation_author=Flytzanis  C.;  citation_journal_title=Opt. Lett.;  citation_year=1985;  citation_volume=10;  citation_pages=511",{"id":28,"text":1466,"url":28,"identifiers":28},"citation_author=Hache  F.; citation_author=Ricard  D.; citation_author=Flytzanis  C.; citation_author=Kreibig  U.;  citation_journal_title=Appl. Phys. A: Solids Surf.;  citation_year=1988;  citation_volume=47;  citation_pages=347",{"id":28,"text":1468,"url":28,"identifiers":28},"citation_author=Liao  H. B.; citation_author=Xiao  R. R.; citation_author=Fu  J. S.; citation_author=Yu  P.; citation_author=Wong  G. K. L.; citation_author=Sheng  P.;  citation_journal_title=Appl. Phys. B: Lasers Opt.;  citation_year=1997;  citation_volume=65;  citation_pages=673",{"id":28,"text":1470,"url":28,"identifiers":28},"citation_author=Liao  H. B.; citation_author=Xiao  R. F.; citation_author=Fu  J. S.; citation_author=Wang  H.; citation_author=Wong  K. S.; citation_author=Wong  G. K. L.;  citation_journal_title=Opt. Lett.;  citation_year=1998;  citation_volume=23;  citation_pages=388",{"id":28,"text":1472,"url":28,"identifiers":28},"citation_author=Abeles  B.;  citation_journal_title=Appl. Solid State Sci.;  citation_year=1976;  citation_volume=6;  citation_pages=1",{"id":28,"text":1474,"url":28,"identifiers":28},"citation_author=Dalacu  D.; citation_author=Martinu  L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1999;  citation_volume=17;  citation_pages=877",{"id":28,"text":1476,"url":28,"identifiers":28},"citation_author=Vepřek  S.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1999;  citation_volume=17;  citation_pages=2401",{"id":28,"text":1478,"url":28,"identifiers":28},"citation_author=Arefi-Khonsari  F.; citation_author=Hellegouarc’h  F.; citation_author=Amouroux  J.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=2240",{"id":28,"text":1480,"url":28,"identifiers":28},"citation_author=Arefi-Khonsari  F.; citation_author=Hellegouarc’h  F.; citation_author=Planade  R.; citation_author=Amouroux  J.;  citation_journal_title=Mater. Res. Soc. Symp. Proc.;  citation_year=1999;  citation_volume=544;  citation_pages=129",{"id":28,"text":1482,"url":28,"identifiers":28},"citation_author=Márquez  E.; citation_author=Nagels  P.; citation_author=González-Leal  J. M.; citation_author=Bernal-Oliva  A. M.; citation_author=Sleeckx  E.; citation_author=Callaerts  R.;  citation_journal_title=Vacuum;  citation_year=1999;  citation_volume=52;  citation_pages=55",{"id":28,"text":1484,"url":28,"identifiers":28},"citation_author=Yi  J. W.; citation_author=Lee  Y. H.; citation_author=Farouk  B.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=326;  citation_pages=154",{"id":28,"text":1486,"url":28,"identifiers":28},"citation_author=Itoh  K.; citation_author=Matsumoto  O.;  citation_journal_title=Thin Solid Films;  citation_year=1999;  citation_volume=345;  citation_pages=29",{"id":28,"text":1488,"url":28,"identifiers":28},"citation_author=Wertheimer  M. R.; citation_author=Fozza  A. C.; citation_author=Holländer  A.;  citation_journal_title=Nucl. Instrum. Methods Phys. Res. B;  citation_year=1999;  citation_volume=151;  citation_pages=65",{"id":28,"text":1490,"url":28,"identifiers":28},"citation_author=Escoubas  L.; citation_author=Gatto  A.; citation_author=Albrand  G.; citation_author=Roche  P.; citation_author=Commandré  M.;  citation_journal_title=Appl. Opt.;  citation_year=1998;  citation_volume=37;  citation_pages=1883",{"id":28,"text":1492,"url":28,"identifiers":28},"The Properties of Optical Glass, Schott Series on Glass and Glass Ceramics , edited by H. Bach and N. Neuroth (Springer, Berlin, 1995). ",{"id":28,"text":1494,"url":28,"identifiers":28},"J. A. Kerr, in CRC Handbook of Chemistry and Physics , edited by D. R. Lide (Chemical Rubber Corp., Boca Raton, FL, 1999), pp. 9–51. ",{"id":28,"text":1496,"url":28,"identifiers":28},"citation_author=Rivaton  A.; citation_author=Gardette  J.;  citation_journal_title=Angew. Makromol. Chem.;  citation_year=1998;  citation_volume=261\u002F262;  citation_pages=173",{"id":28,"text":1498,"url":28,"identifiers":28},"citation_author=Bergeron  A.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Martinu  L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=3227",{"id":28,"text":1500,"url":28,"identifiers":28},"citation_author=Fozza  A. C.; citation_author=Roch  J.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Kruse  A.; citation_author=Holländer  A.; citation_author=Wertheimer  M. R.;  citation_journal_title=Nucl. Instrum. Methods Phys. Res. B;  citation_year=1997;  citation_volume=131;  citation_pages=205",{"id":28,"text":1502,"url":28,"identifiers":28},"Plastics Additives Handbook , 4th ed., edited by R. Gächter, H. Müller, and P. P. Klemchuk (Hanser, Munich, 1993). ",{"id":28,"text":1504,"url":28,"identifiers":28},"citation_author=Holländer  A.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Wertheimer  M. R.;  citation_journal_title=J. Polym. Sci., Part A: Polym. Chem.;  citation_year=1996;  citation_volume=34;  citation_pages=1511",{"id":28,"text":1506,"url":28,"identifiers":28},"citation_author=da Silva Sobrinho  A. S.; citation_author=Schüler  N.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Wertheimer  M. R.; citation_author=Andrews  M.; citation_author=Gujrathi  S. C.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1998;  citation_volume=16;  citation_pages=2021",{"id":28,"text":1508,"url":28,"identifiers":28},"citation_author=Klemberg-Sapieha  J. E.; citation_author=Poitras  D.; citation_author=Martinu  L.; citation_author=Yamasaki  N. L. S.; citation_author=Lantman  C. W.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=985",{"id":28,"text":1510,"url":28,"identifiers":28},"citation_author=Bergeron  A.; citation_author=Poitras  D.; citation_author=Martinu  L.;  citation_journal_title=Opt. Eng.;  citation_year=2000;  citation_volume=39;  citation_pages=825",{"id":28,"text":1512,"url":28,"identifiers":28},"B. Bhushan, Handbook of Micro\u002FNano Tribology (Chemical Rubber Corp., Boca Raton, FL, 1995). ",{"id":28,"text":1514,"url":28,"identifiers":28},"citation_author=Oliver  W. C.; citation_author=Pharr  J. M.;  citation_journal_title=J. Mater. Res.;  citation_year=1992;  citation_volume=7;  citation_pages=1564",{"id":28,"text":1516,"url":28,"identifiers":28},"citation_author=Klemberg-Sapieha  J. E.; citation_author=Martinu  L.; citation_author=Wertheimer  M. R.; citation_author=Gunther  P.; citation_author=Schellin  R.; citation_author=Thielemann  C.; citation_author=Sessler  G.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=2775",{"id":28,"text":1518,"url":28,"identifiers":28},"J. E. Klemberg-Sapieha, S. Dahl, and L. Martinu, Proceedings 43rd Annual Technical Conference (Society of Vacuum Coaters, Denver, 2000), p. 234. ",{"id":28,"text":1520,"url":28,"identifiers":28},"citation_author=Klemberg-Sapieha  J. E.; citation_author=Martinu  L.; citation_author=Yamasaki  N. L. S.; citation_author=Lantman  C. W.;  citation_journal_title=Mater. Res. Soc. Symp. Proc.;  citation_year=1998;  citation_volume=544;  citation_pages=277",{"id":28,"text":1522,"url":28,"identifiers":28},"citation_author=Vallon  S.; citation_author=Drévillon  B.; citation_author=Poncin-Epaillard  F.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Martinu  L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=3194",{"id":28,"text":1524,"url":28,"identifiers":28},"citation_author=Shi  M. K.; citation_author=Selmani  A.; citation_author=Martinu  L.; citation_author=Sacher  E.; citation_author=Wertheimer  M. R.; citation_author=Yelon  A.;  citation_journal_title=J. Adhes. Sci. Technol.;  citation_year=1994;  citation_volume=8;  citation_pages=1129",{"id":28,"text":1526,"url":28,"identifiers":28},"citation_author=Gerenser  L. J.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1988;  citation_volume=6;  citation_pages=2897",{"id":28,"text":1528,"url":28,"identifiers":28},"citation_author=Dahl  S.; citation_author=Rats  D.; citation_author=von Stebut  J.; citation_author=Martinu  L.; citation_author=Klemberg-Sapieha  J. E.;  citation_journal_title=Thin Solid Films;  citation_year=1999;  citation_volume=355–356;  citation_pages=290",{"id":28,"text":1530,"url":28,"identifiers":28},"citation_author=Doshi  P.; citation_author=Jellison  G. E.; citation_author=Rohatgi  A.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=7826",{"id":28,"text":1532,"url":28,"identifiers":28},"citation_author=Winderbaum  S.; citation_author=Yun  F.; citation_author=Reinhold  O.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=1020",{"id":28,"text":1534,"url":28,"identifiers":28},"citation_author=Asinovsky  L.; citation_author=Shen  F.; citation_author=Yamaguchi  T.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=313–314;  citation_pages=198",{"id":28,"text":1536,"url":28,"identifiers":28},"citation_author=Jiang  Z.-T.; citation_author=Yamaguchi  T.; citation_author=Ohshimo  K.; citation_author=Aoyama  M.; citation_author=Asinovsky  L.;  citation_journal_title=Jpn. J. Appl. Phys., Part 1;  citation_year=1998;  citation_volume=37;  citation_pages=571",{"id":28,"text":1538,"url":28,"identifiers":28},"citation_author=Gaillard  F.; citation_author=Schiavone  P.; citation_author=Brault  P.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1997;  citation_volume=15;  citation_pages=2777",{"id":28,"text":1540,"url":28,"identifiers":28},"citation_author=Poitras  D.; citation_author=Martinu  L.;  citation_journal_title=Appl. Opt.;  citation_year=2000;  citation_volume=39;  citation_pages=1168",{"id":28,"text":1542,"url":28,"identifiers":28},"citation_author=Swart  P. L.; citation_author=Bulkin  P. V.; citation_author=Lacquet  B. M.;  citation_journal_title=Opt. Eng.;  citation_year=1997;  citation_volume=36;  citation_pages=1215",{"id":28,"text":1544,"url":28,"identifiers":28},"citation_author=Delano  E.;  citation_journal_title=J. Opt. Soc. Am.;  citation_year=1967;  citation_volume=57;  citation_pages=1529",{"id":28,"text":1546,"url":28,"identifiers":28},"citation_author=Sossi  L.;  citation_journal_title=Izv. Akad. Nauk Estonskoi SSR, Fizika, Matematika;  citation_year=1974;  citation_volume=23;  citation_pages=229",{"id":28,"text":1548,"url":28,"identifiers":28},"citation_author=Dobrowolski  J. A.; citation_author=Lowe  D.;  citation_journal_title=Appl. Opt.;  citation_year=1978;  citation_volume=17;  citation_pages=3039",{"id":28,"text":1550,"url":28,"identifiers":28},"citation_author=Verly  P. G.; citation_author=Dobrowolski  J. A.;  citation_journal_title=Appl. Opt.;  citation_year=1990;  citation_volume=29;  citation_pages=3672",{"id":28,"text":1552,"url":28,"identifiers":28},"citation_author=Tikhonravov  A. V.; citation_author=Sullivan  B. T.; citation_author=Borisova  M. V.;  citation_journal_title=Appl. Opt.;  citation_year=1994;  citation_volume=33;  citation_pages=5142",{"id":28,"text":1554,"url":28,"identifiers":28},"citation_author=Bovard  B. G.;  citation_journal_title=Appl. Opt.;  citation_year=1993;  citation_volume=32;  citation_pages=5427",{"id":28,"text":1556,"url":28,"identifiers":28},"D. Poitras, Ph.D. thesis, École Polytechnique de Montréal, January 2000. ",{"id":28,"text":1558,"url":28,"identifiers":28},"citation_author=Rats  D.; citation_author=Poitras  D.; citation_author=Soro  J. M.; citation_author=Martinu  L.; citation_author=von Stebut  J.;  citation_journal_title=Surf. Coat. Technol.;  citation_year=1999;  citation_volume=111;  citation_pages=220",{"id":28,"text":1560,"url":28,"identifiers":28},"citation_author=Rats  D.; citation_author=Soro  J. M.; citation_author=Martinu  L.; citation_author=von Stebut  J.;  citation_journal_title=Surf. Coat. Technol.;  citation_year=2000;  citation_volume=123;  citation_pages=36",{"id":28,"text":1562,"url":28,"identifiers":28},"citation_author=Sriram  S.; citation_author=Partlow  W. D.; citation_author=Liu  C. S.;  citation_journal_title=Appl. Opt.;  citation_year=1983;  citation_volume=22;  citation_pages=3664",{"id":28,"text":1564,"url":28,"identifiers":28},"citation_author=Lam  D. K. W.;  citation_journal_title=Appl. Opt.;  citation_year=1984;  citation_volume=23;  citation_pages=2744",{"id":28,"text":1566,"url":28,"identifiers":28},"citation_author=Bossi  D. E.; citation_author=Hammer  J. M.; citation_author=Shaw  J. M.;  citation_journal_title=Appl. Opt.;  citation_year=1987;  citation_volume=26;  citation_pages=609",{"id":28,"text":1568,"url":28,"identifiers":28},"citation_author=Kapser  K.; citation_author=Wagner  C.; citation_author=Deimel  P. P.;  citation_journal_title=IEEE Photonics Technol. Lett.;  citation_year=1991;  citation_volume=3;  citation_pages=1096",{"id":28,"text":1570,"url":28,"identifiers":28},"citation_author=Bruno  F.; citation_author=del Guidice  M.; citation_author=Recca  R.; citation_author=Testa  F.;  citation_journal_title=Appl. Opt.;  citation_year=1991;  citation_volume=30;  citation_pages=4560",{"id":28,"text":1572,"url":28,"identifiers":28},"citation_author=Giroult-Matlakowski  G.; citation_author=Charles  C.; citation_author=Durandet  A.; citation_author=Boswell  R. W.; citation_author=Armand  S.; citation_author=Persing  H. M.; citation_author=Perri  A. J.; citation_author=Lloyd  P. D.; citation_author=Hyde  S. C.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1994;  citation_volume=12;  citation_pages=2754",{"id":28,"text":1574,"url":28,"identifiers":28},"citation_author=Hoffmann  M.; citation_author=Kopka  P.; citation_author=Voges  E.;  citation_journal_title=IEEE Photonics Technol. Lett.;  citation_year=1997;  citation_volume=9;  citation_pages=1238",{"id":28,"text":1576,"url":28,"identifiers":28},"citation_author=Durandet  A.; citation_author=McKenzie  D. R.;  citation_journal_title=J. Appl. Phys.;  citation_year=1996;  citation_volume=80;  citation_pages=4707",{"id":28,"text":1578,"url":28,"identifiers":28},"citation_author=Beltrami  D. R.; citation_author=Love  J. D.; citation_author=Durandet  A.; citation_author=Samoć  A.; citation_author=Cogswell  C. J.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=7143",{"id":28,"text":1580,"url":28,"identifiers":28},"citation_author=Bazylenko  M. V.; citation_author=Gross  M.; citation_author=Simonian  A.; citation_author=Chu  P. L.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1996;  citation_volume=14;  citation_pages=336",{"id":28,"text":1582,"url":28,"identifiers":28},"citation_author=Nourshargh  N.; citation_author=Starr  E. M.; citation_author=McCormack  J. S.;  citation_journal_title=IEE Proc. J: Optoelectron.;  citation_year=1986;  citation_volume=133;  citation_pages=264",{"id":28,"text":1584,"url":28,"identifiers":28},"citation_author=Tien  P. K.; citation_author=Smolinsky  G.; citation_author=Martin  R. J.;  citation_journal_title=Appl. Opt.;  citation_year=1972;  citation_volume=11;  citation_pages=637",{"id":28,"text":1586,"url":28,"identifiers":28},"citation_author=Tabasky  M.; citation_author=Bulat  E. S.; citation_author=Tweed  B.; citation_author=Herrick  C.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1994;  citation_volume=12;  citation_pages=1244",{"id":28,"text":1588,"url":28,"identifiers":28},"citation_author=Bulat  E. S.; citation_author=Tabasky  M.; citation_author=Tweed  B.; citation_author=Herrick  C.; citation_author=Hankin  S.; citation_author=Lewis  N. J.; citation_author=Oblas  D.; citation_author=Fitzgerald  T.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1993;  citation_volume=11;  citation_pages=1268",{"id":28,"text":1590,"url":28,"identifiers":28},"citation_author=Bailey  A. H.; citation_author=Darbyshire  D. A.; citation_author=Overbury  A. P.; citation_author=Pitt  C. W.;  citation_journal_title=Vacuum;  citation_year=1986;  citation_volume=36;  citation_pages=139",{"id":28,"text":1592,"url":28,"identifiers":28},"citation_author=Rogers  J. L.; citation_author=Varhue  W. J.; citation_author=Adams  E.; citation_author=Lavoie  M. A.; citation_author=Frenette  R. O.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1994;  citation_volume=12;  citation_pages=2762",{"id":28,"text":1594,"url":28,"identifiers":28},"citation_author=Wirges  W.; citation_author=Bauer-Gogonea  S.; citation_author=Bauer  S.; citation_author=Gerhard-Multhaupt  R.; citation_author=Martinu  L.; citation_author=Klemberg-Sapieha  J. E.; citation_author=Wertheimer  M. R.;  citation_journal_title=Proc. SPIE;  citation_year=1994;  citation_volume=2213;  citation_pages=303",{"id":28,"text":1596,"url":28,"identifiers":28},"citation_author=Wagner  C.; citation_author=Frankenberger  J.; citation_author=Deimel  P. P.;  citation_journal_title=IEEE Photonics Technol. Lett.;  citation_year=1993;  citation_volume=5;  citation_pages=1257",{"id":28,"text":1598,"url":28,"identifiers":28},"citation_author=Yokoyama  S.;  citation_journal_title=J. Vac. Sci. Technol. A;  citation_year=1995;  citation_volume=13;  citation_pages=629",{"id":28,"text":1600,"url":28,"identifiers":28},"A. Malek-Tabrizi, S. I. Najafi, and L. Martinu, in Functional Photonic and Fiber Devices , edited by S. I. Najafi and M. N. Armenise (SPIE, Bellingham WA, 1996), Vol. 2695, p. 180. ",{"id":28,"text":1602,"url":28,"identifiers":28},"Fiber Optics and Glass Integrated Optics , Schott Series on Glass and Glass Ceramics, edited by H. Bach and D. Krause (Springer, Berlin, to be published). ",{"id":28,"text":1604,"url":28,"identifiers":28},"citation_author=Pinard  L.; citation_author=Mackowski  J. M.;  citation_journal_title=Appl. Opt.;  citation_year=1997;  citation_volume=36;  citation_pages=5451",{"id":28,"text":1606,"url":28,"identifiers":28},"citation_author=Martinu  L.; citation_author=Biederman  H.;  citation_journal_title=Plasma Chem. Plasma Process.;  citation_year=1985;  citation_volume=5;  citation_pages=81",{"id":28,"text":1608,"url":28,"identifiers":28},"citation_author=Kildemo  M.; citation_author=Drévillon  B.;  citation_journal_title=Rev. Sci. Instrum.;  citation_year=1996;  citation_volume=67;  citation_pages=1956",{"id":28,"text":1610,"url":28,"identifiers":28},"citation_author=Kildemo  M.; citation_author=Drévillon  B.; citation_author=Hunderi  O.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=313–314;  citation_pages=484",{"id":28,"text":1612,"url":28,"identifiers":28},"citation_author=Kildemo  M.; citation_author=Deniau  S.; citation_author=Bulkin  P.; citation_author=Drévillon  B.;  citation_journal_title=Thin Solid Films;  citation_year=1996;  citation_volume=290–291;  citation_pages=46",{"id":28,"text":1614,"url":28,"identifiers":28},"citation_author=Kim  S. Y.;  citation_journal_title=Appl. Opt.;  citation_year=1996;  citation_volume=35;  citation_pages=6703",{"id":28,"text":1616,"url":28,"identifiers":28},"citation_author=Sullivan  B. T.; citation_author=Dobrowolski  J. A.;  citation_journal_title=Appl. Opt.;  citation_year=1995;  citation_volume=31;  citation_pages=3821",{"id":28,"text":1618,"url":28,"identifiers":28},"citation_author=Kildemo  M.; citation_author=Hunderi  O.; citation_author=Drévillon  B.;  citation_journal_title=J. Opt. Soc. Am. A;  citation_year=1997;  citation_volume=14;  citation_pages=931",{"id":28,"text":1620,"url":28,"identifiers":28},"L. M. Brekhovskikh, Waves in Layered Media (Academic, New York, 1980), p. 199. ",{"id":28,"text":1622,"url":28,"identifiers":28},"J. R. Wait, Electromagnetic Waves in Stratified Media (Pergamon, New York, 1962), p. 88. ",{"id":28,"text":1624,"url":28,"identifiers":28},"citation_author=Galarza  C. G.; citation_author=Khargonekar  P. P.; citation_author=Layardi  N.; citation_author=Vincent  T. L.; citation_author=Rietman  E. A.; citation_author=Lee  J. T. C.;  citation_journal_title=Thin Solid Films;  citation_year=1998;  citation_volume=313–314;  citation_pages=156",{"id":28,"text":1626,"url":28,"identifiers":28},"Handbook of Optical Constants of Solids , edited by E. D. Palik (Academic, San Diego, CA, 1991). ",{"id":28,"text":1628,"url":28,"identifiers":28},"VASE Software, version 3.142, J. A. Woollam Co. ",{"id":28,"text":1630,"url":28,"identifiers":28},"citation_author=Dalacu  D.; citation_author=Martinu  L.;  citation_journal_title=J. Appl. Phys.;  citation_year=2000;  citation_volume=87;  citation_pages=228",{"id":28,"text":1632,"url":28,"identifiers":28},"Schott Glasswork, H. W. Erbsom, H. Krümmel, H. Pacquet, and G. Weidmann, Eur. Pat. EP-446596A. ",false,{"id":1635,"createTime":1636,"updateTime":1636,"relativeEntities":1637,"slug":1638,"properties":1639,"entityType":966,"verifyStatus":26,"verifyTime":1650,"verifyNote":967,"languages":1651,"translateLanguages":28,"viewCount":32,"primaryUrl":1652,"fullTextUrl":28,"authors":1653,"publicationType":1002,"publisherRelationship":1724,"citationCount":1778,"citationInfo":1779,"publishDate":1786,"publishYear":1780,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":1787,"openAccess":28,"references":1788,"isForceReanalyzing":1633},"6bd0ebba-ec2a-41e5-9841-869823daea29","2024-09-12T20:50:31.258+00:00",[],"Microstructural-evolution-during-film-growth",{"openalex":1640,"mag":1642,"abstract":1644,"title":1646,"doi":1648},{"VOID":1641},"W1981966175",{"VOID":1643},"1981966175",{"EN":1645},"\u003Cjats:p>Atomic-scale control and manipulation of the microstructure of polycrystalline thin films during kinetically limited low-temperature deposition, crucial for a broad range of industrial applications, has been a leading goal of materials science during the past decades. Here, we review the present understanding of film growth processes—nucleation, coalescence, competitive grain growth, and recrystallization—and their role in microstructural evolution as a function of deposition variables including temperature, the presence of reactive species, and the use of low-energy ion irradiation during growth.\u003C\u002Fjats:p>",{"EN":1647},"Microstructural evolution during film growth",{"VOID":1649},"10.1116\u002F1.1601610","2024-09-12T20:50:31.257+00:00",[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F21\u002F5\u002FS117\u002F244728\u002FMicrostructural-evolution-during-film-growth",[1654,1673,1690,1709],{"id":1655,"sortIndex":32,"researcher":28,"roles":1656,"affiliations":1657,"properties":1666,"displayName":1670,"givenName":28,"familyName":28},"a55cc872-f4af-4d9a-9631-a6f6049a4ae0",[],[1658],{"id":1659,"sortIndex":32,"affiliation":1660,"properties":28},"42b26af2-95ea-45b2-9dfc-4e56ceeeeac1",{"id":1659,"createTime":28,"updateTime":28,"relativeEntities":1661,"slug":28,"properties":1662,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1665,"statistic":28},[],{"title":1663},{"EN":1664},"Frederick Seitz Materials Research Laboratory and Department of Materials Science, University of Illinois, Urbana, Illinois 61801",[],{"orcid":1667,"title":1669,"openalex":1671},{"VOID":1668},"https:\u002F\u002Forcid.org\u002F0000-0002-2955-4897",{"EN":1670},"I. Petrov",{"VOID":1672},"A5010177657",{"id":1674,"sortIndex":40,"researcher":28,"roles":1675,"affiliations":1676,"properties":1685,"displayName":1687,"givenName":28,"familyName":28},"ee258111-b22b-4b71-b6a7-515cbb86e4fc",[],[1677],{"id":1678,"sortIndex":32,"affiliation":1679,"properties":28},"1db2ce29-06a5-4b3a-9147-0373d2923932",{"id":1678,"createTime":28,"updateTime":28,"relativeEntities":1680,"slug":28,"properties":1681,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1684,"statistic":28},[],{"title":1682},{"EN":1683},"Research Institute for Technical Physics and Materials Science, Hungarian Academy of Sciences, Budapest H-1325, Hungary",[],{"title":1686,"openalex":1688},{"EN":1687},"P.B. Barna",{"VOID":1689},"A5013798338",{"id":1691,"sortIndex":123,"researcher":28,"roles":1692,"affiliations":1693,"properties":1702,"displayName":1706,"givenName":28,"familyName":28},"2bd091dd-a7b5-4910-8dd9-c32b6a8f3177",[],[1694],{"id":1695,"sortIndex":32,"affiliation":1696,"properties":28},"f292b6a5-b278-41d5-aa85-8b0507ff561b",{"id":1695,"createTime":28,"updateTime":28,"relativeEntities":1697,"slug":28,"properties":1698,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1701,"statistic":28},[],{"title":1699},{"EN":1700},"Thin Film Division, Physics Department, Linköping University, S-581 83 Linköping, Sweden",[],{"orcid":1703,"title":1705,"openalex":1707},{"VOID":1704},"https:\u002F\u002Forcid.org\u002F0000-0002-2837-3656",{"EN":1706},"Lars Hultman",{"VOID":1708},"A5086073947",{"id":1710,"sortIndex":42,"researcher":28,"roles":1711,"affiliations":1712,"properties":1719,"displayName":1721,"givenName":28,"familyName":28},"dbd01011-8492-4dce-8e05-dc5167d8133e",[],[1713],{"id":1659,"sortIndex":32,"affiliation":1714,"properties":28},{"id":1659,"createTime":28,"updateTime":28,"relativeEntities":1715,"slug":28,"properties":1716,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1718,"statistic":28},[],{"title":1717},{"EN":1664},[],{"title":1720,"openalex":1722},{"EN":1721},"J. E. Greene",{"VOID":1723},"A5104038627",{"url":28,"publisher":1725,"properties":1771},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":1726,"slug":872,"properties":1727,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":1732,"manageAffiliations":1745,"indexDatabases":1756,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":1728,"eissn":1729,"issn":1730,"title":1731},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[1733,1737,1741],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":1734,"label":1735,"description":1736,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":1738,"label":1739,"description":1740,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":1742,"label":1743,"description":1744,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[1746,1751],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":1747,"slug":28,"properties":1748,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1750,"statistic":28},[],{"title":1749},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":1752,"slug":28,"properties":1753,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":1755,"statistic":28},[],{"title":1754},{"EN":917},[],[1757,1764],{"id":921,"indexDatabase":1758,"url":927,"indexYears":928,"academicFieldIds":1763,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":1759,"label":1760,"description":1761,"key":798,"publicationTags":1762,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":1765,"url":947,"indexYears":28,"academicFieldIds":1770,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":1766,"label":1767,"description":1768,"key":944,"publicationTags":1769,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":1772,"pages":1774,"volume":1776},{"VOID":1773},"5",{"VOID":1775},"S117-S128",{"VOID":1777},"21",1577,{"total":1778,"publishYear":1780,"statisticByYear":1781},2003,{"2012":332,"2013":358,"2014":354,"2015":329,"2016":1782,"2017":153,"2018":1783,"2019":334,"2020":1784,"2021":1785,"2022":566,"2023":564,"2024":206},100,127,111,112,"2003-09-01",[946,933],[1789,1792,1795,1799,1803,1807,1810,1813,1817,1821,1823,1825,1827,1831,1835,1839,1843,1845,1849,1853,1857,1859,1863,1867,1871,1875,1879,1883,1887,1891,1895,1897,1899,1903,1905,1909,1913,1916,1920,1924,1926,1928,1931,1935,1938,1941,1944,1946,1950,1952,1954,1958,1962,1966,1970,1974,1976,1980,1984,1988,1992,1996,2000,2003,2007,2011,2015,2019,2023,2027,2031,2035,2039,2042,2046,2050,2054,2058,2060,2064,2068,2072,2076,2080,2084,2088,2092,2094,2098,2102,2106,2110,2114,2118,2122,2126,2128,2132,2136,2140,2142,2146,2150,2154,2158,2160,2162,2166],{"id":28,"text":1790,"url":28,"identifiers":1791},"1969, Fiz. Met. Metalloved., 28, 83",{},{"id":28,"text":1793,"url":28,"identifiers":1794},"",{},{"id":28,"text":1796,"url":28,"identifiers":1797},"1977, Annu. Rev. Mater. Sci., 7, 239, 10.1146\u002Fannurev.ms.07.080177.001323",{"doi":1798},"10.1146\u002Fannurev.ms.07.080177.001323",{"id":28,"text":1800,"url":28,"identifiers":1801},"1984, J. Vac. Sci. Technol. A, 2, 500, 10.1116\u002F1.572604",{"doi":1802},"10.1116\u002F1.572604",{"id":28,"text":1804,"url":28,"identifiers":1805},"1984, Acta Metall., 32, 773, 10.1016\u002F0001-6160(84)90150-0",{"doi":1806},"10.1016\u002F0001-6160(84)90150-0",{"id":28,"text":1808,"url":28,"identifiers":1809},"1994, Mater. Res. Soc. Symp. Proc., 317, 401",{},{"id":28,"text":1811,"url":28,"identifiers":1812},"1985, Mater. Res. Soc. Symp. Proc., 38, 363",{},{"id":28,"text":1814,"url":28,"identifiers":1815},"1986, J. Vac. Sci. Technol. A, 4, 3059, 10.1116\u002F1.573628",{"doi":1816},"10.1116\u002F1.573628",{"id":28,"text":1818,"url":28,"identifiers":1819},"1998, Thin Solid Films, 317, 27, 10.1016\u002FS0040-6090(97)00503-8",{"doi":1820},"10.1016\u002FS0040-6090(97)00503-8",{"id":28,"text":1793,"url":28,"identifiers":1822},{},{"id":28,"text":1793,"url":28,"identifiers":1824},{},{"id":28,"text":1793,"url":28,"identifiers":1826},{},{"id":28,"text":1828,"url":28,"identifiers":1829},"1974, J. Vac. Sci. Technol., 11, 666, 10.1116\u002F1.1312732",{"doi":1830},"10.1116\u002F1.1312732",{"id":28,"text":1832,"url":28,"identifiers":1833},"1974, Appl. Phys. Lett., 25, 641, 10.1063\u002F1.1655341",{"doi":1834},"10.1063\u002F1.1655341",{"id":28,"text":1836,"url":28,"identifiers":1837},"1977, Thin Solid Films, 47, 219, 10.1016\u002F0040-6090(77)90037-2",{"doi":1838},"10.1016\u002F0040-6090(77)90037-2",{"id":28,"text":1840,"url":28,"identifiers":1841},"1977, Thin Solid Films, 45, 387, 10.1016\u002F0040-6090(77)90276-0",{"doi":1842},"10.1016\u002F0040-6090(77)90276-0",{"id":28,"text":1793,"url":28,"identifiers":1844},{},{"id":28,"text":1846,"url":28,"identifiers":1847},"1982, Thin Solid Films, 92, 41, 10.1016\u002F0040-6090(82)90186-9",{"doi":1848},"10.1016\u002F0040-6090(82)90186-9",{"id":28,"text":1850,"url":28,"identifiers":1851},"1985, J. Appl. Phys., 58, 2573, 10.1063\u002F1.335885",{"doi":1852},"10.1063\u002F1.335885",{"id":28,"text":1854,"url":28,"identifiers":1855},"1985, J. Appl. Phys., 58, 550, 10.1063\u002F1.335661",{"doi":1856},"10.1063\u002F1.335661",{"id":28,"text":1793,"url":28,"identifiers":1858},{},{"id":28,"text":1860,"url":28,"identifiers":1861},"1986, J. Vac. Sci. Technol. A, 4, 2925, 10.1116\u002F1.573662",{"doi":1862},"10.1116\u002F1.573662",{"id":28,"text":1864,"url":28,"identifiers":1865},"1986, Phys. Rev. Lett., 56, 1396, 10.1103\u002FPhysRevLett.56.1396",{"doi":1866},"10.1103\u002FPhysRevLett.56.1396",{"id":28,"text":1868,"url":28,"identifiers":1869},"1987, Phys. Rev. B, 35, 7906, 10.1103\u002FPhysRevB.35.7906",{"doi":1870},"10.1103\u002FPhysRevB.35.7906",{"id":28,"text":1872,"url":28,"identifiers":1873},"1988, J. Vac. Sci. Technol. A, 6, 3074, 10.1116\u002F1.575477",{"doi":1874},"10.1116\u002F1.575477",{"id":28,"text":1876,"url":28,"identifiers":1877},"1988, Phys. Rev. B, 38, 4067, 10.1103\u002FPhysRevB.38.4067",{"doi":1878},"10.1103\u002FPhysRevB.38.4067",{"id":28,"text":1880,"url":28,"identifiers":1881},"1988, Mater. Res. Bull., 23, 385, 10.1016\u002F0025-5408(88)90013-X",{"doi":1882},"10.1016\u002F0025-5408(88)90013-X",{"id":28,"text":1884,"url":28,"identifiers":1885},"1989, Thin Solid Films, 182, 197, 10.1016\u002F0040-6090(89)90255-1",{"doi":1886},"10.1016\u002F0040-6090(89)90255-1",{"id":28,"text":1888,"url":28,"identifiers":1889},"1990, Surf. Coat. Technol., 43\u002F44, 259, 10.1016\u002F0257-8972(90)90079-R",{"doi":1890},"10.1016\u002F0257-8972(90)90079-R",{"id":28,"text":1892,"url":28,"identifiers":1893},"1990, Science, 247, 688, 10.1126\u002Fscience.247.4943.688",{"doi":1894},"10.1126\u002Fscience.247.4943.688",{"id":28,"text":1793,"url":28,"identifiers":1896},{},{"id":28,"text":1808,"url":28,"identifiers":1898},{},{"id":28,"text":1900,"url":28,"identifiers":1901},"2000, Phys. Rev. B, 62, 2899, 10.1103\u002FPhysRevB.62.2899",{"doi":1902},"10.1103\u002FPhysRevB.62.2899",{"id":28,"text":1793,"url":28,"identifiers":1904},{},{"id":28,"text":1906,"url":28,"identifiers":1907},"1990, Annu. Rev. Mater. Sci., 20, 245, 10.1146\u002Fannurev.ms.20.080190.001333",{"doi":1908},"10.1146\u002Fannurev.ms.20.080190.001333",{"id":28,"text":1910,"url":28,"identifiers":1911},"1995, Mater. Sci. Eng., B, 32, 211, 10.1016\u002F0921-5107(95)03011-5",{"doi":1912},"10.1016\u002F0921-5107(95)03011-5",{"id":28,"text":1914,"url":28,"identifiers":1915},"1997, J. Vac. Sci. Technol. B, 15, 763",{},{"id":28,"text":1917,"url":28,"identifiers":1918},"1994, Electrochim. Acta, 39, 1091, 10.1016\u002F0013-4686(94)E0023-S",{"doi":1919},"10.1016\u002F0013-4686(94)E0023-S",{"id":28,"text":1921,"url":28,"identifiers":1922},"2002, J. Electrochem. Soc., 149, S9, 10.1149\u002F1.1469028",{"doi":1923},"10.1149\u002F1.1469028",{"id":28,"text":1793,"url":28,"identifiers":1925},{},{"id":28,"text":1793,"url":28,"identifiers":1927},{},{"id":28,"text":1929,"url":28,"identifiers":1930},"1966, Philos. Mag., 15, 173",{},{"id":28,"text":1932,"url":28,"identifiers":1933},"1971, Thin Solid Films, 7, 179, 10.1016\u002F0040-6090(71)90068-X",{"doi":1934},"10.1016\u002F0040-6090(71)90068-X",{"id":28,"text":1936,"url":28,"identifiers":1937},"1969, J. Vac. Sci. Technol., 6, 172",{},{"id":28,"text":1939,"url":28,"identifiers":1940},"1974, Jpn. J. Appl. Phys., 2, 525",{},{"id":28,"text":1942,"url":28,"identifiers":1943},"2000, Phys. Rev. B, 62, 10458",{},{"id":28,"text":1793,"url":28,"identifiers":1945},{},{"id":28,"text":1947,"url":28,"identifiers":1948},"1970, Krist. Tech., 5, 315, 10.1002\u002Fcrat.19700050211",{"doi":1949},"10.1002\u002Fcrat.19700050211",{"id":28,"text":1793,"url":28,"identifiers":1951},{},{"id":28,"text":1793,"url":28,"identifiers":1953},{},{"id":28,"text":1955,"url":28,"identifiers":1956},"1974, Appl. Phys. Lett., 25, 64, 10.1063\u002F1.1655281",{"doi":1957},"10.1063\u002F1.1655281",{"id":28,"text":1959,"url":28,"identifiers":1960},"1986, J. Vac. Sci. Technol. A, 4, 490, 10.1116\u002F1.573866",{"doi":1961},"10.1116\u002F1.573866",{"id":28,"text":1963,"url":28,"identifiers":1964},"2001, MRS Bull., 26, 182, 10.1557\u002Fmrs2001.40",{"doi":1965},"10.1557\u002Fmrs2001.40",{"id":28,"text":1967,"url":28,"identifiers":1968},"2000, Thin Solid Films, 365, 189, 10.1016\u002FS0040-6090(99)01057-3",{"doi":1969},"10.1016\u002FS0040-6090(99)01057-3",{"id":28,"text":1971,"url":28,"identifiers":1972},"2002, Appl. Phys. Lett., 80, 1144, 10.1063\u002F1.1448389",{"doi":1973},"10.1063\u002F1.1448389",{"id":28,"text":1793,"url":28,"identifiers":1975},{},{"id":28,"text":1977,"url":28,"identifiers":1978},"1994, Surf. Interface Anal., 21, 546, 10.1002\u002Fsia.740210806",{"doi":1979},"10.1002\u002Fsia.740210806",{"id":28,"text":1981,"url":28,"identifiers":1982},"1980, Surf. Sci., 95, 309, 10.1016\u002F0039-6028(80)90144-2",{"doi":1983},"10.1016\u002F0039-6028(80)90144-2",{"id":28,"text":1985,"url":28,"identifiers":1986},"1994, Phys. Status Solidi A, 146, 31, 10.1002\u002Fpssa.2211460104",{"doi":1987},"10.1002\u002Fpssa.2211460104",{"id":28,"text":1989,"url":28,"identifiers":1990},"1999, J. Vac. Sci. Technol. A, 17, 2401, 10.1116\u002F1.581977",{"doi":1991},"10.1116\u002F1.581977",{"id":28,"text":1993,"url":28,"identifiers":1994},"2000, Surf. Coat. Technol., 133,134, 138, 10.1016\u002FS0257-8972(00)00888-4",{"doi":1995},"10.1016\u002FS0257-8972(00)00888-4",{"id":28,"text":1997,"url":28,"identifiers":1998},"2000, Surf. Coat. Technol., 133,134, 131, 10.1016\u002FS0257-8972(00)00887-2",{"doi":1999},"10.1016\u002FS0257-8972(00)00887-2",{"id":28,"text":2001,"url":28,"identifiers":2002},"2001, Surf. Coat. Technol., 142–144, 603",{},{"id":28,"text":2004,"url":28,"identifiers":2005},"2001, Surf. Coat. Technol., 146,147, 351, 10.1016\u002FS0257-8972(01)01396-2",{"doi":2006},"10.1016\u002FS0257-8972(01)01396-2",{"id":28,"text":2008,"url":28,"identifiers":2009},"1998, Surf. Coat. Technol., 100,101, 72, 10.1016\u002FS0257-8972(97)00590-2",{"doi":2010},"10.1016\u002FS0257-8972(97)00590-2",{"id":28,"text":2012,"url":28,"identifiers":2013},"2000, Surf. Coat. Technol., 125, 147, 10.1016\u002FS0257-8972(99)00595-2",{"doi":2014},"10.1016\u002FS0257-8972(99)00595-2",{"id":28,"text":2016,"url":28,"identifiers":2017},"1970, Thin Solid Films, 6, 443, 10.1016\u002F0040-6090(70)90005-2",{"doi":2018},"10.1016\u002F0040-6090(70)90005-2",{"id":28,"text":2020,"url":28,"identifiers":2021},"1998, Thin Solid Films, 332, 272, 10.1016\u002FS0040-6090(98)01098-0",{"doi":2022},"10.1016\u002FS0040-6090(98)01098-0",{"id":28,"text":2024,"url":28,"identifiers":2025},"2001, Sens. Actuators A, 90, 118, 10.1016\u002FS0924-4247(00)00562-8",{"doi":2026},"10.1016\u002FS0924-4247(00)00562-8",{"id":28,"text":2028,"url":28,"identifiers":2029},"2000, Sol. Energy Mater. Sol. Cells, 62, 63, 10.1016\u002FS0927-0248(99)00136-1",{"doi":2030},"10.1016\u002FS0927-0248(99)00136-1",{"id":28,"text":2032,"url":28,"identifiers":2033},"2000, Surf. Coat. Technol., 132, 275, 10.1016\u002FS0257-8972(00)00746-5",{"doi":2034},"10.1016\u002FS0257-8972(00)00746-5",{"id":28,"text":2036,"url":28,"identifiers":2037},"1992, Thin Solid Films, 214, 156, 10.1016\u002F0040-6090(92)90764-3",{"doi":2038},"10.1016\u002F0040-6090(92)90764-3",{"id":28,"text":2040,"url":28,"identifiers":2041},"200, Thin Solid Films, 370, 223",{},{"id":28,"text":2043,"url":28,"identifiers":2044},"1998, Surf. Coat. Technol., 98, 1473, 10.1016\u002FS0257-8972(97)00140-0",{"doi":2045},"10.1016\u002FS0257-8972(97)00140-0",{"id":28,"text":2047,"url":28,"identifiers":2048},"2003, Thin Solid Films, 433, 78, 10.1016\u002FS0040-6090(03)00281-5",{"doi":2049},"10.1016\u002FS0040-6090(03)00281-5",{"id":28,"text":2051,"url":28,"identifiers":2052},"1979, Phys. Status Solidi A, 55, 427, 10.1002\u002Fpssa.2210550210",{"doi":2053},"10.1002\u002Fpssa.2210550210",{"id":28,"text":2055,"url":28,"identifiers":2056},"2001, Surf. Sci., 489, 161, 10.1016\u002FS0039-6028(01)01174-8",{"doi":2057},"10.1016\u002FS0039-6028(01)01174-8",{"id":28,"text":1793,"url":28,"identifiers":2059},{},{"id":28,"text":2061,"url":28,"identifiers":2062},"1994, J. Vac. Sci. Technol. A, 12, 2846, 10.1116\u002F1.578955",{"doi":2063},"10.1116\u002F1.578955",{"id":28,"text":2065,"url":28,"identifiers":2066},"1991, J. Vac. Sci. Technol. A, 9, 434, 10.1116\u002F1.577428",{"doi":2067},"10.1116\u002F1.577428",{"id":28,"text":2069,"url":28,"identifiers":2070},"1978, J. Vac. Sci. Technol. A, 15, 1, 10.1116\u002F1.569429",{"doi":2071},"10.1116\u002F1.569429",{"id":28,"text":2073,"url":28,"identifiers":2074},"1995, J. Appl. Phys., 78, 5395, 10.1063\u002F1.359720",{"doi":2075},"10.1063\u002F1.359720",{"id":28,"text":2077,"url":28,"identifiers":2078},"1993, Appl. Phys. Lett., 63, 36, 10.1063\u002F1.109742",{"doi":2079},"10.1063\u002F1.109742",{"id":28,"text":2081,"url":28,"identifiers":2082},"1993, J. Appl. Phys., 73, 8580, 10.1063\u002F1.353388",{"doi":2083},"10.1063\u002F1.353388",{"id":28,"text":2085,"url":28,"identifiers":2086},"1998, J. Appl. Phys., 84, 6034, 10.1063\u002F1.368913",{"doi":2087},"10.1063\u002F1.368913",{"id":28,"text":2089,"url":28,"identifiers":2090},"2002, J. Appl. Phys., 92, 5084, 10.1063\u002F1.1510558",{"doi":2091},"10.1063\u002F1.1510558",{"id":28,"text":1793,"url":28,"identifiers":2093},{},{"id":28,"text":2095,"url":28,"identifiers":2096},"2003, J. Appl. Phys., 93, 9086, 10.1063\u002F1.1567797",{"doi":2097},"10.1063\u002F1.1567797",{"id":28,"text":2099,"url":28,"identifiers":2100},"1989, Thin Solid Films, 169, 299, 10.1016\u002F0040-6090(89)90713-X",{"doi":2101},"10.1016\u002F0040-6090(89)90713-X",{"id":28,"text":2103,"url":28,"identifiers":2104},"1987, J. Appl. Phys., 62, 1800, 10.1063\u002F1.339560",{"doi":2105},"10.1063\u002F1.339560",{"id":28,"text":2107,"url":28,"identifiers":2108},"1989, Thin Solid Films, 171, 5, 10.1016\u002F0040-6090(89)90030-8",{"doi":2109},"10.1016\u002F0040-6090(89)90030-8",{"id":28,"text":2111,"url":28,"identifiers":2112},"1993, Thin Solid Films, 226, 30, 10.1016\u002F0040-6090(93)90201-Y",{"doi":2113},"10.1016\u002F0040-6090(93)90201-Y",{"id":28,"text":2115,"url":28,"identifiers":2116},"1992, J. Vac. Sci. Technol. A, 10, 265, 10.1116\u002F1.578074",{"doi":2117},"10.1116\u002F1.578074",{"id":28,"text":2119,"url":28,"identifiers":2120},"1986, J. Vac. Sci. Technol. A, 4, 443, 10.1116\u002F1.573902",{"doi":2121},"10.1116\u002F1.573902",{"id":28,"text":2123,"url":28,"identifiers":2124},"1986, J. Appl. Phys., 60, 4160, 10.1063\u002F1.337499",{"doi":2125},"10.1063\u002F1.337499",{"id":28,"text":1793,"url":28,"identifiers":2127},{},{"id":28,"text":2129,"url":28,"identifiers":2130},"1992, J. Vac. Sci. Technol. A, 10, 3283, 10.1116\u002F1.577812",{"doi":2131},"10.1116\u002F1.577812",{"id":28,"text":2133,"url":28,"identifiers":2134},"1992, J. Vac. Sci. Technol. A, 10, 1618, 10.1116\u002F1.578032",{"doi":2135},"10.1116\u002F1.578032",{"id":28,"text":2137,"url":28,"identifiers":2138},"1999, J. Appl. Phys., 86, 3633, 10.1063\u002F1.371271",{"doi":2139},"10.1063\u002F1.371271",{"id":28,"text":1793,"url":28,"identifiers":2141},{},{"id":28,"text":2143,"url":28,"identifiers":2144},"2002, Surf. Sci., 513, 468, 10.1016\u002FS0039-6028(02)01845-9",{"doi":2145},"10.1016\u002FS0039-6028(02)01845-9",{"id":28,"text":2147,"url":28,"identifiers":2148},"2003, Phys. Rev. B, 67, 035409, 10.1103\u002FPhysRevB.67.035409",{"doi":2149},"10.1103\u002FPhysRevB.67.035409",{"id":28,"text":2151,"url":28,"identifiers":2152},"2002, Phys. Rev. Lett., 89, 176102, 10.1103\u002FPhysRevLett.89.176102",{"doi":2153},"10.1103\u002FPhysRevLett.89.176102",{"id":28,"text":2155,"url":28,"identifiers":2156},"2003, Surf. Sci., 526, 85, 10.1016\u002FS0039-6028(02)02570-0",{"doi":2157},"10.1016\u002FS0039-6028(02)02570-0",{"id":28,"text":1793,"url":28,"identifiers":2159},{},{"id":28,"text":1793,"url":28,"identifiers":2161},{},{"id":28,"text":2163,"url":28,"identifiers":2164},"2002, MRS Bull., 27, 19, 10.1557\u002Fmrs2002.15",{"doi":2165},"10.1557\u002Fmrs2002.15",{"id":28,"text":2167,"url":28,"identifiers":2168},"2002, J. Vac. Sci. Technol. A, 20, 1815, 10.1116\u002F1.1503784",{"doi":2169},"10.1116\u002F1.1503784",{"id":2171,"createTime":2172,"updateTime":2172,"relativeEntities":2173,"slug":2174,"properties":2175,"entityType":966,"verifyStatus":26,"verifyTime":2172,"verifyNote":967,"languages":2184,"translateLanguages":28,"viewCount":32,"primaryUrl":2185,"fullTextUrl":28,"authors":2186,"publicationType":1002,"publisherRelationship":2223,"citationCount":2276,"citationInfo":2277,"publishDate":2280,"publishYear":2278,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":2281,"openAccess":28,"references":2282,"isForceReanalyzing":1633},"ac2d4435-be9b-4eb9-bd77-848fb040c778","2024-10-16T19:27:06.600+00:00",[],"Theory-of-ripple-topography-induced-by-ion-bombardment",{"openalex":2176,"mag":2178,"title":2180,"doi":2182},{"VOID":2177},"W1979545045",{"VOID":2179},"1979545045",{"EN":2181},"Theory of ripple topography induced by ion bombardment",{"VOID":2183},"10.1116\u002F1.575561",[31],"https:\u002F\u002Fpubs.aip.org\u002Favs\u002Fjva\u002Farticle\u002F6\u002F4\u002F2390-2395\u002F101351",[2187,2206],{"id":2188,"sortIndex":32,"researcher":28,"roles":2189,"affiliations":2190,"properties":2199,"displayName":2203,"givenName":28,"familyName":28},"f03a55e9-13fb-4ff3-ad11-5939bf939147",[],[2191],{"id":2192,"sortIndex":32,"affiliation":2193,"properties":28},"7f818665-cf86-46ec-a8d6-277912da335a",{"id":2192,"createTime":28,"updateTime":28,"relativeEntities":2194,"slug":28,"properties":2195,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2198,"statistic":28},[],{"title":2196},{"VI":2197},"Department of Physics, Colorado State University, Fort Collins, Colorado 80523",[],{"orcid":2200,"title":2202,"openalex":2204},{"VOID":2201},"https:\u002F\u002Forcid.org\u002F0000-0001-6233-9016",{"EN":2203},"R. Mark Bradley",{"VOID":2205},"A5050848787",{"id":2207,"sortIndex":40,"researcher":28,"roles":2208,"affiliations":2209,"properties":2218,"displayName":2220,"givenName":28,"familyName":28},"29488751-3b19-492f-86ad-d17c39c17d98",[],[2210],{"id":2211,"sortIndex":32,"affiliation":2212,"properties":28},"0d5010b4-f9b1-4a42-843a-c31d3601bf6a",{"id":2211,"createTime":28,"updateTime":28,"relativeEntities":2213,"slug":28,"properties":2214,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2217,"statistic":28},[],{"title":2215},{"VI":2216},"IBM T. J. Watson Research Center, Yorktown Heights, New York 10598",[],{"title":2219,"openalex":2221},{"EN":2220},"J. M. E. Harper",{"VOID":2222},"A5061907337",{"url":28,"publisher":2224,"properties":2270},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":2225,"slug":872,"properties":2226,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":2231,"manageAffiliations":2244,"indexDatabases":2255,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":2227,"eissn":2228,"issn":2229,"title":2230},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[2232,2236,2240],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":2233,"label":2234,"description":2235,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":2237,"label":2238,"description":2239,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":2241,"label":2242,"description":2243,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[2245,2250],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":2246,"slug":28,"properties":2247,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2249,"statistic":28},[],{"title":2248},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":2251,"slug":28,"properties":2252,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2254,"statistic":28},[],{"title":2253},{"EN":917},[],[2256,2263],{"id":921,"indexDatabase":2257,"url":927,"indexYears":928,"academicFieldIds":2262,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":2258,"label":2259,"description":2260,"key":798,"publicationTags":2261,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":2264,"url":947,"indexYears":28,"academicFieldIds":2269,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":2265,"label":2266,"description":2267,"key":944,"publicationTags":2268,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":2271,"pages":2273,"volume":2275},{"VOID":2272},"4",{"VOID":2274},"2390-2395",{"VOID":1052},1329,{"total":2276,"publishYear":2278,"statisticByYear":2279},1988,{"2012":599,"2013":161,"2014":208,"2015":279,"2016":325,"2017":436,"2018":567,"2019":279,"2020":152,"2021":279,"2022":352,"2023":139,"2024":434},"1988-07-01",[946,933],[],{"id":2284,"createTime":2285,"updateTime":2285,"relativeEntities":2286,"slug":2287,"properties":2288,"entityType":966,"verifyStatus":26,"verifyTime":2285,"verifyNote":967,"languages":2299,"translateLanguages":28,"viewCount":32,"primaryUrl":2300,"fullTextUrl":28,"authors":2301,"publicationType":1002,"publisherRelationship":2368,"citationCount":2421,"citationInfo":2422,"publishDate":2425,"publishYear":2423,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":2426,"openAccess":28,"references":2427,"isForceReanalyzing":1633},"4c994ddc-0a91-4cea-9bdc-51a0658f57de","2024-09-28T10:16:34.998+00:00",[],"Structural-analysis-of-Si-111-7-7-by-UHV-transmission-electron-diffraction-and-microscopy",{"openalex":2289,"mag":2291,"abstract":2293,"title":2295,"doi":2297},{"VOID":2290},"W2050086101",{"VOID":2292},"2050086101",{"EN":2294},"\u003Cjats:p>Structural analysis of the surface reconstructions investigated by ultrahigh vacuum (UHV) transmission electron microscopy (TEM) and diffraction (TED) is shown. By TED intensity analysis a new structural model of Si(111)-7×7 is derived. The model basically consists of 12 adatoms arranged locally in the 2×2 structure, nine dimers on the sides of the triangular subunits of the 7×7 unit cell and a stacking fault layer. UHV–HREM of Si (111)-7×7 surface is commented.\u003C\u002Fjats:p>",{"EN":2296},"Structural analysis of Si(111)-7×7 by UHV-transmission electron diffraction and microscopy",{"VOID":2298},"10.1116\u002F1.573160",[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F3\u002F3\u002F1502\u002F212496\u002FStructural-analysis-of-Si-111-7-7-by-UHV",[2302,2321,2338,2353],{"id":2303,"sortIndex":32,"researcher":28,"roles":2304,"affiliations":2305,"properties":2314,"displayName":2318,"givenName":28,"familyName":28},"4fa8486d-eb29-4ccf-a36f-9f791c382390",[],[2306],{"id":2307,"sortIndex":32,"affiliation":2308,"properties":28},"5f75491e-e168-49b4-9073-88f1d848293b",{"id":2307,"createTime":28,"updateTime":28,"relativeEntities":2309,"slug":28,"properties":2310,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2313,"statistic":28},[],{"title":2311},{"VI":2312},"Department of Physics, Tokyo Institute of Technology, Oh-okayama, Meguro-ku, Tokyo, 152 Japan",[],{"orcid":2315,"title":2317,"openalex":2319},{"VOID":2316},"https:\u002F\u002Forcid.org\u002F0000-0001-9567-4929",{"EN":2318},"K. Takayanagi",{"VOID":2320},"A5103226752",{"id":2322,"sortIndex":40,"researcher":28,"roles":2323,"affiliations":2324,"properties":2331,"displayName":2335,"givenName":28,"familyName":28},"fb384ef2-a89a-4e5e-9679-0f4f0ac949e8",[],[2325],{"id":2307,"sortIndex":32,"affiliation":2326,"properties":28},{"id":2307,"createTime":28,"updateTime":28,"relativeEntities":2327,"slug":28,"properties":2328,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2330,"statistic":28},[],{"title":2329},{"VI":2312},[],{"orcid":2332,"title":2334,"openalex":2336},{"VOID":2333},"https:\u002F\u002Forcid.org\u002F0000-0003-1916-3961",{"EN":2335},"Y. Tanishiro",{"VOID":2337},"A5069512933",{"id":2339,"sortIndex":123,"researcher":28,"roles":2340,"affiliations":2341,"properties":2348,"displayName":2350,"givenName":28,"familyName":28},"0c065664-701a-4a39-ad6b-013a8c6efbdd",[],[2342],{"id":2307,"sortIndex":32,"affiliation":2343,"properties":28},{"id":2307,"createTime":28,"updateTime":28,"relativeEntities":2344,"slug":28,"properties":2345,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2347,"statistic":28},[],{"title":2346},{"VI":2312},[],{"title":2349,"openalex":2351},{"EN":2350},"Mutsuji Takahashi",{"VOID":2352},"A5073611000",{"id":2354,"sortIndex":42,"researcher":28,"roles":2355,"affiliations":2356,"properties":2363,"displayName":2365,"givenName":28,"familyName":28},"d067bdc4-ba85-4fc1-a146-88dea0f8ed7f",[],[2357],{"id":2307,"sortIndex":32,"affiliation":2358,"properties":28},{"id":2307,"createTime":28,"updateTime":28,"relativeEntities":2359,"slug":28,"properties":2360,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2362,"statistic":28},[],{"title":2361},{"VI":2312},[],{"title":2364,"openalex":2366},{"EN":2365},"Shigeki Takahashi",{"VOID":2367},"A5033167379",{"url":28,"publisher":2369,"properties":2415},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":2370,"slug":872,"properties":2371,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":2376,"manageAffiliations":2389,"indexDatabases":2400,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":2372,"eissn":2373,"issn":2374,"title":2375},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[2377,2381,2385],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":2378,"label":2379,"description":2380,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":2382,"label":2383,"description":2384,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":2386,"label":2387,"description":2388,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[2390,2395],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":2391,"slug":28,"properties":2392,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2394,"statistic":28},[],{"title":2393},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":2396,"slug":28,"properties":2397,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2399,"statistic":28},[],{"title":2398},{"EN":917},[],[2401,2408],{"id":921,"indexDatabase":2402,"url":927,"indexYears":928,"academicFieldIds":2407,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":2403,"label":2404,"description":2405,"key":798,"publicationTags":2406,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":2409,"url":947,"indexYears":28,"academicFieldIds":2414,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":2410,"label":2411,"description":2412,"key":944,"publicationTags":2413,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":2416,"pages":2418,"volume":2420},{"VOID":2417},"3",{"VOID":2419},"1502-1506",{"VOID":2417},1302,{"total":2421,"publishYear":2423,"statisticByYear":2424},1985,{"2012":199,"2013":134,"2014":47,"2015":134,"2016":127,"2017":51,"2018":130,"2019":357,"2020":357,"2021":205,"2022":46,"2023":126,"2024":46},"1985-05-01",[946,933],[],{"id":2429,"createTime":2430,"updateTime":2430,"relativeEntities":2431,"slug":2432,"properties":2433,"entityType":966,"verifyStatus":26,"verifyTime":2430,"verifyNote":967,"languages":2443,"translateLanguages":28,"viewCount":32,"primaryUrl":2444,"fullTextUrl":28,"authors":2445,"publicationType":1002,"publisherRelationship":2465,"citationCount":2518,"citationInfo":2519,"publishDate":2522,"publishYear":2520,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":2523,"openAccess":28,"references":2524,"isForceReanalyzing":1633},"07e8e31d-ada1-4f56-b818-0cc8382b1f24","2024-09-26T00:47:02.414+00:00",[],"The-search-for-novel-superhard-materials",{"openalex":2434,"mag":2436,"abstract":2438,"title":2440,"doi":2442},{"VOID":2435},"W2153703866",{"VOID":2437},"2153703866",{"EN":2439},"\u003Cjats:p>The recent development in the field of superhard materials with Vickers hardness of ⩾40 GPa is reviewed. Two basic approaches are outlined including the intrinsic superhard materials, such as diamond, cubic boron nitride, C3N4, carbonitrides, etc. and extrinsic, nanostructured materials for which superhardness is achieved by an appropriate design of their microstructure. The theoretically predicted high hardness of C3N4 has not been experimentally documented so far. Ceramics made of cubic boron nitride prepared at high pressure and temperature find many applications whereas thin films prepared by activated deposition from the gas phase are still in the stage of fundamental development. The greatest progress has been achieved in the field of nanostructured materials including superlattices and nanocomposites where superhardness of ⩾50 GPa was reported for several systems. More recently, nc-TiN\u002FSiNx nanocomposites with hardness of 105 GPa were prepared, reaching the hardness of diamond. The principles of design for these materials are summarized and some unresolved questions outlined.\u003C\u002Fjats:p>",{"EN":2441},"The search for novel, superhard materials",{"VOID":1991},[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F17\u002F5\u002F2401\u002F753457\u002FThe-search-for-novel-superhard-materials",[2446],{"id":2447,"sortIndex":32,"researcher":28,"roles":2448,"affiliations":2449,"properties":2458,"displayName":2462,"givenName":28,"familyName":28},"f9875e77-bd31-43d8-b23f-c93b11283509",[],[2450],{"id":2451,"sortIndex":32,"affiliation":2452,"properties":28},"251ff73b-7507-4908-a6e6-759617a4a727",{"id":2451,"createTime":28,"updateTime":28,"relativeEntities":2453,"slug":28,"properties":2454,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2457,"statistic":28},[],{"title":2455},{"VI":2456},"Institute for Chemistry of Inorganic Materials, Technical University Munich, Lichtenbergstrasse 4, D-85747 Garching b. Munich, Germany",[],{"orcid":2459,"title":2461,"openalex":2463},{"VOID":2460},"https:\u002F\u002Forcid.org\u002F0000-0002-6016-3093",{"EN":2462},"S. Vepřek",{"VOID":2464},"A5081504023",{"url":28,"publisher":2466,"properties":2512},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":2467,"slug":872,"properties":2468,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":2473,"manageAffiliations":2486,"indexDatabases":2497,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":2469,"eissn":2470,"issn":2471,"title":2472},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[2474,2478,2482],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":2475,"label":2476,"description":2477,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":2479,"label":2480,"description":2481,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":2483,"label":2484,"description":2485,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[2487,2492],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":2488,"slug":28,"properties":2489,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2491,"statistic":28},[],{"title":2490},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":2493,"slug":28,"properties":2494,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":2496,"statistic":28},[],{"title":2495},{"EN":917},[],[2498,2505],{"id":921,"indexDatabase":2499,"url":927,"indexYears":928,"academicFieldIds":2504,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":2500,"label":2501,"description":2502,"key":798,"publicationTags":2503,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":2506,"url":947,"indexYears":28,"academicFieldIds":2511,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":2507,"label":2508,"description":2509,"key":944,"publicationTags":2510,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":2513,"pages":2514,"volume":2516},{"VOID":1773},{"VOID":2515},"2401-2420",{"VOID":2517},"17",1171,{"total":2518,"publishYear":2520,"statisticByYear":2521},1999,{"2012":434,"2013":138,"2014":436,"2015":201,"2016":328,"2017":147,"2018":352,"2019":353,"2020":148,"2021":278,"2022":202,"2023":352,"2024":47},"1999-09-01",[946,933],[2525,2527,2529,2532,2534,2537,2540,2542,2546,2548,2552,2556,2560,2564,2568,2572,2574,2578,2581,2585,2589,2593,2597,2601,2605,2609,2613,2617,2621,2624,2628,2632,2636,2640,2644,2648,2652,2656,2660,2664,2668,2672,2675,2679,2683,2687,2690,2694,2698,2702,2706,2710,2714,2718,2722,2725,2729,2733,2736,2740,2743,2747,2751,2753,2755,2757,2759,2763,2766,2769,2773,2777,2781,2785,2787,2790,2792,2796,2799,2803,2807,2811,2815,2819,2823,2825,2829,2833,2837,2841,2843,2845,2847,2850,2853,2857,2861,2864,2866,2868,2872,2876,2880,2883,2887,2890,2893,2896,2900,2904,2908,2911,2915,2918,2921,2924,2928,2932,2936,2940,2944,2946,2950,2954,2958,2962,2966,2970,2974,2978,2982,2986,2990,2994,2998,3000,3004,3008,3011,3015,3019,3022,3026,3029,3033,3036,3039,3042,3045,3047,3051,3055,3059,3063,3066,3070,3074,3078,3081,3085,3089,3093,3096,3100,3103,3107,3111,3115,3119,3122,3125,3128,3132,3136,3140,3144,3148,3152,3155,3159,3163,3167,3171,3175,3179,3183,3187,3191,3195,3199,3203,3207,3211,3214,3218,3222,3226,3230,3234,3238,3242,3246,3250,3254,3258,3262,3266,3270,3274,3278,3282,3286,3290,3294,3298,3302,3306,3309,3313,3317,3321,3325,3329,3333,3337,3341,3345,3349,3351,3355,3359,3363,3367,3371,3374,3378,3381,3385,3389,3391,3393,3396,3399,3403,3407,3409,3411,3415,3418,3422,3425,3428,3432,3435,3439,3443,3447,3449,3451,3455,3457,3461,3465,3469,3472,3474,3478,3480,3484,3486,3490,3492,3494,3496,3498,3500,3503,3507,3511,3515,3519,3523,3527,3531,3535,3539,3543,3547,3551,3555,3559,3563,3566,3570,3574,3578,3582,3586,3588,3590,3593,3596,3598,3600,3602,3606,3608,3612,3616,3620,3622,3624,3626,3630,3632,3636,3640,3644,3648,3652],{"id":28,"text":1793,"url":28,"identifiers":2526},{},{"id":28,"text":1793,"url":28,"identifiers":2528},{},{"id":28,"text":2530,"url":28,"identifiers":2531},"1995, Surf. Coat. Technol., 76–77, 712",{},{"id":28,"text":1793,"url":28,"identifiers":2533},{},{"id":28,"text":2535,"url":28,"identifiers":2536},"1970, Phys. Rev. B, 2, 547",{},{"id":28,"text":2538,"url":28,"identifiers":2539},"1996, Surf. Coat. Technol., 86–87, 394",{},{"id":28,"text":1793,"url":28,"identifiers":2541},{},{"id":28,"text":2543,"url":28,"identifiers":2544},"1996, Mater. Chem. Phys., 43, 1, 10.1016\u002F0254-0584(95)01607-V",{"doi":2545},"10.1016\u002F0254-0584(95)01607-V",{"id":28,"text":1793,"url":28,"identifiers":2547},{},{"id":28,"text":2549,"url":28,"identifiers":2550},"1985, Phys. Rev. B, 32, 7988, 10.1103\u002FPhysRevB.32.7988",{"doi":2551},"10.1103\u002FPhysRevB.32.7988",{"id":28,"text":2553,"url":28,"identifiers":2554},"1989, Science, 245, 841, 10.1126\u002Fscience.245.4920.841",{"doi":2555},"10.1126\u002Fscience.245.4920.841",{"id":28,"text":2557,"url":28,"identifiers":2558},"1994, Solid State Commun., 92, 45, 10.1016\u002F0038-1098(94)90857-5",{"doi":2559},"10.1016\u002F0038-1098(94)90857-5",{"id":28,"text":2561,"url":28,"identifiers":2562},"1996, Mater. Sci. Eng., A, 209, 1, 10.1016\u002F0921-5093(95)10120-9",{"doi":2563},"10.1016\u002F0921-5093(95)10120-9",{"id":28,"text":2565,"url":28,"identifiers":2566},"1995, J. Vac. Sci. Technol. A, 13, 2914, 10.1116\u002F1.579613",{"doi":2567},"10.1116\u002F1.579613",{"id":28,"text":2569,"url":28,"identifiers":2570},"1996, Appl. Phys. Lett., 68, 634, 10.1063\u002F1.116492",{"doi":2571},"10.1063\u002F1.116492",{"id":28,"text":1793,"url":28,"identifiers":2573},{},{"id":28,"text":2575,"url":28,"identifiers":2576},"1996, Mod. Phys. Lett. B, 10, 615, 10.1142\u002FS0217984996000675",{"doi":2577},"10.1142\u002FS0217984996000675",{"id":28,"text":2579,"url":28,"identifiers":2580},"1996, J. Phys.: Condens. Mater., 8, 685",{},{"id":28,"text":2582,"url":28,"identifiers":2583},"1997, Philos. Mag. Lett., 75, 155, 10.1080\u002F095008397179714",{"doi":2584},"10.1080\u002F095008397179714",{"id":28,"text":2586,"url":28,"identifiers":2587},"1997, Diamond Relat. Mater., 6, 1799, 10.1016\u002FS0925-9635(97)00142-8",{"doi":2588},"10.1016\u002FS0925-9635(97)00142-8",{"id":28,"text":2590,"url":28,"identifiers":2591},"1996, J. Tribol., 118, 543, 10.1115\u002F1.2831572",{"doi":2592},"10.1115\u002F1.2831572",{"id":28,"text":2594,"url":28,"identifiers":2595},"1996, J. Vac. Sci. Technol. A, 14, 2935, 10.1116\u002F1.580247",{"doi":2596},"10.1116\u002F1.580247",{"id":28,"text":2598,"url":28,"identifiers":2599},"1997, IEEE Trans. Magn., 33, 938, 10.1109\u002F20.560135",{"doi":2600},"10.1109\u002F20.560135",{"id":28,"text":2602,"url":28,"identifiers":2603},"1998, IEEE Trans. Magn., 34, 1720, 10.1109\u002F20.706683",{"doi":2604},"10.1109\u002F20.706683",{"id":28,"text":2606,"url":28,"identifiers":2607},"1998, IEEE Trans. Magn., 34, 1735, 10.1109\u002F20.706688",{"doi":2608},"10.1109\u002F20.706688",{"id":28,"text":2610,"url":28,"identifiers":2611},"1998, Appl. Phys. Lett., 73, 915, 10.1063\u002F1.122036",{"doi":2612},"10.1063\u002F1.122036",{"id":28,"text":2614,"url":28,"identifiers":2615},"1998, J. Vac. Sci. Technol. A, 16, 2093, 10.1116\u002F1.581315",{"doi":2616},"10.1116\u002F1.581315",{"id":28,"text":2618,"url":28,"identifiers":2619},"1998, J. Appl. Phys., 84, 2133, 10.1063\u002F1.368274",{"doi":2620},"10.1063\u002F1.368274",{"id":28,"text":2622,"url":28,"identifiers":2623},"1998, Nucl. Instrum. Methods Phys. Res. B, 136–138, 236",{},{"id":28,"text":2625,"url":28,"identifiers":2626},"1998, Thin Solid Films, 323, 72, 10.1016\u002FS0040-6090(97)01050-X",{"doi":2627},"10.1016\u002FS0040-6090(97)01050-X",{"id":28,"text":2629,"url":28,"identifiers":2630},"1998, Solid State Commun., 107, 75, 10.1016\u002FS0038-1098(98)00152-5",{"doi":2631},"10.1016\u002FS0038-1098(98)00152-5",{"id":28,"text":2633,"url":28,"identifiers":2634},"1998, Thin Solid Films, 317, 380, 10.1016\u002FS0040-6090(97)00628-7",{"doi":2635},"10.1016\u002FS0040-6090(97)00628-7",{"id":28,"text":2637,"url":28,"identifiers":2638},"1998, Nucl. Instrum. Methods Phys. Res. B, 135, 224, 10.1016\u002FS0168-583X(97)00595-8",{"doi":2639},"10.1016\u002FS0168-583X(97)00595-8",{"id":28,"text":2641,"url":28,"identifiers":2642},"1998, Diamond Relat. Mater., 7, 899, 10.1016\u002FS0925-9635(97)00328-2",{"doi":2643},"10.1016\u002FS0925-9635(97)00328-2",{"id":28,"text":2645,"url":28,"identifiers":2646},"1998, Thin Solid Films, 325, 123, 10.1016\u002FS0040-6090(98)00509-4",{"doi":2647},"10.1016\u002FS0040-6090(98)00509-4",{"id":28,"text":2649,"url":28,"identifiers":2650},"1998, J. Vac. Sci. Technol. A, 16, 1956, 10.1116\u002F1.581203",{"doi":2651},"10.1116\u002F1.581203",{"id":28,"text":2653,"url":28,"identifiers":2654},"1998, Jpn. J. Appl. Phys., Part 2, 37, L746, 10.1143\u002FJJAP.37.L746",{"doi":2655},"10.1143\u002FJJAP.37.L746",{"id":28,"text":2657,"url":28,"identifiers":2658},"1998, Appl. Phys. Lett., 72, 3449, 10.1063\u002F1.121662",{"doi":2659},"10.1063\u002F1.121662",{"id":28,"text":2661,"url":28,"identifiers":2662},"1998, Jpn. J. Appl. Phys., Part 2, 37, L675, 10.1143\u002FJJAP.37.L675",{"doi":2663},"10.1143\u002FJJAP.37.L675",{"id":28,"text":2665,"url":28,"identifiers":2666},"1998, Thin Solid Films, 317, 384, 10.1016\u002FS0040-6090(97)01056-0",{"doi":2667},"10.1016\u002FS0040-6090(97)01056-0",{"id":28,"text":2669,"url":28,"identifiers":2670},"1998, Thin Solid Films, 317, 359, 10.1016\u002FS0040-6090(97)00552-X",{"doi":2671},"10.1016\u002FS0040-6090(97)00552-X",{"id":28,"text":2673,"url":28,"identifiers":2674},"1998, J. Non-Cryst. Solids, 227–230, 650",{},{"id":28,"text":2676,"url":28,"identifiers":2677},"1998, Thin Solid Films, 322, 245, 10.1016\u002FS0040-6090(97)00940-1",{"doi":2678},"10.1016\u002FS0040-6090(97)00940-1",{"id":28,"text":2680,"url":28,"identifiers":2681},"1998, Thin Solid Films, 323, 217, 10.1016\u002FS0040-6090(97)01036-5",{"doi":2682},"10.1016\u002FS0040-6090(97)01036-5",{"id":28,"text":2684,"url":28,"identifiers":2685},"1998, Mater. Chem. Phys., 54, 325, 10.1016\u002FS0254-0584(98)00105-9",{"doi":2686},"10.1016\u002FS0254-0584(98)00105-9",{"id":28,"text":2688,"url":28,"identifiers":2689},"1998, Nucl. Instrum. Methods Phys. Res. B, 136–138, 231",{},{"id":28,"text":2691,"url":28,"identifiers":2692},"1998, J. Vac. Sci. Technol. B, 16, 1219, 10.1116\u002F1.589987",{"doi":2693},"10.1116\u002F1.589987",{"id":28,"text":2695,"url":28,"identifiers":2696},"1994, J. Vac. Sci. Technol. A, 12, 3192, 10.1116\u002F1.579237",{"doi":2697},"10.1116\u002F1.579237",{"id":28,"text":2699,"url":28,"identifiers":2700},"1995, Int. J. Mod. Phys. B, 9, 3527, 10.1142\u002FS0217979295001385",{"doi":2701},"10.1142\u002FS0217979295001385",{"id":28,"text":2703,"url":28,"identifiers":2704},"1995, Diamond Relat. Mater., 4, 1093, 10.1016\u002F0925-9635(95)00288-X",{"doi":2705},"10.1016\u002F0925-9635(95)00288-X",{"id":28,"text":2707,"url":28,"identifiers":2708},"1998, J. Appl. Phys., 83, 1975, 10.1063\u002F1.366924",{"doi":2709},"10.1063\u002F1.366924",{"id":28,"text":2711,"url":28,"identifiers":2712},"1998, Phys. Rev. B, 58, 2207, 10.1103\u002FPhysRevB.58.2207",{"doi":2713},"10.1103\u002FPhysRevB.58.2207",{"id":28,"text":2715,"url":28,"identifiers":2716},"1997, Russ. Chem. Rev., 66, 901, 10.1070\u002FRC1997v066n11ABEH000378",{"doi":2717},"10.1070\u002FRC1997v066n11ABEH000378",{"id":28,"text":2719,"url":28,"identifiers":2720},"1998, Sci. China, Ser. A, 41, 405, 10.1007\u002FBF02879032",{"doi":2721},"10.1007\u002FBF02879032",{"id":28,"text":2723,"url":28,"identifiers":2724},"1995, Diamond Films Technol., 5, 261",{},{"id":28,"text":2726,"url":28,"identifiers":2727},"1990, J. Am. Ceram. Soc., 73, 1973, 10.1111\u002Fj.1151-2916.1990.tb05254.x",{"doi":2728},"10.1111\u002Fj.1151-2916.1990.tb05254.x",{"id":28,"text":2730,"url":28,"identifiers":2731},"1995, Phys. Rev. Lett., 75, 1336, 10.1103\u002FPhysRevLett.75.1336",{"doi":2732},"10.1103\u002FPhysRevLett.75.1336",{"id":28,"text":2734,"url":28,"identifiers":2735},"1996, Phys. Rev. Lett., 76, 2205",{},{"id":28,"text":2737,"url":28,"identifiers":2738},"1996, J. Vac. Sci. Technol. A, 14, 56, 10.1116\u002F1.579880",{"doi":2739},"10.1116\u002F1.579880",{"id":28,"text":2741,"url":28,"identifiers":2742},"1996, J. Vac. Sci. Technol. A, 14, 2695",{},{"id":28,"text":2744,"url":28,"identifiers":2745},"1998, Appl. Phys. Lett., 72, 2532, 10.1063\u002F1.121410",{"doi":2746},"10.1063\u002F1.121410",{"id":28,"text":2748,"url":28,"identifiers":2749},"1999, Phys. Rev. B, 59, 5162, 10.1103\u002FPhysRevB.59.5162",{"doi":2750},"10.1103\u002FPhysRevB.59.5162",{"id":28,"text":1793,"url":28,"identifiers":2752},{},{"id":28,"text":1793,"url":28,"identifiers":2754},{},{"id":28,"text":1793,"url":28,"identifiers":2756},{},{"id":28,"text":1793,"url":28,"identifiers":2758},{},{"id":28,"text":2760,"url":28,"identifiers":2761},"1986, J. Mater. Res., 1, 601, 10.1557\u002FJMR.1986.0601",{"doi":2762},"10.1557\u002FJMR.1986.0601",{"id":28,"text":2764,"url":28,"identifiers":2765},"1993, Härteri Technische. Mitteilungen, 48, 3",{},{"id":28,"text":2767,"url":28,"identifiers":2768},"1989, Metalloberfläche, 2, 41",{},{"id":28,"text":2770,"url":28,"identifiers":2771},"1993, Surf. Coat. Technol., 61, 201, 10.1016\u002F0257-8972(93)90226-E",{"doi":2772},"10.1016\u002F0257-8972(93)90226-E",{"id":28,"text":2774,"url":28,"identifiers":2775},"1992, J. Mater. Res., 7, 613, 10.1557\u002FJMR.1992.0613",{"doi":2776},"10.1557\u002FJMR.1992.0613",{"id":28,"text":2778,"url":28,"identifiers":2779},"1992, J. Mater. Res., 7, 1564, 10.1557\u002FJMR.1992.1564",{"doi":2780},"10.1557\u002FJMR.1992.1564",{"id":28,"text":2782,"url":28,"identifiers":2783},"1998, Mater. Sci. Eng., A, 253, 151, 10.1016\u002FS0921-5093(98)00724-2",{"doi":2784},"10.1016\u002FS0921-5093(98)00724-2",{"id":28,"text":1793,"url":28,"identifiers":2786},{},{"id":28,"text":2788,"url":28,"identifiers":2789},"1995, Materialprüfung, 37, 9",{},{"id":28,"text":1793,"url":28,"identifiers":2791},{},{"id":28,"text":2793,"url":28,"identifiers":2794},"1998, Thin Solid Films, 317, 449, 10.1016\u002FS0040-6090(97)00665-2",{"doi":2795},"10.1016\u002FS0040-6090(97)00665-2",{"id":28,"text":2797,"url":28,"identifiers":2798},"1997, Electrochem. Soc. Proc., 97-25, 317",{},{"id":28,"text":2800,"url":28,"identifiers":2801},"1998, Surf. Coat. Technol., 108\u002F109, 138, 10.1016\u002FS0257-8972(98)00618-5",{"doi":2802},"10.1016\u002FS0257-8972(98)00618-5",{"id":28,"text":2804,"url":28,"identifiers":2805},"1998, Tribol. Int., 31, 5, 10.1016\u002FS0301-679X(98)00004-8",{"doi":2806},"10.1016\u002FS0301-679X(98)00004-8",{"id":28,"text":2808,"url":28,"identifiers":2809},"1987, J. Mater. Sci., 22, 1501, 10.1007\u002FBF01233154",{"doi":2810},"10.1007\u002FBF01233154",{"id":28,"text":2812,"url":28,"identifiers":2813},"1989, Mater. Sci. Technol., 5, 865, 10.1179\u002Fmst.1989.5.9.865",{"doi":2814},"10.1179\u002Fmst.1989.5.9.865",{"id":28,"text":2816,"url":28,"identifiers":2817},"1981, J. Am. Ceram. Soc., 64, 533, 10.1111\u002Fj.1151-2916.1981.tb10320.x",{"doi":2818},"10.1111\u002Fj.1151-2916.1981.tb10320.x",{"id":28,"text":2820,"url":28,"identifiers":2821},"1981, J. Am. Ceram. Soc., 64, 539, 10.1111\u002Fj.1151-2916.1981.tb10321.x",{"doi":2822},"10.1111\u002Fj.1151-2916.1981.tb10321.x",{"id":28,"text":1793,"url":28,"identifiers":2824},{},{"id":28,"text":2826,"url":28,"identifiers":2827},"1994, Phys. Status Solidi A, 142, 389, 10.1002\u002Fpssa.2211420212",{"doi":2828},"10.1002\u002Fpssa.2211420212",{"id":28,"text":2830,"url":28,"identifiers":2831},"1995, J. Mater. Sci., 30, 5394, 10.1007\u002FBF00351549",{"doi":2832},"10.1007\u002FBF00351549",{"id":28,"text":2834,"url":28,"identifiers":2835},"1995, Mat. -wiss. u. Werkstofftech, 26, 477, 10.1002\u002Fmawe.19950260904",{"doi":2836},"10.1002\u002Fmawe.19950260904",{"id":28,"text":2838,"url":28,"identifiers":2839},"1996, Mat. -wiss. u. Werkstofftech., 27, 487, 10.1002\u002Fmawe.19960271008",{"doi":2840},"10.1002\u002Fmawe.19960271008",{"id":28,"text":1793,"url":28,"identifiers":2842},{},{"id":28,"text":1793,"url":28,"identifiers":2844},{},{"id":28,"text":1793,"url":28,"identifiers":2846},{},{"id":28,"text":2848,"url":28,"identifiers":2849},"1979, Sov. Phys. Dokl., 24, 83",{},{"id":28,"text":2851,"url":28,"identifiers":2852},"1961, Chem. Eng., 68, 177",{},{"id":28,"text":2854,"url":28,"identifiers":2855},"1991, Mater. Sci. Eng., B, 10, 149, 10.1016\u002F0921-5107(91)90121-B",{"doi":2856},"10.1016\u002F0921-5107(91)90121-B",{"id":28,"text":2858,"url":28,"identifiers":2859},"1997, Phys. Rev. B, 55, 6203, 10.1103\u002FPhysRevB.55.6203",{"doi":2860},"10.1103\u002FPhysRevB.55.6203",{"id":28,"text":2862,"url":28,"identifiers":2863},"1998, MRS Bull., 23, 22",{},{"id":28,"text":1793,"url":28,"identifiers":2865},{},{"id":28,"text":1793,"url":28,"identifiers":2867},{},{"id":28,"text":2869,"url":28,"identifiers":2870},"1968, J. Appl. Phys., 39, 2915, 10.1063\u002F1.1656693",{"doi":2871},"10.1063\u002F1.1656693",{"id":28,"text":2873,"url":28,"identifiers":2874},"1973, J. Appl. Phys., 44, 1428, 10.1063\u002F1.1662389",{"doi":2875},"10.1063\u002F1.1662389",{"id":28,"text":2877,"url":28,"identifiers":2878},"1976, J. Appl. Phys., 47, 4746, 10.1063\u002F1.322531",{"doi":2879},"10.1063\u002F1.322531",{"id":28,"text":2881,"url":28,"identifiers":2882},"1969, Sov. Phys. Crystallogr., 14, 449",{},{"id":28,"text":2884,"url":28,"identifiers":2885},"1970, Russ. Chem. Rev., 39, 783, 10.1070\u002FRC1970v039n09ABEH002022",{"doi":2886},"10.1070\u002FRC1970v039n09ABEH002022",{"id":28,"text":2888,"url":28,"identifiers":2889},"1975, Sci. Am., 233, 102",{},{"id":28,"text":2891,"url":28,"identifiers":2892},"1953, Exp. Tech. Phys. (Berlin), 1, 49",{},{"id":28,"text":2894,"url":28,"identifiers":2895},"1956, Z. Phys. Chem. (Leipzig), 205, 349",{},{"id":28,"text":2897,"url":28,"identifiers":2898},"1971, J. Appl. Phys., 42, 2953, 10.1063\u002F1.1660654",{"doi":2899},"10.1063\u002F1.1660654",{"id":28,"text":2901,"url":28,"identifiers":2902},"1973, J. Vac. Sci. Technol., 10, 104, 10.1116\u002F1.1317915",{"doi":2903},"10.1116\u002F1.1317915",{"id":28,"text":2905,"url":28,"identifiers":2906},"1976, Appl. Phys. Lett., 29, 118, 10.1063\u002F1.88963",{"doi":2907},"10.1063\u002F1.88963",{"id":28,"text":2909,"url":28,"identifiers":2910},"1978, Sov. Phys. Tech. Phys., 23, 222",{},{"id":28,"text":2912,"url":28,"identifiers":2913},"1991, Diamond Relat. Mater., 1, 1, 10.1016\u002F0925-9635(91)90005-U",{"doi":2914},"10.1016\u002F0925-9635(91)90005-U",{"id":28,"text":2916,"url":28,"identifiers":2917},"1998, MRS Bull., 23, 32",{},{"id":28,"text":2919,"url":28,"identifiers":2920},"1981, Indian J. Pure Appl. Phys., 19, 803",{},{"id":28,"text":2922,"url":28,"identifiers":2923},"1998, MRS Bull., 23, 16",{},{"id":28,"text":2925,"url":28,"identifiers":2926},"1996, Diamond Relat. Mater., 5, 501, 10.1016\u002F0925-9635(96)80068-9",{"doi":2927},"10.1016\u002F0925-9635(96)80068-9",{"id":28,"text":2929,"url":28,"identifiers":2930},"1995, Diamond Relat. Mater., 4, 288, 10.1016\u002F0925-9635(94)05244-1",{"doi":2931},"10.1016\u002F0925-9635(94)05244-1",{"id":28,"text":2933,"url":28,"identifiers":2934},"1998, J. Vac. Sci. Technol. A, 16, 3287, 10.1116\u002F1.581535",{"doi":2935},"10.1116\u002F1.581535",{"id":28,"text":2937,"url":28,"identifiers":2938},"1976, Thin Solid Films, 38, L17, 10.1016\u002F0040-6090(76)90214-5",{"doi":2939},"10.1016\u002F0040-6090(76)90214-5",{"id":28,"text":2941,"url":28,"identifiers":2942},"1977, Thin Solid Films, 40, L31, 10.1016\u002F0040-6090(77)90097-9",{"doi":2943},"10.1016\u002F0040-6090(77)90097-9",{"id":28,"text":1793,"url":28,"identifiers":2945},{},{"id":28,"text":2947,"url":28,"identifiers":2948},"1978, Vacuum, 28, 449, 10.1016\u002FS0042-207X(78)80020-7",{"doi":2949},"10.1016\u002FS0042-207X(78)80020-7",{"id":28,"text":2951,"url":28,"identifiers":2952},"1979, Thin Solid Films, 58, 117, 10.1016\u002F0040-6090(79)90220-7",{"doi":2953},"10.1016\u002F0040-6090(79)90220-7",{"id":28,"text":2955,"url":28,"identifiers":2956},"1980, Thin Solid Films, 70, L9, 10.1016\u002F0040-6090(80)90429-0",{"doi":2957},"10.1016\u002F0040-6090(80)90429-0",{"id":28,"text":2959,"url":28,"identifiers":2960},"1980, Appl. Phys. Lett., 36, 291, 10.1063\u002F1.91465",{"doi":2961},"10.1063\u002F1.91465",{"id":28,"text":2963,"url":28,"identifiers":2964},"1979, Thin Solid Films, 58, 101, 10.1016\u002F0040-6090(79)90217-7",{"doi":2965},"10.1016\u002F0040-6090(79)90217-7",{"id":28,"text":2967,"url":28,"identifiers":2968},"1981, J. Vac. Sci. Technol., 18, 179, 10.1116\u002F1.570719",{"doi":2969},"10.1116\u002F1.570719",{"id":28,"text":2971,"url":28,"identifiers":2972},"1983, J. Appl. Phys., 54, 4590, 10.1063\u002F1.332613",{"doi":2973},"10.1063\u002F1.332613",{"id":28,"text":2975,"url":28,"identifiers":2976},"1983, Appl. Phys. Lett., 42, 636, 10.1063\u002F1.94056",{"doi":2977},"10.1063\u002F1.94056",{"id":28,"text":2979,"url":28,"identifiers":2980},"1994, Pure Appl. Chem., 66, 1789, 10.1351\u002Fpac199466091789",{"doi":2981},"10.1351\u002Fpac199466091789",{"id":28,"text":2983,"url":28,"identifiers":2984},"1994, Diamond Relat. Mater., 3, 361, 10.1016\u002F0925-9635(94)90186-4",{"doi":2985},"10.1016\u002F0925-9635(94)90186-4",{"id":28,"text":2987,"url":28,"identifiers":2988},"1996, Surf. Coat. Technol., 82, 199, 10.1016\u002F0257-8972(95)02734-3",{"doi":2989},"10.1016\u002F0257-8972(95)02734-3",{"id":28,"text":2991,"url":28,"identifiers":2992},"1998, Thin Solid Films, 326, 1, 10.1016\u002FS0040-6090(98)00497-0",{"doi":2993},"10.1016\u002FS0040-6090(98)00497-0",{"id":28,"text":2995,"url":28,"identifiers":2996},"1998, Carbon, 36, 765, 10.1016\u002FS0008-6223(98)00003-7",{"doi":2997},"10.1016\u002FS0008-6223(98)00003-7",{"id":28,"text":1793,"url":28,"identifiers":2999},{},{"id":28,"text":3001,"url":28,"identifiers":3002},"1981, MRS Bull., 16, 1385, 10.1016\u002F0025-5408(81)90057-X",{"doi":3003},"10.1016\u002F0025-5408(81)90057-X",{"id":28,"text":3005,"url":28,"identifiers":3006},"1984, Thin Solid Films, 117, 311, 10.1016\u002F0040-6090(84)90361-4",{"doi":3007},"10.1016\u002F0040-6090(84)90361-4",{"id":28,"text":3009,"url":28,"identifiers":3010},"1990, Mater. Sci. Forum, 54\u002F55, 295",{},{"id":28,"text":3012,"url":28,"identifiers":3013},"1995, J. Mater. Res., 10, 320, 10.1557\u002FJMR.1995.0320",{"doi":3014},"10.1557\u002FJMR.1995.0320",{"id":28,"text":3016,"url":28,"identifiers":3017},"1990, J. Am. Ceram. Soc., 73, 2498, 10.1111\u002Fj.1151-2916.1990.tb07618.x",{"doi":3018},"10.1111\u002Fj.1151-2916.1990.tb07618.x",{"id":28,"text":3020,"url":28,"identifiers":3021},"1996, Z. Metallkd., 87, 170",{},{"id":28,"text":3023,"url":28,"identifiers":3024},"1997, Adv. Mater. Chem. Vap. Deposition, 3, 257, 10.1002\u002Fcvde.19970030503",{"doi":3025},"10.1002\u002Fcvde.19970030503",{"id":28,"text":3027,"url":28,"identifiers":3028},"1999, Thin Solid Films, 331, 154",{},{"id":28,"text":3030,"url":28,"identifiers":3031},"1999, Adv. Mater., Chem. Vap. Deposition, 5, 61, 10.1002\u002F(SICI)1521-3862(199903)5:2\u003C61::AID-CVDE61>3.0.CO;2-Z",{"doi":3032},"10.1002\u002F(SICI)1521-3862(199903)5:2\u003C61::AID-CVDE61>3.0.CO;2-Z",{"id":28,"text":3034,"url":28,"identifiers":3035},"1977, Vesti. Adak. Nauk BSSR, Ser. Fiz.-Mat. Nauk, 2, 111",{},{"id":28,"text":3037,"url":28,"identifiers":3038},"1977, Chem. Abstr., 87, 59009j",{},{"id":28,"text":3040,"url":28,"identifiers":3041},"1977, Pis'ma Zh. Tekh. Fiz., 3, 186",{},{"id":28,"text":3043,"url":28,"identifiers":3044},"1977, Chem. Abstr., 86, 175831z",{},{"id":28,"text":1793,"url":28,"identifiers":3046},{},{"id":28,"text":3048,"url":28,"identifiers":3049},"1992, Plasma Chem. Plasma Process., 12, 219, 10.1007\u002FBF01447023",{"doi":3050},"10.1007\u002FBF01447023",{"id":28,"text":3052,"url":28,"identifiers":3053},"1997, Surf. Coat. Technol., 97, 45, 10.1016\u002FS0257-8972(97)00159-X",{"doi":3054},"10.1016\u002FS0257-8972(97)00159-X",{"id":28,"text":3056,"url":28,"identifiers":3057},"1992, Adv. Mater., 4, 759, 10.1002\u002Fadma.19920041114",{"doi":3058},"10.1002\u002Fadma.19920041114",{"id":28,"text":3060,"url":28,"identifiers":3061},"1976, J. Less-Common Met., 47, 43, 10.1016\u002F0022-5088(76)90072-2",{"doi":3062},"10.1016\u002F0022-5088(76)90072-2",{"id":28,"text":3064,"url":28,"identifiers":3065},"1994, Japan. Inst. Metals Mater. Trans., 35, 85",{},{"id":28,"text":3067,"url":28,"identifiers":3068},"1997, Int. J. Refract. Met. Hard Mater., 15, 13, 10.1016\u002FS0263-4368(96)00046-7",{"doi":3069},"10.1016\u002FS0263-4368(96)00046-7",{"id":28,"text":3071,"url":28,"identifiers":3072},"1998, Diamond Relat. Mater., 7, 1519, 10.1016\u002FS0925-9635(98)00228-3",{"doi":3073},"10.1016\u002FS0925-9635(98)00228-3",{"id":28,"text":3075,"url":28,"identifiers":3076},"1990, Surf. Coat. Technol., 43\u002F44, 107, 10.1016\u002F0257-8972(90)90065-K",{"doi":3077},"10.1016\u002F0257-8972(90)90065-K",{"id":28,"text":3079,"url":28,"identifiers":3080},"1992, J. Hard Mater., 3, 29",{},{"id":28,"text":3082,"url":28,"identifiers":3083},"1987, Phys. Rev. B, 36, 3344, 10.1103\u002FPhysRevB.36.3344",{"doi":3084},"10.1103\u002FPhysRevB.36.3344",{"id":28,"text":3086,"url":28,"identifiers":3087},"1995, Surf. Coat. Technol., 74\u002F75, 273, 10.1016\u002F0257-8972(95)08235-2",{"doi":3088},"10.1016\u002F0257-8972(95)08235-2",{"id":28,"text":3090,"url":28,"identifiers":3091},"1997, Surf. Coat. Technol., 97, 335, 10.1016\u002FS0257-8972(97)00196-5",{"doi":3092},"10.1016\u002FS0257-8972(97)00196-5",{"id":28,"text":3094,"url":28,"identifiers":3095},"1990, Int. J. Refract. Met. Hard Mater., 9, 92",{},{"id":28,"text":3097,"url":28,"identifiers":3098},"1988, Appl. Phys. Lett., 53, 2495, 10.1063\u002F1.100528",{"doi":3099},"10.1063\u002F1.100528",{"id":28,"text":3101,"url":28,"identifiers":3102},"1995, Mater. Res. Soc. Symp. Proc., 356, 767",{},{"id":28,"text":3104,"url":28,"identifiers":3105},"1986, J. Vac. Sci. Technol. A, 4, 2661, 10.1116\u002F1.573700",{"doi":3106},"10.1116\u002F1.573700",{"id":28,"text":3108,"url":28,"identifiers":3109},"1996, Nature (London), 383, 401, 10.1038\u002F383401a0",{"doi":3110},"10.1038\u002F383401a0",{"id":28,"text":3112,"url":28,"identifiers":3113},"1994, J. Mater. Sci. Lett., 13, 1688, 10.1007\u002FBF00451741",{"doi":3114},"10.1007\u002FBF00451741",{"id":28,"text":3116,"url":28,"identifiers":3117},"1993, Phys. Rev. B, 48, 13344, 10.1103\u002FPhysRevB.48.13344",{"doi":3118},"10.1103\u002FPhysRevB.48.13344",{"id":28,"text":3120,"url":28,"identifiers":3121},"1998, Phys. Rev. B, 57, 4979",{},{"id":28,"text":3123,"url":28,"identifiers":3124},"1951, Proc. Phys. Soc. London, Sect., B64, 747",{},{"id":28,"text":3126,"url":28,"identifiers":3127},"1953, J. Iron Steel Inst., London, 174, 25",{},{"id":28,"text":3129,"url":28,"identifiers":3130},"1986, J. Mater. Sci., 21, 1837, 10.1007\u002FBF00547918",{"doi":3131},"10.1007\u002FBF00547918",{"id":28,"text":3133,"url":28,"identifiers":3134},"1998, Acta Mater., 46, 5611, 10.1016\u002FS1359-6454(98)00231-6",{"doi":3135},"10.1016\u002FS1359-6454(98)00231-6",{"id":28,"text":3137,"url":28,"identifiers":3138},"1998, Usp. Fiz. Nauk, 41, 49, 10.1070\u002FPU1998v041n01ABEH000329",{"doi":3139},"10.1070\u002FPU1998v041n01ABEH000329",{"id":28,"text":3141,"url":28,"identifiers":3142},"1998, Scr. Mater., 39, 341, 10.1016\u002FS1359-6462(98)00173-0",{"doi":3143},"10.1016\u002FS1359-6462(98)00173-0",{"id":28,"text":3145,"url":28,"identifiers":3146},"1985, Metall. Trans. A, 16, 2167, 10.1007\u002FBF02670417",{"doi":3147},"10.1007\u002FBF02670417",{"id":28,"text":3149,"url":28,"identifiers":3150},"1970, Metall. Trans. A, 1, 1121, 10.1007\u002FBF02900224",{"doi":3151},"10.1007\u002FBF02900224",{"id":28,"text":3153,"url":28,"identifiers":3154},"1995, Mater. Res. Soc. Symp. Proc., 362, 219",{},{"id":28,"text":3156,"url":28,"identifiers":3157},"1995, Nanostruct. Mater., 6, 205, 10.1016\u002F0965-9773(95)00044-5",{"doi":3158},"10.1016\u002F0965-9773(95)00044-5",{"id":28,"text":3160,"url":28,"identifiers":3161},"1997, Philos. Mag. B, 76, 559, 10.1080\u002F01418639708241122",{"doi":3162},"10.1080\u002F01418639708241122",{"id":28,"text":3164,"url":28,"identifiers":3165},"1998, Nature (London), 391, 532, 10.1038\u002F35254",{"doi":3166},"10.1038\u002F35254",{"id":28,"text":3168,"url":28,"identifiers":3169},"1998, Nature (London), 391, 561, 10.1038\u002F35328",{"doi":3170},"10.1038\u002F35328",{"id":28,"text":3172,"url":28,"identifiers":3173},"1995, Nanostruct. Mater., 5, 441, 10.1016\u002F0965-9773(95)00257-F",{"doi":3174},"10.1016\u002F0965-9773(95)00257-F",{"id":28,"text":3176,"url":28,"identifiers":3177},"1989, Scr. Metall., 23, 1679, 10.1016\u002F0036-9748(89)90342-6",{"doi":3178},"10.1016\u002F0036-9748(89)90342-6",{"id":28,"text":3180,"url":28,"identifiers":3181},"1989, Scr. Metall., 23, 2013, 10.1016\u002F0036-9748(89)90223-8",{"doi":3182},"10.1016\u002F0036-9748(89)90223-8",{"id":28,"text":3184,"url":28,"identifiers":3185},"1990, Scr. Metall. Mater., 24, 1599, 10.1016\u002F0956-716X(90)90439-N",{"doi":3186},"10.1016\u002F0956-716X(90)90439-N",{"id":28,"text":3188,"url":28,"identifiers":3189},"1990, Scr. Metall. Mater., 24, 2319, 10.1016\u002F0956-716X(90)90086-V",{"doi":3190},"10.1016\u002F0956-716X(90)90086-V",{"id":28,"text":3192,"url":28,"identifiers":3193},"1990, Scr. Metall. Mater., 24, 145, 10.1016\u002F0956-716X(90)90582-2",{"doi":3194},"10.1016\u002F0956-716X(90)90582-2",{"id":28,"text":3196,"url":28,"identifiers":3197},"1991, J. Mater. Res., 6, 1012, 10.1557\u002FJMR.1991.1012",{"doi":3198},"10.1557\u002FJMR.1991.1012",{"id":28,"text":3200,"url":28,"identifiers":3201},"1992, Scr. Metall. Mater., 26, 1879, 10.1016\u002F0956-716X(92)90052-G",{"doi":3202},"10.1016\u002F0956-716X(92)90052-G",{"id":28,"text":3204,"url":28,"identifiers":3205},"1992, Scr. Metall. Mater., 27, 855, 10.1016\u002F0956-716X(92)90405-4",{"doi":3206},"10.1016\u002F0956-716X(92)90405-4",{"id":28,"text":3208,"url":28,"identifiers":3209},"1992, Scr. Metall. Mater., 27, 1185, 10.1016\u002F0956-716X(92)90596-7",{"doi":3210},"10.1016\u002F0956-716X(92)90596-7",{"id":28,"text":3212,"url":28,"identifiers":3213},"1997, Mater. Sci. Eng., A, 234, 77",{},{"id":28,"text":3215,"url":28,"identifiers":3216},"1997, Acta Mater., 45, 4019, 10.1016\u002FS1359-6454(97)00092-X",{"doi":3217},"10.1016\u002FS1359-6454(97)00092-X",{"id":28,"text":3219,"url":28,"identifiers":3220},"1997, Scr. Mater., 37, 809, 10.1016\u002FS1359-6462(97)00157-7",{"doi":3221},"10.1016\u002FS1359-6462(97)00157-7",{"id":28,"text":3223,"url":28,"identifiers":3224},"1998, Acta Mater., 46, 4195, 10.1016\u002FS1359-6454(98)00114-1",{"doi":3225},"10.1016\u002FS1359-6454(98)00114-1",{"id":28,"text":3227,"url":28,"identifiers":3228},"1998, J. Vac. Sci. Technol. A, 16, 3301, 10.1116\u002F1.581537",{"doi":3229},"10.1116\u002F1.581537",{"id":28,"text":3231,"url":28,"identifiers":3232},"1972, Acta Metall., 20, 887, 10.1016\u002F0001-6160(72)90082-X",{"doi":3233},"10.1016\u002F0001-6160(72)90082-X",{"id":28,"text":3235,"url":28,"identifiers":3236},"1979, Mater. Sci. Eng., 39, 211, 10.1016\u002F0025-5416(79)90060-0",{"doi":3237},"10.1016\u002F0025-5416(79)90060-0",{"id":28,"text":3239,"url":28,"identifiers":3240},"1974, Metall. Trans. A, 5, 2339, 10.1007\u002FBF02644014",{"doi":3241},"10.1007\u002FBF02644014",{"id":28,"text":3243,"url":28,"identifiers":3244},"1980, J. Am. Ceram. Soc., 63, 680, 10.1111\u002Fj.1151-2916.1980.tb09860.x",{"doi":3245},"10.1111\u002Fj.1151-2916.1980.tb09860.x",{"id":28,"text":3247,"url":28,"identifiers":3248},"1976, Metall. Trans. A, 7, 1225, 10.1007\u002FBF02656607",{"doi":3249},"10.1007\u002FBF02656607",{"id":28,"text":3251,"url":28,"identifiers":3252},"1982, Metall. Trans. A, 13, 703, 10.1007\u002FBF02642384",{"doi":3253},"10.1007\u002FBF02642384",{"id":28,"text":3255,"url":28,"identifiers":3256},"1998, Tribol. Int., 31, 87, 10.1016\u002FS0301-679X(98)00011-5",{"doi":3257},"10.1016\u002FS0301-679X(98)00011-5",{"id":28,"text":3259,"url":28,"identifiers":3260},"1978, J. Appl. Phys., 49, 5479, 10.1063\u002F1.324518",{"doi":3261},"10.1063\u002F1.324518",{"id":28,"text":3263,"url":28,"identifiers":3264},"1978, Phys. Rev. Lett., 41, 1814, 10.1103\u002FPhysRevLett.41.1814",{"doi":3265},"10.1103\u002FPhysRevLett.41.1814",{"id":28,"text":3267,"url":28,"identifiers":3268},"1975, Acta Metall., 23, 193, 10.1016\u002F0001-6160(75)90183-2",{"doi":3269},"10.1016\u002F0001-6160(75)90183-2",{"id":28,"text":3271,"url":28,"identifiers":3272},"1980, Thin Solid Films, 72, 261, 10.1016\u002F0040-6090(80)90007-3",{"doi":3273},"10.1016\u002F0040-6090(80)90007-3",{"id":28,"text":3275,"url":28,"identifiers":3276},"1990, J. Electrochem. Soc., 137, 440, 10.1149\u002F1.2086459",{"doi":3277},"10.1149\u002F1.2086459",{"id":28,"text":3279,"url":28,"identifiers":3280},"1987, J. Appl. Phys., 62, 481, 10.1063\u002F1.339770",{"doi":3281},"10.1063\u002F1.339770",{"id":28,"text":3283,"url":28,"identifiers":3284},"1992, J. Mater. Res., 7, 901, 10.1557\u002FJMR.1992.0901",{"doi":3285},"10.1557\u002FJMR.1992.0901",{"id":28,"text":3287,"url":28,"identifiers":3288},"1992, J. Vac. Sci. Technol. A, 10, 1604, 10.1116\u002F1.578030",{"doi":3289},"10.1116\u002F1.578030",{"id":28,"text":3291,"url":28,"identifiers":3292},"1996, Surf. Coat. Technol., 86\u002F87, 351, 10.1016\u002FS0257-8972(96)03026-5",{"doi":3293},"10.1016\u002FS0257-8972(96)03026-5",{"id":28,"text":3295,"url":28,"identifiers":3296},"1992, J. Appl. Phys., 72, 4466, 10.1063\u002F1.352177",{"doi":3297},"10.1063\u002F1.352177",{"id":28,"text":3299,"url":28,"identifiers":3300},"1990, Appl. Phys. Lett., 57, 2654, 10.1063\u002F1.104189",{"doi":3301},"10.1063\u002F1.104189",{"id":28,"text":3303,"url":28,"identifiers":3304},"1994, J. Mater. Res., 9, 1456, 10.1557\u002FJMR.1994.1456",{"doi":3305},"10.1557\u002FJMR.1994.1456",{"id":28,"text":3307,"url":28,"identifiers":3308},"1990, Thin Solid Films, 193–194, 818",{},{"id":28,"text":3310,"url":28,"identifiers":3311},"1992, Appl. Phys. Lett., 61, 654, 10.1063\u002F1.107812",{"doi":3312},"10.1063\u002F1.107812",{"id":28,"text":3314,"url":28,"identifiers":3315},"1994, J. Vac. Sci. Technol. A, 12, 1595, 10.1116\u002F1.579361",{"doi":3316},"10.1116\u002F1.579361",{"id":28,"text":3318,"url":28,"identifiers":3319},"1996, Surf. Coat. Technol., 86\u002F87, 170, 10.1016\u002FS0257-8972(96)02977-5",{"doi":3320},"10.1016\u002FS0257-8972(96)02977-5",{"id":28,"text":3322,"url":28,"identifiers":3323},"1996, Science, 273, 889, 10.1126\u002Fscience.273.5277.889",{"doi":3324},"10.1126\u002Fscience.273.5277.889",{"id":28,"text":3326,"url":28,"identifiers":3327},"1997, J. Vac. Sci. Technol. A, 15, 946, 10.1116\u002F1.580784",{"doi":3328},"10.1116\u002F1.580784",{"id":28,"text":3330,"url":28,"identifiers":3331},"1995, Appl. Phys. Lett., 67, 203, 10.1063\u002F1.114667",{"doi":3332},"10.1063\u002F1.114667",{"id":28,"text":3334,"url":28,"identifiers":3335},"1996, Appl. Phys. Lett., 68, 1211, 10.1063\u002F1.115972",{"doi":3336},"10.1063\u002F1.115972",{"id":28,"text":3338,"url":28,"identifiers":3339},"1996, Surf. Rev. Lett., 3, 1597, 10.1142\u002FS0218625X96002588",{"doi":3340},"10.1142\u002FS0218625X96002588",{"id":28,"text":3342,"url":28,"identifiers":3343},"1997, Surf. Coat. Technol., 94\u002F95, 174, 10.1016\u002FS0257-8972(97)00421-0",{"doi":3344},"10.1016\u002FS0257-8972(97)00421-0",{"id":28,"text":3346,"url":28,"identifiers":3347},"1998, J. Vac. Sci. Technol. A, 16, 1880, 10.1116\u002F1.581122",{"doi":3348},"10.1116\u002F1.581122",{"id":28,"text":1793,"url":28,"identifiers":3350},{},{"id":28,"text":3352,"url":28,"identifiers":3353},"1995, Nanostruct. Mater., 5, 349, 10.1016\u002F0965-9773(95)00250-I",{"doi":3354},"10.1016\u002F0965-9773(95)00250-I",{"id":28,"text":3356,"url":28,"identifiers":3357},"1991, Scr. Metall. Mater., 25, 1465, 10.1016\u002F0956-716X(91)90434-3",{"doi":3358},"10.1016\u002F0956-716X(91)90434-3",{"id":28,"text":3360,"url":28,"identifiers":3361},"1995, J. Appl. Phys., 77, 4403, 10.1063\u002F1.359467",{"doi":3362},"10.1063\u002F1.359467",{"id":28,"text":3364,"url":28,"identifiers":3365},"1996, Appl. Phys. Lett., 68, 2198, 10.1063\u002F1.116011",{"doi":3366},"10.1063\u002F1.116011",{"id":28,"text":3368,"url":28,"identifiers":3369},"1997, Thin Solid Films, 302, 147, 10.1016\u002FS0040-6090(97)00023-0",{"doi":3370},"10.1016\u002FS0040-6090(97)00023-0",{"id":28,"text":3372,"url":28,"identifiers":3373},"1998, Phys. World, 11, 45",{},{"id":28,"text":3375,"url":28,"identifiers":3376},"1998, J. Appl. Phys., 84, 776, 10.1063\u002F1.368137",{"doi":3377},"10.1063\u002F1.368137",{"id":28,"text":3379,"url":28,"identifiers":3380},"1995, Sumimoto Electr. Ind., 146, 91",{},{"id":28,"text":3382,"url":28,"identifiers":3383},"1996, Surf. Coat. Technol., 86\u002F87, 225, 10.1016\u002FS0257-8972(96)03033-2",{"doi":3384},"10.1016\u002FS0257-8972(96)03033-2",{"id":28,"text":3386,"url":28,"identifiers":3387},"1991, Thin Solid Films, 205, 153, 10.1016\u002F0040-6090(91)90297-B",{"doi":3388},"10.1016\u002F0040-6090(91)90297-B",{"id":28,"text":2077,"url":28,"identifiers":3390},{"doi":2079},{"id":28,"text":2081,"url":28,"identifiers":3392},{"doi":2083},{"id":28,"text":3394,"url":28,"identifiers":3395},"1995, Surf. Coat. Technol., 74–75, 833",{},{"id":28,"text":3397,"url":28,"identifiers":3398},"1995, Surf. Coat. Technol., 76–77, 328",{},{"id":28,"text":3400,"url":28,"identifiers":3401},"1985, J. Vac. Sci. Technol. A, 3, 2345, 10.1116\u002F1.572879",{"doi":3402},"10.1116\u002F1.572879",{"id":28,"text":3404,"url":28,"identifiers":3405},"1988, Surf. Coat. Technol., 36, 707, 10.1016\u002F0257-8972(88)90011-4",{"doi":3406},"10.1016\u002F0257-8972(88)90011-4",{"id":28,"text":1793,"url":28,"identifiers":3408},{},{"id":28,"text":1793,"url":28,"identifiers":3410},{},{"id":28,"text":3412,"url":28,"identifiers":3413},"1995, Appl. Phys. Lett., 66, 2540, 10.1063\u002F1.113160",{"doi":3414},"10.1063\u002F1.113160",{"id":28,"text":3416,"url":28,"identifiers":3417},"1996, Thin Solid Films, 268, 64",{},{"id":28,"text":3419,"url":28,"identifiers":3420},"1996, J. Vac. Sci. Technol. A, 14, 46, 10.1116\u002F1.579878",{"doi":3421},"10.1116\u002F1.579878",{"id":28,"text":3423,"url":28,"identifiers":3424},"1996, Electrochemical Soc. Proc., 96-5, 619",{},{"id":28,"text":3426,"url":28,"identifiers":3427},"1997, Mater. Res. Soc. Symp. Proc., 457, 407",{},{"id":28,"text":3429,"url":28,"identifiers":3430},"1998, J. Vac. Sci. Technol. B, 16, 19, 10.1116\u002F1.589778",{"doi":3431},"10.1116\u002F1.589778",{"id":28,"text":3433,"url":28,"identifiers":3434},"1996, Mater. Res. Soc. Symp. Proc., 400, 261",{},{"id":28,"text":3436,"url":28,"identifiers":3437},"1997, Thin Solid Films, 297, 145, 10.1016\u002FS0040-6090(96)09480-1",{"doi":3438},"10.1016\u002FS0040-6090(96)09480-1",{"id":28,"text":3440,"url":28,"identifiers":3441},"1993, Nanostruct. Mater., 2, 267, 10.1016\u002F0965-9773(93)90153-3",{"doi":3442},"10.1016\u002F0965-9773(93)90153-3",{"id":28,"text":3444,"url":28,"identifiers":3445},"1998, Mech. Mater., 30, 111, 10.1016\u002FS0167-6636(98)00027-1",{"doi":3446},"10.1016\u002FS0167-6636(98)00027-1",{"id":28,"text":1793,"url":28,"identifiers":3448},{},{"id":28,"text":1793,"url":28,"identifiers":3450},{},{"id":28,"text":3452,"url":28,"identifiers":3453},"1994, J. Mater. Res., 9, 2362, 10.1557\u002FJMR.1994.2362",{"doi":3454},"10.1557\u002FJMR.1994.2362",{"id":28,"text":1793,"url":28,"identifiers":3456},{},{"id":28,"text":3458,"url":28,"identifiers":3459},"1982, J. Mater. Sci., 17, 1320, 10.1007\u002FBF00752241",{"doi":3460},"10.1007\u002FBF00752241",{"id":28,"text":3462,"url":28,"identifiers":3463},"1982, J. Mater. Sci., 17, 3336, 10.1007\u002FBF01203503",{"doi":3464},"10.1007\u002FBF01203503",{"id":28,"text":3466,"url":28,"identifiers":3467},"1983, J. Mater. Sci., 18, 2401, 10.1007\u002FBF00541845",{"doi":3468},"10.1007\u002FBF00541845",{"id":28,"text":3470,"url":28,"identifiers":3471},"1995, J. Phys. IV, 2, C5",{},{"id":28,"text":1793,"url":28,"identifiers":3473},{},{"id":28,"text":3475,"url":28,"identifiers":3476},"1996, Surf. Coat. Technol., 86\u002F87, 231, 10.1016\u002FS0257-8972(96)02950-7",{"doi":3477},"10.1016\u002FS0257-8972(96)02950-7",{"id":28,"text":1793,"url":28,"identifiers":3479},{},{"id":28,"text":3481,"url":28,"identifiers":3482},"1992, Plasma Chem. Plasma Process., 12, 287, 10.1007\u002FBF01447027",{"doi":3483},"10.1007\u002FBF01447027",{"id":28,"text":1793,"url":28,"identifiers":3485},{},{"id":28,"text":3487,"url":28,"identifiers":3488},"1998, Surf. Coat. Technol., 108\u002F109, 241, 10.1016\u002FS0257-8972(98)00560-X",{"doi":3489},"10.1016\u002FS0257-8972(98)00560-X",{"id":28,"text":1793,"url":28,"identifiers":3491},{},{"id":28,"text":1793,"url":28,"identifiers":3493},{},{"id":28,"text":1793,"url":28,"identifiers":3495},{},{"id":28,"text":1793,"url":28,"identifiers":3497},{},{"id":28,"text":1793,"url":28,"identifiers":3499},{},{"id":28,"text":3501,"url":28,"identifiers":3502},"1987, J. Electrochem. Soc., 136, 2398",{},{"id":28,"text":3504,"url":28,"identifiers":3505},"1988, Plasma Chem. Plasma Process., 8, 445, 10.1007\u002FBF01016059",{"doi":3506},"10.1007\u002FBF01016059",{"id":28,"text":3508,"url":28,"identifiers":3509},"1988, Thin Solid Films, 165, 139, 10.1016\u002F0040-6090(88)90685-2",{"doi":3510},"10.1016\u002F0040-6090(88)90685-2",{"id":28,"text":3512,"url":28,"identifiers":3513},"1989, J. Vac. Sci. Technol. A, 7, 31, 10.1116\u002F1.575763",{"doi":3514},"10.1116\u002F1.575763",{"id":28,"text":3516,"url":28,"identifiers":3517},"1996, Plasma Chem. Plasma Process., 16, 341, 10.1007\u002FBF01447150",{"doi":3518},"10.1007\u002FBF01447150",{"id":28,"text":3520,"url":28,"identifiers":3521},"1971, J. Cryst. Growth, 9, 266, 10.1016\u002F0022-0248(71)90240-5",{"doi":3522},"10.1016\u002F0022-0248(71)90240-5",{"id":28,"text":3524,"url":28,"identifiers":3525},"1986, J. Vac. Sci. Technol. A, 4, 2695, 10.1116\u002F1.573708",{"doi":3526},"10.1116\u002F1.573708",{"id":28,"text":3528,"url":28,"identifiers":3529},"1991, Surf. Coat. Technol., 48, 175, 10.1016\u002F0257-8972(91)90142-J",{"doi":3530},"10.1016\u002F0257-8972(91)90142-J",{"id":28,"text":3532,"url":28,"identifiers":3533},"1992, J. Vac. Sci. Technol. A, 10, 1749, 10.1116\u002F1.577742",{"doi":3534},"10.1116\u002F1.577742",{"id":28,"text":3536,"url":28,"identifiers":3537},"1992, Werkst. Korros., 43, 511, 10.1002\u002Fmaco.19920431102",{"doi":3538},"10.1002\u002Fmaco.19920431102",{"id":28,"text":3540,"url":28,"identifiers":3541},"1990, Surf. Coat. Technol., 41, 351, 10.1016\u002F0257-8972(90)90146-4",{"doi":3542},"10.1016\u002F0257-8972(90)90146-4",{"id":28,"text":3544,"url":28,"identifiers":3545},"1992, Surf. Coat. Technol., 54\u002F55, 255, 10.1016\u002F0257-8972(92)90171-6",{"doi":3546},"10.1016\u002F0257-8972(92)90171-6",{"id":28,"text":3548,"url":28,"identifiers":3549},"1994, Surf. Coat. Technol., 68\u002F69, 556, 10.1016\u002F0257-8972(94)90217-8",{"doi":3550},"10.1016\u002F0257-8972(94)90217-8",{"id":28,"text":3552,"url":28,"identifiers":3553},"1994, Surf. Coat. Technol., 68\u002F69, 194, 10.1016\u002F0257-8972(94)90159-7",{"doi":3554},"10.1016\u002F0257-8972(94)90159-7",{"id":28,"text":3556,"url":28,"identifiers":3557},"1995, Surf. Coat. Technol., 74\u002F75, 491, 10.1016\u002F0257-8972(95)08252-2",{"doi":3558},"10.1016\u002F0257-8972(95)08252-2",{"id":28,"text":3560,"url":28,"identifiers":3561},"1997, Surf. Coat. Technol., 94\u002F95, 297, 10.1016\u002FS0257-8972(97)00440-4",{"doi":3562},"10.1016\u002FS0257-8972(97)00440-4",{"id":28,"text":3564,"url":28,"identifiers":3565},"1997, Diamond Films Technol., 7, 165",{},{"id":28,"text":3567,"url":28,"identifiers":3568},"1998, Vacuum, 50, 313, 10.1016\u002FS0042-207X(98)00059-1",{"doi":3569},"10.1016\u002FS0042-207X(98)00059-1",{"id":28,"text":3571,"url":28,"identifiers":3572},"1989, Thin Solid Films, 174, 51, 10.1016\u002F0040-6090(89)90868-7",{"doi":3573},"10.1016\u002F0040-6090(89)90868-7",{"id":28,"text":3575,"url":28,"identifiers":3576},"1991, Thin Solid Films, 205, 171, 10.1016\u002F0040-6090(91)90299-D",{"doi":3577},"10.1016\u002F0040-6090(91)90299-D",{"id":28,"text":3579,"url":28,"identifiers":3580},"1997, J. Solid State Chem., 133, 249, 10.1006\u002Fjssc.1997.7450",{"doi":3581},"10.1006\u002Fjssc.1997.7450",{"id":28,"text":3583,"url":28,"identifiers":3584},"1997, J. Mater. Sci., 32, 4463, 10.1023\u002FA:1018604830327",{"doi":3585},"10.1023\u002FA:1018604830327",{"id":28,"text":1793,"url":28,"identifiers":3587},{},{"id":28,"text":1793,"url":28,"identifiers":3589},{},{"id":28,"text":3591,"url":28,"identifiers":3592},"1973, Z. Metallkd., 64, 484",{},{"id":28,"text":3594,"url":28,"identifiers":3595},"1974, Z. Metallkd., 65, 297",{},{"id":28,"text":1793,"url":28,"identifiers":3597},{},{"id":28,"text":1793,"url":28,"identifiers":3599},{},{"id":28,"text":1793,"url":28,"identifiers":3601},{},{"id":28,"text":3603,"url":28,"identifiers":3604},"1995, Appl. Surf. Sci., 86, 329, 10.1016\u002F0169-4332(94)00399-8",{"doi":3605},"10.1016\u002F0169-4332(94)00399-8",{"id":28,"text":1793,"url":28,"identifiers":3607},{},{"id":28,"text":3609,"url":28,"identifiers":3610},"1996, J. Mater. Res., 11, 2841, 10.1557\u002FJMR.1996.0359",{"doi":3611},"10.1557\u002FJMR.1996.0359",{"id":28,"text":3613,"url":28,"identifiers":3614},"1997, J. Mater. Res., 12, 119, 10.1557\u002FJMR.1997.0019",{"doi":3615},"10.1557\u002FJMR.1997.0019",{"id":28,"text":3617,"url":28,"identifiers":3618},"1998, Nanostruct. Mater., 10, 865, 10.1016\u002FS0965-9773(98)00122-6",{"doi":3619},"10.1016\u002FS0965-9773(98)00122-6",{"id":28,"text":3475,"url":28,"identifiers":3621},{"doi":3477},{"id":28,"text":1793,"url":28,"identifiers":3623},{},{"id":28,"text":1793,"url":28,"identifiers":3625},{},{"id":28,"text":3627,"url":28,"identifiers":3628},"1991, Mater. Sci. Eng., A, 140, 609, 10.1016\u002F0921-5093(91)90485-6",{"doi":3629},"10.1016\u002F0921-5093(91)90485-6",{"id":28,"text":1793,"url":28,"identifiers":3631},{},{"id":28,"text":3633,"url":28,"identifiers":3634},"1998, J. Mater. Sci., 33, 319, 10.1023\u002FA:1004307426887",{"doi":3635},"10.1023\u002FA:1004307426887",{"id":28,"text":3637,"url":28,"identifiers":3638},"1998, Diamond Relat. Mater., 7, 463, 10.1016\u002FS0925-9635(97)00214-8",{"doi":3639},"10.1016\u002FS0925-9635(97)00214-8",{"id":28,"text":3641,"url":28,"identifiers":3642},"1996, Science, 271, 933, 10.1126\u002Fscience.271.5251.933",{"doi":3643},"10.1126\u002Fscience.271.5251.933",{"id":28,"text":3645,"url":28,"identifiers":3646},"1997, Science, 277, 1791, 10.1126\u002Fscience.277.5333.1791",{"doi":3647},"10.1126\u002Fscience.277.5333.1791",{"id":28,"text":3649,"url":28,"identifiers":3650},"1998, Chem. Soc. Rev., 27, 1, 10.1039\u002Fa827001z",{"doi":3651},"10.1039\u002Fa827001z",{"id":28,"text":3653,"url":28,"identifiers":3654},"1998, MRS Bull., 23, 33",{},{"id":3656,"createTime":3657,"updateTime":3657,"relativeEntities":3658,"slug":3659,"properties":3660,"entityType":966,"verifyStatus":26,"verifyTime":3657,"verifyNote":967,"languages":3668,"translateLanguages":28,"viewCount":32,"primaryUrl":3669,"fullTextUrl":28,"authors":3670,"publicationType":1002,"publisherRelationship":3688,"citationCount":3740,"citationInfo":3741,"publishDate":3744,"publishYear":3742,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":3745,"openAccess":28,"references":3746,"isForceReanalyzing":1633},"de8d1366-16eb-4a66-a515-0372cfdcdcad","2024-10-02T02:43:46.916+00:00",[],"Material-selection-for-hard-coatings",{"openalex":3661,"mag":3663,"title":3665,"doi":3667},{"VOID":3662},"W2013705827",{"VOID":3664},"2013705827",{"EN":3666},"Material selection for hard coatings",{"VOID":3106},[31],"https:\u002F\u002Fpubs.aip.org\u002Favs\u002Fjva\u002Farticle\u002F4\u002F6\u002F2661-2669\u002F101659",[3671],{"id":3672,"sortIndex":32,"researcher":28,"roles":3673,"affiliations":3674,"properties":3683,"displayName":3685,"givenName":28,"familyName":28},"28f7e69c-24e6-4bd4-bd27-7822f401d897",[],[3675],{"id":3676,"sortIndex":32,"affiliation":3677,"properties":28},"8e9548a1-c4bc-4640-b78d-6ccc6a8ea6a4",{"id":3676,"createTime":28,"updateTime":28,"relativeEntities":3678,"slug":28,"properties":3679,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3682,"statistic":28},[],{"title":3680},{"EN":3681},"Kernforschungszentrum Karlsruhe, Institut für Material und Festkörperforschung, Postfach 3640, D 7500 Karlsruhe 1, Federal Republic of Germany",[],{"title":3684,"openalex":3686},{"EN":3685},"H. Holleck",{"VOID":3687},"A5049562315",{"url":28,"publisher":3689,"properties":3735},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":3690,"slug":872,"properties":3691,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":3696,"manageAffiliations":3709,"indexDatabases":3720,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":3692,"eissn":3693,"issn":3694,"title":3695},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[3697,3701,3705],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":3698,"label":3699,"description":3700,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":3702,"label":3703,"description":3704,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":3706,"label":3707,"description":3708,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[3710,3715],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":3711,"slug":28,"properties":3712,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3714,"statistic":28},[],{"title":3713},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":3716,"slug":28,"properties":3717,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3719,"statistic":28},[],{"title":3718},{"EN":917},[],[3721,3728],{"id":921,"indexDatabase":3722,"url":927,"indexYears":928,"academicFieldIds":3727,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":3723,"label":3724,"description":3725,"key":798,"publicationTags":3726,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":3729,"url":947,"indexYears":28,"academicFieldIds":3734,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":3730,"label":3731,"description":3732,"key":944,"publicationTags":3733,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":3736,"pages":3737,"volume":3739},{"VOID":1052},{"VOID":3738},"2661-2669",{"VOID":2272},1123,{"total":3740,"publishYear":3742,"statisticByYear":3743},1986,{"2012":69,"2013":434,"2014":279,"2015":201,"2016":149,"2017":201,"2018":69,"2019":150,"2020":141,"2021":138,"2022":132,"2023":278,"2024":131},"1986-11-01",[946,933],[],{"id":3748,"createTime":3749,"updateTime":3749,"relativeEntities":3750,"slug":3751,"properties":3752,"entityType":966,"verifyStatus":26,"verifyTime":3749,"verifyNote":967,"languages":3763,"translateLanguages":28,"viewCount":32,"primaryUrl":3764,"fullTextUrl":28,"authors":3765,"publicationType":1002,"publisherRelationship":3798,"citationCount":3851,"citationInfo":3852,"publishDate":3855,"publishYear":3853,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":3856,"openAccess":28,"references":3857,"isForceReanalyzing":1633},"d2e4b327-40cb-446e-8cf3-11322e9b4b98","2024-10-11T05:34:11.233+00:00",[],"Sculptured-thin-films-and-glancing-angle-deposition-Growth-mechanics-and-applications",{"openalex":3753,"mag":3755,"abstract":3757,"title":3759,"doi":3761},{"VOID":3754},"W1983831441",{"VOID":3756},"1983831441",{"EN":3758},"\u003Cjats:p>Sculptured thin films with three dimensional microstructure controlled on the 10 nm scale were fabricated with an evaporation technique. Glancing angle deposition (GLAD) and substrate motion were employed to “sculpt” columnar thin film microstructure into desired forms ranging from zigzag shaped to helical to four-sided “square” helical. Computer control of substrate motion was used to accurately position the substrate and to achieve the desired film structures. The growth mechanics of this novel thin film deposition technique are investigated with density measurements, scanning electron microscopy analysis, and measurements of effective refractive index. Adatom diffusion and atomic shadowing are the dominant growth mechanisms with glancing angle deposition conditions creating extreme shadowing. With controlled rotation of the substrate about two axes during deposition, a dense capping layer can be produced on top of the porous sculptured films. The success of the capping process was found to be strongly dependent on the technique used, with an exponential decrease (θ∝[1−A⋅eB⋅t]) with time of incident flux angle found to be the best to reduce filling of the porous film and fracturing of the capping film. The GLAD technique was found to have potentially promising application in optical, biological, and chemical devices and materials.\u003C\u002Fjats:p>",{"EN":3760},"Sculptured thin films and glancing angle deposition: Growth mechanics and applications",{"VOID":3762},"10.1116\u002F1.580562",[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F15\u002F3\u002F1460\u002F961835\u002FSculptured-thin-films-and-glancing-angle",[3766,3783],{"id":3767,"sortIndex":32,"researcher":28,"roles":3768,"affiliations":3769,"properties":3778,"displayName":3780,"givenName":28,"familyName":28},"d80b34e1-9e67-4897-aa60-5dc5dea4cfa1",[],[3770],{"id":3771,"sortIndex":32,"affiliation":3772,"properties":28},"73d27d9f-888f-42db-b4e7-ac2aaa2999e2",{"id":3771,"createTime":28,"updateTime":28,"relativeEntities":3773,"slug":28,"properties":3774,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3777,"statistic":28},[],{"title":3775},{"EN":3776},"Department of Electrical Engineering and Alberta Microelectronic Centre, University of Alberta, Edmonton, Alberta T6G 2G7, Canada",[],{"title":3779,"openalex":3781},{"EN":3780},"Kevin Robbie",{"VOID":3782},"A5005707007",{"id":3784,"sortIndex":40,"researcher":28,"roles":3785,"affiliations":3786,"properties":3793,"displayName":3795,"givenName":28,"familyName":28},"6dfd1695-50ab-4e37-bb82-bfcd5e753710",[],[3787],{"id":3771,"sortIndex":32,"affiliation":3788,"properties":28},{"id":3771,"createTime":28,"updateTime":28,"relativeEntities":3789,"slug":28,"properties":3790,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3792,"statistic":28},[],{"title":3791},{"EN":3776},[],{"title":3794,"openalex":3796},{"EN":3795},"Michael J. Brett",{"VOID":3797},"A5103421248",{"url":28,"publisher":3799,"properties":3845},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":3800,"slug":872,"properties":3801,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":3806,"manageAffiliations":3819,"indexDatabases":3830,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":3802,"eissn":3803,"issn":3804,"title":3805},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[3807,3811,3815],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":3808,"label":3809,"description":3810,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":3812,"label":3813,"description":3814,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":3816,"label":3817,"description":3818,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[3820,3825],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":3821,"slug":28,"properties":3822,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3824,"statistic":28},[],{"title":3823},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":3826,"slug":28,"properties":3827,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3829,"statistic":28},[],{"title":3828},{"EN":917},[],[3831,3838],{"id":921,"indexDatabase":3832,"url":927,"indexYears":928,"academicFieldIds":3837,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":3833,"label":3834,"description":3835,"key":798,"publicationTags":3836,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":3839,"url":947,"indexYears":28,"academicFieldIds":3844,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":3840,"label":3841,"description":3842,"key":944,"publicationTags":3843,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":3846,"pages":3847,"volume":3849},{"VOID":2417},{"VOID":3848},"1460-1465",{"VOID":3850},"15",921,{"total":3851,"publishYear":3853,"statisticByYear":3854},1997,{"2012":139,"2013":200,"2014":428,"2015":516,"2016":201,"2017":50,"2018":139,"2019":133,"2020":352,"2021":352,"2022":132,"2023":323,"2024":49},"1997-05-01",[946,933],[],{"id":3859,"createTime":3860,"updateTime":3860,"relativeEntities":3861,"slug":3862,"properties":3863,"entityType":966,"verifyStatus":26,"verifyTime":3860,"verifyNote":967,"languages":3872,"translateLanguages":28,"viewCount":32,"primaryUrl":3873,"fullTextUrl":28,"authors":3874,"publicationType":1002,"publisherRelationship":3892,"citationCount":3944,"citationInfo":3945,"publishDate":3744,"publishYear":3742,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":3947,"openAccess":28,"references":3948,"isForceReanalyzing":1633},"c898f544-a96b-4f3d-9c5d-a0f4cd9f5c54","2024-10-06T06:19:19.420+00:00",[],"Titanium-aluminum-nitride-films-A-new-alternative-to-TiN-coatings",{"openalex":3864,"mag":3866,"title":3868,"doi":3870},{"VOID":3865},"W2132008118",{"VOID":3867},"2132008118",{"EN":3869},"Titanium aluminum nitride films: A new alternative to TiN coatings",{"VOID":3871},"10.1116\u002F1.573713",[31],"https:\u002F\u002Fpubs.aip.org\u002Favs\u002Fjva\u002Farticle\u002F4\u002F6\u002F2717-2725\u002F101517",[3875],{"id":3876,"sortIndex":32,"researcher":28,"roles":3877,"affiliations":3878,"properties":3887,"displayName":3889,"givenName":28,"familyName":28},"2106918f-818a-4c7e-87d7-2590487acbd0",[],[3879],{"id":3880,"sortIndex":32,"affiliation":3881,"properties":28},"7fb242a4-025c-417d-92ed-09cfea87d043",{"id":3880,"createTime":28,"updateTime":28,"relativeEntities":3882,"slug":28,"properties":3883,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3886,"statistic":28},[],{"title":3884},{"EN":3885},"Leybold–Heraeus GmbH, P. O. Box 1555, D‐6450 Hanau 1, West Germany",[],{"title":3888,"openalex":3890},{"EN":3889},"W.‐D. Münz",{"VOID":3891},"A5006331684",{"url":28,"publisher":3893,"properties":3939},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":3894,"slug":872,"properties":3895,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":3900,"manageAffiliations":3913,"indexDatabases":3924,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":3896,"eissn":3897,"issn":3898,"title":3899},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[3901,3905,3909],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":3902,"label":3903,"description":3904,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":3906,"label":3907,"description":3908,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":3910,"label":3911,"description":3912,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[3914,3919],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":3915,"slug":28,"properties":3916,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3918,"statistic":28},[],{"title":3917},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":3920,"slug":28,"properties":3921,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3923,"statistic":28},[],{"title":3922},{"EN":917},[],[3925,3932],{"id":921,"indexDatabase":3926,"url":927,"indexYears":928,"academicFieldIds":3931,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":3927,"label":3928,"description":3929,"key":798,"publicationTags":3930,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":3933,"url":947,"indexYears":28,"academicFieldIds":3938,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":3934,"label":3935,"description":3936,"key":944,"publicationTags":3937,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":3940,"pages":3941,"volume":3943},{"VOID":1052},{"VOID":3942},"2717-2725",{"VOID":2272},917,{"total":3944,"publishYear":3742,"statisticByYear":3946},{"2012":130,"2013":139,"2014":141,"2015":131,"2016":142,"2017":147,"2018":140,"2019":150,"2020":129,"2021":136,"2022":134,"2023":202,"2024":146},[946,933],[],{"id":3950,"createTime":3951,"updateTime":3951,"relativeEntities":3952,"slug":3953,"properties":3954,"entityType":966,"verifyStatus":26,"verifyTime":3951,"verifyNote":967,"languages":3964,"translateLanguages":28,"viewCount":32,"primaryUrl":3965,"fullTextUrl":28,"authors":3966,"publicationType":1002,"publisherRelationship":4018,"citationCount":4071,"citationInfo":4072,"publishDate":4075,"publishYear":4073,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":4076,"openAccess":28,"references":4077,"isForceReanalyzing":1633},"e55b4fdd-fb6e-490c-adc5-c0a455301d8c","2024-09-02T15:22:06.483+00:00",[],"Revised-structure-zone-model-for-thin-film-physical-structure",{"openalex":3955,"mag":3957,"abstract":3959,"title":3961,"doi":3963},{"VOID":3956},"W2011044189",{"VOID":3958},"2011044189",{"EN":3960},"\u003Cjats:p>Thin films prepared under conditions of low adatom mobility are characterized by a highly anisotropic physical structure with a wide range of systematically varying column and void sizes. The structure zone models, previously developed to classify the larger sized physical structures, are revised to account for the evolutionary growth stages of structure development as well as the separate effects of thermal- and bombardment-induced mobility. The zone T introduced by Thornton is shown to be a subzone within zone 1.\u003C\u002Fjats:p>",{"EN":3962},"Revised structure zone model for thin film physical structure",{"VOID":1802},[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F2\u002F2\u002F500\u002F99426\u002FRevised-structure-zone-model-for-thin-film",[3967,3984,4001],{"id":3968,"sortIndex":32,"researcher":28,"roles":3969,"affiliations":3970,"properties":3979,"displayName":3981,"givenName":28,"familyName":28},"bf333ff4-1696-4084-8f53-020ccd8217f0",[],[3971],{"id":3972,"sortIndex":32,"affiliation":3973,"properties":28},"f5883162-5d32-4a02-bcc2-752d4aadc83b",{"id":3972,"createTime":28,"updateTime":28,"relativeEntities":3974,"slug":28,"properties":3975,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3978,"statistic":28},[],{"title":3976},{"VI":3977},"Materials Research Laboratory, Pennsylvania State University, University Park, Pennsylvania 16802",[],{"title":3980,"openalex":3982},{"EN":3981},"R. Messier",{"VOID":3983},"A5072715318",{"id":3985,"sortIndex":40,"researcher":28,"roles":3986,"affiliations":3987,"properties":3994,"displayName":3998,"givenName":28,"familyName":28},"84f32ad7-e6b3-4b65-8345-df62aa391136",[],[3988],{"id":3972,"sortIndex":32,"affiliation":3989,"properties":28},{"id":3972,"createTime":28,"updateTime":28,"relativeEntities":3990,"slug":28,"properties":3991,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":3993,"statistic":28},[],{"title":3992},{"VI":3977},[],{"orcid":3995,"title":3997,"openalex":3999},{"VOID":3996},"https:\u002F\u002Forcid.org\u002F0000-0001-7797-7969",{"EN":3998},"Anupam Giri",{"VOID":4000},"A5074726542",{"id":4002,"sortIndex":123,"researcher":28,"roles":4003,"affiliations":4004,"properties":4011,"displayName":4015,"givenName":28,"familyName":28},"8c6252c4-cbdb-4199-ad97-2f16bd5b473c",[],[4005],{"id":3972,"sortIndex":32,"affiliation":4006,"properties":28},{"id":3972,"createTime":28,"updateTime":28,"relativeEntities":4007,"slug":28,"properties":4008,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4010,"statistic":28},[],{"title":4009},{"VI":3977},[],{"orcid":4012,"title":4014,"openalex":4016},{"VOID":4013},"https:\u002F\u002Forcid.org\u002F0000-0002-8065-0091",{"EN":4015},"R. Roy",{"VOID":4017},"A5008900462",{"url":28,"publisher":4019,"properties":4065},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":4020,"slug":872,"properties":4021,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":4026,"manageAffiliations":4039,"indexDatabases":4050,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":4022,"eissn":4023,"issn":4024,"title":4025},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[4027,4031,4035],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":4028,"label":4029,"description":4030,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":4032,"label":4033,"description":4034,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":4036,"label":4037,"description":4038,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[4040,4045],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":4041,"slug":28,"properties":4042,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4044,"statistic":28},[],{"title":4043},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":4046,"slug":28,"properties":4047,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4049,"statistic":28},[],{"title":4048},{"EN":917},[],[4051,4058],{"id":921,"indexDatabase":4052,"url":927,"indexYears":928,"academicFieldIds":4057,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":4053,"label":4054,"description":4055,"key":798,"publicationTags":4056,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":4059,"url":947,"indexYears":28,"academicFieldIds":4064,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":4060,"label":4061,"description":4062,"key":944,"publicationTags":4063,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":4066,"pages":4068,"volume":4070},{"VOID":4067},"2",{"VOID":4069},"500-503",{"VOID":4067},887,{"total":4071,"publishYear":4073,"statisticByYear":4074},1984,{"2012":131,"2013":69,"2014":131,"2015":134,"2016":69,"2017":278,"2018":133,"2019":278,"2020":122,"2021":122,"2022":69,"2023":135,"2024":47},"1984-04-01",[946,933],[],{"id":4079,"createTime":4080,"updateTime":4080,"relativeEntities":4081,"slug":4082,"properties":4083,"entityType":966,"verifyStatus":26,"verifyTime":4080,"verifyNote":967,"languages":4094,"translateLanguages":28,"viewCount":32,"primaryUrl":4095,"fullTextUrl":28,"authors":4096,"publicationType":1002,"publisherRelationship":4161,"citationCount":4213,"citationInfo":4214,"publishDate":4216,"publishYear":3742,"citationAnalyzeStatus":884,"lastCitationAnalyze":28,"indexDatabases":4217,"openAccess":28,"references":4218,"isForceReanalyzing":1633},"02f79dd7-07c8-4be3-8e52-6086ba2e21dc","2024-12-06T07:19:54.695+00:00",[],"Infrared-spectroscopic-study-of-SiO-i-x-i-films-produced-by-plasma-enhanced-chemical-vapor-deposition",{"openalex":4084,"mag":4086,"abstract":4088,"title":4090,"doi":4092},{"VOID":4085},"W2033185055",{"VOID":4087},"2033185055",{"EN":4089},"\u003Cjats:p>We have studied the local atomic structure of silicon suboxide (SiOx, x<2) thin films using infrared (IR) spectroscopy. The films were prepared by plasma enhanced chemical vapor deposition (PECVD) of silane (SiH4) and nitrous oxide (N2O) mixtures, which were then diluted with He. The IR spectra were found to vary significantly with the degree of He dilution. Films grown with no He showed SiN, NH, and SiH bonding groups in addition to the three characteristic vibrations of the Si–O–Si linkage. The addition of He reduced the strength of the SiN, NH, and SiH absorption bands, and resulted in systematic increases in the frequency of the Si–O–Si asymmetric stretching vibration. The frequency of this Si–O–Si stretching vibration scales linearly with the oxygen concentration from approximately 940 cm−1 in oxygen doped amorphous silicon to 1075 cm−1 in stoichiometric noncrystalline SiO2. A deposition temperature of 350 °C and a He dilution of 50% gave a film composition close to SiO1.9. We propose a model for the deposition process that emphasizes the role of the He dilution.\u003C\u002Fjats:p>",{"EN":4091},"Infrared spectroscopic study of SiO\u003Ci>x\u003C\u002Fi> films produced by plasma enhanced chemical vapor deposition",{"VOID":4093},"10.1116\u002F1.573833",[31],"https:\u002F\u002Fpubs.aip.org\u002Fjva\u002Farticle\u002F4\u002F3\u002F689\u002F247897\u002FInfrared-spectroscopic-study-of-SiOx-films",[4097,4114,4129,4144],{"id":4098,"sortIndex":32,"researcher":28,"roles":4099,"affiliations":4100,"properties":4109,"displayName":4111,"givenName":28,"familyName":28},"c4938cb5-ae7e-4898-bdf9-19c0eff5d8da",[],[4101],{"id":4102,"sortIndex":32,"affiliation":4103,"properties":28},"c71d6e5b-63cc-4bfa-a0f7-a82fc192582c",{"id":4102,"createTime":28,"updateTime":28,"relativeEntities":4104,"slug":28,"properties":4105,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4108,"statistic":28},[],{"title":4106},{"EN":4107},"Energy Conversion Devices, Inc., Troy, Michigan 48084",[],{"title":4110,"openalex":4112},{"EN":4111},"P. G. Pai",{"VOID":4113},"A5068791394",{"id":4115,"sortIndex":40,"researcher":28,"roles":4116,"affiliations":4117,"properties":4124,"displayName":4126,"givenName":28,"familyName":28},"ed722487-ac52-43fe-857c-3f6a762eaee8",[],[4118],{"id":4102,"sortIndex":32,"affiliation":4119,"properties":28},{"id":4102,"createTime":28,"updateTime":28,"relativeEntities":4120,"slug":28,"properties":4121,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4123,"statistic":28},[],{"title":4122},{"EN":4107},[],{"title":4125,"openalex":4127},{"EN":4126},"S. S. Chao",{"VOID":4128},"A5072863806",{"id":4130,"sortIndex":123,"researcher":28,"roles":4131,"affiliations":4132,"properties":4139,"displayName":4141,"givenName":28,"familyName":28},"9bdf62f1-afaf-4e76-8ba9-946eb15ed5c9",[],[4133],{"id":4102,"sortIndex":32,"affiliation":4134,"properties":28},{"id":4102,"createTime":28,"updateTime":28,"relativeEntities":4135,"slug":28,"properties":4136,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4138,"statistic":28},[],{"title":4137},{"EN":4107},[],{"title":4140,"openalex":4142},{"EN":4141},"Yasuo Takagi",{"VOID":4143},"A5110330265",{"id":4145,"sortIndex":42,"researcher":28,"roles":4146,"affiliations":4147,"properties":4156,"displayName":4158,"givenName":28,"familyName":28},"0512dd3a-8f52-4d53-81df-5ebc45e0711c",[],[4148],{"id":4149,"sortIndex":32,"affiliation":4150,"properties":28},"9230b5fd-98ef-4901-919a-0a7c027cb3ab",{"id":4149,"createTime":28,"updateTime":28,"relativeEntities":4151,"slug":28,"properties":4152,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4155,"statistic":28},[],{"title":4153},{"VI":4154},"Department of Physics, North Carolina State University, Raleigh, North Carolina, 27695-8202",[],{"title":4157,"openalex":4159},{"EN":4158},"G. Lucovsky",{"VOID":4160},"A5111857649",{"url":28,"publisher":4162,"properties":4208},{"id":868,"createTime":869,"updateTime":870,"relativeEntities":4163,"slug":872,"properties":4164,"entityType":25,"verifyStatus":884,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":32,"subjectFields":4169,"manageAffiliations":4182,"indexDatabases":4193,"url":951,"thumbnailPath":28,"statistic":28,"gsStatistic":28,"type":28,"analyzePriority":28},[],{"country":4165,"eissn":4166,"issn":4167,"title":4168},{"VOID":875},{"VOID":877},{"VOID":879},{"EN":881},[4170,4174,4178],{"id":887,"createTime":28,"updateTime":28,"relativeEntities":4171,"label":4172,"description":4173,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":890},{},{"id":893,"createTime":28,"updateTime":28,"relativeEntities":4175,"label":4176,"description":4177,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":896},{},{"id":899,"createTime":28,"updateTime":28,"relativeEntities":4179,"label":4180,"description":4181,"parentId":28,"standard":28,"scholarHubFieldId":28},[],{"EN":902},{},[4183,4188],{"id":906,"createTime":28,"updateTime":28,"relativeEntities":4184,"slug":28,"properties":4185,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4187,"statistic":28},[],{"title":4186},{"EN":910},[],{"id":913,"createTime":28,"updateTime":28,"relativeEntities":4189,"slug":28,"properties":4190,"entityType":28,"verifyStatus":28,"verifyTime":28,"verifyNote":28,"languages":28,"translateLanguages":28,"viewCount":28,"url":28,"parentIds":4192,"statistic":28},[],{"title":4191},{"EN":917},[],[4194,4201],{"id":921,"indexDatabase":4195,"url":927,"indexYears":928,"academicFieldIds":4200,"indexDatabaseRanking":933},{"id":792,"createTime":28,"updateTime":28,"relativeEntities":4196,"label":4197,"description":4198,"key":798,"publicationTags":4199,"standard":28},[],{"EN":795,"VI":795},{"EN":795,"VI":797},[800],[930,931,932],{"id":935,"indexDatabase":4202,"url":947,"indexYears":28,"academicFieldIds":4207,"indexDatabaseRanking":28},{"id":937,"createTime":28,"updateTime":28,"relativeEntities":4203,"label":4204,"description":4205,"key":944,"publicationTags":4206,"standard":28},[],{"EN":940,"VI":940},{"EN":942,"VI":943},[946,785],[949,950],{"issue":4209,"pages":4210,"volume":4212},{"VOID":2417},{"VOID":4211},"689-694",{"VOID":2272},783,{"total":4213,"publishYear":3742,"statisticByYear":4215},{"2012":148,"2013":132,"2014":131,"2015":51,"2016":140,"2017":132,"2018":135,"2019":140,"2020":51,"2021":136,"2022":357,"2023":205,"2024":126},"1986-05-01",[946,933],[]]